Key Features

•FlexibleandModularSurfaceAnalysisSystemDesign

•OptimizedAnalysisModulesforSpectroscopy,MicroscopyandSamplePreparation

•Multi-MethodSystemCapabilities•EasyandCostEffectiveUpgradeOptions

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FlexMod

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SPECS leads the way in state-of-the-art technology for surface analysis.

SPECSSurfacenanoAnalysisGmbH

SPECS headquarters, with more than 150employees,islocatedinthecenterofGermany’scapital berlin, with subsidiaries in Switzerland(SPECS Zurich GmbH) and in the USA (SPECSinc.). Furthermore,we are represented all overtheglobebyourliaisonofficesorsalespartners.

We are a teamof scientists and engineerswhohave been dedicating their knowledge andexperience to the development, design, andproduction of instruments for surface science,materials research, and nanotechnology since1983.

Our key to success is know-how, experience,closecontacttoscientistsfromallovertheworld,customer orientation, reliable quality control,anddynamicresearchanddevelopment.

Packaging of a SPECS component after final testing

Final alignment of an UHV high precision sample manipulator

FlexModFlExiblEMODUlArAnAlySiSSyStEM

Content

FlexModConcept . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

FlexPS–SystemModuleforElectronSpectroscopy . . . . . . . . . . . . . . . . 6

FlexPM–SystemModuleforScanningProbeMicroscopy . . . . . . . . . . . . . .10

FlexPrep–SystemModuleforSamplePreparation . . . . . . . . . . . . . . . .14

Flexintro–SystemModuleforSampleintroduction. . . . . . . . . . . . . . . . 16

FlexAdd–FlexibleAddonModules . . . . . . . . . . . . . . . . . . . . .18

FlexMan–FlexibleSampleManipulation . . . . . . . . . . . . . . . . . . .20

Flexvac–FlexiblePumpingSystem . . . . . . . . . . . . . . . . . . . . .24

Flexbake–FlexiblebakeOutConcept . . . . . . . . . . . . . . . . . . . .26

FlexModConfigurations. . . . . . . . . . . . . . . . . . . . . . . . . 27

FlexMod

FlexModConceptFlExiblEMODUlArAnAlySiSSyStEM

Surface Nano Analysis tools combining uncompromised performance with an upgradeable, cost-effective system concept

Standard system solutions and stand-alonesystemsinmostcasesonlycananswerstandardquestions. the integration of several analyticaltechniques requires a more sophisticatedapproach. Such integration can include samplepreparation, thin film deposition, surfaceanalysisinultrahighvacuum,andevenmethodsworking in other environments or in situanalysis in working conditions. thus, advancedapplications in surface analysis and surfacenano analysis require a significant degree ofcustomizationintheanalysissystemdesign.

thedilemmahere is, that customized solutionstakealongtimetoberealized,andaresignificantlymoreexpensive.Furthermore,normallytheyarenotflexibletolaterchanges,becausegeometriesand specifications are only optimized for thedefined purpose. later upgrades, if possibleatall,will lead toa systemconceptwithahighdegreeofcomplexityinoperation.

the way out of this maze would be amodularconcept,wellknowntomanyofusfromchildhooddays. transfer the pleasure of playing withbuildingblockstomodernresearch.Concentrateon the scientific problem solution, instead ofdiving into the small details of complicatedsystem designs. Start from well-planned, well-specified and application-optimized buildingblocktypemodulesforadedicatedtask.Withallmoduleshavingequalformfactors,immediateorlater combinationof several of theseoptimizedmoduleshelptobuild-upamulti-methodsystem,exactlyoptimizedtotherecentapplicationandinfutureevengrowingwithextendedtasks.

the future of customization is available: SPECSFlexMod.

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the FlexMod system concept provides thescientistwithanoptimizedandyetstillcustomizedconfigurable solution for a variety of surfacescience techniques. the system allows you tostartwithabasicconfigurationandexpandwithupgrade options for higher performance andadditionalsurfacesciencemethods.thismeansthesystemcangrowwithyouandyourneeds.

the individual modules are designed foroptimized functionality for the chosenmethod.Withinthemodule it ispossibletochoosefroma large number of components for analysis. inaddition, we offer several choices for pumpingconfiguration and sample manipulationwhich allow you to adapt the system to yourneeds. individual modules can be operated asstandalonesystemsorbecombinedfrommulti-methodsystemconfigurations.

As a result of to the modularity, the systemcan grow over time by adding completemodulesor additional components. the systemconfigurationcanalsoberearrangedtoadapttonew experimental requirements. Accompaniedby comprehensive automation, FlexMod is theperfect solution for multiuser environments aswell.Convinceyourselfofthisconceptandstarttoadaptthesurfacenanoanalysissystemtoyourresearch,insteadoflimitingyourresearchtotheequipmentpresentinyourlab.

FlexMod

FlexPSSyStEMMODUlEFOrElECtrOnSPECtrOSCOPy

The specially designed UHV chamber provides an optimized geometry for all electron spectroscopy applications. It allows a combination of XPS, UPS, AES and ISS methods with full performance for each method.

FlexPS System – Standard UHV System Module with optional components for electron spectroscopy

the heart of the FlexPS UHv systemmodule isthe specially designed analysis chamber. it isoptimizedtofulfillthegeometricalrequirementsfor all common electron- and ion spectroscopyapplications. the chamber is made of µ-metalin order to optimize magnetic shielding andallow the highest energy resolution. Forless sensitive applications, a stainless steelconfiguration is alsoavailable. the systembasefitsavarietyofpumpingconfigurationsavailable

to meet specified gas load and base pressurerequirements. thanks to the unique design,componentscaneasilybeadded,upgradedandexchanged. Within the flexible system concept,differentsamplehandlingoptionscanbechosenwith respect to sample size, temperature rangeandmanipulation possibilities. the FlexMod PSallowssamplesizesupto2”usingmanipulationpossibilitieswithupto6degreesof freedom.itoffers fitting solutions for all standard heating

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Hemispherical Analyzer PHOIBOS

Twin Anode X-Ray Source XR 50

ConfigurationOptionsforElectronSpectroscopyCenterpiece for electron spectroscopy isthe hemispherical analyzer PHOibOS. it is ahighly flexible electron analyzer with availableconfigurations for ESCA, xPS, ArxPS, ArPES,UPS, AES, SAM, iSS, snap shot data acquistionand2Ddetectionmodes.Specialdetectorswithextended dynamic range offer high count rateswhile the special analyzer design results in thebestenergyresolutiondownto2mevinUPSandlateralresolutiontobelow50µminxPS.

Monochromatic X-Ray source FOCUS 500

High Performance UV source UVS 300

Dependingontheapplication,suitableexcitationsources can be chosen from a wide range ofoptions:

•x-raysourcesforxPS/ESCAincludingtwinanodex-raysourcexr50andmonochromaticx-raysourceFOCUS500andspecialµ-FOCUSsources

•ElectronsourceEQ22forAESandelectronsourcesforSEM/SAMdownto100nmlateralresolution

•varietyofUvsourcesforUPS:UvS10/35,UvS300andUvlSwithoptionalmonochromator

•FloodGunFG15/40forchargecompensation

•ionsourcesforsamplepreparation,depthprofilingandiSS:iQE11/35andiQE12/38

•Samplemanipulatorwithupto6axis,samplesizeupto2”andheatingandcoolingfacilities

and cooling operations, thus covering a broadtemperature range. Additional sample storageslotscanbeimplementedtoincreasethesystem’sefficencyortoupgradeformulti-useroperation.

FlexMod

applications

ESCA/xPS/ArxPS UPS/ArPES

The high resolution capability of the PHOIBOS analyzer combined with the FOCUS 500 monochromator and the flood gun FG 15/40 has been demonstrated by XPS measurements on a PET (polyethylene terephthalate) surface. In the analysis of polymeric surfaces, monochromatic sources offer a significant advantage over non-monochromatic sources due to the improved resolution. This allows to distinguish even small energy shifts which are caused by different bonding. When using monochromatic X-rays however, spectra can be difficult to obtain due to surface charging effects when analyzing non conducting organic materials. In order to record high quality data under these circumstances, it is necessary to neutralize surface charging carefully. The FG 15/40 is a compact, easy to handle, reliable flood gun for charge neutralization. The C1s spectrum above shows the ability to distinguish carbon atoms 1, 2 and 3 with a FWHM of 0.8 eV.

Angle resolved UV photoelectron spectroscopy is an important tool for band structure analysis of crystalline surfaces and low dimensional structures. The band structure of crystalline graphite layers on the (0001) surface of SiC was measured by high-resolution angle-resolved photoelectron spectroscopy. The surface was analyzed using a PHOIBOS 100 analyzer with a 2D CCD detector which allows snap shot mode analysis of band structures using a special wide angle lens mode. This results in extremely fast data acquisition of less then one minute for the full image. The experiments were performed using a SPECS UV source UVS 10/35, which has a line width of < 2 meV and a spot size of about 0.6 mm in diameter. The photon energy for all measurements shown here were 40.81 eV (He II). Data courtesy T. Balasubramanian (MAX-Lab, Sweden) and R. Uhrberg (Linköping University, Sweden).

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AES/SEM/SAM DepthProfilingandiSS/lEiS

Depth profiling of 100nm SiO2 layer on Si (standard sample for depth calibration) based on XPS signal during ion sputtering. Shown is the atomic concentration for silicon and oxygen elements calculated from the XPS intensity of the Si 2p and the O 1s element lines. The interface between the SiO2 layer and the Si wafer substrate is visible as a sharp edge with a width of 7 nm (20 % to 80 %).

Secondary Electron Microscopy (SEM) images of Sn balls on graphite. Size 5 nm -30 µm

Secondary Electron Microscopy (SEM) image of copper square mesh G300.300 lines/inch, 25 µm bar width, 58 µm hole width Ion Scattering Spectroscopy (ISS) measurement of He

ion scattering on Ag surface with analyzer PHOIBOS. The ISS method is extremely surface sensitive and can give important additional information to the electron spectroscopic methods.

S - B = 1.4FWHM =

FlexMod

FlexPMSyStEMMODUlEFOrSCAnninGPrObEMiCrOSCOPy

SPECS engineers have developed a dedicated chamber module design for atomically resolved STM and AFM in UHV conditions.

the FlexPM systemmodule integrates a varietyof in situ sample preparation techniqueswith outstanding atomically resolved SPMperformance in onededicated chamber design.DuetothespecialSPECSSPM150Aarhusdesign,theconfiguration is very smallandflexible.theextreme stability of the SPM150Aarhus allowsa variety of different pumping configurations,including the option of using turbo pumps for

FlexPM System – Standard UHV system module with optional components for Scanning Probe Microscopy

high gas loads. Even in noisy surroundings,atomic resolution is achieved without externalvibrational damping. the system includes portsfor in situ tip and sample preparationwith ionsources and evaporators. A sample storage canbe added for convenient sample loading whileviewportsareincludedasstandardconfigurationforeasysamplehandling.

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UHV Scanning Probe Microscopy Head SPM Aarhus 150

KolibriSensor for parallel STM and AFM data acquisition with highest stability

Ion Source for in situ tip preparation

Sample storage and heating stage for sample preparation

ConfigurationOptionsforScanningProbeMicroscopytheScanningProbeMicroscopyModuleisbasedaround the high stability StM 150 Aarhus. theSPM Aarhus family includes configurations forpure StM and for StM/AFM combinations. ForAFM,thespecialKolibriSensorisusedwhichhasa unique cross talk free parallel performancefor StM and AFM. in all configurations, in situtip preparation for optimum resolution inSPM is a unique feature of the Aarhus design.FastestStMelectronicsaswellashighflexibilitynanoniselectronicsforSPMcanbechosen.thetemperaturerangeforSPMcanbechosenfromliquid nitrogen or helium to high temperaturesupto1300K.

Depending on the application, suitableaccessories for sample preparation can bechosenfromalargerangeofoptions:

•ionsourceiQE11/35forsamplepreparationandtippreparation

•E-beamevaporatorsinsinglepocket,EbE-1,ormultipocket,EbE-4,configurationforthinfilmdeposition

•Samplestoragewithheatingstageforsamplepreparationthroughdirectcurrentheatingupto1400K

FlexMod

stM applications

DefectmobilityonO(2x1)-ru(0001) Grapheneonru(0001)imagedat700°Cwithatomic-resolution

Instrument: SPM 150 Aarhus with KolibriSensorImaging parameters: Constant current STM images I = 0.57 nA, U = 1.473 V Image size: 20 nm x 20 nm, 12 nm x 12 nm, 4 nm x 4 nm Temperature: room temperatureImages taken at SPECS laboratoryThe O(2x1)-Ru(0001) surface consists of different domains rotated by 120° with respect to each other. At room temperature mobility of point defects imaged as dark spots on top of the bright rows is observed.

Instrument: SPM 150 Aarhus HT with W-STM tipImaging parameters: Constant current STM images I = 0.37 nA, U = 0.013 V Image size: 150 nm x 150 nm, 12 nm x 12 nm, 4 nm x 4 nm Temperature: 700 °CImages taken at SPECS laboratoryThe graphene was grown by chemical vapor deposition of ethylene on the hot Ru(0001) sample inside the microscope. The sample was heated by radiation from a hot filament to 700°C throughout preparation and imaging.

13aFM applications

Grapheneonru(0001) WaterlayeronKbr(001)

Graphene on Ru(0001)Instrument: SPM 150 Aarhus with KolibriSensorImaging parameters:   Constant detuning NC-AFM imageDf = -0.08 Hz, U = -0.16 V, fres = 999,154 Hz, A = 300 pm, Q= 29600Image size: 150 nm x 150 nm, 30 nm x 30 nm, 9 nm x 9 nm Temperature: room temperatureImages taken at SPECS laboratory

The graphene was grown by chemical vapor deposition of ethylene on Ru(0001). At low coverages the growth of monolayers and isolated islands was observed.

Instrument: SPM 150 Aarhus with KolibriSensorImaging parameters: Constant detuning NC-AFM imageDf = -0.3 Hz, fres = 996,581 Hz, Q= 3500, A = 500 pmImage size: 200 nm x 200 nm Temperature: 130 KImage taken at SPECS laboratoryAt low temperatures the formation of a water wetting layer is observed on the KBr(001) surface. The wetting layer nucleates preferentially at step edges

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FlexMod

the FlexPrep module allows a wide range ofin situ preparation techniques including ionetching, e-beam deposition, as well as lEEDand rHEED analysis. SPECS also provides thecorrespondingvarietyoftechnicalequipmentandaccessories.theFlexPrepmoduleisanextensionof the FlexPSand FlexPMmodules for separatebut in situ sample preparation. this allows thehighestpuritylevelinanalysiscombinedwiththerequiredflexibilityforpreparation.

thepumpingconfigurationalsocanbechosentomeetgas loadandbasepressurerequirements.Within the flexible system concept, samplehandling can also be chosen regarding samplesize, temperature range and manipulationpossibility, to meet the experimentalrequirementsoptimally.

FlexPrepSyStEMMODUlEFOrSAMPlEPrEPArAtiOn

For in situ sample preparation SPECS offers an optimized and versatile chamber module solution.

FlexPrep System – Standard UHV System Module with optional components for sample preparation

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LEED Optics ErLEED 150

E-Beam Evaporator EBE-4

RHEED package RHD 30 for in situ analysis

Plasma source PCS ECR for sample preparation

the FlexPrep sample manipulation includessolutions up to 2” sample size with up to 5degreesoffreedomandextendedsampleheatingandcoolingfeatures.inaddition,samplestoragefacilitiescanbeadded.

ConfigurationOptionsforSamplePreparationDepending on the application, suitableaccessories for sample preparation can bechosenfromawiderangeofoptions:

•ionsourceiQE11/35forsamplecleaning

•PlasmasourcesPCS-ECr,MPS-ECrorPCS-rFforsamplepreparationwithreactivegases,e.g.

•nitriding(Gan,Aln,innandSin),doping(ZnSe),alloying(GalnnAs,GaAlAsn)

•Oxygen:HtCsuperconductors,opticalcoatings,dielectrics,reactivesputtering,laserablationandceramicgrowth(Al2O3)

•0xygencleaningandoxidationkinetics,postgrowthoxidation/lowtemperatureSiO2

•Hydrogen:Cleaning,growthenhancement/surfactant

•Chlorine:in-situetchingmethane(carbon):SiCfilmgrowth

•E-beamevaporatorsinsinglepocket,EbE-1,ormultipocket,EbE-4,configurationsforthinfilmdepositon

•lEEDopticsErlEEDwithAugeroptionandSafiresoftwarepackageforimageacquisitionandevaluation

•rHEEDrHD-30packagewithSafiresoftwareoptionandelevatedpressureoption

•Samplemanipulatorwithupto6axis,samplesizeupto2”andheatingandcoolingpossibilities

FlexMod

loadlockFlexintro

Special fast sample introduction load lock withminimizedvolumeforfastpumpdown.Pumpingoptions include an independent turbo pumpstation or a cost efficient bypass solution. thesystem is designed for sample handling andloading of the SPECS SH2/12 sample plates forsamplesizesupto10mmx10mm

loadlockFlexintroPlus

Advanced multipurpose load lock system withupgradepathsforsamplepreparationandrotarysample distribution. the system has extendedsamplehandlingcapabilitiesforupto2”samplesizes, sample storage possibilities and rotarysampledistribution.Optimizedportsforsamplepreparation options, like heating for degassing,ionsputteringanddepositionare included.the

Sample Introduction Systems for FlexMod System Moduls: FlexIntro and FlexIntro Plus

FlexintroSyStEMMODUlEFOrSAMPlEintrODUCtiOn

Load lock system with fast access sample loading door for easy and fast sample loading without system venting. The system has a minimized volume for fast pump down.

17pumpingconfigurationcanbechosentosuitthedesired base pressure, pump down speed andgasloads.

ConfigurationOptionsforFlexintro

•Samplestorageforupto8samples

ConfigurationOptionsforFlexintroPlus

•Samplestorageforupto8samples

•radialsampledistributionwithsamplecarouselforupto8samplesandconnectionofupto5satellitechambers

•Samplepreparation:ionSourceiQE11/35,HydrogenCrackerSourcetGC-H,e-beamevaporators,EbE-1orEbE-4orPlasmaSources

Rotary sample storage and distribution for 6 samples plates type SH 2/12 with z-retract

Linear sample storage for 6 SH 2/12 type samples plates, double sided for compact design

FlexMod

FlexModAdd-OnOptions

the idea of FlexMod concept is maximumflexibilitycombinedwithdedicatedsolutionsforsurfacescience.FlexAddmodulesallowextensionofdedicatedFlexModsystemsinacompactandcosteffectiveway.Existingframesandpumpingsystems can be used and the capability of thesystem extended by just adding an additionalchamberforspecificmethods.

SPECS offers flexible customized add-onmodules,forexampleforirAS,ellipsometry,etc.as well as dedicated standard add onmodulesforscanningprobemicroscopy,preparationandhighpressurereactionexperiments.

standard Flexadd Modules

FlexPMbolt-OnModule

SPM extension for standard FlexPS or FlexPrepSystem Modules. the main chamber pumpingsystemcanbeusedifanionpumpisfitted.Canbemountedtoanexistingframe.

FlexAddFlExiblEADDOnMODUlES

Compact and cost efficient upgrade possibility for FlexMod System Modules. SPECS system modules can be upgraded with a versatile preparation add-on module, SPM add on module or customized configurations.

FlexPrepbolt-OnModule

Preparation extension for standard FlexPS orFlexPM System Modules. Pumping system ofmainchambercanbeused.Canbemountedtotheexistingframe.

FlexPrep Bolt-On Module added to FlexPS System Module with equipment options

19HighPressureCellHPC20

Special bolt-On solution for SPECS SystemModulesforin situanalysisofcatalyticreactions.Specialized design with minimized reactionvolume and chamber in chamber design withwatercooled innerchamberandspecialsealingmechanism for operation up to 20 bar. SPECShas implemented a special heating mechanismby halogen lamp which only heats the reactivesample area and therefore prevents reactions

atothersurfacesandallowsheating inreactionconditions up to 800°C. the high pressure cellworks with a wide range of gases includingO2, CO2, n2, H2, and all inert gases. the samplehandling is designed for SPECS type SH 2/12sampleplatesforupto10mmx10mmsamplesize.

FlexMod

5 axis UHV sample manipulator with full motorizazion and SH 2/12 sample stage with additional sample storage possibility

Specifications

•x-,y-translations:+/-12mm

•precision:+/-10µm

Ztranslation

•selectablefor4axismanipulator:200mm,300mm,500mm,700mm,900mm

•selectablefor5axismanipulatorwithazimuthalrotation:200mm,300mm,500mm

•selectablefor5axismanipulatorwithcontinuousazimuthalrotation:200mm,500mm

•selectablefor5axismanipulatorwithtilt:500mm

•precision:+/-50µm

•polarrotation:+/-180°•precision:+/-0.1°selectablesecondrotation:

•azimuthalrotation(inplane):+/-90°

•continuousazimuthalrotation(withoutcoolingoption)

•outofplanesampletilt:+/-30°

•liquidnitrogencoolingpossibilitydownto90Kincludedforallconfigurations,besidesthecontinuousrotationoption.

•optionalHecooling•sampleheatingpossibilitywithe-beam

heatingupto800°Ccontinuousandupto1200°Cflashheating,optionalpowersupplywithPiDcontroller

FlexManFlExiblESAMPlEMAniPUlAtiOntyPESH2/12

Flexible configuration with up to 5 degrees of freedom for sample manipulation and selection of Z-travel, including heating, cooling and optional motorization.

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Sample holder stage with SH 2/12 sample plate inside FlexPS module in front of electron spectroscopy equipment

SPECSSampleHoldertypeSH2/12

•Formountingofsampleswithsizesupto12 mmx12 mm

•Minimumsamplethicknessof0.5mm,maximumthickness4mm,

•Optionalsampleholderfor1”sampleplates

•Samplebiasconnectionincluded

•Filamentandconnectionsfore-beamheatingupto800 °Ccontinuousheatingandupto1200 °Cshorttimeheatingincluded

•liquidnitrogencoolingdownto90 Kincludedforallmodelsexceptthe5axiscontinuousrotationversion

•thermocouplefixedtosamplestage

Sampletransfer

For sample mounting, a variety of transferablesample plates are available. Samples aremounted directly to the sample plates, offeringflexible operation. Heating and cooling optionsare integrated in the manipulator stage. thesample plates are transferred with a specialtransfer tool with sample locking mechanismmountedtoamagneticallycoupledtransferrod.

Transfer of sample plate with transferable thermocouple connections to heatable and coolable sample stage

FlexMod

Standard stainless steel SH 2/12 sample plate with 4 threaded holes for sample mounting

SamplePlatesforSPECSSampleHoldertypeSH2/12

•varietyofdifferentsampleplatesavailablefordirectcurrentheating,e-beamheating,powdersamples,etc.

•Differentmaterialsavailableincludingstainlesssteel,taandMo.

SampleManipulationOptions

•PowersupplyEbH-150withPiDcontrollerfortemperatureregulationincludinginterfaceforPCcontrol

•transferablethermocoupleconnectionforprecisetemperaturemeasurementatthesamplesurface,forexamplefortemperatureprogrammeddesorptionstudies

•Samplestorageforuptothreesamplesmountedtomanipulator

•MotorizationofindividualmanipulatoraxisorallaxisandPCcontrolpossibility

Special SH 2/12 sample plate for direct current heating, e. g. for heating of semiconductors like Si up to 1400 °C

Special SH 2/12 high temperature sample plate for high temperature e-beam heating up to 1400 °C

Special SH 2/12 sample plate for “hat”-shaped crystals

23SampleHolderPlateDimensions

“1” Sample Holder Plate for sample size up to 1”

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FlexMod

the FlexMod concept offers highflexibility, andthis also applies to the pumping system. it ispossibletostartwithabasicpumpconfigurationforUHvgenerationandupgradetomoreadvancedsystems for higher gas load or lower pressureslater.theframeandpumpingportsarepreparedtoaccomodatedifferentconfigurationsincludingdifferentturbopumpsizes,iongetterpumpsandtitanium sublimation pumps. Generally, SPECSimplementsoil freepumps toachieveoptimumvacuumconditions.Specialoilfreescrollpumpsareusedasroughingpumps.

FlexvacFlExiblEPUMPinGSyStEM

The FlexMod system frame is designed to allow for a variety of pumping configurations depending on your requirements.

FlexModsystemsarealsoalwaysequippedwiththe necessary pressuremeasurement packagesconsistingofbayard-Alpert iongauges,PenningcoldcathodegaugesandPiranigaugesdependingon the vacuum range of the corresponingFlexModmodule.

the system frame also allows upgrades forvibrationaldampingandattachmentofadditionalframemodules.

25PumpingConfigurationOptionsforFlexPS,FlexPMandFlexPrep

Final Base Pressure

Pump configuration

Small 9E-10mbarturbopump260l/sn2,titaniumsublimationpump,scrollpump

Medium 5E-10mbarturbopump685l/sn2,titaniumsublimationpump,scrollpump

large 2E-10mbar

turbopump260l/sn2,ionpump240l/sn2,titaniumsublimationpump,scrollpump

ion 5E-10mbarionpump240l/sn2,titaniumsublimationpump

AdditionalOptions

•Gatevalves,pneumaticormanual

•Pressuremeasurementwithsoftwarecontrol

PumpingConfigurationsforFlexintro

Final Base Pressure

Pump configuration

Small 9E-8mbarbypasstomainsystemmodule(onlywithturbopumpasmainchamber)

Medium 5E-8mbar turbopump71l/sn2,Scrollpump

large 2E-8mbar turbopump260l/sn2,Scrollpump

Pressure and pump control by software package SpecsLab Prodigy

FlexMod

toachievepurestvacuumconditionsallFlexModModules are complemented by an easy to usebakeout system. it uses a well establishedoven like principle to ensure a homogeneoustemperature distribution throughout the bakeoutprocess.thebakeouttentismadeofaheatresistant insulation layer supported by rigidmetalframewhichincludestheheatingunitsandfans.insulationlayerandframearecomposedofsimplemodular parts. this ensures compliancewiththeFlexModconceptasthebakeouttentcan

FlexbakeFlExiblEbAKEOUtCOnCEPt

To achieve optimum UHV conditions the FlexMod system module is equipped with a specially designed bakeout tent. The tent consists of a flexible and easy to handle cover and a rigid form.

easilygrowwith thesystem.Moreover itallowsaconvenientsingleuserinstallationandreducesthenecessary storagespace toaminimum.Forautomatedoperationthecontrolunitisequippedwithaprogrammabletemperaturecontrolandatimerfunction.

FlexPS & FlexPrep & FlexIntro Classic

FlexModConfigurationstHEMODUlArCOnCEPt

The FlexMod system concept allows a wide range of combinations, particularly reconfiguration and expansion schemes. Examples of the FlexMod System Concept are shown. Please contact us for your specific configuration and design.

FlexPS & FlexPrep & FlexSTM & FlexIntro Classic with linear distribution

FlexPS & FLexPrep & FlexSTM & FlexIntro Classic

FlexSTM & FlexPrep & FlexIntro Classic

Electron Spectroscopy System consisting of FlexPS and FlexIntro Classic

sPeCsSurfacenanoAnalysisGmbHvoltastrasse513355berlin / Germanywww.specs.com

t+4930467824-0F+49304642083Esupport@specs.com