Forth-Rite Technologies, LLCConfidential

…Staying the Course

Trace-Rite Endpoint and Excursion Detection

February 2015

FORTH-RITE TECHNOLOGIES, LLC12400 Highway 71 West

Suite 350 M/S 197Austin, Texas 78738PH: (512) 276-5044FAX: (512) 276-5147

www.forth-rite.com

Benefits of Endpoint Detection

• Productivity Improvement– NF3 gas savings– Higher throughput– Automation of cleaning endpoint management– Management Aging of RPS– Yield Management: particle reduction

• Endpoint for “invisible” environments (SiO2, RF assisted plasma)

• Environmental Benefits (minimum usage of GW gas)

…Staying the Course Forth-Rite Technologies, LLCConfidential

About Us

• Founded in 2005• Based in Austin, Texas• Worldwide IP spanning the design and application of our products. • Sales service and support in:

– China, Japan, Europe, Korea, Singapore, Taiwan, US• Customers include major end users as well as equipment suppliers in the

semiconductor, FPD and PV industries. • Selected by Japanese government to be a part of Green Devices due to

positive environmental impact technology. • Purchased by the Chinese government for use in greenhouse gas reduction

efforts in Beijing. • Solutions enable customers to produce more for less while being

environmentally friendly.

…Staying the Course Forth-Rite Technologies, LLCConfidential

…Staying the Course Forth-Rite Technologies, LLCConfidential

Our Customers

…Staying the Course Forth-Rite Technologies, LLCConfidential

Our Products

…Staying the Course Forth-Rite Technologies, LLCConfidential

Product Employment Description

Designed specifically for end point detection of PECVD/CVD remote plasma chamber clean processes

integrated with classical version Trace-Rite:- Endpoint Detection (during clean) - Excursion Detection (during depos.)

is designed as a low cost focused solution (SW analysis outside)- Endpoint Detection and/or - Excursion Detection