FACILITIES, EQUIPMENT, AND OTHER RESOURCES CUNY Advanced Science Research Center

Shared Facilities Nanofabrication Facility A 5,000 square feet ISO 6 (Class 1,000) and ISO 5 (Class 100) cleanroom space on the ASRC ground floor contains additional lab space for back-end processing and support areas. The facilities provide researchers with tools to etch, deposit, and write materials, amongst other capabilities. Situated on the ground floor of the ASRC, the Nanofabrication facilities and users are currently supported by four dedicated staff members (a director, manager, process engineer and technician).

Major NanoFab instrumentation includes a high precision electron beam lithography system, a field emission SEM, dedicated inductively coupled plasma etchers for chlorine and fluorine chemistries, a dual chamber electron beam evaporator and sputtering system, a metrology suite and a 3D nano-lithography system. Imaging Suite The Imaging Facilities are a purpose built suite comprised of five electromagnetically shielded rooms. The instrumentation in this suite currently includes: a Leica TCS SP8 STED3x microscope, for super-resolution STED and confocal microscopy; an FEI Titan Themis 200 kV TEM; an FEI Titan Halo 80-300 kV cryoTEM; an FEI Helios NanoLab 660 dual beam SEM/FIB, and; several auxiliary instruments for sample preparation, including an FEI Vitrobot Mark IV plunge freezer, Fischione Nanoclean plasma cleaner, Leica high vacuum coater, and custom-made rapid-mix-spray-freeze apparatus. The installation of an FEI Tecnai G2 BioTwin 120 kV TEM is expected in 2017 (instrument currently on-site). The imaging suite is situated on the ground floor of the building, operated by The ASRC Nanoscience Initiative, and has a dedicated full-time manger for all operational support including technical support and research development. Surface Science Suite The surface science facility (ASRC ground floor) currently supports three state-of-the-art surface analytical techniques: Atomic Force Microscopy (AFM) with capabilities for mechanical properties mapping and electrochemical measurements; X-ray and UV Photoelectron Spectroscopy (XPS and UPS), and Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) – the Bruker Mulitmode 8, Phi Electronics PHI 500 VersaProbe II Scanning ESCA Microprobe, and a Phi Electronics PHI Trift V nano TOF systems, respectively. XPS and TOF-

Figure 2: ASRC NanoFab gowning room, with lithography bay shown in the distance.

Figure 1: CUNY ASRC building.

SIMS accessories include, but are not limited to, Argon cluster, Argon sputter, C60, and liquid metal ion guns to allow for a diverse range of samples to be analyzed. Planned expansion of the instrumentation includes a SwissLitho NanoFrazor thermochemical nanolithography tool accessible from November 2016. The Surface Science Facility suite is situated on the ground floor of the building, operated by The ASRC Nanoscience Initiative, and has a dedicated full-time manger for all operational support including technical support and research development. Spectroscopy Suite In addition to spectroscopy capabilities of the soft nanotechnology laboratories, an accessible spectroscopy suite for more advanced sample analyses is also available on the ASRC 3rd floor. Instrumentation currently includes a high-resolution circular dichroism, linear dichroism (CD/LD) instrument (Jasco Inc. J-1000) for chirality analysis of samples, with accessories for a number of techniques (rectangular and circular cells of various path lengths, stopped flow analysis, etc.). NMR Suite A purpose-built NMR suite on the ASRC ground floor includes three state-of-the-art NMR models: Bruker Avance III HD 600 MHz, 700 MHz and 800 MHz instruments suitable for the full complement of biomolecular NMR studies. All three spectrometers are equipped with either cryogenically-cooled or room temperature probes offering a wide range of probes for 1H, 13C, 15N, 19F, 31P and 2H studies. Additional resources include i) two laser systems dedicated for studies of photoreceptors or other photochemical systems, ii) a high-pressure system for acquiring NMR data at pressures up to 2500 bar, and iii) 1.6-mm HXY magic-angle-spinning (MAS) probe for solid-state NMR experiments, capable of sample MAS rates of up to 40 kHz, for use with the 600 MHz spectrometer. A facility manager supports on-going practical research by faculty, staff, and students. Crystallography Facility The macromolecular crystallization facility contains crystallization equipment and robotics, including two Gryphon protein crystallization and Minstrel crystallization tray imagers (at 4° and 25°C), an Alchemist crystallization screen-maker and associated microscopes and incubators. The electron microscopy facility contains an FEI Titan Halo cryo-EM for biomolecular complex visualization and two additional FEI microscopes supporting structural biology and materials science applications. Mass Spectrometry Facility The Core Facility maintains ultra-high resolution maXis-II / ETD ESI-q-TOF, equipped with Dionex Ultimate-3000 U(H)PLC and RS-nano-LC systems, and Autoflex-Speed MALDI TOF-TOF mass-spectrometers. Bruker’s maXis-II/ETD features latest developments in TOF technology to provide confidence for accurate mass measurements and molecular formula determination. Bruker’s Autoflex-Speed hardware options include both linear and high-resolution reflectron modes, LIFTTM technology for structural analysis of peptides. Several orders of magnitude dynamic range of both instruments ensure highly sensitive mass measurements at sufficient speed. A facility manager offers training and support in on-going practical research by faculty, staff, and students with MS requirements.

Seminar Facilities The center also hosts a conference auditorium on the ASRC 1st Floor (max. capacity 100) with reception area, and a seminar/workshop room on the ASRC 1st Floor (max. capacity 40) for smaller workshops, presentations and education programming, and career development. Discovery Science and Education Center A Discovery & Education Center, currently under development, will house permanent interactive educational displays on the ASRC 1st floor of current ASRC research for public outreach activities. An interactive education and teaching facility that will be used to demonstrate and explain ASRC and CUNY research to K-12 students and the general public. A Discovery & Education Manager, Camille Santistevan, is currently developing educational programing and outreach activities, with execution support from an on-site events team (Events Manager and Guest Services and Events Coordinator). Computing Facility Computing facilities at the ASRC include a high-power network, flexible computing platform, and an EMC Isilon Storage System. All are overseen by an IT manager and support staff. The flexible computing platform includes a CISCO UCS B200 Chassis; eight CISCO UCS B200-M3 blades; a redundant pair of 6248 Fabric Interconnects plus all cabling, Dual Ivy-Bridge 12-core E5-2697v2 CPUs (24 cores/blade); 256 GB Internal dual 100Gig SSDs for local boot and storage; and up to eight 10 GB interfaces per blade (Vic 1240 adapter and port expander included). Visualization Center (currently being outfitted): Comprised of six data servers, this advanced Visualization Center will enable the collection, management, and integration of diverse data stacks from many data sources of widely varying format and content. Expected data types include: GIS layers, point oriented time series, in situ samples, raster files (satellite imagery), mesh/grid modeling data, and file based “any”-data such as video, audio, and text documents. As the name implies, it is being outfitted with state-of-the-art equipment for facilitate data discovery and exploration in complex and voluminous digital information streams. Environmental Science Observatories and Sensors (currently being outfitted): Lab space within the Environmental Sciences Initiative will house a facility for designing next-generation sensors, along with a rooftop observatory with a number of instruments, including a ceilometer, a hyperspectral microwave radiometer, a sky radiometer, and a rooftop laboratory to house an atmospheric LIDAR system, all of which will be supported by a dedicated, PhD-level facility manager. Advanced Laboratory for Chemical and Isotopic Signatures (ALCIS) (currently being outfitted): Located in the Environmental Sciences Initiative, the ALCIS facility is designed to support characterization of the molecular, elemental, and isotopic signatures of materials in modern and paleo-earth systems, with a focus on understanding how human activities modify natural earth processes. Managed by a PhD-level facility manager, two magnetic sector isotope ratio mass spectrometers (a ThermoFisher Scientific MAT-253 Plus and a ThermoFisher Scientific Delta V Plus) are dedicated to the study of isotope compositions of

organic compounds and elements (C, H, O, N, S). The facility also will house equipment to process and prepare solid and gas samples for analysis and will feature custom-made on-line and off-line vacuum extraction systems. Additional lab space in the Environmental Sciences Initiative will be coupled with the ALCIS facility and will contain gas chromatographs and flow injection analyzers for analyses of carbon and nitrogen cycling processes. EQUIPMENT ASRC Nanofabrication Facility - Equipment List Tool Category Company & Model Rapid Thermal Anneal Thermal Allwin21 AccuThermo AW610 Anneal Furnace (25 wafer boat) Thermal Tystar Corp. Mini Tytan 4600 Optical Profiler Metrology Bruker Scientific ContourGT-I Surface Profilometer Metrology Bruker Scientific Dektak XT Spectroscopic Ellipsometer (variable angle) Metrology J.A. Woolam V-Vase

Spectral Reflectance Instrument Metrology Filmetrics F20-UV Inspection Microscope (3x) Metrology Nikon LV150N Scanning Electron Microscope Metrology FEI Nova NanoSEM 450

3D Nano Lithography Tool Lithography Nanoscribe Photonic Professional GT

Mask Aligner (front & backside alignment) Lithography EV Group EVG620

Photoresist Oven (2x) Lithography SPX BlueM DC-146 Spinner (3x) Lithography Brewer Science CEE200X Hot Plate Tower Lithography Air Control Inc. Custom Nanopattern Software Lithography Raith ELPHY Quantum Electron beam lithography (100kV system) Lithography Elionix ELS-F100-6

ICP Etching (Fl Based w/ DRIE) Etch Oxford Inst. PlasmaPro System 100 ICP Etching (Cl based) Etch Oxford Inst. PlasmaPro System 100 RIE Etching Etch Oxford Inst. PlasmaPro NGP80 UV Ozone Cleaner Etch Samco UV-2 Plasma Asher Etch PVA TePla Ion System Vapor HF Etcher / Release Etch SPTS Primaxx uEtch XeF2 Etcher / Release Etch SPTS Xactix e1

ALD (Plasma Enhanced) Deposition Ultratech/Cambridge Nanotech Fiji G2

Atomic Force Microscope Deposition Bruker Scientific Dimension FastScan

Evaporator Thermal & E-beam Deposition AJA International ORION-8E Evaporator Thermal Deposition AJA International ORION-3-TH RF/DC Sputter (reactive gases & Deposition AJA International ORION-8

heating) PECVD (load locked system) Deposition Oxford Inst. PlasmaPro System 100 Sputter Coater Deposition Cressington Manual Sputter Coater Spin Rinse Dryer Deposition OEM Group 470S Thermal Oxidation Furnace Deposition Tystar Corp. Mini Tytan 4600 SiO2 LPCVD (TEOS) Deposition Tystar Corp. Mini Tytan 4600 SiN LPCVD (low stress and stoichiometric) Deposition Tystar Corp. Mini Tytan 4600

Wafer Dicer Back-End Disco DAD3220 Wire bonder (semi-auto, ball & wedge) Back-End West Bond Auto 454647E Tape Mounter Back-End Ultron UH114 UV Tape Curing System Back-End Ultron UH102

ASRC Imaging Suite Equipment Tool Category Company & Model TEM - Cryo for Life Sciences (300 kV) Metrology Titan Themis Halo 80-300 TEM - Materials Science (200 kV) Metrology Titan Themis 200 TEM - Screening/Training (120 kV) Metrology Tecnai G2 Spirit Twin SEM / FIB with EDS (w/ nanopattern software) Metrology Helios NanoLab 660

ASRC Surface Science Suite Equipment Tool Category Company & Model

X-ray Photoelectron Spectroscopy Metrology/ Analysis Phi Electronics Versaprobe II

TOF Secondary Ion Mass Spec. Metrology/ Analysis Phi Electronics THIIFT V nanoTOF

Thermochemical Nanolithography Metrology/ Analysis SwissLitho NanoFrazor

Atomic Force Microscopy Metrology Bruker Scientific Multimode 8 Initiative Equipment Instrument Location Capability Overview CEM Liberty Blue V1 Peptide Synthesizer

ASRC Ground Floor

Microwave assisted peptide synthesis

Dionex U3000 HPLC

ASRC Ground Floor

Up to 10 mL/min flow rates, semi-prep capabilities, fraction collector and UV diode array detector for sample analysis and small scale purification

Dionex U3000 prepHPLC ASRC Ground Floor

Up to 50 mL/min flow rates, 5 mL injection volume and fraction collector. Suitable for purification of samples.

Jasco Inc. FP series fluorometer

ASRC Ground Floor

Temp controlled analysis of fluorescence of liquids, films, or surfaces

Jasco Inc. V-660 UV-Vis spetrometer

ASRC Ground Floor

Temp controlled absorption analysis of liquids, films, or surfaces.

Buchi Rotavapor rotary evaporator (x2)

ASRC Ground Floor

Water-cooled or cold finger rotary evaporator system for automated solvent extraction of a variety of solvents.

Bruker Vertex 70 FTIR

ASRC Ground Floor

High resolution (4 cm-1) FTIR absorption and transmittence spectra. Step scan available for monitoring protein folding.

Anton Paar MCR302 Rheometer

ASRC Ground Floor

Temperature controlled analysis mechanical properties of materials including viscoelasticity & viscosity.

Bruker Mutlimdoe IVa AFM ASRC Ground Floor

Can operate in scanning tunneling microscopy configuration, liquid, piezoelectric and electric (EFM, CAFM, KPFM) modes, and are equipped to work in controlled atmosphere. Liquids cells allow for nanoRheology-AFM methods and other imaging techniques in liquids. This AFM has been modified to work with the home-made modules for thermochemical nanolithography (TCNL).

Agilent PicoForce AFM ASRC Ground Floor

Can operate in scanning tunneling microscopy configuration, liquid, piezoelectric and electric (EFM, CAFM, KPFM) modes, and are equipped to work in controlled atmosphere. Liquids cells allow for nanoRheology-AFM methods and other imaging techniques in liquids. This AFM has been modified to work with the home-made modules for thermochemical nanolithography (TCNL).

Veeco CP AFM ASRC Ground Floor

Can operate in scanning tunneling microscopy configuration, liquid, piezoelectric and electric (EFM, CAFM, KPFM) modes, and are equipped to work in controlled atmosphere. Liquids cells allow for nanoRheology-AFM methods and other imaging techniques in liquids. This AFM has been modified to work with the home-made modules for thermochemical nanolithography (TCNL).

Bruker Multimode 8 AFM

ASRC Ground Floor

Suitable for high resolution nanoscale surface imaging, surface mechanical properties testing and surface electrochemical properties. Installed with a hot/cold stage for temperature control.

Jobin Yvon LabRam 300 raman system mounted Agilent PicoPlus AFM

ASRC Ground Floor

The system is also coupled with inverted optical microscope, and digital camera to allow for raman microscopy and AFM measurements to be taken simultaneously.

Leica TCS SP8 STED3x microscope

ASRC Ground Floor

High resolution confocal imaging of fluorescent materials (up to 20 nm in XY axes, and 50 nm in z)

FEI Titan Themis 200 kV TEM

ASRC Ground Floor

High resolution electron microscopy imaging

FEI Titan Halo 80-300 kV cryoTEM

ASRC Ground Floor

High resolution electron microscopy imaging in cryo mode

FEI Helios NanoLab 660 dual beam SEM/FIB

ASRC Ground Floor

High resolution topographical imaging. FIB capabilities allows for depth imaging materials.

Phi Electronics PHI 500 VersaProbe II Scanning ESCA Microprobe XPS

ASRC Ground Floor

Can analyze the composition and surface chemistry of solid samples with a sampling depth of 5 nm. It is possible to obtain quantitative elemental composition of surfaces, molecular species present on surfaces, and chemical states of surface atoms. The instrument is also equipped with a UPS is used to study the valence band of a surface material.

Phi Electronics PHI Trift V nano TOF TOF-SIMS

ASRC Ground Floor

Provides elemental and molecular information from surfaces of solid materials, using a time-

of-flight analyzer.

Jasco Inc. J-1000 CD/LD spectrometer

ASRC 3rd Floor

Can perform high resolution CD/LD measurements simultaneously for chirality analysis of samples.

Bruker Avance III HD 600 MHz NMR

ASRC Ground Floor

Probes for 1H, 19F, 13C, 15N, and 2 H protons for structural analysis of molecular compounds. Additional capabilities for solid state NMR under development.