euv maskless lithography j. vac. sci. technol. b 30, 051606 (2012); 9/25/20121k. johnson...
TRANSCRIPT
K. Johnson [email protected] 1
EUV Maskless Lithography
J. Vac. Sci. Technol. B 30, 051606 (2012); http://dx.doi.org/10.1116/1.4752112
9/25/2012
K. Johnson [email protected] 2
EUV Maskless Lithography
Concept:• -Scanned-spot array (e.g., 4000-by-4000 array over
10 mm square image field, 2.5 μm spacing)• Spots can be either individually modulated (with an
SLM) or source-modulated (for printing periodic patterns).
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Performance capability (based on JVST-B paper):• ~20 nm print resolution (13.5-nm wavelength, 0.3 NA, EUV source ~40 μm
diameter with 1 steradian collection per image field)• ~30 (300-mm) wafers per hour, with 500 kHz EUV source (“… Using a 10 μm nozzle tin
droplets as small as 17 μm in diameter at a 550 kHz repetition rate have been demonstrated. …” Brandt et al., Ref. 25)
Advantages:• Maskless• Eliminates coherent proximity effects• Comparatively simple optics (e.g., only 2 projection mirrors)• Comparatively moderate EUV power requirement
K. Johnson [email protected] 39/25/2012
Projection Optics
• Two-mirror, flat-image Schwarzschild system• 10-mm square image field• 10-X reduction• 0.3 NA (obscuration: 0.12-NA)
M1
M2
objectsurface
object spot array
detail view 1
Schematic:
Effect of central obscuration on focused image spot:
unobscured
obscured
(Side lobe has relatively minimal effect because image spots do not overlap.)
side lobe
K. Johnson [email protected] 49/25/2012
objectsurface
L0
L1
EUV illumination
microchannelarray
virtualobject spot
L2
aperture
intermediatefocus
Schematic(detail view 1)
detail view 2
Spot-Generation Optics
• Phase-Fresnel microlens arrays (L1 & L2) in achromatic configuration (L0 beam shaper optional)
• Transmittance (including lenses, substrates, fill factor losses) about 20%; no spectral narrowing.
• Can accommodate SLM shutters at intermediate foci.
mm
Microlens Fresnel zone structure at edge of object field
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Microlens Structure
• Stepped Fresnel profile: 8 bilayers of Mo (20 nm) / Ru (2 nm etch stop) on thin Si substrate
• Minimum Fresnel zone width: 0.9 μm• Deposition tolerances: about 26X less stringent than EUV reflection optics• Axial lens positioning tolerance (focus): about 100X less stringent than
EUV reflection optics• Patterning/alignment tolerances: about 10 nm (comparable to EUV
photomasks)
Microlens profile (detail view 2)
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Aberration Compensation
• Microlens design completely eliminates geometric aberration (including image distortion and image field curvature).
• Microlens doublet configuration substantially eliminates chromatic aberration.
Image of object point (at field edge), no aberration correction:
With aberration correction (at 3 wavelengths: 13.4, 13.5, 13.6 nm):
nm nm
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EUV Source and Collection Optics
• Power requirement: modest due to comparatively low throughput (e.g., 30 wph) and few near-normal-incidence mirrors.
• Source size requirement: The scan spots are demagnified images of the source; should be within the diffraction limit. (1 steradian collected from a 40-μm source could be partitioned, e.g., into a 4000-by-4000 array of spots with 1-steradian convergence cones and 10-nm geometric spot size).
• Rep rate requirement: Printing throughput is proportional to the rep rate and number of spots (e.g., with a 500 kHz rep rate, 16 million spots, and 10-nm grid step, the scan rate would be 8 cm2/sec).
• Source power sharing: The source size (area) can be N times larger, and the rep rate N times smaller, if N print units are supplied from a single source. (Throughput per source will be the same as N=1.)
• The microlens design can correct moderate imperfections in the collection optics :
– Non-ideal beam shape.– Nonuniform source magnification across microlens array.– Nonuniform radiant intensity across microlens array.
K. Johnson [email protected] 89/25/2012
EUV Maskless Lithography Development Tasks• Develop system design outline based on realistic, practical source
characteristics:– Source size? (limits print resolution)– Rep rate? (limits printing throughput)– Power? (comparatively moderate power requirement)
• Develop detailed, full-system optical design; simulate lithography performance.
• Evaluate microlens/microchannel fabrication methods.• Evaluate SLM feasibility.• Economic modeling.• Proof-of-concept prototype (e.g., using the CXRO’s MET tool)• Productization options:
– Source-modulated (alternative to interference lithography, GRATE for HVM)– Full image modulation with SLM (alternative to maskless e-beam, e.g., REBL,
MAPPER)– BEUV (Maskless capability and simplified projection optics could facilitate accelerated
development of 6.x-nm lithography.)