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Santa Clara, CA USA August 2008 1 Flash Memory Trends Gregory Wong, Founder and Principal Analyst [email protected]

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Santa Clara, CA USA

August 2008 1

Flash Memory Trends

Gregory Wong, Founder and Principal Analyst

[email protected]

Santa Clara, CA USA

August 2008 2

Agenda

Flash Memory Overview• Architecture

• Multi-level Cell Storage

Technology Overview• Technology Evolution

• Roadmaps

• Scaling Challenges

Vendors

Summary

Array Architectures

Santa Clara, CA USA

August 2008 3

Bit line

Bit line

Word line

Source line

Bit line

Bit line

Sourceline select

Bitline select

Source

Source

Word line

NOR NAND NROM

Source/Drain

• Parallel architecture

• 10F2

• Serial architecture

• 4F2

• Parallel architecture

• 7F2

NAND vs. NOR

Santa Clara, CA USA

August 2008 4

random access serial access

Access speed:

Random: 10-50µs

serial (page mode): 25-50ns

write speed:

random: 200µs/byte

page: 200µs/page (0,4µs/byte)

Access time:

Random: 60-120ns

page mode/burst mode:

30ns/15ns

write speed:

random: 10µs/byte or word

• Low Cost

• small cell size

• High sustained write

• page write

• High Performance optimized

• fast random read

• fast random write

Flash Memory

NANDNOR

NROM vs. Floating Gate

Santa Clara, CA USA

August 2008 5

NROM Floating Gate

Bit 2Bit 1

Floating

Gate (Poly) Gate Oxide

Poly

Oxide

• localized storage in nitride traps

• 2 physical bits per cell

• multi-level cell storage allows storage

of 2 electrical bits per cell

• physical storage of charge in floating gate

•multi-level cell storage allows storage of 2

or more electrical bits per cell

Bit 1

NAND Flash Cell Size

6

• Need to transition to multi-bit technologies

Santa Clara, CA USA

August 2008

0

0.05

0.1

0.15

0.2

2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012

µm

2

NAND Physical Cell size Trend

Multi-level Cell Storage - NAND

Santa Clara, CA USA

August 2008 7

S D

Substrate

FG

CG

1010 1000100111101111 11001101 00100011 0000000101100111 010001011011

# o

f ce

lls

110111 100101# o

f ce

lls

01# o

f ce

lls

4 bits/cell

010011 000001110111 100101# o

f ce

lls

3 bits/cell

2 bits/cell

1 bit/cell

Multi-level Cell Storage - NROM

Santa Clara, CA USA

August 2008 8

Bit 2Bit 1

Bit 4Bit 3

Bit 2Bit 1

110111 100101# o

f ce

lls

01# o

f ce

lls

2 bits/cell

4 bits/cell

9

4Gb SLC NAND

70nm

156mm2

4Gb SLC NAND

70nm

145mm2

8Gb MLC NAND

70nm

146mm2

Samsung Hynix Toshiba

8Gb Quad NROM

75nm

120mm2

Saifun

Images: Semiconductor Insights, Inc., Saifun Semiconductors, Toshiba

16Gb 4b/c NAND

70nm

168mm2

Toshiba

Multi-level Cell Storage Cost

Advantage

Programming Mechanisms

Santa Clara, CA USA

August 2008 10

S D

Substrate

FG

CG

10V

0V 5V

S D

Substrate

FG

CG

18V

0V 0V

NOR NAND NROM

• CHE • FN tunneling • CHE

9V

4.5V0V

Erase Mechanisms

Santa Clara, CA USA

August 2008 11

S D

Substrate

FG

CG

-18V

0V 5V

S D

Substrate

FG

CG

0V 0V

NOR NAND NROM

• FN tunneling • FN tunneling • BBHHI

-7V

5V0V

18V

Read Mechanisms

Santa Clara, CA USA

August 2008 12

S D

Substrate

FG

CG

3V

0V 1V

NOR NAND NROM

3V

2V0V

4.5V

0V

4.5V

Selected WL

Unselected WL

0.8V0.8V0.8VBL=0.8V

0V

4.5V

4.5V

Unselected WL

Images: Intel Corp.

13

2002 - 130nm

2004 - 90nm

2000 - 180nm

2006 - 65nm

2008 - 45nm

NOR Flash Technology Evolution

Santa Clara, CA USA

August 2008

14

2006 - 60nm

2007 - 50nm

2004 - 90nm

2008 - 40nm

Images: Samsung, Semiconductor Insights, Toshiba

NAND Flash Technology Evolution

Santa Clara, CA USA

August 2008

15

2004 - 110nm

2006 - 90nm

2002 - 230nm

Images: Spansion

2008 - 65nm

2009 - 45nm

NROM Flash Technology Evolution

Santa Clara, CA USA

August 2008

Code Flash Roadmap

16Santa Clara, CA USA

August 2008

128

256

512

1024

2048

4096

64

128

256

512

1024

10

100

1000

10000

2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012

De

nsi

ty (

Mb

)

Code Flash Density Trend

MLC NOR NROM Code Source: Forward Insights

• NROM code to be superseded by Eclipse

Data Flash Roadmap

Santa Clara, CA USA

August 2008 17

1024

2048

4096

8192

16384

32768

65536

2048

8192

16384

100

1000

10000

100000

2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012

De

nsi

ty (

Mb

)Data Flash Density Trend

MLC NAND NROM QUAD Source: Forward Insights

Code – Bit Size Trend

18Santa Clara, CA USA

August 2008

2003 2004 2005 2006 2007 2008 2009 2010 2011 2012

Bit

siz

e (µ

m²)

Volume Production

Bit Size Trend

Mirrorbit MLC NOR

NAND - Bit Size Trend

19Santa Clara, CA USA

August 2008

2003 2004 2005 2006 2007 2008 2009 2010 2011 2012

Bit

size

(µm

²)

Volume Production

Bit Size Trend

SLC NAND MLC NAND 8LC NAND 16LC NAND

20Santa Clara, CA USA

August 2008

Scaling Challenges

NOR Flash NAND Flash NROM

•Short channel

effect

•Contact and

isolation fill

•Charge storage

reduction

•Inter-cell

interference

•CG-FG coupling

•Gap fill

•Charge storage

reduction

•Short channel

effect

•Bit disturbs

NOR Flash Vendors

• Numonyx

– $2.4 billion merger of ST’s (48.6%) and Intel’s (45.1%) NOR businesses; Francisco Partners

owns 6.3%

– Includes ST’s Catania and AMK8 fabs, stake in ST-Hynix Wuxi fab and Intel’s fab 18

– Intel contributed Pudong & Kiveta assembly & test facilities

– Transitioning to 45nm

• Samsung

– Focus on high density NOR for MCPs

– NOR manufactured on legacy 200mm fabs

– 65nm in volume

• Toshiba

– NOR flash for MCPs

– 1st MLC products on 70nm ramping

21Santa Clara, CA USA

August 2008

NOR Flash Vendors

• Macronix

– Focus on serial flash and low density parallel NOR flash on 110nm

• Winbond

– Focus on serial flash

– 90nm NOR flash in 300mm fab ramping in 2H/08

22Santa Clara, CA USA

August 2008

• Samsung

– Fungible production capacity between NAND and DRAM

– Volume production of 42nm

• Toshiba/SanDisk

– NAND manufacturing JV: FlashPartners, FlashAlliance

– Fundamental NAND and MLC patents

– Volume production of 43nm

– First to market with x3, x4 technology: 16Gb x3 in production

• Hynix/Numonyx

– NAND joint development and manufacturing JV

– Volume production of 48nm

23Santa Clara, CA USA

August 2008

NAND Flash Vendors

• Intel/Micron

– NAND joint development and manufacturing JV

– Sampling 34nm 32Gb MLC device

• Powerchip

– 70nm in volume

– 50nm in development

24Santa Clara, CA USA

August 2008

NAND Flash Vendors

• Spansion

– Acquired NROM patent owner, Saifun in E’07

– Product and technology licensing agreement with SMIC for 65nm

– Volume production of 65nm at SP1 300mm wafer fab

• Macronix

– Code flash products based on 150nm NROM technology

– 75nm XtraROM in production

• SMIC

– Production of 2Gb NROM for data storage

– Production of 8Gb NROM Quad in 2H/08

25Santa Clara, CA USA

August 2008

NROM Vendors

26Santa Clara, CA USA

August 2008

Summary

NOR and NROM most suitable for code storage; NAND for data storage

Move to multi-bit storage to drive further cost reductions as technology scaling slows

Cost benefits of 3bit/cell & 4bit/cell to materialize in next two years

27Santa Clara, CA USA

August 2008

Acknowledgements

Special thanks for the use of material/images

IEEE

Intel

Semiconductor Insights

Spansion

28Santa Clara, CA USA

August 2008

Forward Thinking

www.forward-insights.com