flowsensor for compressed air - ckd for compressed air sensor section ip64 drip-proof-compatible •...

18
1004 1005 Flow sensor For compressed air High polymer membrane dryer Desiccant type dryer Refrigerating type dryer Air filter Automatic drain other Water cooling refrigerator Flow sensor for water Auxiliary Silencer Pressure SW for coolant Flow sensor for air Seating / close contact conf. SW F.R.L (Separate) Check valve / others Joint / tube Vacuum auxiliary / pad Mechanical pressure SW Electronic pressure SW Electronic dif. pres. SW Flow control valve F.R.L (Module) Small F.R. Precise R. Electro pneumatic R. Vacuum F. Vacuum R. Vacuum generator Total air system This sensor is ideal for controlling and checking the flow of compressed air at plants and equipment lines, etc. Flow rate sensor - FLUEREX PF500D to PF16000E Series. Ideal for plant energy-saving control PF500D PF1000D PF2000D PF4000D PF8000D PF16000E PFK500D PFK1000D PFK2000D PFK4000D PFK8000D Note: Only the port sizes indicated with are available for the tester kit. 25 50 100 200 400 800 8000 16000 4000 2000 500 1000 Covering a wide range of flow rates with 11 models FLUEREX Tester kit 10 100 1,000 10,000 100,000 10A 15A 25A 40A 50A Flow rate range Port size NL/min Model series system Major applications Flow rate control at plants Flow rate control in manufacturing lines or devices Energy-saving measures at plants Instantaneous flow display (Standard) Cumulative flow display (Standard) Peak flow display (Standard) Flow load display (Standard) Monitor functions Switch output (Standard) Analog output Output function Pulse output (option) Perfect for networks connecting personal computers, etc. 0 to 5 VDC (Standard) 4 to 20 mADC (Option) 1 to 5 VDC (Option) 0 to 10 VDC (Option) Flowsensor for compressed air Sensor section IP64 drip-proof-compatible This sensor can be installed in position. A straight piping section is not needed when installing the flow meter (excluding the PF16000E). Monitor Easy-to-read digital display Display functions are switched with one-touch key operations. The separated type enables operation at random sites. 0.1MPa Pressure range P 1.5MPa ISO14001 Optimum for ISO14001 acquisition Large flow rate types compatible with controlling energy saving in the each plant are available. This component is indispensable for acquiring International Standard Organization ISO14001 certification for your environment management system. This sensor also functions as a flow sensor for different devices. Eliminate compensation - read directly with a digital gauge Bothersome pressure compensation and temperature correction are not required. The digitally displayed value can be directly read in. Pressure compensation not necessary: detection of mass flow Temperature correction not necessary: Automatic temperature correction function integrated High practical precision at ±3%F.S. A practical precision of ±3%F.S. is realized without correction at temperatures from 0 to 40°C and pressures from 0.1 to 1.5 MPa. Practical precision expresses linearity, pressure, and temperature with a composite error based on JIS Standards JISZ8103. Easily estimate working air capacity The standard estimate function makes it easy to measure working air capacity. Variety of output functions Four analog output types and a pulse output type ideal for networking, are available in addition to switch output. Portable kit Five types of tester kits (PFK) containing a sensor, monitor, and piping, etc., in a trunk are available. This kit is used for different applications. Quick wiring and piping connections are used. PF SERIES OUT1 READ AIR FLOW MONITOR FLUEREX CHANGE ERROR Nkm 3 Nm 3 Nm 3 /min TOTAL N Temperature range 40° 0°

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Page 1: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1004 1005

Flow sensor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

This sensor is ideal for controlling and checking the flow of compressed air at plants and equipment lines, etc.

Flow rate sensor - FLUEREX PF500D to PF16000E Series.

Ideal for plant energy-saving control

PF500D

PF1000D

PF2000D

PF4000D

PF8000D

PF16000E

PFK500D

PFK1000D

PFK2000D

PFK4000D

PFK8000D

Note: Only the port sizes indicated with are available for the tester kit.

25

50

100

200

400

800

8000

16000

4000

2000

500

1000

Covering a wide range of flow rates with 11 models

FLUEREX Tester kit 10 100 1,000 10,000 100,00010A 15A 25A 40A 50A

Flow rate rangePort size NL/min Model series system

Major applications

• Flow rate control at plants

• Flow rate control in manufacturing

lines or devices

• Energy-saving measures at plants

Instantaneous flow display (Standard)

Cumulative flow display (Standard)

Peak flow display (Standard)

Flow load display (Standard)

Monitor functions

Switch output (Standard)

Analog output

Output function

Pulse output (option)

Perfect for networks connecting personal computers, etc.

0 to 5 VDC (Standard)4 to 20 mADC (Option)1 to 5 VDC (Option)0 to 10 VDC (Option)

Flowsensor for compressed air

Sensor section

IP64 drip-proof-compatible• This sensor can be installed in position.

• A straight piping section is not needed when installing the flow meter (excluding the PF16000E).

Monitor

Easy-to-read digital display• Display functions are switched with one-touch key operations.

• The separated type enables operation at random sites.

0.1MPa

Pressure range

P

1.5MPa

ISO14001Optimum for ISO14001 acquisition

Large flow rate types compatible with controlling energy saving in the each plant are available.This component is indispensable for acquiring International Standard Organization ISO14001 certification for your environment management system. This sensor also functions as a flow sensor for different devices.

Eliminate compensation - read directly with a digital gauge

Bothersome pressure compensation and temperature correction are not required. The digitally displayed value can be directly read in.• Pressure compensation not necessary: detection of mass flow• Temperature correction not necessary: Automatic temperature correction function integrated

High practical precision at ±3%F.S.

A practical precision of ±3%F.S. is realized without correction at temperatures from 0 to 40°C and pressures from 0.1 to 1.5 MPa. Practical precision expresses linearity, pressure, and temperature with a composite error based on JIS Standards JISZ8103.

Easily estimate working air capacity

The standard estimate function makes it easy to measure working air capacity.

Variety of output functions

Four analog output types and a pulse output type ideal for networking, are available in addition to switch output.

Portable kit

Five types of tester kits (PFK) containing a sensor, monitor, and piping, etc., in a trunk are available.This kit is used for different applications.• Quick wiring and piping connections are used.

PF SERIES

OUT1

READ

AIR FLOW MONITOR

FLUEREX

CHANGE

ERROR Nkm3 Nm3

Nm3/minTOTAL

N

Temperature range

40°

Page 2: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1006

PF Series

Applications

For flow rate control in paint lines For flow rate control in automobilemanufacturing lines

• For flow rate control per line !• Cost conversion by integrating flow rate display

For flow rate control of loom plant

For low pressure casting devices• For control of die cooling temperature !

For semiconductor manufacturingequipment

• For flow rate control of expensive air with lowdew point !Ready detection of trouble such as "overflow", etc. !

Crucible

Stoke

Die

Ejection cylinder

Compressed air

Molten metal

Page 3: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1007

Flow sensor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

Compressor air flow sensor PF and PFK Series

Design & SelectionWorking fluid1 Do not use this product for flammable fluids.

Work environment1 Explosion-proof environment

Do not use this product in an atmosphere containingflammable gas. It does not have an explosion-proofstructure, so flame or fires could occur.

2 Applicable fluidsThere is a risk of oxygen deficiency if nitrogen gas isused for the applicable fluid. Observe the followingpoints when handling:

(1) Use this product in a well-ventilated place.(2) Ventilate the area while using nitrogen gas.(3) Regularly check nitrogen gas piping for leaks.

1 Sensor and monitor combinationWith the conventional PF4000/8000, the sensor andmonitor were used as a non interchangeable pair.The PF500D, 1000D, 2000D, 4000D, 8000D, and 16000DSeries have independent sensors and monitors. Sec-tions within the same model series can be inter-changed.

(1) PF4000/8000<Example>

• Only sensor A can be connected to monitor A. Sensor Bcannot.

(2) PF500D/1000D/2000D/4000D/8000D/16000E<Example>

• Sensors A, B, and C can be freely inter-changed and connected with monitor A ifsensors are from the same model.

• Differing models cannot be interchanged.• Old and new models cannot be interchanged.

2 Use within an ambient temperature range 0 to 50°C.3 Avoid using in areas where vibration exceeds 49m/s2

and impact 294m/s2.

Working fluid1 This product is not to be used as a business meter.

This product does not conform to Measuring Laws,and thus cannot be used for commercial purposes.Use this sensor for industrial applications.

2 Compressed air or nitrogen can be used. Do not use otherfluids or the precision cannot be guaranteed.

3 Compressed air from the compressor containsdrainage – water, oil oxide, foreign substances, etc. –so install a filter, air dryer, and oil mist filter on theprimary side (upper stream side) of the sensor. Thesensor's meshing rectifies flow in the pipe. It doesnot filter out foreign substances, so provide a filter.

Working environment1 Corrosive environment

Do not use this product in an environment containingcorrosive gases such as sulphur dioxide.

2 Fluid temperatureKeep the fluid temperature within 0 to 40°C.Do not use this product where temperature suddenlychanges, even if ambient temperature is withinspecifications. Otherwise, dew could form.

3 Maximum working pressure and specified flow raterangeApplications exceeding the maximum workingpressure and specified flow rate range may result infaults. Use this product only within the specifiedrange.

4 Drip-proof environment. Only the sensor conforms to IP64.The sensor is dust-proof and drip-proof, so problemsdo not occur if water gets on the sensor duringmaintenance or cleaning. The sensor should not beexposed to water for long periods or used in placeswhere water and oil scatter with force.

Filter Air dryer Oil mist filter Flow sensor Valve

Design & Selection

Design & Selection

PF4000 monitor A

PF4000 monitor A

PF4000 sensor A

PF4000 sensor B

PF500D monitor A

PF500D monitor A

PF500D monitor A

PF1000D monitor

PF4000 monitor

PF500D sensor A

PF500D sensor B

PF500D sensor C

PF500D sensor

PF4000D sensor

Vibration of 49 m/s2 and over Impact of 294 m/s2 and over

WARNING

CAUTION

DANGER

Pneumatic components (Sensor devices)

Safety PrecautionsRead this before starting use.Please refer to Intro 43 for general details on the pneumatic components, and to " SafetyPrecautions" in this section for detailed cautions pertaining to each series.

Page 4: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1008

Piping1 This sensor can be installed vertically, horizontally, or

in any other position.

2 When adjusting the flow with a metering valve (globevalve, ball valve, etc.), install the metering valve on the

secondary side of the sensor (downstream). If the

metering valve is installed on the primary side, drift

(turbulent flow) could occur and result in an error.

3 When installing a stop valve on the primary side of thesensor for maintenance, use the stop valve fully open

or fully closed.

Compressor air flow sensor PF and PFK Series

Installation, Piping & Wiring

Installation, Piping & Wiring

10D 5D

Using an elbow

10D 5D

Using a bushing

Metering valve Metering valve

Installation, Piping & Wiring

1 Set the power voltage and output at the specifiedvoltage.Application of voltage exceeding the specifiedvoltage could result in malfunctions, sensor dam-age, electrical shock, or fire.

Do no use a load exceeding the output rating.Failure to observe this could result in output dam-age or fire.

Wiring1 Check the wire color and terminal numbers when

wiring. Incorrect wiring connections could result in

sensor damage, problems, and malfunctions, so

check wire color and terminal numbers against the

instruction manual before wiring.

Use a wire with the same or higher performance

than the 600 V vinyl wire for the power supply and

other wiring. Insert a noise filter if required.

2 Ground the FG terminal with Class 3 grounding(100ΩΩΩΩΩ or less). Do not use a common ground with

the power distribution system.

3 Check wiring insulation.Check that wires do not contact other circuits and

that there are no ground faults or insulation faults

across terminals. Overcurrent could flow in and

damage the sensor.

4 Separate the monitor from high-voltage wires, highvoltage devices, and powered devices such as

motors.

5 Check that there are no swarf or wire scraps on themonitor's gland and sensor connectors before wiring.

4 Do not install a regulator before the sensor (on theprimary side).

5 When using an elbow or bushing (up to 1 port sizerank difference) in piping for the PF16000E Series,

install a 10D or larger straight pipe on the up-

stream side and a 5D or larger straight piping

section on the downstream side. If there is no

straight piping section, drift (turbulent flow) could

occur and result in an error.* "D" here refers to the piping material bore.

WARNING

CAUTION

DANGER

Pneumatic components (Sensor devices)

Safety PrecautionsRead this before starting use.Please refer to Intro 43 for general details on the pneumatic components, and to " SafetyPrecautions" in this section for detailed cautions pertaining to each series.

Page 5: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1009

Flow sensor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

6 When installing the sensor on piping, use the follow-

ing torque so that excessive screw-in torque or load

torque is not applied to the connection port:

7 Align the fluid direction and the direction shown on

the body when piping. The indicated flow rate in-

creases if connected in reverse.

8 Clean out piping to remove foreign substances and

swarf, etc., before piping. The rectifying unit or

platinum sensor could be damaged if a large amount

of foreign substances or swarf, etc., enters.9 Check that force is not applied to resin parts when

piping.10 Check that sealing tape or adhesive does not get

inside when piping.

Installation, Piping & Wiring

A. max. screw torque N·m

B. max. load torque N·m

PFS500D

29

14

PFS1000D

29

14

PFS2000D

29

14

PFS4000D

48

38

PFS8000D

72

48

PFS16000E

80

60

Model No.

Resin cover

Load torque

Screw torque

Flow direction

When winding fluorine resin sealing tape around threads, wind

sealing tape 1 to 2 times, leaving 2 to 3 threads open at the

end of the screw. Press down on tape to stick it to threads.

When using liquid sealing agent, leave 1 to 2 threads open

from the end, and avoid applying too much. Check that the

sealing agent does not get on the device's threads.

Acceptable

Sealing tape Solid/liquid sealing agent

Not acceptable Acceptable Not acceptable

Solid/liquid

sealing agent

Solid/liquid

sealing agent

Wiring1 Separate the cable from sources of noise such as

power distribution wires.

Failure to do so could result in malfunctions caused

by noise.2 Use the enclosed cable PF-FL-280774 (3 m) to wire

the sensor to the monitor. Use the CKD extension

cable PF-FL-280775 (length 3 m) to extend the cable.

The enclosed cable can be connected to the exten-

sion cable for a maximum of 6 m. Contact CKD if

longer distances are required. The extension cable is

compatible with all models.

3 Do not short-circuit the output contact.4 Do not use this product for loads generating surge

voltage. When directly driving a load that generates a

surge, such as a relay or solenoid valve, use a

sensor with integrated surge absorbing element.

Similarly, use surge countermeasures if there is a

source of surge in the power supply line. (Refer to

"Protection circuit for monitor contact" on the

following page.)5 Do not repeatedly bend or tension to leads or wires

could disconnect.

CAUTION

3000

6.7

dia.

14.5

dia

.

Page 6: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1010

Compressor air flow sensor PF and PFK Series

1 A flow several times higher than the rated flow occurs

if the valve connected to the sensor is suddenly

opened. This can damage the platinum membrane

sensor or rectifying unit and cause fluid to flow to the

1 If an error occurs during operation, immediately turn

power OFF, stop use, and contact your dealer. Slight

heating (40°C) of the display section is not a prob-

lem.2 Internal settings, such as the hardware check, are

made in the first 10 seconds after power is turned

ON. The display and output do not function correctly

during this time. If an interlock circuit is established

with control system devices using switch output, an

abnormal stop could occur, so mask the output

during this time.3 When the output setting is changed, the control

system devices could operate unintentionally. Stop

devices before changing settings.

During use & Maintenance

During use & Maintenance

Pneumatic components (Sensor devices)

Safety PrecautionsRead this before starting use.Please refer to Intro 43 for general details on the pneumatic components, and to " SafetyPrecautions" in this section for detailed cautions pertaining to each series.

WARNING

CAUTION

secondary side. Gradually open the valve connected

to the sensor while checking that the monitor display

does not exceed the rated flow.

4 Inspect the sensor at least once a year and confirm

that it is operates correctly.5 Do not disassemble or modify the sensor or prob-

lems could result.

Page 7: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1011

Flow sensor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

Circuit example Features and other items Selecting the elementApplication

AC DC

Pow

er s

uppl

y C

Load

Pow

er s

uppl

y

C Load

Inductiveload

Inductiveload

Monitor(OUT1)

Monitor(OUT1)

Inductiveload

Monitor(OUT1)

Inductiveload

Monitor(OUT1)

Inductiveload

Monitor(OUT1)

Monitor(OUT1)

Monitor(OUT1)

C R

Power supply

C

RPower supply

Power supply

Power supply

Power supply

CR

Diode

Diode andZener diode

Variable resistor

** When using with an AC voltage, check

that load impedance is sufficiently smaller than CR impedance.

When the load is a relay or solenoid, recovery time is delayed. Connect the circuit between loads when using a 24 or 48 V power voltage and across contacts for a 100 to 200 V power voltage for maximum effect.

Energy accumulated in coils is passed as current by the parallel diode, and consumed as Joule heating by inductive load resistance. Recovery for this takes even longer than for CR.

This is effective when recovery of the diode is too slow.

This uses the constant voltage of the variable resistor to prevent very high voltage from being applied across contacts. Recovery is also slower with this method. Connect the circuit between loads when using a 24 to 48 V power voltage and across contacts for a 100 to 200 V power voltage for maximum effect.

The guide for C and R is:C: 1 to 0.5 (uF) of the contact current 1 AR: 0.5 to 1 (W) of the contact voltage 1 V.

These may not necessarily match due to dispersion in load characteristics, etc.Test the state while considering that C is affected by discharge suppression when the contact is opened, and R plays a role in suppressing current when power is turned ON next.Generally, C should have a withstand voltage between 200 and 300 V. When an AC circuit is involved, use an AC capacitor (no polarity).

Use a diode with a reverse withstand voltage that is 10-fold or more than circuit voltage and for which forward current is larger than load current. If circuit voltage is not that high for the electronic circuit, a diode with a reverse withstand voltage 2 to 3 times larger than the power voltage can be used.

The Zener voltage of the Zener diode is approximately the same as the power voltage.

Select cut voltage Vc to satisfy the following condition: When using alternating current, voltage must be multiplied by .

• Avoid using the following arc suppressors:

These are extremely effective for extinguishing arcs at cut off, but capacity is accumulated in C when the contact is opened. C's short-circuit current flows when the contact is tripped and causes the contact to melt easily.

This is extremely effective for extinguishing arcs at cutoff, but charged current flows to C when the contact is tripped, causing the contact to melt easily.

• It is usually more difficult to switch a DC induction load than to a resistance load, so performance can be increased to the same level as the resistanceload by using an appropriate arc suppressor.

• Keep wiring short to prevent effects from noise. Separate wire from sources of noise such as power distribution cables.

2

Maximum contact voltage > Vc > Power voltage

Contact protection circuit for monitor

The monitor has an integrated switch contact.Provide the following protection circuit to protect the contact from inductive loads:

PF/PFK Series

Contact protection circuit for monitor

Page 8: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1022

PF and PFK Series electrical wiring

• If the ratings at left are exceeded, use anauxiliary relay to turn the load ON and OFF.

• When using an inductive load, such as anauxiliary relay, on the relay contact's out-put, use a CR filter as the arc suppressorcircuit (when using AC), or protect the cir-cuit with a diode, etc.(Refer to the Contact protection circuit formonitor section on page 1011.)

1 Switch output

The monitor has 1 independent contact. Observe the following precautions when using this contact:

2 Analog output (Option symbol: No symbol, -A1, -A2, -A3)

3 Cumulative pulse output (Option symbol: -A6)

LoadDescriptions

Contact specifications

Resistance load (COS φ = 1)Inductive load

(COS φ = 0.4, L/R = 7ms)

RatedLoad

Rated energizing current

Maximum contact voltage

Maximum contact current

Maximum contact capacitance

AC110V 0.5A

DC24V 1A

AC110V 0.2A

DC24V 0.3A

2A

AC125V, DC60V

1A

60VA, 30W 30VA, 15W

Integrated relay: G2Q-187P-V, OMRON

When the cumulative display exceeds 100N

When the cumulative display exceeds 200N

40msec

ON

OFF

Time

40msec 40msec

40msec

ON

OFF

Time

Model No. PF500D PF1000D PF2000D

10 100

PF4000D PF8000D PF16000E

Cumulative flow rate per pulse

[N ]

Example: The pulse waveform for the PF8000D is shown below.

PF/PFK Series

• The relation of the flow and analog outputis shown in the graphs at left. Analog out-put is not output correctly when lower thanthe minimum. Note that flow is displayedon the monitor even when less than theminimum.

• Do not short-circuit the analog output ter-minal (AO) with other terminals. Failure toobserve this could result in problems.

• Keep wiring short to prevent the effect ofnoise. Separate the wire from sources ofnoise such as power distribution cables.

Load resistance

Load resistance for analog outputDescriptions

Analog output

DC0 to 5V

DC4 to 20mA

DC1 to 5V

DC0 to 10V

1MΩ or more

500Ω or less

1MΩ or more

1MΩ or more

PF500DPFK500DPF1000DPFK1000DPF2000DPFK2000DPF4000DPFK4000DPF8000DPFK8000D

PF16000E

Model no. Min. value (N /min) FS(N /min)

25

50

100

200

400

800

500

1000

2000

4000

8000

16000

• Electrical specifications Output circuit

Rating across OUT21 and 22Maximum rated voltage: 35 VDCMaximum rated current: 50 mA

OUT21

OUT22

Common GND

Transistor output

Inte

rnal

circ

uit

• The cumulative pulse outputs the pulse at the following cumulative value:

Note that the cumulative display is updated at 1 s intervals.

Ana

log

outp

ut (

V)

Ana

log

outp

ut (

mA

)

Ana

log

outp

ut (

V)

Ana

log

outp

ut (

V)

Page 9: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1023

Flo

w sen

sor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

PF/PFK Series

Electric wiring

4 Wiring the sensor and monitor• Observe the following precautions when wiring

Gland layout

Pulse output (Option symbol: -A6)

Use the CKD dedicating connector cable (PF-FL-280774).

Specifications : For DC applications

4-core 0.5 mm2

Equivalent : X2S2F-D421-G80-A,

OMRON Note that the cable is 5 m long.

Use the CKD extension cable (PF-FL-280775) to extend the

cable. The dedicating cable can be connected with the

extension cable to achieve a maximum length of 6 m.

Extending the cable any longer results in errors.

• Cumulative flow is cleared by connecting the RES terminal

to the GND terminal.

Coupler storage section

Cable and power cord storage section

Switch output terminal

Recorder terminal

Cable (3m)

Power cord (2. 5m)

AC100VPower switch

PFK500D to 8000D

Page 10: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1024 1025

Flo

w sen

sor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

Flow display changeover

Set the required value by pressing the (SHIFT key) and (UP key) at the

blinking digit.

Switch operation: StoppedAnalog output: Operating state

The switch setting, bar graph setting value, etc., are set or changed.

CHANGE

Switch parameter setting

Switch Low setting

Switch High setting

Hysteresis setting

Bar graph 100% setting

Peak value cleared

Cumulative value cleared

CHANGE

CHANGE

CHANGE

CHANGE

(Shift Key) (Up Key)

Use this to select the flow to be displayed at all times.

1) Press the CHANGE key. When the required display is displayed, hold down the CHANGE key for 5 seconds.

2) The changeover is completed when the unit light changes from blinking to continuously lit.

3) The instantaneous flow is displayed at shipment.

Changing the normally displayed flow

Use this to show cumulative flow rate for a short time, while show the instantaneous flow normally.1) The display shown at left is displayed when the CHANGE

key is pressed.Note that only the unit matching the current cumulative flow is displayed when this display is opened first.

2) The unit light blinks when the temporary value is displayed.3) The original display is returned to after 10 seconds.

Changing the flow temporarily

<WRITE MODE>

Hysteresis

Bar graph 100% setting

Displaying and clearing thepeak value

A wide setting can be made randomly.

The load factor is displayed on the bar graph when the 100% flow rate is set.

The peak value within 24 hours after power ON or after the peak value was cleared is displayed.To clear the value, hold down the and keys simultaneously for 10 seconds, then change to MEASUREMENT MODE. Data is cleared.

Displaying and clearing the cumulative value

The cumulative flow from the value at shipment is displayed. To clear the value, hold down the and keys simultaneously for 10 seconds, then change to MEASUREMENT MODE. Data is cleared.

Hysteresis

FlowHysteresis

(Hysteresis is set with parameters 0 and 1.)

NN N N

N N N

N N N

N N N

N

N

N

N

N

N

N

Instantaneous flow <Unit>

Cumulative flow <Unit>

Cumulative flow <Unit>

Cumulative flow <Unit>

Hold down the and keys simultaneously for 3 seconds.

Peak display

Cumulative value display

The switch setting, bar graph setting, etc., are read out.

Switch operation : Operating stateAnalog output : Operating state

READ

READ

READ

READ

READ

READ

READ

READ

READ

CHANGE

The normal flow is measured and displayed.

Switch operation : Operating stateAnalog output : Operating state

<READ MODE>

<MEASUREMENT MODE>

Three types of parameters are selected based on the application.

Hol

d do

wn

the

a

nd

key

s si

mul

tane

ousl

y fo

r 3 s

econ

ds.

Indicates the switch's output state.

Switch output light

Indicates errors in the sensor section.

The sensor's power is shut off when this light is ON.

Sensor error lightBar graph

Reads the setting value. Shifts to the <READ MODE>.

Read key

<WRITE MODE> Shifts the blinking digit to the right.

Shift key

<WRITE MODE> Increments the blinking digit.

UP key

Shows the peak value and load factor.

Unit display light

Indicates the unit for the "5-digit digital display".

5-digit digital display<MEASUREMENT MODE>Displays the instantaneous and cumulative flows.<WRITE MODE> <READ MODE>Displays the switch setting, bar graph setting, peak value, etc.

CHANGE key<MEASUREMENT MODE>Toggles between instantaneous and cumulate flows.<WRITE MODE>Changes the setting.

Switch parameter display

Switch Low display

Switch High display

Hysteresis display

Bar graph 100% display

Hol

d do

wn

the

a

nd

ke

ys

sim

ulta

neou

sly

for 1

0 se

cond

s.

* The unit of instantaneous flow displayed for the PF16000E is Nm3/min.

Switch parameters

PF/PFK Series

Explanation of monitor functions and operations

PF/PFK Series

Explanation of functions and operation

Page 11: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1020

Explanation of functions

0.000

0.020

0.040

0.060

0.080

0 250

0.7MPa

0.4MPa

0.1MPa

500 750 1000

Pre

ssur

e lo

ss (

MP

a)

• PF500D / PF1000D-10

0.000

0.020

0.040

0.060

0.080

0 250

0.7MPa

0.4MPa

0.1MPa

500 750 1000

Flow (N /min)

Pre

ssur

e lo

ss (

MP

a)

• PF1000D-15 / PFK500D / PFK1000D

0.000

0.020

0.040

0.060

0.080

0 500

0.7MPa

0.4MPa

0.1MPa

1000 1500 2000

Flow (N /min)

Pre

ssur

e lo

ss (

MP

a)

PF2000D-10

0.000

0.020

0.040

0.060

0.080

0 500

0.7MPa

0.4MPa

0.1MPa

1000 1500 2000

Flow (N /min)

Pre

ssur

e lo

ss (

MP

a)

• PF2000D-15 / PFK2000D

0.000

0.020

0.040

0.060

0.080

0 1000

0.7MPa

0.4MPa

0.1MPa

2000 3000 4000

Flow (N /min)

Pre

ssur

e lo

ss (

MP

a)

• PF4000D-15

0.000

0.020

0.040

0.060

0.080

0 1000

0.7MPa

0.4MPa

0.1MPa

2000 2000 4000

Flow (N /min)

Pre

ssur

e lo

ss (

MP

a)

• PF4000D-25 / PFK4000D

0.000

0.020

0.040

0.060

0.080

0 2000

0.7MPa

0.4MPa

0.1MPa

4000 6000 8000

Pre

ssur

e lo

ss (

MP

a)

• PF8000D-25

0.000

0.020

0.040

0.060

0.080

0 2000

0.7MPa

0.4MPa

0.1MPa

4000 6000 8000

Pre

ssur

e lo

ss (

MP

a)

• PF8000D-40 / PFK8000D

0.000

0.020

0.040

0.060

0.080

0 4000

0.7MPa

0.4MPa

0.1MPa

8000 12000 16000

Pre

ssur

e lo

ss (

MP

a)

• PF16000E-50

Flow (N /min)

Flow (N /min) Flow (N /min) Flow (N /min)

The sensor section consists of a rectifier that passesan even amount of compressed air, a heater tem-perature detection resistor with integrated heater,and fluid temperature detection resistance for de-tecting fluid temperature.When compressed air is not flowing, electricity flowsto the heater at the heater temperature detectionresistor to maintain it at a set temperature. Whencompressed air flows, heat is lost in proportion tothe air mass, so current flows to the heater tem-perature detection resistor to maintain the set tem-perature.The monitor receives a signal indicating the amountof electricity that has flowed, and displays the air'sinstantaneous and cumulative flows obtained byconverting to 0°C with practical atmospheric pres-sure.The fluid temperature detection resistor measuresand compensates for the temperature of com-pressed air.

PF/PFK Series

Pressure loss characteristics

Platinum membrane sensor (heater temperature detection resistor)

Piping adapter

Rectifier

Flow path

Fluid direction

Platinum membrane sensor (fluid temperature detection resistor)

Page 12: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1012

100N /pulse10N /pulse

N /min

MPa

MPa

MPa

°C

sec

* 3

* 4

Diversion range

Port size

Applicable fluid

Working air quality

Max. working pressure

Min. working pressure

Withstanding pressure

Ambient temperature and humidity

Fluid temperature

Linearity

Pressure characteristics

Temperature characteristics

Output response time

Display

Min. display flow rate

Integrating flow rate

Analog output

Switch output

Pulse output (option)

Power supply

Cable

Set value holding function

Installation attitude

Installation strait piping section

Protective structure

Mass

Rc3/8 Rc1/2 Rc3/8 Rc1/2 Rc3/8 Rc1/2 Rc1/2 Rc1 Rc1 Rc11/2 Rc2Spe

c.W

orki

ng c

ondi

tions

Acc

urac

yO

utpu

tIn

stal

latio

n

Descriptions

25 to 500 50 to 1000 100 to 2000 200 to 4000 400 to 8000 800 to 16000

Compressed air / N2 gas

Atmospheric dew point -17°C or less (* 1)

1.5

0.1

2.25

0 to 50°C, 85%RH or less

0 to 40

± 1.5%F.S (0.7MPa, 20°C)

± 1.5%F.S (0.1 to 1.5MPa, 0.7MPa standard)

± 2.0%F.S (0 to 40°C, while 20°C standard)

5 digits LED display

Max. 9 digitsHowever, display switched by change key

Standard: DCO to 5V Option: DC4 to 20mA, 1 to 5V and 0 to 10V

Relay contact (1ch, a contact)

AC100V ± 10%(Max. 10W)

Auxiliaries (3m connector, 0.5mm2 conductor)

Semipermanent due to EEPROM

Both vertical and horizontal (resin cover facing downward excluded)

Equivalent to IP64 (sensor section only)

1.5 2.0 2.2 5.0

10N /min 20N /min 30N /min 50N /min 100N /min 0.2Nm3/min

± 2.5%F.S. * 2

Approx. 2.5

Upper stream: 10D

Down stream : 5D * 5

Approx. 1.25

Not required

* 1: If foreign matter, moisture or oil is contained in the compressed air, detecting flow rate is failed, so " sensor error " is displayed.Install a filter, refrigerating type dryer and oil mist filter before a flow sensor.

* 2: Same conditions as PF8000D; 0.7MPa, 20°C are applied.* 3: If lower than min. flow rate range, 0 is indicated. Also, for indicated value under flow rate range, accuracy is not guaranteed.* 4: Refer to descriptions of integrating pulse output on Page 1022 for details of pulse output.* 5: 1D shows pipe inner diameter, so prepare 10D= approx. 530mm and 5D= approx. 265mm long strait piping section.

PF500D-10

PF500D-15

PF1000D-10

PF1000D-15

PF2000D-10

PF2000D-15

PF4000D-15

PF4000D-25

PF8000D-25

PF8000D-40

PF16000E-50

kg

Flow sensor for compressed air (flow rate sensor)

PF500D to PF8000D / PF16000E SeriesFlow sensor for compressed air with various functions• Flow rate range: 25 to 500, 50 to 1000, 100 to 2000

200 to 4000, 400 to 8000 and 800 to 16000N /min

Specifications

JIS symbol

CAD DATA AVAILABLE.

Page 13: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1013

Flo

w sen

sor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

Symbol Descriptions

500D

1000D

2000D

4000D

8000D

16000E

10

15

25

40

50

Blank

A1

A2

A3

A6

25 to 500N /min

50 to 1000N /min

100 to 2000N /min

200 to 4000N /min

400 to 4000N /min

800 to 16000N /min

Rc3/8

Rc1/2

Rc1

Rc11/2

Rc2

Analog output DC0 to 5V (standard)

Analog output DC4 to 20mA

Analog output DC1 to 5V

Analog output DC0 to 10V

Integrating pulse output

PF

2000

D

PF

1000

D

PF

500D

PF

4000

D

PF

8000

D

PF

1600

0E

Model

Port sizeB

Flow rate rangeA

OutputC

Flow rate rangeA

OutputC

Port sizeB

15 A1PF 4000D

Above circled combination can be manufactured.

PF Series

How to orderHow to order

[Example of model number] PF4000D-15-A1Model: PF4000D

Flow rate range : 200 to 4000N /minPort size : Rc1/2Output : Analog output DC4 to 20mA

A

B

C

Page 14: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1014

8 10 11 7 85 12 13

464 6 9 3 21

Internal structure and parts list

• PF500D to PF8000D

• PF16000E

PF Series

1

2

3

4

5

6

7

No. Parts name Material No. Parts name Material

Platinum thin film sensor 1

Platinum thin film sensor 2

Body

Attachment

Sensor base

O ring

O ring

Ceramic / platinum

Ceramic / platinum

A6063 Aluminum alloy

A6063 Aluminum alloy

PBT PBT

NBR Nitrile rubber

NBR Nitrile rubber

O ring

Mesh

Collar

Gasket

Sensor circuit board

Sensor cover

NBR Nitrile rubber

SUS304 Stainless steel

A6063 Aluminum alloy

NBR Nitrile rubber

ABS ABS resin

8

9

10

11

12

13

1 6

102 4 5 6 7 8 5 9 4 3

1

2

3

4

5

No. Parts name Material No. Parts name Material

Separate flow sensor section

Body 1

Body 2

Spacer

O ring

Refer to the figure above.

A6063 Aluminum alloy

A6063 Aluminum alloy

A6063 Aluminum alloy

NBR Nitrile rubber

Sub attachment

O ring

Orifice

Aspirator

O ring

SUS304 Stainless steel

NBR Nitrile rubber

C3604 Copper alloy

C3604 Copper alloy

NBR Nitrile rubber

6

7

8

9

10

Page 15: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1015

Flo

w sen

sor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

3

60 FA

Entrance

Exit

Bracket

N

47B

HG

I

C8

36

Port size

24 M

DE

KJ L

6.5

4.5

3000

7 dia.

68

80 a

nd o

ver

80 and over

526868

5 108

122

16

76

72

72

Dimensions

• PF500D to PF8000DSensor section

-10

-15

-25

-40

Rc3/8

Rc1/2

Rc1

Rc11/2

End of model no. Port size

Model no.

PF500D / 1000D / 2000D-**

PF4000D-**

PF8000D-**

A B C D E F G H I J K L M N

135

176

188

52

57

66

82

91

99

22.5

27

31

59.5

64

68

24

38

44

72

72

84

64

64

74

33

33

42

36

36

40

26

26

28

49.5

70

74

55.5

76

82 M5 threadlength 3.6

M4 threadlength 4.5M4 threadlength 4.5

68

68

80 a

nd o

ver

80 and over

• Panel cut dimensionStandard panel cut dimension is shown as below.(Note) Appropriate panel plate thickness is 1 to 4mm.

Monitor section

PF Series

Dimensions

(File name: Page 1026 or Ending 30)

Page 16: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1016

59.5

2-Rc2 (S)

99

128.

5

37.5

79

75

300

Dimensions

Monitor section

PF Series

68

68

80 a

nd o

ver

80 and over

52686868

5 108

122

16

76

72

72

68

68

80 a

nd o

ver

80 and over

• Panel cut dimensionStandard panel cut dimension is as shown below.(Note) Appropriate panel plate thickness is 1 to 4mm.

Note 1: This product is always used with appli-cable monitor PFM16000E.

Note 2: When installation, the flow direction mustbe as same as flow direction on nameplate.

(File name: Page 1026 or Ending 30) • PF16000ESensor section

Page 17: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1018

Flow sensor for compressed air, tester kit

PFK SeriesAir flow rate measuring component kit is available to measure the flowrate instantly at workshop.

• Flow rate range: 25 to 500, 50 to 1000, 100 to 2000,

200 to 4000, 400 to 8000N /min

SpecificationsDescriptions PFK500D PFK1000D PFK2000D PFK4000D PFK8000D

25 to 500 50 to 1000 100 to 2000 200 to 4000 400 to 8000

Rc1/2 Rc1/2 Rc1/2 Rc1 Rc11/2

Flow rate range N /min

Port size

Applicable fluid

Working air quality

Max. working pressure MPa

Min. working pressure MPa

Withstanding pressure MPa

Ambient temperature and humidity

Fluid temperature °CLinearity

Pressure characteristics

Temperature characteristics

Response time sec

Analog output

Switch output

Power voltage

Cable

Set value holding function

Installation attitude

Installation strait piping section

Protective structure

Mass kg

Instal

lation

Out

put

Acc

urac

yW

orki

ng c

ondi

tions

Spe

c.

5.6 7.4 9.2

Compressed air / N2 gas

Atmospheric dew point -17°C or less (* 1)

1.5

0.1

2.25

0 to 50°C 85%RH or less

0 to 40

± 1.5%F.S (0.7MPa and 20°C)

± 1.5%F.S (0.1 to 1.5MPa, 0.7MPa standard)

± 2.0%F.S (0 to 40°C, 20°C standard)

Approx. 1.25

Standard DC0 to 5V Option: DC4 to 20mA, 1 to 5V and 0 to 10V

Relay contact (1ch, a contact)

AC100V ± 10% (10W or less)

Auxiliaries (3m connector, 0.5mm2 conductor) * 2

Semipermanent due to EEPROM

Both vertical and horizontal (resin cover facing downward excluded)

Not required

Equivalent to IP64 (sensor section only)

* 1: If foreign matter, water or oil is contained in the compressed air, detecting flow rate could be failed, so " sensor error " is displayed. Always install a filter, refrigerating type dryer and oil mist filter before a flow sensor.

* 2: Extension cable (3m) can be connected. Model no. PF-FL-280775

Product structure

Case(Monitor)

SensorCoupler (2 pieces)

Cable (3m) Power cable (2.5m)

Symbol Descriptions

500D

1000D

2000D

4000D

8000D

25 to 500N /min

50 to 1000N /min

100 to 2000N /min

200 to 4000N /min

400 to 8000N /min

Flow rate rangeAFlow rate rangeA

PFK 4000D

How to order

Page 18: Flowsensor for compressed air - CKD for compressed air Sensor section IP64 drip-proof-compatible • This sensor can be installed in position. • A straight piping section is not

1019

Flo

w sen

sor

For com

pressed air

High polymer membrane dryer

Desiccant type dryer

Refrigerating type dryer

Air filter

Automatic drain other

Water cooling refrigerator

Flow sensor for water

Auxiliary

Silencer

Pressure SW for coolant

Flow sensor for air

Seating / closecontact conf. SW

F.R.L(Separate)

Check valve/ others

Joint/ tube

Vacuum auxiliary / pad

Mechanicalpressure SW

Electronic pressure SW

Electronic dif. pres. SW

Flow control valve

F.R.L(Module)

Small F.R.

Precise R.

Electro pneumatic R.

Vacuum F.

Vacuum R.

Vacuum generator

Total air system

Coupler

C

BA

220389

Knob

245

A B CSensor for PFK500D to 2000D

Sensor for PFK4000D

Sensor for PFK8000D

215

292

338

251

338

390

Rc1/2

Rc1

Rc11/2

Dimensions

• PFKSensor section

PFK Series

Dimensions

Case