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Excellence in Thin Film Products Evaporation Materials l Coating Accessories l Sputtering Targets

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Excellence in Thin Film Products

Evaporation Materials l Coating Accessories l Sputtering Targets

02 l 03

Contents

1. Evaporation materials 04

2. Coating Accessories 14

3. Sputtering Targets 20

04 l 05

Evaporation Materials

Contents

1. Metal and alloy thin-film materials 06Al Ag Au

Cu Rh

2. Low refractive index materials 06CaF2 NaF2 SiO2+Ai2O3

NaF AIF3 YbF3

CrF3+CaF2 SiO2 ErF3

Na3AIF6 SrF3

KF BaF2

3. Medium refractive index materials 08Al2O3 CeF3 ZrO2+Ai2O3

LaF3 AI2O3+MgO BiF3

DyF3 WO3 BaTiO3

YF3 Al2O3+TiO2 SnO+Al2O3

SmF3 SnO2+Pt SrTiO3

NdF3 MgO

4. High refractive index materials 09Nd2O3 NiO TiO2+Nb2O5 Gd2O3 SnO2 TiO2+ Ta2O5

Sm2O3 SnO2+1n2O3 Sb2O3

Sc2O3 ZrO2+TiO2 V2O3

Y2O3 Cr2O3 ZnSSiO LaTiO3 Bi2O3

Ti2O3 Nb2O5 CdS Ti3O5 PrTiO3 CuOTiO Pr(TiO3)2 Fe2O3

TiO2 ZrO2+Ta2O5 CdTeZrO2+Y2O3 ZnO Si Pr6O11 HfO2 CdSeZrO2 Ta2O5

Dy2O3 CeO2

06 l 07

EXCELLENCE IN THIN FILM PRODUCTS

Metal and alloy thin-film materials

B: Resistance Heating (Evaporation source material as indicated in the brackets)

E: Electron Beam; R:Reaction Evaperation; S:Sputtering; RS:Reaction Sputtering

Low refractive index

Formula Melting Pointa℃ Evaporation Source Refractive Index at 550nm Transparency Range Application

AL 660 B Cold light coating HR coating

Ag 961 EB HR coating

Au 1064 B HR coating l Conductive coating

Cu 1085 EB HR coating l Protected coating

Rh 1966 EB HR coating

Evaporation material Chemical Formula

Refractive Index at 550nm

Transparency Range

ShapeMelting Pointa℃ Purity Typical Application

Recommended Evaporation Source

Risk andSafety IndicationGranules Tablets Crystal

granules

Calcium fluoride CaF2 1.23-1.46 0.15-12㎛ Ⅱ● ●Ⅱ 1360 99.90% 99.999% AR coating B(W, Ta, Mo) CAS No.7789-75-5

Natrium fluoride NaF 1.29-1.30 0.2-14㎛ ● ● 992 99.90% Infrared coating B{Mo) CAS No. 7681-49-4

Chromic fluoride+ Calcium fluoride CrF3+CaF2 1.3-1.4 ● ● 99.90% Applied to infrared wavelength to form homogeneous

dense film B{W, Ta, Mo) CAS No.7788-97-8/7789-75-5

Cryolite Na3AlF6 1.32-1.35 0.2-1.4㎛ ● ● 1000 99.90% Wide transparency range, excellent performance in infrared wavelength, usually applied to Infrared coating B(Mo, Ta) CAS No.15096-52-3 I R48/23/25,R20/22,R51/53,S45,S60,S61

Potassium fluoride KF 1.35 ● ● 880 99.95% Filter and UV coating CAS No.7789-23-3

Magnesium fluoride MgF2 1.38 0.11-10㎛ ● 1266 99.99% Far Infrared coating B(W, Ta, Mo) CAS No.7783-40-6 I R20/21/22,R36/37/38,R64,S22,S26,S28,S36/37

Aluminium fluoride AlF3 1.38 0.2-20㎛ ● 900 99.90% Multilayer coating I AR coating Decorative coating Glasses coating I UV coating B CAS No.7784-18-1

Silicon dioxide SiO2 1.45-1.46 0.2-9㎛ Ⅱ● Ⅱ● ●Ⅱ 1700 99.99% UV coating E CAS No.7631-86-9

Strontium fluoride SrF3 1.45 0.2-10㎛ ● ● 1190 99.90% AR coating I Cold light coating Filter I lnsulating coating Glasses coating I UV coating B(W, Mo)

Barium fluoride BaF2 1.47 0.25-15㎛ ● ● 1280 99.90% Infrared coating B CAS No. 7787-32-8 I R20/21/22,R36/37 /38,S22,S26,S28,S36/37

Silicon dioxide+ Aluminium oxide SiO2+Al2O3 1.48 0.3-7㎛ ● ● 2000 99.99% Infrared coating E CAS No. 7631-86-9/1344-28-1

Ytterbium fluoride YbF3 1.52 0.22-12㎛ ● 1157 99.99% AR coating Glasses coating E CAS No.13760-80-0

Erbium fluoride ErF3 ● 1350 99.99% Wide transparency range, excellent performance in infrared wavelength, usually applied to Infrared coating CAS No.13760-83-3

I Evaporation Materials I

08 l 09



Medium refractive index





Transparency Range




granules

Aluminium oxide Al2O3 1.54 0.17-9㎛ ● ● 2020 99.90% 99.99% AR coating I Glasses coating Protective coating B(W), E CAS No.1 344-28-1

Lanthanum fluoride LaF3 1.56 0.2-12㎛ ● ● 1490 99.90% UV coating B(W, Mo) CAS No.13709-38-1 I R20/21 /22,R36/37 /38 I R64,S22,S26,S28,S36/37

Dysprosium fluoride DyF3 1.56 0.22-12㎛ ● ● 1360 99.90% CAS No.13569-80-7

Yttrium fluoride YF3 1.59 0.22-14㎛ ● 1387 99.99% Excellent perfonnance in infrared wavelength CAS No.13709-49-4 I R20/21/22,R36/37/38,S22,S26,28

Samarium fluoride SmF3 1.59 0.22-14㎛ ● ● 1306 99.99% Infrared coating B,E CAS No.13765-24-7

Neodymium fluoride NdF3 1.61 0.22-6㎛ ● ● 1410 99.90% Infrared coating B(Ta, Mo) CAS No.13709-42-7 I R20/21 /22,R36/37 /38,S22,S26,S28

Cerium fluoride CeF3 1.63 0.3-0.5㎛ ● ● 1460 99.90% AR coating I Glasses coating B(W), E R20/21/22,R36/37 /38,S22,S26,S28

Aluminium oxide+Magenesium oxide Al2O3+MgO 1.65-1.7 ● ● 1473 99.90% Higher refractive index than Al2O3 Easy to evaporate,

various ratios available upon customers' request CAS No.1344-28-1/1309-48-4

Tungsten oxide WO3 1.65-1.7 0.3-10㎛ ● ● 1473 99.90% Transition coating CAS No.1 314-3 5-8

Aluminium oxide+Titanium dioxide Al2O3+TiO2 1.7 ● ● 1127 99.90% Higher refractive index than Al2O3 Easy to evaporate,

various ratios ava1lable upon customers' request CAS No.1344-28-1/13463-67-7

Stannic oxide+Platinum SnO2+Pt 1.7 0.17-9㎛ ● ● 2800 99.90% Applied to sputtering to form sensitive film. Various ratios

avaliable upon customers' request CAS No.18282-10-5/7440-06-4

Magnesium oxide MgO 1.7 0.23-9㎛ ● ● 99.90% AR coating B(W, Ta), E CAS No.1309-48-4

Zirconium dioxide+Aluminium oxide ZrO2+Ai2O3 1.7 ● ● 99.99% Resistant to chemical attack Various ratios avaliable

upon customers' request CAS No.1314-23-4/1344-28-1

Bismuth fluoride BiF3 1.74(1㎛) 0.26-20㎛ ● ● 722 99.90% Infrared coating B(C), E CAS No.7787-61-3

barium fluoride BaTiO3 1.66(10㎛) ● ● 1620 99.99% CAS No.12047-27-7

Tin oxide+Aluminium oxide SnO+Al2O3 ● ● 99.90% Conductive coating CAS No.21651-19-4/1344-28-1

Strontium titanate SrTiO3 ● ● 99.90% CAS No.12060-59-2

10 l 11



High refractive index





Transparency Range




granules

Neodymium sesquioxide Nd2O3 1.79 0.4-2㎛ ● ● 1900 99.90% Filter and HR coating B(W, Mo), E CAS No.1313-97 -9

Gadolinium sesquioxide Gd2O3 1.8 0.32-15㎛ ● ● 2340 99.90% Smooth and firm flim applied to AR coating RS, E CAS No.12064-62-9

Samarium sesquioxide Sm2O3 1.8 ● ● 2350 99.90% Applied to electron gun evaporation, easy to lose oxygen in

the evaporat1on process Firm, compact and smooth film E CAS No.12060-58-1

Scandium oxide Sc2O3 1.86 0.35-13㎛ ● ● 2300 99.90% UV coating E CAS No.12060-08-1

Yttrium oxide Y2O3 1.87 0.3-12㎛ ● ● 2410 99.99% lnsulative coating E CAS No.1314-36-9

Silicon monoxide SiO 1.8-1.9 0.4-9㎛ ● ● 1700 99.90% Cold light coating I Decorative coating Protective coating B(Ta, Mo, W) CAS No.10097-28-6

Titanium sesquioxide Ti2O3 1.9-2.3 0.4-12㎛ ● ● ● 1800 99.90% AR coating I Beam splitter Cold light coating Filter I HR coating I Glasses coating RE, RS CAS No.1344-54-3

Trititanium pentoxide Ti3O5 1.9-2.3 0.4-12㎛ ● ● 1750 99.90% AR coating I Beam splitter Cold light coating Filter I HR coating I Glasses coating RE, RS CAS No.12065-65-5

Titanium monoxide TiO 1.9-2.3 0.4-12㎛ ● ● 1750 99.90% AR coating I Beam splitter Cold light coating Filter I HR coating I Glasses coating RE, RS

Titanium dioxide TiO2 1.9-2.3 0.36-9㎛ ● ● 1850 99.99% AR coating I Beam splitter Cold light coating Filter I HR coating I Glasses coating RE, RS CAS No.13463-67-7

Zirconium dioxide+ Yttrium oxide ZrO2+Y2O3 1.9 ● ● 99.99% Applied to electron gun to form compact and smooth film.

Vanous ratios are avaliable upon customers' request CAS No.1314-23-4/1344-28-1

Praseodymium oxide Pr6O11 1.92-2.05 0.4-10㎛ ● ● 2125 99.90% AR coating I Polarized coating B(W), E CAS No.12037-29-5

Zirconium dioxide ZrO2 1.97-2.05 0.25-9㎛ ● ● 2715 99.90% Muti-layer coating I AR coating Hard coating I Glasses coating E CAS No.1314-23-4

Dysprosium sesquioxide Dy2O3 2.0 ● ● 2340 99.90% E CAS No.1308-87-8

Nickel oxide NiO 2.0-2.1 ● ● 1990 99.99% B(W), S CAS No.1313-99-1

Stannic oxide SnO2 2.0-2.1 ● ● 1127 99.99% B(W), E CAS No.18282-10-5

Stannic oxide+indium oxide SnO2+ln2O3 2.0 0.3-9㎛ ● ● 1127 99.90% Conductive coating CAS No.18282-10-5/1312-43-2 I R48/20,S22

Zirconium dioxide+Titanium dioxide ZrO2+TiO2 2.05-2.15 0.36-7㎛ ● ● 2200-2400 99.99% E, B(W) CAS No.1314-23-4/13463-67-7

12 l 13



High refractive index





Transparency Range




granules

Dichromium trioxide Cr2O3 2.1 ● ● 2275 99.90% Absorbing coating B(W), E CAS No.1333-82-0

Lanthanum titanate LaTiO3 2.1 0.3-9㎛ ● ● 2200-2300 99.90% Low temperature substrate to get multi-layer coating AR coating I Filter I Glasses coating E, B(W)

Columbium pentoxide Nb2O5 2.1-2.3 0.35-9㎛ ● ● 1530 99.99% Filter and HR coating E CAS No.1313-96-8

Praseodymium titanate PrTiO3 2.1 0.3-9㎛ ● 2200-2300 99.90% Multi-layer coating I AR coating Glasses coating E, B(W)

Praseodymium dititanate Pr(TiO3)2 2.2 0.3-9㎛ ● ● 2200-2300 99.90% Low temperature substrate to get multi-layer coating AR

coating

Zirconium dioxide+Tantalum pentoxide ZrO2+Ta2O5 2.1 ● ● 99.99%

Higher refractive index than ZrO.To form compact and smooth film. Resistant to chemical attack. Various proportions avaliable to customers' request.

CAS No.1314-23-4/1314-61-0

Zinc oxide ZnO 2.1 0.35-20㎛ ● ● 1975 99.90% Conductive coating Infrared coating B(W, Mo) CAS No.1314-13-2

Hafnium oxide HfO2 2.15 0.2-9㎛ ● ● 2812 99.99% AR coating I HR coating I UV coating E, RS CAS No.12055-23-1

Tantalum pentoxide Ta2O5 2.16 0.35-9㎛ ● ● 1800 Filters I HR coating I Insulating coating RE, RS CAS No.1314-61-0

Cerium dioxide CeO2 2.2 0.4-12㎛ ● ● 1950 99.99% AR coating B(W), E CAS No.1306-38-3 I R22

Titanium dioxide+Columbium pentoxide TiO2+Nb2O5 2.2 ● ● 99.99% Applied to electron gun evaporation. Easy to handle. Various

proportions are avaliable upon customers' request. E CAS No.13463-67-7 /1313-96-8

Titanium dioxide+Tantalum pentoxide TiO2+Ta2O5 2.25-2.3 ● ● 99.99% Applied to electron gun evaporation. Easy to handle. Various

proportions are avaliable upon customers' request. E CAS No.13463-67-7/1314-61-0

Dysprosium trioxide Sb2O3 2.3 0.3-1㎛ ● ● 656 99.90% AR coating B(Ta, Pt) CAS No.1327 -33-9

Vanadium trioxode V2O3 2.3 0.56-7㎛ ● ● 690 99.90% CAS No.1314-34-7

Zinc sulfide ZnS 2.35 0.4-14㎛ ● ● 1900 99.99% Cold light coating I Decoration coating Filter HR coating I Infrared coating B(Ta, Mo) CAS No.1314-98-3

Bismuth trioxide Bi2O32.45(0.55㎛) 2.2(9㎛) 0.4-12㎛ ● ● 860 99.90% AR coating R(Pt), RS Poisonous vapour

Cadmium sulfide CdS 2.5 0.55-7㎛ ● ● 1750 99.90% AR coating B(Pt, Ta) CAS No.1306-23-6

Cupric oxide CuO 2.6 ● ● 1326 99.90% E CAS No.1317-38-0

Iron troxide Fe2O3 2.72 ● ● 1565 99.90% E CAS No.1309-37-1

Cadmium+tellurium CdTe 3.05 0.97-30 ● ● 1041 99.90% Infrared coating B(Mo) CAS No.7440-43-9/13494-80-9

Silicon Si 3.4 1.0-9 ● ● 1410 99.999% Filter I AR coating I HR coating Laser coating E, S CAS No.7440-21-3

Cadmium+Selenium CdSe 3.5 ● ● 1350 99.99% B(W) CAS No.7440-43-9/7782-49-2

14 l 15

Coating Accessories

Contents

1. Material Comparison 16-17

2. Crucibles 18

3. Evaporation Boats 19

4. Filaments 19

16 l 17

I Coating Accessories I


Materials overview

Material PurityForms

Dimensions Colour(ln House) Melting Point ℃ Density g/cc, 300K Risk and safety Indication RemarksCrucibles Boats Filaments

Cu 99.97% ● Upon request Brown Red 1084 8.96 Not poisonous or toxic Easily oxidized

Mo 99.50%~99.99% ● ● Upon request White Grey 2630 10.22 Not poisonous or toxic Chemically stable and brittle

W 99.50%~99.99% ● ● ● Upon request White Grey 3407 19.35 Not poisonous or toxic Chemically stable and brittle

Ta 99.50%~99.99% ● ● Upon request Black Grey 2996 16.65 Not poisonous or toxic Chemically stable

C 99.99% ● Upon request Black 3850 2.26 Not poisonous or toxic

Nb 99.50%~99.99% ● ● Upon request Stainless Grey 2468 8.57 Not poisonous or toxic

Al2O3 99.50% ● ● Upon request White 2020 3.98 Not poisonous or toxic Brittle

BN 99.50% ● ● Upon request White 3000 2.80~3.20 Not poisonous or toxic

SiO2 99.99% ● Upon request Transparent 1710 2.32 Not poisonous or toxic Brittle

18 l 19

I Coating Accessories I


Crucibles Evaporation Boats

Filaments

Customized crucibles ФA : [mm]

ФB : [mm]

C : [mm]

D : [mm]

θa : [mm]

θb : [mm]

R1 : [mm]

R2 : [mm]

Customized evaporation boats A : [mm]

B : [mm]

C : [mm]

Sheet thickness : [mm]

Cubage : [mm]

Customized filaments A : [mm]

B : [mm]

C : [mm]

Wires Diameter : [mm]

Windings : [mm]

20 l 21

Sputtering Targets

Contents

1. Pure Metals 22-23

2. Alloys 24-25

3. Compounds 26-27

4. Applications Matrix 28-29

22 l 23

I Sputtering Targets I


Pure Metals

Various dimensions and ratios are avaliable upon customers' request

Name Chemical Formula Purity Apperance Density

(G/cm3)Melting Point ℃

ElectricalResistivity(106/cm)

ThermalResistivity(W/cmK)

Remarks Risk and Safety Indication

Silver Ag 99.99% Silvery 10.5 961 0.63 4.29 Various specifications with circular, rectangular or irregular shape CAS No.7440-22-4 I R48/20/22

Aluminum Al 99.999% l 99.9995% Silvery White 2.702 660 0.377 2.37 Controllable grain orientation, high uniformity based on fine grain size (avg.<50um) CAS No.7429-90-5

Gold Au 99.99% l 99.999% Golden Yellow 19.32 1064 0.452 3.17 Various specifications with circular, rectangular or irregular shape CAS No.7440-57-5 I R48/20/22

Boron B 99.90% Yellowish-brown 3.24 2300 1.00E-12 0.274 Various specifications with circular, rectangular or irregular shape CAS No.7440-42-8

Graphite C 99.99% Black 2.26 3500 0.00061 1.29 High purity and high density graphite CAS No.7782-42-5

Cerium Ce 99.90% Gray 6.77 798 0.0115 0.114 Various specifications with circular, rectangular or irregular shape CAS No.7440-45-1

Cobalt Co 99.95% Silvery White 8.9 1495 0.172 1 Various specifications with circular, rectangular or irregular shape CAS No.7440-48-4

Chromium Cr 99.8% l 99.95% Gray 7.19 1857 0.0774 0.937 HIP process production to form high density CAS No.7440-47-3

Copper Cu 99.97% l 99.999% l 99.9999% Reddish orange 8.96 1084.6 0.596 4.01 High uniformity based on fine grain size (avg.<50um) CAS No.7440-50-8 I R48/20/22

Iron Fe 99.9% l 99.99% Silvery white 7.874 1535 0.0993 0.802 Various specifications with circular, rectangular or irregular shape CAS No.7439-89-6 I R48/20/22

Germanium Ge 99.999% Offwhite 5.323 937.4 1.45E-08 0.599 Various specifications with circular, rectangular or irregular shape CAS No.7440-56-4

Hafnium Hf 99.90% Silvery white 13.31 2227 0.0312 0.23 Various specifications with circular, rectangular or irregular shape CAS No.7440-58-6 I S3/14

Indium In 99.99% Silvery white 7.31 156.76 0.116 0.816 Various specifications with circular, rectangular or irregular shape CAS No.7440-74-6

Iridium Ir 99.95% White 22.4 2443 0.197 1.47 Density could reach up to 99% CAS No.7439-88-5

Magnesium Mg 99.99% Gray 1.738 649 0.226 1.56 With compact internal organization and smooth surface no cratering on the cross section CAS No.7439-95-4 I S3/14

Molybdenum Mo 99.95% Silvery white 10.22 2617 0.187 1.38 High uniformity based on fine grain size (avg. <50um) CAS No.7439-98-7

Niobium Nb 99.95% Silvery gray 8.57 2460 0.0693 0.537 High uniformity based on fine grain size (avg. <50um) CAS No.7440-3-1

Nickel Ni 99.995% White 8.9 1453 0.143 0.907 High uniformity based on fine grain size (avg. <50um) CAS No.7440-02-0

Osmium Os 99.90% Black 22.6 3027 0.109 0.876 Various specifications with circular, rectangular or irregular shape CAS No.7440-4-2

Palladium Pd 99.99% Silvery White 12.02 1552 0.095 0.718 Various specifications with circular, rectangular or irregular shape CAS No.7440-5-5

Platinum Pt 99.99% Silvery White 21.45 1772 0.0966 0.716 Various specifications with circular, rectangular or irregular shape CAS No.7440-6-4

Rhenium Re 99.95% l 99.99% Silvery White 21.04 3180 0.0542 0.48 Various specifications with circular, rectangular or irregular shape CAS No.7440-15-5

Rhodium Rh 99.99% Silvery White 12.41 1966 0.211 1.5 Various specifications with circular, rectangular or irregular shape CAS No.7440-16-6

Ruthenium Ru 99.95% Silvery White 12.37 2250 0.137 1.17 Density>95% CAS No.7440-18-8

Antimony Sb 99.99% l 99.999% White 6.684 630.9 0.0288 0.243 Various specifications with circular, rectangular or irregular shape CAS No.7440-36-0

Selenium Se 99.99% Dark gray 4.79 221 1.00E-12 0.0204 Various specifications with circular, rectangular or irregular shape CAS No.7782-49-2

Momovrystalline Silicon Si 99.99% l 99.999% Dark gray 2.33 1410 <0.05*cm l

<0.02*cm 1.48 Addtional resitivitity data available upon request CAS No.7440-21-3

Polycrystalline Silicon Si 99.99% l 99.999% Dark gray 2.33 1410 <0.05*cm l

<0.02*cm 1.48 Addtional resitivitity data available upon request CAS No.7440-21-3

Tin Sn 99.999% White 7.31 232.06 0.0917 0.666 Fine grain and low gas content CAS No.7440-31-5

Tantalum Ta 99.95% Gray 16.65 2990 0.0761 0.575 High uniformity based on fine grain size (avg. <50um) CAS No.7440-25-7

Tellurium Te 99.99% Silvery white 6.24 449.65 2.00E-06 0.0235 Various specifications with circular, rectangular or irregular shape CAS No.13494-80-9

Titanium Ti 99.6% l 99.99% Silvery white 4.5 1660 0.0234 0.219 High uniformity based on fine and equiaxed grain(avg.<1Oum for 4N5,<20um for 5N) CAS No.7440-32-6 I S3/ 14

Vanadium V 99.95% l 99.99% Silvery white 6.11 1902 0.0489 0.307 Various specifications with circular, rectangular or irregular shape CAS No.7440-62-2

Tungsten W 99.995% Silvery white 19.35 3407 0.189 1.74 HIP process production to form high density CAS No.7440-33-7

Zinc Zn 99.99% Bluish white 7.13 419.73 0.166 1.16 Various specifications with circular, rectangular or irregular shape CAS No.7740-66-6 I S3/14

Zirconium Zr 99.90% Sinvery gray 6.51 1852 0.236 0.227 Various specifications with circular, rectangular or irregular shape CAS No.7440-67-7

24 l 25



Alloys


Name Chemical Formula Purity Remarks Risk and safety Indication

Silver+Copper Ag+Cu 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-22-4/7440-S0-8 I R48/20/22

Aluminum+Copper AI+Cu 99.99% Fine structure with average grain size<50Um CAS No.7429-90-5/7440-50-8 I R48/20/22

Aluminum+Silicon AI+Si 99.99% Fine structure with average grain size<50Um CAS No.7429-90-5/7440-21-3

Gold+Beryllium Au+Be 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7440-57-5/7440-41-7

Gold+Copper Au+Cu 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7440-57-5/7440-50-8 I R48/20/22

Gold+Germanium Au+Ge 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7440-57-5/7440-56-4

Gold+Germanium+Nickel Au+Ge+Ni 99.99% Fine structure with average grain size<50Um CAS No.7440-57-5/7440-56-4/7440-02-0

Gold+Germanium+Antimony Au+Ge+Sb 99.99% Fine structure with average grain size<50Um CAS No.7440-57-5/7440-56-4/7440-36-0

Gold+Nickel Au+Ni 99.90% Fine structure with average grain size<50Um CAS No.7440-57-5/7440-02-0

Chromium+Silicon Cr+Si 99.50% Various specifications with circular, rectangular or irregular shape CAS No.7440-47-3/7440-21-3

CIGS Cu(lnGa)Se2 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7440-S0-8/7440-74-6/7440-55-3/7782-49-2 I R48/20/22

Copper+Gallium Cu+Ga 99.99% State of the art melting allows for high purity, density and uniformity (avg. grain size <50Um) CAS No.7440-50-8/7440-55-3 I R48/20/22

Copper+lndium Cu+ln 99.99% State of the art melting allows for high purity, density and uniformity (avg. grain size <50Um) CAS No.7440-50-8/7440-74-6 I R48/ 20/22

Copper+Nickel Cu+Ni 99.99% State of the art melting allows for high purity, density and uniformity (avg. grain size <50Um) CAS No.7440-50-8/7440-02-0 I R48/20/22

Copper+Selenium Cu+Se 99.99% State of the art melting allows for high purity, density and uniformity (avg. grain size <50Um) CAS No.7440-50-8/7782-49-2 I R48/ 20/22

Copper+Zinc Cu+Zn 99.99% State of the art melting allows for high purity, density and uniformity (avg. grain size <50Um) CAS No.7440-50-8/7740-66-6 I R48/ 20/22

Copper+lndium+Selenium CulnSe2 99.99% State of the art melting allows for high purity, density and uniformity (avg. grain size <50Um) CAS No.7440-50-8/7440-74-6/7782-49-2 I R48/20/22

lron+Hafnium Fe+Hf 99.90% High PTF,fine structure CAS No.7439-89-6/7440-58-6 I R48/ 20/22

Germanium+Antimony Ge+Sb 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-56-4/7440-36-0

Germanium+Antimony + Tellurium Ge+Sb+Te 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-56-4/7440-36-0/13494-80-9

Germanium+ Tellurium Ge+Te 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-56-4/13494-80-9

Indium+ Tin ln+Sn 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7440-74-6/7440-31-5 I R48/20/22

lndium+Selenium ln2Se2 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7440-74-6/7782-49-2

Nickel+Chromium Ni+Cr 99.99% NiCr targets are available in monoblock and bonded assembly CAS No.7440-02-0/7440-47-3

Nickel+Piatinum Ni+Pt 99.95% Mainly used for silicide metallization in Schottky diodes processes CAS No.7 440-02-0/7 440-6-4

Niclel+Vanadium Ni+V 99.95% Mainly used for the formation of resistive films and diffusion barriers CAS No.7440-02-0/7440-62-2

Osmium+Iridium Os+Ir 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-4-2/7439-88-5

Osmium+Iridium+Aluminum Os+Ir+Al 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-4-2/7439-88-5/7429-90-5

Osmium+Rhenium Os+Re 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-4-2/7440-15-5

Osmium+Ruthenium OS+Ru 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-4-2/7440-18-8

Osmium+Tungsten Os+W 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-4-2/ 7440-33-7

Palladium+Silver Pd+Ag 99.90% Various specifications with circular, rectangular or irregular shape CAS No.7440-5-5/7440-22-4

Silicon+Antimony+Tellurium Si+SB+Te 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7440-21-3/7440-36-0/13494-80-9

Antimony+Tellurium Te+SB 99.90% Various specifications with circular, rectangular or irregular shape CAS No.l3494-80-9/7440-36-0

Titatium+Aluminum Ti+Al 99.50% l 99.99% Fine structure with average grain size<501Jm CAS No.7440-32-6/ 7429-90-5

Titanium+Chromium Ti+Cr 99.50% l 99.95% State of the art melting allows for high purity, density and uniformity (avg. grain size <50urm) CAS No.7440-32-6/7440-47-3

Titanium+Copper Ti+Cu 99.90% State of the art melting allows for high purity, density and uniformity (avg. grain size <50urm) CAS No.7440-32-6/7440-50-8

Titanium+Nickel Ti+Ni 99.90% Fine structure with average grain size<501Jm CAS No.7440-32-6/7440-02-0

Titanium+Silicon Ti+Si 99.50% Various specifications with circular, rectangular or irregular shape CAS No.7440-32-6/7440-21-3

Titanium+Zirconium Ti+Zr 99.5% l 99.9% Various specifications with circular, rectangular or irregular shape CAS No.7440-32-6/7440-67-7

Tungsten+Titanium W+Ti 99.90% State of the art melting allows for high purity, density and uniformity (avg. grain size <50urm) CAS No.7440-33-7/7440-32-6

Zinc+Aluminum Zn+Al 99.99% Fine structure with average grain size<501Jm CAS No.7740-66-6/7429-90-5

Zinc+Selenium Zn+Se 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7740-66-6/7782-49-2

Zinc+Tin Zn+Sn 99.99% Various specifications with circular, rectangular or irregular shape CAS No.7740-66-6/7440-31-5

Zirconium+Aluminum Zr+Al 99.90% Fine structure with average grain size<501Jm CAS No.7440-67-7/7429-90-5

Zirconium+Hafnium Zr+Hf 99.90% l 99.95% Fine structure with average grain size<501Jm CAS No.7440-67-7/7440-58-6

26 l 27



Compounds


Name Chemical Formula Purity Apperance Density(G/cm3)

Melting Point ℃ Remarks Risk and Safety Indication

Aluminium oxide Al2O3 99.9% I 99.99% White 3.98 2020 Sintered compact CAS No.l344-28-1

Aluminum nitride AIN 99.90% White 3.26 2400 Optical disc CAS No.24304-00-5

Antimony doped tin oxide Sb2O3+SnO2(ATO) 99.99% Blue Transparent conductive oxides(TCO) CAS No.l8282-1 0-5/ 13494-80-9

Barium titanate BaTi03 99.99% White 6 1500 Tetragonal system CAS No.12047-27-7

Boron nitride BN 99% White 2.25 3000 Hexagonal system CAS No.1 0043-11-5

Cadmium sulfide CdS 99.90% Yellowish-brown 3.91-4.15 1750 Solar energy and thin-film resistor CAS No.1306-23-6 I R21/22

Cerium dioxide CeO2 99.99% Straw yellow 7.13 1950 CAS No.1306-38-3 I R22

Dichromium trioxide Cr2O3 99.90% Green 5.21 2275 CAS No.1333-82-0

Chromium silicide CrSi2 99.50% Gray 5 1570 Hexagonal system CAS No.12018-09-6

Cupric oxide CuO 99.90% Black 6.3-6.49 1326 Monoclinic system CAS No.1317-38-0 I R23/ 24/25

Iron tri oxide ln2O3+SnO2(ITO) 99.90% Reddish brown 5.24 1565 Trigonal system CAS No.1309-37-1

Hafnium oxide HfO2 99.99% White 9.68 2812 Monoclinic system CAS No.l2055-23-1

Indium oxide ln2O3 99.99% Straw yellow 7.179 1910 Trigonal system CAS No.l312-43-2

Indium tin oxide ITO 99.99% Yellow-gray Transparent conductive oxides(TCO) CAS No.18282-1 0-5/ 1312-43-2 I R48/ 20,S22

Lanthanum oxide La2O3 99.99% White 6.51 2260 CAS No.1312-81-8 I R14,S3/ 14

Magnesium oxide MgO 99.90% White 3.58 2852 Cubic system CAS No.1309-48-4

Columbium pentoxide Nb2O5 99.99% Black 4.47 1530 Sintered compact CAS No.1313-96-8

Neodymium sesquioxide Nd2O5 99.90% Lilac colour 7.24 1900 Sintered compact CAS No.1313-97-9 I R22

Nickel oxide NiO 99.90% Green 6.7 Sintered compact CAS No.1313-99-1 I R23/ 24,R42/43/45

Silicon nitride Si3N4 99.50% Gray 3.44 1900 Hexagonal system CAS No.12033-89-5

Silicon carbide SiC 99.90% Atrovirens 3.217 2500 Hexagonal system CAS No.409-21-2

Silicon monoxide SiO 99.99% Yellowish-brown 2.24 1700 Sintered compact CAS No.10097-28-6

Silicon dioxide SiO2 99.99% Colourless 2.1 1713 Tetragonal system CAS No.7631-86-9

Stannic oxide SnO2 99.99% White 6.95 1630 Tetragonal system CAS No.18282-1 0-5

Strontium titanate SrTiO3 99.99% Colourless 4.8 2080 Cubic system CAS No.l2060-59-2

Tantalum pentoxide Ta2O5 99.99% White 8.74 1800 Sintered compact CAS No.1314-61-0

Titanium sesquioxide Ti2O3 99.90% Purple 4.29 1850 Sintered compact CAS No.1344-54-3

Trititanium pentoxide Ti3O5 99.90% Purple 4.29 1850 Sintered compact CAS No.12065-65-5

Titanium nitride TiN 99.90% Yellow 5.43 2950 Sintered compact CAS No.25583-20-4/ 11116-16-8

Titanium monoxide TiO 99.90% Orange and black 4.88 1750 Sintered compact

Titanium dioxide TiO2 99.90% Black 4.29 1850 Sintered compact CAS No.l3463-67-7

Tungsten oxide WO3 99.90% Green 12.1 1473 Rhombic system CAS No.1314-35-8

Yttrium oxide Y2O3 99.99% White 5 2410 Cubic system CAS No.1314-36-9

Aluminium zinc oxide Al2O3+ZnO(ZAO) 99.90% White Transparent conductive oxides(TCO) CAS No.1314-13-2/ 1344-28-

Zinc oxide ZnO 99.90% White 5.6 1975 Hexagonal system CAS No.1314-13-2

Zinc oxide+Silver ZnO+Ag 99.90% White Sintered compact CAS No.1314-13-2/7440-22-4

Zinc oxide+Aiuminum ZnO+AI 99.90% White Sintered compact CAS No.1314-13-2/7429-90-5

Zinc sulfide ZnS 99.99% White 4.102 1700 Hexagonal system CAS No.1314-98-3

Zirconium nitride ZrN 99.50% Yellowish-brown 7.3 2980 CAS No.25658-42-8

Zirconium dioxide ZrO2 99.90% White 5.49 2715 Sintered compact CAS No.1314-23-4

Zirconium Yttrium oxide ZrO2+Y2O3(YSZ ) 99.99% White Sintered compact CAS No.l314-23-4/1314-36-9

Zinc tin oxide ZnO+SnO2(ZTO) 99.90% White Transparent conductive oxides(TCO) CAS No.1314-13-2/18282-10-5

28 l 29



Application Matrix


Application Chemical FormulaPurity Remarks

Semi-Conductor Semi-Conductor AI, AISiCu, AISi, Ti, WTi, Ta, Cu, Au ect.

Optical Disc ODS AI, Ag, AgTi, AgPdCu, Au, ZnS-SiO1, AglnAsTe ect.

Magnetic Storage MDS CoCrTaZr, Coer, FeCo, CoCrPtTa, CoCrPtB, Ru, lrMn ect.

Large Area Coating LAC SUS, Cr, Ti, Ag, NiCr, ZnAI, TiOx, Sn, SiAl ect.

Flat Panel Display FPD AI, Ag, Ni, Au, Cr, Mo, Ta, Ti, Si, SiO1, ITO, AINd ect.

Photovoltaics PV AI, Ag, AZO, ITO, NiV, Culn, CulnGaSn, Mo ect.

Optoelectronics OPT AI, Ag, Si, Ti, Ta, Nb, SiO2, Zr ect.

Gear Cutting Tool Coating WDC Cr, Ti, AI, TiAI, Zr ect.

Crystal Oscillator OSL Cr, Ag, Au ect.

Thin-film Resistor RES NiCr, NiCrSi, CrSi, NiCuCrMn ect.

Decorative Coating SDC Ag, Au, CuZn, Ti, TiAI, Sn, NCVM ect.

Electromagnetic Shielding EMI SUS, Cu, Sn, Ni, NiCr, AI, Ag, Au ect.

excellence in thin film products · 2015-01-26 · excellence in thin film products evaporation...

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