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©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 1
22 Bd Benoni Goullin44200 NANTES – FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr
Hamamatsu C12880MAMicro-SpectrometerMEMS report by Sylvain HALLEREAUJuly 2018 – version 1
REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 2
Overview / Introduction 3
o Executive Summary
o Reverse Costing Methodology
Company Profile 7
o Hamamatsu Photonic
o Hamamatsu Revenue Profile
o C12880MA
Physical Analysis 13
o Summary of the Physical Analysis
o Physical Analysis Methodology
o Package 16
Package Views & Dimensions
Package Opening
Package Cross-Section
o Reflective Grating 28
Dimensions
Cross-Section
Grating
o Die 43
Details View: Flow Chamber, Pixels
View, Dimensions& Marking
Color sensor
Active Area Deprocessing
Die Process
Die Cross-Section: Metal Layers, Active Area
Slit Cross-Section
Process Characteristics
o Comparison C12880MA and NanoLambda NSP32 and Consumer Physics
SCIO Molecular sensor 71
Table of Contents
Manufacturing Process Flow 76
o Global Overview
o IC Front-End Process
o Wafer Fabrication Unit
o Image Sensor Process Flow
o Reflective Grating Process Flow
o Packaging Process Flow
Cost Analysis 88
o Summary of the cost analysis
o Yields Explanation & Hypotheses
o Image Sensor 86
IC Wafer Front-End Cost
Sensor Layers Wafer Front-End Cost
Sensor Layers Front-End Cost per process steps
Total Front-End Cost
Back-End 0 : Probe Test & Dicing
Wafer & Die Cost
o Reflective Grating
o Component 92
Back-End : Packaging Cost
Back-End : Packaging Cost per Process Steps
Back-End : Final Test Cost
Component Cost
Estimated Price Analysis 104
Customer Feedback 108
Company services 110
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 3
Overview / Introductiono Executive Summaryo Reverse Costing
Methodology
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Executive Summary
• This full reverse costing study has been conducted to provide insight on technology data, manufacturing cost andselling price of the Hamamatsu C12880MA microspectrometer.
• The micro-spectrometer head of Hamamatsu Photonics of only 2.5cm3 is a real spectrometer with a high sensitivityCMOS linear image sensor and a reflective grating for the diffraction of the light.
• Function with wavelength between UV and Near IR, 340 to 850nm, the micro-spectrometer can be used for foodinspection, biometry, tester of light, water quality and other light level measurements.
• With a hermetically sealed package, the spectrometer can be used in moist atmosphere.
• A comparison between the C12880MA micro-spectrometer and two another technologies spectrometer, theNanoLambda NSP32 and Consumer Physics SCiO is performed in this report.
• This report includes a complete analysis of the C12880MAchip from Hamamatsu, featuring Chip disassembly and dieanalyses, processes and cross-sections. Finally, it contains a full cost analysis and a selling price estimation of thecomponent.
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 4
Overview / Introduction
Company Profile & SupplyChain
Physical Analysiso Package Overviewo Package Cross-Sectiono Reflective Gratingo Image sensoro Die Cross-Sectiono Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Package View & Dimensions
Package Top View©2018 by System Plus Consulting
Package Bottom View©2018 by System Plus Consulting
Package Side View©2018 by System Plus Consulting
20.1 mm
13
.4 m
m
• Package:Metal Package 10-Leads
• Dimensions: 20.1 x 12.5 x 10.1 mm
• Pin Pitch: 2.5 mm
• Marking:
C12880MA
16L01139
<logo Hamamatsu>
12
.5 m
m
10
.1 m
mPackage Marking
©2018 by System Plus Consulting
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 5
Overview / Introduction
Company Profile & SupplyChain
Physical Analysiso Package Overviewo Package Cross-Sectiono Reflective Gratingo Image sensoro Die Cross-Sectiono Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Package Opening
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 6
Overview / Introduction
Company Profile & SupplyChain
Physical Analysiso Package Overviewo Package Cross-Sectiono Reflective Gratingo Image sensoro Die Cross-Sectiono Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Reflective Grating
Light diffraction on the grating – Optical View©2018 by System Plus Consulting
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 7
Overview / Introduction
Company Profile & SupplyChain
Physical Analysiso Package Overviewo Package Cross-Sectiono Reflective Gratingo Image sensoro Die Cross-Sectiono Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Grating dimension
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 8
Overview / Introduction
Company Profile & SupplyChain
Physical Analysiso Package Overviewo Package Cross-Sectiono Reflective Gratingo Image sensoro Die Cross-Sectiono Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Die Dimensions
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 9
Overview / Introduction
Company Profile & SupplyChain
Physical Analysiso Package Overviewo Package Cross-Sectiono Reflective Gratingo Image sensoro Die Cross-Sectiono Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Image Sensor – Through-Hole Slit
Image sensor Cross-Section – SEM View©2018 by System Plus Consulting
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 10
Overview / Introduction
Company Profile & SupplyChain
Physical Analysis
Manufacturing Process Flowo Front-End Process o Wafer Fabrication Unito Sensor Layers Process Flowo Reflective Gratingo Packaging Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Plus
Process Flow (1/2)
drawing not to scale
Silicon wafer
• Integrated Circuit
Silicon wafer
Silicon wafer
Silicon wafer
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 11
Overview / Introduction
Company Profile & SupplyChain
Physical Analysis
Manufacturing Process Flow
Cost Analysiso Summary of cost analysiso Yield Explanationo Front-End Costo Image Die Costo Reflective Gratingo Packaging Costo Component Cost
Selling Price Analysis
Customer feedback
About System Plus
IC Front-End Cost
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 12
Overview / Introduction
Company Profile & SupplyChain
Physical Analysis
Manufacturing Process Flow
Cost Analysiso Summary of cost analysiso Yield Explanationo Front-End Costo Image Die Costo Reflective Gratingo Packaging Costo Component Cost
Selling Price Analysis
Customer feedback
About System Plus
Component Cost
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 13
Overview / Introduction
Company Profile & SupplyChain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Pluso Company serviceso Contacto Legalo Related reports
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©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 14
COMPANYSERVICES
©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 15
Overview / Introduction
Company Profile & SupplyChain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Pluso Company serviceso Contacto Legalo Related reports
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©2018 by System Plus Consulting | Hamamatsu C12880MA Micro Spectrometer 16
Overview / Introduction
Company Profile & SupplyChain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
Customer feedback
About System Pluso Company serviceso Contacto Legalo Related reports
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