flotron x, pem, oes, reactive gas control, 2015

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High-speed Process Monitoring (OES, analog voltage) and Control System. Plasma Emission Monitoring. PEM. Reactive Gas Control. Voltage Control. Reactive Magnetron Sputtering. PVD. PECVD. PEALD. Vacuum Arc.

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Page 1: FloTron X, PEM, OES, Reactive Gas Control, 2015