flowsensor for compressed air - ckd for compressed air sensor section ip64 drip-proof-compatible •...
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1004 1005
Flow sensor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
This sensor is ideal for controlling and checking the flow of compressed air at plants and equipment lines, etc.
Flow rate sensor - FLUEREX PF500D to PF16000E Series.
Ideal for plant energy-saving control
PF500D
PF1000D
PF2000D
PF4000D
PF8000D
PF16000E
PFK500D
PFK1000D
PFK2000D
PFK4000D
PFK8000D
—
Note: Only the port sizes indicated with are available for the tester kit.
25
50
100
200
400
800
8000
16000
4000
2000
500
1000
Covering a wide range of flow rates with 11 models
FLUEREX Tester kit 10 100 1,000 10,000 100,00010A 15A 25A 40A 50A
Flow rate rangePort size NL/min Model series system
Major applications
• Flow rate control at plants
• Flow rate control in manufacturing
lines or devices
• Energy-saving measures at plants
Instantaneous flow display (Standard)
Cumulative flow display (Standard)
Peak flow display (Standard)
Flow load display (Standard)
Monitor functions
Switch output (Standard)
Analog output
Output function
Pulse output (option)
Perfect for networks connecting personal computers, etc.
0 to 5 VDC (Standard)4 to 20 mADC (Option)1 to 5 VDC (Option)0 to 10 VDC (Option)
Flowsensor for compressed air
Sensor section
IP64 drip-proof-compatible• This sensor can be installed in position.
• A straight piping section is not needed when installing the flow meter (excluding the PF16000E).
Monitor
Easy-to-read digital display• Display functions are switched with one-touch key operations.
• The separated type enables operation at random sites.
0.1MPa
Pressure range
P
1.5MPa
ISO14001Optimum for ISO14001 acquisition
Large flow rate types compatible with controlling energy saving in the each plant are available.This component is indispensable for acquiring International Standard Organization ISO14001 certification for your environment management system. This sensor also functions as a flow sensor for different devices.
Eliminate compensation - read directly with a digital gauge
Bothersome pressure compensation and temperature correction are not required. The digitally displayed value can be directly read in.• Pressure compensation not necessary: detection of mass flow• Temperature correction not necessary: Automatic temperature correction function integrated
High practical precision at ±3%F.S.
A practical precision of ±3%F.S. is realized without correction at temperatures from 0 to 40°C and pressures from 0.1 to 1.5 MPa. Practical precision expresses linearity, pressure, and temperature with a composite error based on JIS Standards JISZ8103.
Easily estimate working air capacity
The standard estimate function makes it easy to measure working air capacity.
Variety of output functions
Four analog output types and a pulse output type ideal for networking, are available in addition to switch output.
Portable kit
Five types of tester kits (PFK) containing a sensor, monitor, and piping, etc., in a trunk are available.This kit is used for different applications.• Quick wiring and piping connections are used.
PF SERIES
OUT1
READ
AIR FLOW MONITOR
FLUEREX
CHANGE
ERROR Nkm3 Nm3
Nm3/minTOTAL
N
Temperature range
40°
0°
1006
PF Series
Applications
For flow rate control in paint lines For flow rate control in automobilemanufacturing lines
• For flow rate control per line !• Cost conversion by integrating flow rate display
For flow rate control of loom plant
For low pressure casting devices• For control of die cooling temperature !
For semiconductor manufacturingequipment
• For flow rate control of expensive air with lowdew point !Ready detection of trouble such as "overflow", etc. !
Crucible
Stoke
Die
Ejection cylinder
Compressed air
Molten metal
1007
Flow sensor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
Compressor air flow sensor PF and PFK Series
Design & SelectionWorking fluid1 Do not use this product for flammable fluids.
Work environment1 Explosion-proof environment
Do not use this product in an atmosphere containingflammable gas. It does not have an explosion-proofstructure, so flame or fires could occur.
2 Applicable fluidsThere is a risk of oxygen deficiency if nitrogen gas isused for the applicable fluid. Observe the followingpoints when handling:
(1) Use this product in a well-ventilated place.(2) Ventilate the area while using nitrogen gas.(3) Regularly check nitrogen gas piping for leaks.
1 Sensor and monitor combinationWith the conventional PF4000/8000, the sensor andmonitor were used as a non interchangeable pair.The PF500D, 1000D, 2000D, 4000D, 8000D, and 16000DSeries have independent sensors and monitors. Sec-tions within the same model series can be inter-changed.
(1) PF4000/8000<Example>
• Only sensor A can be connected to monitor A. Sensor Bcannot.
(2) PF500D/1000D/2000D/4000D/8000D/16000E<Example>
• Sensors A, B, and C can be freely inter-changed and connected with monitor A ifsensors are from the same model.
• Differing models cannot be interchanged.• Old and new models cannot be interchanged.
2 Use within an ambient temperature range 0 to 50°C.3 Avoid using in areas where vibration exceeds 49m/s2
and impact 294m/s2.
Working fluid1 This product is not to be used as a business meter.
This product does not conform to Measuring Laws,and thus cannot be used for commercial purposes.Use this sensor for industrial applications.
2 Compressed air or nitrogen can be used. Do not use otherfluids or the precision cannot be guaranteed.
3 Compressed air from the compressor containsdrainage – water, oil oxide, foreign substances, etc. –so install a filter, air dryer, and oil mist filter on theprimary side (upper stream side) of the sensor. Thesensor's meshing rectifies flow in the pipe. It doesnot filter out foreign substances, so provide a filter.
Working environment1 Corrosive environment
Do not use this product in an environment containingcorrosive gases such as sulphur dioxide.
2 Fluid temperatureKeep the fluid temperature within 0 to 40°C.Do not use this product where temperature suddenlychanges, even if ambient temperature is withinspecifications. Otherwise, dew could form.
3 Maximum working pressure and specified flow raterangeApplications exceeding the maximum workingpressure and specified flow rate range may result infaults. Use this product only within the specifiedrange.
4 Drip-proof environment. Only the sensor conforms to IP64.The sensor is dust-proof and drip-proof, so problemsdo not occur if water gets on the sensor duringmaintenance or cleaning. The sensor should not beexposed to water for long periods or used in placeswhere water and oil scatter with force.
Filter Air dryer Oil mist filter Flow sensor Valve
Design & Selection
Design & Selection
PF4000 monitor A
PF4000 monitor A
PF4000 sensor A
PF4000 sensor B
PF500D monitor A
PF500D monitor A
PF500D monitor A
PF1000D monitor
PF4000 monitor
PF500D sensor A
PF500D sensor B
PF500D sensor C
PF500D sensor
PF4000D sensor
Vibration of 49 m/s2 and over Impact of 294 m/s2 and over
WARNING
CAUTION
DANGER
Pneumatic components (Sensor devices)
Safety PrecautionsRead this before starting use.Please refer to Intro 43 for general details on the pneumatic components, and to " SafetyPrecautions" in this section for detailed cautions pertaining to each series.
1008
Piping1 This sensor can be installed vertically, horizontally, or
in any other position.
2 When adjusting the flow with a metering valve (globevalve, ball valve, etc.), install the metering valve on the
secondary side of the sensor (downstream). If the
metering valve is installed on the primary side, drift
(turbulent flow) could occur and result in an error.
3 When installing a stop valve on the primary side of thesensor for maintenance, use the stop valve fully open
or fully closed.
Compressor air flow sensor PF and PFK Series
Installation, Piping & Wiring
Installation, Piping & Wiring
10D 5D
Using an elbow
10D 5D
Using a bushing
Metering valve Metering valve
Installation, Piping & Wiring
1 Set the power voltage and output at the specifiedvoltage.Application of voltage exceeding the specifiedvoltage could result in malfunctions, sensor dam-age, electrical shock, or fire.
Do no use a load exceeding the output rating.Failure to observe this could result in output dam-age or fire.
Wiring1 Check the wire color and terminal numbers when
wiring. Incorrect wiring connections could result in
sensor damage, problems, and malfunctions, so
check wire color and terminal numbers against the
instruction manual before wiring.
Use a wire with the same or higher performance
than the 600 V vinyl wire for the power supply and
other wiring. Insert a noise filter if required.
2 Ground the FG terminal with Class 3 grounding(100ΩΩΩΩΩ or less). Do not use a common ground with
the power distribution system.
3 Check wiring insulation.Check that wires do not contact other circuits and
that there are no ground faults or insulation faults
across terminals. Overcurrent could flow in and
damage the sensor.
4 Separate the monitor from high-voltage wires, highvoltage devices, and powered devices such as
motors.
5 Check that there are no swarf or wire scraps on themonitor's gland and sensor connectors before wiring.
4 Do not install a regulator before the sensor (on theprimary side).
5 When using an elbow or bushing (up to 1 port sizerank difference) in piping for the PF16000E Series,
install a 10D or larger straight pipe on the up-
stream side and a 5D or larger straight piping
section on the downstream side. If there is no
straight piping section, drift (turbulent flow) could
occur and result in an error.* "D" here refers to the piping material bore.
WARNING
CAUTION
DANGER
Pneumatic components (Sensor devices)
Safety PrecautionsRead this before starting use.Please refer to Intro 43 for general details on the pneumatic components, and to " SafetyPrecautions" in this section for detailed cautions pertaining to each series.
1009
Flow sensor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
6 When installing the sensor on piping, use the follow-
ing torque so that excessive screw-in torque or load
torque is not applied to the connection port:
7 Align the fluid direction and the direction shown on
the body when piping. The indicated flow rate in-
creases if connected in reverse.
8 Clean out piping to remove foreign substances and
swarf, etc., before piping. The rectifying unit or
platinum sensor could be damaged if a large amount
of foreign substances or swarf, etc., enters.9 Check that force is not applied to resin parts when
piping.10 Check that sealing tape or adhesive does not get
inside when piping.
Installation, Piping & Wiring
A. max. screw torque N·m
B. max. load torque N·m
PFS500D
29
14
PFS1000D
29
14
PFS2000D
29
14
PFS4000D
48
38
PFS8000D
72
48
PFS16000E
80
60
Model No.
Resin cover
Load torque
Screw torque
Flow direction
When winding fluorine resin sealing tape around threads, wind
sealing tape 1 to 2 times, leaving 2 to 3 threads open at the
end of the screw. Press down on tape to stick it to threads.
When using liquid sealing agent, leave 1 to 2 threads open
from the end, and avoid applying too much. Check that the
sealing agent does not get on the device's threads.
Acceptable
Sealing tape Solid/liquid sealing agent
Not acceptable Acceptable Not acceptable
Solid/liquid
sealing agent
Solid/liquid
sealing agent
Wiring1 Separate the cable from sources of noise such as
power distribution wires.
Failure to do so could result in malfunctions caused
by noise.2 Use the enclosed cable PF-FL-280774 (3 m) to wire
the sensor to the monitor. Use the CKD extension
cable PF-FL-280775 (length 3 m) to extend the cable.
The enclosed cable can be connected to the exten-
sion cable for a maximum of 6 m. Contact CKD if
longer distances are required. The extension cable is
compatible with all models.
3 Do not short-circuit the output contact.4 Do not use this product for loads generating surge
voltage. When directly driving a load that generates a
surge, such as a relay or solenoid valve, use a
sensor with integrated surge absorbing element.
Similarly, use surge countermeasures if there is a
source of surge in the power supply line. (Refer to
"Protection circuit for monitor contact" on the
following page.)5 Do not repeatedly bend or tension to leads or wires
could disconnect.
CAUTION
3000
6.7
dia.
14.5
dia
.
1010
Compressor air flow sensor PF and PFK Series
1 A flow several times higher than the rated flow occurs
if the valve connected to the sensor is suddenly
opened. This can damage the platinum membrane
sensor or rectifying unit and cause fluid to flow to the
1 If an error occurs during operation, immediately turn
power OFF, stop use, and contact your dealer. Slight
heating (40°C) of the display section is not a prob-
lem.2 Internal settings, such as the hardware check, are
made in the first 10 seconds after power is turned
ON. The display and output do not function correctly
during this time. If an interlock circuit is established
with control system devices using switch output, an
abnormal stop could occur, so mask the output
during this time.3 When the output setting is changed, the control
system devices could operate unintentionally. Stop
devices before changing settings.
During use & Maintenance
During use & Maintenance
Pneumatic components (Sensor devices)
Safety PrecautionsRead this before starting use.Please refer to Intro 43 for general details on the pneumatic components, and to " SafetyPrecautions" in this section for detailed cautions pertaining to each series.
WARNING
CAUTION
secondary side. Gradually open the valve connected
to the sensor while checking that the monitor display
does not exceed the rated flow.
4 Inspect the sensor at least once a year and confirm
that it is operates correctly.5 Do not disassemble or modify the sensor or prob-
lems could result.
1011
Flow sensor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
Circuit example Features and other items Selecting the elementApplication
AC DC
Pow
er s
uppl
y C
Load
Pow
er s
uppl
y
C Load
Inductiveload
Inductiveload
Monitor(OUT1)
Monitor(OUT1)
Inductiveload
Monitor(OUT1)
Inductiveload
Monitor(OUT1)
Inductiveload
Monitor(OUT1)
Monitor(OUT1)
Monitor(OUT1)
C R
Power supply
C
RPower supply
Power supply
Power supply
Power supply
CR
Diode
Diode andZener diode
Variable resistor
** When using with an AC voltage, check
that load impedance is sufficiently smaller than CR impedance.
When the load is a relay or solenoid, recovery time is delayed. Connect the circuit between loads when using a 24 or 48 V power voltage and across contacts for a 100 to 200 V power voltage for maximum effect.
Energy accumulated in coils is passed as current by the parallel diode, and consumed as Joule heating by inductive load resistance. Recovery for this takes even longer than for CR.
This is effective when recovery of the diode is too slow.
This uses the constant voltage of the variable resistor to prevent very high voltage from being applied across contacts. Recovery is also slower with this method. Connect the circuit between loads when using a 24 to 48 V power voltage and across contacts for a 100 to 200 V power voltage for maximum effect.
The guide for C and R is:C: 1 to 0.5 (uF) of the contact current 1 AR: 0.5 to 1 (W) of the contact voltage 1 V.
These may not necessarily match due to dispersion in load characteristics, etc.Test the state while considering that C is affected by discharge suppression when the contact is opened, and R plays a role in suppressing current when power is turned ON next.Generally, C should have a withstand voltage between 200 and 300 V. When an AC circuit is involved, use an AC capacitor (no polarity).
Use a diode with a reverse withstand voltage that is 10-fold or more than circuit voltage and for which forward current is larger than load current. If circuit voltage is not that high for the electronic circuit, a diode with a reverse withstand voltage 2 to 3 times larger than the power voltage can be used.
The Zener voltage of the Zener diode is approximately the same as the power voltage.
Select cut voltage Vc to satisfy the following condition: When using alternating current, voltage must be multiplied by .
• Avoid using the following arc suppressors:
These are extremely effective for extinguishing arcs at cut off, but capacity is accumulated in C when the contact is opened. C's short-circuit current flows when the contact is tripped and causes the contact to melt easily.
This is extremely effective for extinguishing arcs at cutoff, but charged current flows to C when the contact is tripped, causing the contact to melt easily.
• It is usually more difficult to switch a DC induction load than to a resistance load, so performance can be increased to the same level as the resistanceload by using an appropriate arc suppressor.
• Keep wiring short to prevent effects from noise. Separate wire from sources of noise such as power distribution cables.
2
Maximum contact voltage > Vc > Power voltage
Contact protection circuit for monitor
The monitor has an integrated switch contact.Provide the following protection circuit to protect the contact from inductive loads:
PF/PFK Series
Contact protection circuit for monitor
1022
PF and PFK Series electrical wiring
• If the ratings at left are exceeded, use anauxiliary relay to turn the load ON and OFF.
• When using an inductive load, such as anauxiliary relay, on the relay contact's out-put, use a CR filter as the arc suppressorcircuit (when using AC), or protect the cir-cuit with a diode, etc.(Refer to the Contact protection circuit formonitor section on page 1011.)
1 Switch output
The monitor has 1 independent contact. Observe the following precautions when using this contact:
2 Analog output (Option symbol: No symbol, -A1, -A2, -A3)
3 Cumulative pulse output (Option symbol: -A6)
LoadDescriptions
Contact specifications
Resistance load (COS φ = 1)Inductive load
(COS φ = 0.4, L/R = 7ms)
RatedLoad
Rated energizing current
Maximum contact voltage
Maximum contact current
Maximum contact capacitance
AC110V 0.5A
DC24V 1A
AC110V 0.2A
DC24V 0.3A
2A
AC125V, DC60V
1A
60VA, 30W 30VA, 15W
Integrated relay: G2Q-187P-V, OMRON
When the cumulative display exceeds 100N
When the cumulative display exceeds 200N
40msec
ON
OFF
Time
40msec 40msec
40msec
ON
OFF
Time
Model No. PF500D PF1000D PF2000D
10 100
PF4000D PF8000D PF16000E
Cumulative flow rate per pulse
[N ]
Example: The pulse waveform for the PF8000D is shown below.
PF/PFK Series
• The relation of the flow and analog outputis shown in the graphs at left. Analog out-put is not output correctly when lower thanthe minimum. Note that flow is displayedon the monitor even when less than theminimum.
• Do not short-circuit the analog output ter-minal (AO) with other terminals. Failure toobserve this could result in problems.
• Keep wiring short to prevent the effect ofnoise. Separate the wire from sources ofnoise such as power distribution cables.
Load resistance
Load resistance for analog outputDescriptions
Analog output
DC0 to 5V
DC4 to 20mA
DC1 to 5V
DC0 to 10V
1MΩ or more
500Ω or less
1MΩ or more
1MΩ or more
PF500DPFK500DPF1000DPFK1000DPF2000DPFK2000DPF4000DPFK4000DPF8000DPFK8000D
PF16000E
Model no. Min. value (N /min) FS(N /min)
25
50
100
200
400
800
500
1000
2000
4000
8000
16000
• Electrical specifications Output circuit
Rating across OUT21 and 22Maximum rated voltage: 35 VDCMaximum rated current: 50 mA
OUT21
OUT22
Common GND
Transistor output
Inte
rnal
circ
uit
• The cumulative pulse outputs the pulse at the following cumulative value:
Note that the cumulative display is updated at 1 s intervals.
Ana
log
outp
ut (
V)
Ana
log
outp
ut (
mA
)
Ana
log
outp
ut (
V)
Ana
log
outp
ut (
V)
1023
Flo
w sen
sor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
PF/PFK Series
Electric wiring
4 Wiring the sensor and monitor• Observe the following precautions when wiring
Gland layout
Pulse output (Option symbol: -A6)
Use the CKD dedicating connector cable (PF-FL-280774).
Specifications : For DC applications
4-core 0.5 mm2
Equivalent : X2S2F-D421-G80-A,
OMRON Note that the cable is 5 m long.
Use the CKD extension cable (PF-FL-280775) to extend the
cable. The dedicating cable can be connected with the
extension cable to achieve a maximum length of 6 m.
Extending the cable any longer results in errors.
• Cumulative flow is cleared by connecting the RES terminal
to the GND terminal.
Coupler storage section
Cable and power cord storage section
Switch output terminal
Recorder terminal
Cable (3m)
Power cord (2. 5m)
AC100VPower switch
PFK500D to 8000D
1024 1025
Flo
w sen
sor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
Flow display changeover
Set the required value by pressing the (SHIFT key) and (UP key) at the
blinking digit.
Switch operation: StoppedAnalog output: Operating state
The switch setting, bar graph setting value, etc., are set or changed.
CHANGE
Switch parameter setting
Switch Low setting
Switch High setting
Hysteresis setting
Bar graph 100% setting
Peak value cleared
Cumulative value cleared
CHANGE
CHANGE
CHANGE
CHANGE
(Shift Key) (Up Key)
Use this to select the flow to be displayed at all times.
1) Press the CHANGE key. When the required display is displayed, hold down the CHANGE key for 5 seconds.
2) The changeover is completed when the unit light changes from blinking to continuously lit.
3) The instantaneous flow is displayed at shipment.
Changing the normally displayed flow
Use this to show cumulative flow rate for a short time, while show the instantaneous flow normally.1) The display shown at left is displayed when the CHANGE
key is pressed.Note that only the unit matching the current cumulative flow is displayed when this display is opened first.
2) The unit light blinks when the temporary value is displayed.3) The original display is returned to after 10 seconds.
Changing the flow temporarily
<WRITE MODE>
Hysteresis
Bar graph 100% setting
Displaying and clearing thepeak value
A wide setting can be made randomly.
The load factor is displayed on the bar graph when the 100% flow rate is set.
The peak value within 24 hours after power ON or after the peak value was cleared is displayed.To clear the value, hold down the and keys simultaneously for 10 seconds, then change to MEASUREMENT MODE. Data is cleared.
Displaying and clearing the cumulative value
The cumulative flow from the value at shipment is displayed. To clear the value, hold down the and keys simultaneously for 10 seconds, then change to MEASUREMENT MODE. Data is cleared.
Hysteresis
FlowHysteresis
(Hysteresis is set with parameters 0 and 1.)
NN N N
N N N
N N N
N N N
N
N
N
N
N
N
N
Instantaneous flow <Unit>
Cumulative flow <Unit>
Cumulative flow <Unit>
Cumulative flow <Unit>
Hold down the and keys simultaneously for 3 seconds.
Peak display
Cumulative value display
The switch setting, bar graph setting, etc., are read out.
Switch operation : Operating stateAnalog output : Operating state
READ
READ
READ
READ
READ
READ
READ
READ
READ
CHANGE
The normal flow is measured and displayed.
Switch operation : Operating stateAnalog output : Operating state
<READ MODE>
<MEASUREMENT MODE>
Three types of parameters are selected based on the application.
Hol
d do
wn
the
a
nd
key
s si
mul
tane
ousl
y fo
r 3 s
econ
ds.
Indicates the switch's output state.
Switch output light
Indicates errors in the sensor section.
The sensor's power is shut off when this light is ON.
Sensor error lightBar graph
Reads the setting value. Shifts to the <READ MODE>.
Read key
<WRITE MODE> Shifts the blinking digit to the right.
Shift key
<WRITE MODE> Increments the blinking digit.
UP key
Shows the peak value and load factor.
Unit display light
Indicates the unit for the "5-digit digital display".
5-digit digital display<MEASUREMENT MODE>Displays the instantaneous and cumulative flows.<WRITE MODE> <READ MODE>Displays the switch setting, bar graph setting, peak value, etc.
CHANGE key<MEASUREMENT MODE>Toggles between instantaneous and cumulate flows.<WRITE MODE>Changes the setting.
Switch parameter display
Switch Low display
Switch High display
Hysteresis display
Bar graph 100% display
Hol
d do
wn
the
a
nd
ke
ys
sim
ulta
neou
sly
for 1
0 se
cond
s.
* The unit of instantaneous flow displayed for the PF16000E is Nm3/min.
Switch parameters
PF/PFK Series
Explanation of monitor functions and operations
PF/PFK Series
Explanation of functions and operation
1020
Explanation of functions
0.000
0.020
0.040
0.060
0.080
0 250
0.7MPa
0.4MPa
0.1MPa
500 750 1000
Pre
ssur
e lo
ss (
MP
a)
• PF500D / PF1000D-10
0.000
0.020
0.040
0.060
0.080
0 250
0.7MPa
0.4MPa
0.1MPa
500 750 1000
Flow (N /min)
Pre
ssur
e lo
ss (
MP
a)
• PF1000D-15 / PFK500D / PFK1000D
0.000
0.020
0.040
0.060
0.080
0 500
0.7MPa
0.4MPa
0.1MPa
1000 1500 2000
Flow (N /min)
Pre
ssur
e lo
ss (
MP
a)
PF2000D-10
0.000
0.020
0.040
0.060
0.080
0 500
0.7MPa
0.4MPa
0.1MPa
1000 1500 2000
Flow (N /min)
Pre
ssur
e lo
ss (
MP
a)
• PF2000D-15 / PFK2000D
0.000
0.020
0.040
0.060
0.080
0 1000
0.7MPa
0.4MPa
0.1MPa
2000 3000 4000
Flow (N /min)
Pre
ssur
e lo
ss (
MP
a)
• PF4000D-15
0.000
0.020
0.040
0.060
0.080
0 1000
0.7MPa
0.4MPa
0.1MPa
2000 2000 4000
Flow (N /min)
Pre
ssur
e lo
ss (
MP
a)
• PF4000D-25 / PFK4000D
0.000
0.020
0.040
0.060
0.080
0 2000
0.7MPa
0.4MPa
0.1MPa
4000 6000 8000
Pre
ssur
e lo
ss (
MP
a)
• PF8000D-25
0.000
0.020
0.040
0.060
0.080
0 2000
0.7MPa
0.4MPa
0.1MPa
4000 6000 8000
Pre
ssur
e lo
ss (
MP
a)
• PF8000D-40 / PFK8000D
0.000
0.020
0.040
0.060
0.080
0 4000
0.7MPa
0.4MPa
0.1MPa
8000 12000 16000
Pre
ssur
e lo
ss (
MP
a)
• PF16000E-50
Flow (N /min)
Flow (N /min) Flow (N /min) Flow (N /min)
The sensor section consists of a rectifier that passesan even amount of compressed air, a heater tem-perature detection resistor with integrated heater,and fluid temperature detection resistance for de-tecting fluid temperature.When compressed air is not flowing, electricity flowsto the heater at the heater temperature detectionresistor to maintain it at a set temperature. Whencompressed air flows, heat is lost in proportion tothe air mass, so current flows to the heater tem-perature detection resistor to maintain the set tem-perature.The monitor receives a signal indicating the amountof electricity that has flowed, and displays the air'sinstantaneous and cumulative flows obtained byconverting to 0°C with practical atmospheric pres-sure.The fluid temperature detection resistor measuresand compensates for the temperature of com-pressed air.
PF/PFK Series
Pressure loss characteristics
Platinum membrane sensor (heater temperature detection resistor)
Piping adapter
Rectifier
Flow path
Fluid direction
Platinum membrane sensor (fluid temperature detection resistor)
1012
100N /pulse10N /pulse
N /min
MPa
MPa
MPa
°C
sec
* 3
* 4
Diversion range
Port size
Applicable fluid
Working air quality
Max. working pressure
Min. working pressure
Withstanding pressure
Ambient temperature and humidity
Fluid temperature
Linearity
Pressure characteristics
Temperature characteristics
Output response time
Display
Min. display flow rate
Integrating flow rate
Analog output
Switch output
Pulse output (option)
Power supply
Cable
Set value holding function
Installation attitude
Installation strait piping section
Protective structure
Mass
Rc3/8 Rc1/2 Rc3/8 Rc1/2 Rc3/8 Rc1/2 Rc1/2 Rc1 Rc1 Rc11/2 Rc2Spe
c.W
orki
ng c
ondi
tions
Acc
urac
yO
utpu
tIn
stal
latio
n
Descriptions
25 to 500 50 to 1000 100 to 2000 200 to 4000 400 to 8000 800 to 16000
Compressed air / N2 gas
Atmospheric dew point -17°C or less (* 1)
1.5
0.1
2.25
0 to 50°C, 85%RH or less
0 to 40
± 1.5%F.S (0.7MPa, 20°C)
± 1.5%F.S (0.1 to 1.5MPa, 0.7MPa standard)
± 2.0%F.S (0 to 40°C, while 20°C standard)
5 digits LED display
Max. 9 digitsHowever, display switched by change key
Standard: DCO to 5V Option: DC4 to 20mA, 1 to 5V and 0 to 10V
Relay contact (1ch, a contact)
AC100V ± 10%(Max. 10W)
Auxiliaries (3m connector, 0.5mm2 conductor)
Semipermanent due to EEPROM
Both vertical and horizontal (resin cover facing downward excluded)
Equivalent to IP64 (sensor section only)
1.5 2.0 2.2 5.0
10N /min 20N /min 30N /min 50N /min 100N /min 0.2Nm3/min
± 2.5%F.S. * 2
Approx. 2.5
Upper stream: 10D
Down stream : 5D * 5
Approx. 1.25
Not required
* 1: If foreign matter, moisture or oil is contained in the compressed air, detecting flow rate is failed, so " sensor error " is displayed.Install a filter, refrigerating type dryer and oil mist filter before a flow sensor.
* 2: Same conditions as PF8000D; 0.7MPa, 20°C are applied.* 3: If lower than min. flow rate range, 0 is indicated. Also, for indicated value under flow rate range, accuracy is not guaranteed.* 4: Refer to descriptions of integrating pulse output on Page 1022 for details of pulse output.* 5: 1D shows pipe inner diameter, so prepare 10D= approx. 530mm and 5D= approx. 265mm long strait piping section.
PF500D-10
PF500D-15
PF1000D-10
PF1000D-15
PF2000D-10
PF2000D-15
PF4000D-15
PF4000D-25
PF8000D-25
PF8000D-40
PF16000E-50
kg
Flow sensor for compressed air (flow rate sensor)
PF500D to PF8000D / PF16000E SeriesFlow sensor for compressed air with various functions• Flow rate range: 25 to 500, 50 to 1000, 100 to 2000
200 to 4000, 400 to 8000 and 800 to 16000N /min
Specifications
JIS symbol
CAD DATA AVAILABLE.
1013
Flo
w sen
sor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
Symbol Descriptions
500D
1000D
2000D
4000D
8000D
16000E
10
15
25
40
50
Blank
A1
A2
A3
A6
25 to 500N /min
50 to 1000N /min
100 to 2000N /min
200 to 4000N /min
400 to 4000N /min
800 to 16000N /min
Rc3/8
Rc1/2
Rc1
Rc11/2
Rc2
Analog output DC0 to 5V (standard)
Analog output DC4 to 20mA
Analog output DC1 to 5V
Analog output DC0 to 10V
Integrating pulse output
PF
2000
D
PF
1000
D
PF
500D
PF
4000
D
PF
8000
D
PF
1600
0E
Model
Port sizeB
Flow rate rangeA
OutputC
Flow rate rangeA
OutputC
Port sizeB
15 A1PF 4000D
Above circled combination can be manufactured.
PF Series
How to orderHow to order
[Example of model number] PF4000D-15-A1Model: PF4000D
Flow rate range : 200 to 4000N /minPort size : Rc1/2Output : Analog output DC4 to 20mA
A
B
C
1014
8 10 11 7 85 12 13
464 6 9 3 21
Internal structure and parts list
• PF500D to PF8000D
• PF16000E
PF Series
1
2
3
4
5
6
7
No. Parts name Material No. Parts name Material
Platinum thin film sensor 1
Platinum thin film sensor 2
Body
Attachment
Sensor base
O ring
O ring
Ceramic / platinum
Ceramic / platinum
A6063 Aluminum alloy
A6063 Aluminum alloy
PBT PBT
NBR Nitrile rubber
NBR Nitrile rubber
O ring
Mesh
Collar
Gasket
Sensor circuit board
Sensor cover
NBR Nitrile rubber
SUS304 Stainless steel
A6063 Aluminum alloy
NBR Nitrile rubber
—
ABS ABS resin
8
9
10
11
12
13
1 6
102 4 5 6 7 8 5 9 4 3
1
2
3
4
5
No. Parts name Material No. Parts name Material
Separate flow sensor section
Body 1
Body 2
Spacer
O ring
Refer to the figure above.
A6063 Aluminum alloy
A6063 Aluminum alloy
A6063 Aluminum alloy
NBR Nitrile rubber
Sub attachment
O ring
Orifice
Aspirator
O ring
SUS304 Stainless steel
NBR Nitrile rubber
C3604 Copper alloy
C3604 Copper alloy
NBR Nitrile rubber
6
7
8
9
10
1015
Flo
w sen
sor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
3
60 FA
Entrance
Exit
Bracket
N
47B
HG
I
C8
36
Port size
24 M
DE
KJ L
6.5
4.5
3000
7 dia.
68
80 a
nd o
ver
80 and over
526868
5 108
122
16
76
72
72
Dimensions
• PF500D to PF8000DSensor section
-10
-15
-25
-40
Rc3/8
Rc1/2
Rc1
Rc11/2
End of model no. Port size
Model no.
PF500D / 1000D / 2000D-**
PF4000D-**
PF8000D-**
A B C D E F G H I J K L M N
135
176
188
52
57
66
82
91
99
22.5
27
31
59.5
64
68
24
38
44
72
72
84
64
64
74
33
33
42
36
36
40
26
26
28
49.5
70
74
55.5
76
82 M5 threadlength 3.6
M4 threadlength 4.5M4 threadlength 4.5
68
68
80 a
nd o
ver
80 and over
• Panel cut dimensionStandard panel cut dimension is shown as below.(Note) Appropriate panel plate thickness is 1 to 4mm.
Monitor section
PF Series
Dimensions
(File name: Page 1026 or Ending 30)
1016
59.5
2-Rc2 (S)
99
128.
5
37.5
79
75
300
Dimensions
Monitor section
PF Series
68
68
80 a
nd o
ver
80 and over
52686868
5 108
122
16
76
72
72
68
68
80 a
nd o
ver
80 and over
• Panel cut dimensionStandard panel cut dimension is as shown below.(Note) Appropriate panel plate thickness is 1 to 4mm.
Note 1: This product is always used with appli-cable monitor PFM16000E.
Note 2: When installation, the flow direction mustbe as same as flow direction on nameplate.
(File name: Page 1026 or Ending 30) • PF16000ESensor section
1018
Flow sensor for compressed air, tester kit
PFK SeriesAir flow rate measuring component kit is available to measure the flowrate instantly at workshop.
• Flow rate range: 25 to 500, 50 to 1000, 100 to 2000,
200 to 4000, 400 to 8000N /min
SpecificationsDescriptions PFK500D PFK1000D PFK2000D PFK4000D PFK8000D
25 to 500 50 to 1000 100 to 2000 200 to 4000 400 to 8000
Rc1/2 Rc1/2 Rc1/2 Rc1 Rc11/2
Flow rate range N /min
Port size
Applicable fluid
Working air quality
Max. working pressure MPa
Min. working pressure MPa
Withstanding pressure MPa
Ambient temperature and humidity
Fluid temperature °CLinearity
Pressure characteristics
Temperature characteristics
Response time sec
Analog output
Switch output
Power voltage
Cable
Set value holding function
Installation attitude
Installation strait piping section
Protective structure
Mass kg
Instal
lation
Out
put
Acc
urac
yW
orki
ng c
ondi
tions
Spe
c.
5.6 7.4 9.2
Compressed air / N2 gas
Atmospheric dew point -17°C or less (* 1)
1.5
0.1
2.25
0 to 50°C 85%RH or less
0 to 40
± 1.5%F.S (0.7MPa and 20°C)
± 1.5%F.S (0.1 to 1.5MPa, 0.7MPa standard)
± 2.0%F.S (0 to 40°C, 20°C standard)
Approx. 1.25
Standard DC0 to 5V Option: DC4 to 20mA, 1 to 5V and 0 to 10V
Relay contact (1ch, a contact)
AC100V ± 10% (10W or less)
Auxiliaries (3m connector, 0.5mm2 conductor) * 2
Semipermanent due to EEPROM
Both vertical and horizontal (resin cover facing downward excluded)
Not required
Equivalent to IP64 (sensor section only)
* 1: If foreign matter, water or oil is contained in the compressed air, detecting flow rate could be failed, so " sensor error " is displayed. Always install a filter, refrigerating type dryer and oil mist filter before a flow sensor.
* 2: Extension cable (3m) can be connected. Model no. PF-FL-280775
Product structure
Case(Monitor)
SensorCoupler (2 pieces)
Cable (3m) Power cable (2.5m)
Symbol Descriptions
500D
1000D
2000D
4000D
8000D
25 to 500N /min
50 to 1000N /min
100 to 2000N /min
200 to 4000N /min
400 to 8000N /min
Flow rate rangeAFlow rate rangeA
PFK 4000D
How to order
1019
Flo
w sen
sor
For com
pressed air
High polymer membrane dryer
Desiccant type dryer
Refrigerating type dryer
Air filter
Automatic drain other
Water cooling refrigerator
Flow sensor for water
Auxiliary
Silencer
Pressure SW for coolant
Flow sensor for air
Seating / closecontact conf. SW
F.R.L(Separate)
Check valve/ others
Joint/ tube
Vacuum auxiliary / pad
Mechanicalpressure SW
Electronic pressure SW
Electronic dif. pres. SW
Flow control valve
F.R.L(Module)
Small F.R.
Precise R.
Electro pneumatic R.
Vacuum F.
Vacuum R.
Vacuum generator
Total air system
Coupler
C
BA
220389
Knob
245
A B CSensor for PFK500D to 2000D
Sensor for PFK4000D
Sensor for PFK8000D
215
292
338
251
338
390
Rc1/2
Rc1
Rc11/2
Dimensions
• PFKSensor section
PFK Series
Dimensions
Case