helium compressors & cryo systems - synsyscosynergy systemsficorp 6 210 n tonsend ae montrose co...

synergy

systems�corp

A Marathon® Keeps You Running Longer

HeliumCompressors& Cryo Systems

synergy

systems�corp

2510 N Townsend Ave • Montrose, CO 81401 • www.SynSysCo.com • 970-240-94292

OMNI® CRYO SYSTEMS: Made in the USA

THE IDEA

DRIVE multiple manufacturers’ cryopumps selected and installed based on performance, quality, and serviceability, instead of what is available from a single OEM

DEPLOY a single helium compressor which operates cryopumps from multiple manufacturers and manages both Standard Pumps and Auto-Regen Pumps and drives 3-phase and 2-phase cryopump motors

SECURE a globally supported helium compressor that replaces aging legacy helium compressors

SERVICE AND SUPPORT all of the above equipment through a single provider which provides full warranty coverage

BREAK OUT of the OEM Technology Silo that may be limiting your process and equipment performance

OMNI® HELIUM COMPRESSORS provide all the above features and benefits

synergy

systems�corp

2510 N Townsend Ave • Montrose, CO 81401 • www.SynSysCo.com • 970-240-9429 3

THE PROBLEM:• Cooldown Times are too long

• Limited Hydrogen Capacity requires regen during process

THE ISSUES:• OEM “A” does not have a higher performance pump that fits the tool

• OEM “B” DOES have a higher performance pump that fits the tool • OEM “A” compressors cannot drive OEM “B” pumps due to different

phasing and voltages

OEM “A”Compressor

OEM “A”ProcessPump

ProcessTool Load

Lock

OEM “A”Load Lock

Pump

Pre–OMNI®

THE SOLUTION:• Cryopump “B” is deployed to solve the Cooldown and Carrying

Capacity problems

• The Omni Compressor will drive both Cryopump “A” and “B”

• The End User can trade in the old “A” Process Pump and “A” Compressor and keep the “A” Load Lock pump because it is operating well

• The process can now run from tool set-up to tool set-up without being interrupted by a Regen

Post–OMNI®

OMNICompressor

OEM “B”ProcessPump

ProcessTool Load

Lock

OEM “A”Load Lock

Pump


AN APPLICATION EXAMPLE

Speed(L/Sec)

OEM “A”Process Pump

H2O 9,000

Air 3,000

H 5,000

AR 2,500

Capacity(Std. L)

AR 2,000

H 24

Cooldown(Min)

150

Speed(L/Sec)

OEM “B”

H2O 9,500

Air 3,600

H 7,300

AR 3,100

Capacity(Std. L)

AR 2,000

H 50

Cooldown(Min)

90

synergy

systems�corp


OMNI® Helium Compressors drive multiple cryogenic pumps, made by different manufacturers, at the same time on the same tool.

OMNIs drive Standard Pumps & Auto-Regen pumps at the same time.

OMNIs drive 3-phase and 2-phase cryopump motors

OMNI® Compressors simultaneously operate cryogenic pumps of different manufacturers either as a singular group by manufacturer, or by mixing cryogenic pumps of multiple manufacturers on the same application.

Omni® Compressors are available in Air Cooled & Water Cooled versions.

FEATURES and BENEFITS

• Water cooled and air cooled versions

• Proven compressor technology

• 2 year warranty

• 30,000+ hour adsorber exchange

• Drive standard and auto regen pumps simultaneously

• Drive 3-phase and 2-phase cryopumps

• Very quiet smooth operation

• Two oil separators plus an adsorber

• Simple controls and utility hook up

• Displays supply and return pressure

• Multiple service centers globally

• Small footprint vs. pumping capacity

• Simplicity of design provides for easy repair and maintenance

• Enables the selection and installation of Cryopumps based on their performance—not by their manufacturer

Made in the USA Patents PendingCross Platform Cryo Pump Solutions

Cryo-Plex is a registered trademark of Trillium US Inc., On-Board and Cryo-Torr are registered trademarks of Brooks Automation Inc., and Marathon is a registered trademark of Sumitomo (SHI) Cryogenics of America, Inc.


OMNI® HELIUM COMPRESSORS

CryoPump Omni 900Water & Air Cooled

Omni 800Water & Air Cooled

Omni 100Water & Air Cooled

Cryo-Plex 8, 8LP/350CS

3 2 1

Cryo-Plex 10, 1020CS

2 1 1

Cryo-Plex 16, 1050CS

2 NA NA

OnBoard and Cryo-Torr 8, 8F

3 2 1

OnBoard and Cryo-Torr 250F

2 1 1

OnBoard and Cryo-Torr 10, 10F

2 1 1

OnBoard and Cryo-Torr 400

2 NA NA

OnBoard and Cryo-Torr 500

1 NA NA

Cryo-Torr 20HP 1 NA NA

Marathon CP8 3 2 1

Marathon CP250 2 1 1

Marathon CP12 2 1 NA

Marathon CP16 1 NA NA

Marathon CP-20 1 NA NA

MODELS AND CAPACITIES

synergy

systems�corp




OMNI® HELIUM COMPRESSORS

Electrical Supply

3 Phase200 V, 50/60 Hz

3 Phase380-415 V, 50 Hz

480 V, 60 Hz

Power Consumption

6.6-6.9 kW at 50 Hz7.5-7.8 kW at 60 Hz

Ambient Temp -30 ºC to 44 ºC (-22 ºF to 112 ºF)

Dimensions(HxWxD)

Outdoor Unit (mm) 948 x 928 x 335(inch) 36.5 x 37.4 x 13.5

Dimensions(HxWxD)

Indoor Unit (mm) 547 x 637 x 262(inch) 21.6 x 10.4 x 25

Adsorber 30,000 Hours

900AL 900AH

Electrical Supply

3 Phase200 V, 50/60 Hz

3 Phase380-415 V, 50 Hz

480 V, 60 Hz

Power Consumption

6.6-6.9 kW at 50 Hz7.5-7.8 kW at 60 Hz

Ambient Temp 4-40 ºC (40-104 ºF)

Cooling Water(Inlet)

6-9 L/min. (1.6-2.4 gal./min.)5-25 ºC (41-77 ºF)

Dimensions(HxWxD)

532 x 443 x 493 mm(20.9 x 17.4 x 19.4 in.)

Weight 100 kg (225 lbs.)


900L 900H

OMNI–900

OMNI–900A Air–Cooled CompressorIndoor/Outdoor Unit

Electrical Supply 1 Phase200 V, 220 V,230/240 V, 50 Hz

220 V, 60 Hz

Power Consumption 3.0 kW at 50 Hz3.4 kW at 60 Hz


Cooling Air 20 m3/min. (706 cfm)

Dimensions (HxWxD) 715 x 453 x 488 mm(28.2 x 17.8 x 19.2 in.)

Weight 102 kg (225 lbs.)111 kg (245 lbs.) w/ transfomer


OMNI–100A OMNI–800A

Electrical Supply

3 Phase200 V, 50/60 Hz

3 Phase380-415 V, 50 Hz

480 V, 60 Hz

Power Consumption

3.6-3.8 kW at 50 Hz4.6-4.8 kW at 60 Hz


Dimensions(HxWxD)

888 x 442 x 512 mm(34.9 x 17.4 x 20.2 in.)



800AL 800AH

Electrical Supply

3 Phase200 V, 50/60 Hz

3 Phase380-415 V, 50 Hz

480 V, 60 Hz

Power Consumption

3.6-3.8 kW at 50 Hz4.6-4.8 kW at 60 Hz



4-9 L/min. (1.0-2.4 gal./min.)5-25 ºC (41-77 ºF)

Dimensions(HxWxD)

532 x 443 x 493 mm(20.9 x 17.4 x 19.4 in.)



800L 800H

OMNI–800

TO BE

RELEASED

SUMMER

OF 2019

TO BE

RELEASED

FALL

OF 2019

TO BE RELEASEDFALL OF 2019

synergy

systems�corp



Made in the USA: Marathon Cryopumps are manufactured by Sumitomo Corporation America, Inc. in Allentown, PA USA.

Whisper™ quiet technology: Provides quiet, low vibration, pneumatic

operation combined with world–class performance and reliability. Global OEMs choose Marathon® for MRI helium re-liquefaction and the most demanding coating, flat panel and R&D applications.

Hot Swap: In-situ displacer changes enable End Users to conduct helium

side maintenance in about 45 to 60 minutes without removing the pump and without breaking vacuum.

World Class Performance: Industry leading carrying capacities extend Regen times. Very flat pumping speed curves between Regens maintain chamber performance and pressures.

Versatile Application: Marathon® Cryopumps are driven by OMNI® Helium Compressors and by Marathon® Compressors. Pump models are available from 8 inches to 20 inches, with standard and auto-regen capabilities.

Global Support: Service, maintenance, parts and support are available through 7 locations globally.


OMNI® CRYO SYSTEMS INTEGRATE MARATHON® CRYOPUMPS

synergy

systems�corp



MARATHON® CP-8

MARATHON® CP-8LP


MARATHON® CRYOPUMPS

Air (liters/second) 1,500

Water (liters/second) 4,200

Argon (liters/second) 1,250

Hydrogen (liters/second) 2,300

Argon Throughput (liters/second) 11.0

Argon Capacity (standard liters) 1,200

Hydrogen Capacity (standard liters) 25

Crossover Rating (torr-liters) 220

Cooldown Time (minutes) 75

Weight (kg/lbs.) 16.8 (35)

Dimensions (H) (mm/in.) 516 (20.3)

Performance Specifications










Weight (kg/lbs.) 17.9 (39.5)

Dimensions (H) (mm/in.) 186 x 565 (7.3 x 22.3)


Available Configurations• ANSI 6”, ISO 200 or CF 10” Flange Options• Standard Manual Operation• Optional Fully-Automated Operation with

Marathon® Cryopump Controller• Two (2) cryopumps operating with one (1)

OMNI® 800 or F40 L/H Compressor• Displex® Technology

Available Configurations• Standard Low Profile Design in Left or

Right Hand Configurations• ANSI 6”, ISO 200 or CF 10” Flange Options• Standard Manual Operation• Optional Fully-Automated Operation with



synergy

systems�corp



MARATHON® CP-250LP

MARATHON® CP-12












Weight (kg/lbs.) 20 (44)

Dimensions (H) (mm/in.) 181 x 591 (7.2 x 23.2)














Available Configurations• Standard Low Profile Design in Left or

Right Hand Configurations• ISO 250 Flange• Standard Manual Operation• Optional Fully-Automated Operation with



Available Configurations• ANSI 10”, ISO 320 or CF 14” Flange Options• Standard Manual Operation• Optional Fully-Automated Operation with


OMNI® 900 or F-70L/H Compressor• Displex® and Whisper® Technology

synergy

systems�corp



MARATHON® CP-16

MARATHON® CP-20



























Available Configurations• ISO 400 or CVC 10” or Wire Seal Flange Options• Standard Manual Operation• Optional Fully-Automated Operation with


OMNI® 900 or F-70L/H Compressor• Displex® and Whisper® Technology

Available Configurations• ISO 500 or ANSI 20” or Wire Seal Flange Options• Standard Manual Operation• Optional Fully-Automated Operation with

Marathon® Cryopump Controller• One (1) cryopump operating with one (1) OMNI®

900 or F-70 Compressor• Displex® and Whisper® Technology

synergy

systems�corp




MARATHON® COMPRESSORS

Electrical Supply

3 Phase200 V, 50/60 Hz

3 Phase380-415 V, 50 Hz

480 V, 60 Hz

Power Consumption

6.6-6.9 kW at 50 Hz7.5-7.8 kW at 60 Hz

Ambient Temp -30 ºC to 44 ºC (-22 ºF to 112 ºF)

Dimensions(HxWxD)

Outdoor Unit (mm) 948 x 928 x 335(inch) 36.5 x 37.4 x 13.5

Dimensions(HxWxD)

Indoor Unit (mm) 547 x 637 x 262(inch) 21.6 x 10.4 x 25


FA-70L FA-70H

Electrical Supply

3 Phase200 V, 50/60 Hz

3 Phase380-415 V, 50 Hz

480 V, 60 Hz

Power Consumption

6.6-6.9 kW at 50 Hz7.5-7.8 kW at 60 Hz



6-9 L/min. (1.6-2.4 gal./min.)5-25 ºC (41-77 ºF)

Dimensions(HxWxD)

532 x 443 x 493 mm(20.9 x 17.4 x 19.4 in.)



F-70L F-70H

F–70L/H Water–Cooled Compressor

FA–70L/H Air–Cooled CompressorIndoor/Outdoor Unit

Electrical Supply 1 Phase200 V, 220 V,230/240 V, 50 Hz

220 V, 60 Hz

Power Consumption 3.0 kW at 50 Hz3.4 kW at 60 Hz


Cooling Air 20 m3/min. (706 cfm)

Dimensions (HxWxD) 715 x 453 x 488 mm(28.2 x 17.8 x 19.2 in.)

Weight 102 kg (225 lbs.)111 kg (245 lbs.) w/ transfomer


Zephyr® Air–Cooled Compressor FA–40L/H Air–Cooled Compressors

Electrical Supply

3 Phase200 V, 50/60 Hz

3 Phase380-415 V, 50 Hz

480 V, 60 Hz

Power Consumption

3.6-3.8 kW at 50 Hz4.6-4.8 kW at 60 Hz


Dimensions(HxWxD)

888 x 442 x 512 mm(34.9 x 17.4 x 20.2 in.)



FA-40L FA-40H

Electrical Supply

3 Phase200 V, 50/60 Hz

3 Phase380-415 V, 50 Hz

480 V, 60 Hz

Power Consumption

3.6-3.8 kW at 50 Hz4.6-4.8 kW at 60 Hz



4-9 L/min. (1.0-2.4 gal./min.)5-25 ºC (41-77 ºF)

Dimensions(HxWxD)

532 x 443 x 493 mm(20.9 x 17.4 x 19.4 in.)



F-40L F-40H

FA–40L/H Water–Cooled Compressors

synergy

systems�corp


MCC automates operation of Marathon®

Cryopumps. Protocol is delivered via RS-232 interface, via host computer, PLC or Windows PC (using optional MCC Software). Automatic operation, regeneration, and monitoring of critical system functions yield improved process times, and greatly reduced downtime between production cycles. Automatic valves, vacuum and temperature instrumentation and blanket heaters are included.

Temperature Indicators, are designed to display and communicate cryopump temperatures. The SCM-10 Indicator is a single, Model 9302 is dual, and Model 9304 is a four channel temperature indicator. All have alarm set points, RS-232 interface and analog output (optional on Model 1901). Models 9302 and 9304 have a standard Ethernet interface.

Tool kits are available from the standard wrench kit (used for connecting couplings) that accompanies new Marathon CP® systems to more comprehensive kits that include such items as gas charging valves and additional tools required for performing your own Hot Swap service on Marathon® Cryopumps and Compressors.

Standard manual systems include cables from our compressors to the cryopump cold head, with options to extend up to 66 feet (20 meters). For MCC systems, cables are included to power the cold head, MCC, automatic valves, blanket heater and vacuum and temp instrumentation. RS-232 cables connect between the MCC and the customer’s host computer, PLC or PC.

Marathon® CP Cryopumps come standard with flexible helium gas lines in lengths from 40 feet to 66 feet (20 meters). Superflex lines offer smaller bend radius without thinning the wall of the hose and a higher flexing cycle life than standard lines. Superflex lines dampen vibration and noise of the helium gas traveling through the lines.

Excellent for Roughing and Regen Does not require water or N2 2 Year Warranty3 year Maintenance Cycle5-7 year Rebuild Cycle Non-Contact Internal Components Excellent for pumping water vapor and other condensible vapors.

Anest Iwata is the Original Manufacturer of Dry Scroll Pumps. With over 35 years’ experience in manufacturing scroll pumps for various pump OEM’s, Anest Iwata brings consistent, reliable, and economical performance to your Chamber Roughing and Cryo-Regen needs.

Heated N2 will Improve Regen times. Our stainless-steel heaters are compact and powerful. N2 is isolated from the heating elements, thus insuring that gas purity is maintained and your pump is cleanly regenerated. Units are available in different flows, wattages, voltages, and inlet + outlet fittings to support your application.

Flexible & Superflex Gas Lines Cables

Tool Kits & Replacement Parts Kits Marathon® Cryopump Controller (MCC)

Temperature Indicators Infinity Heaters

Anest Iwata Scroll Pumps Kashiyama NeoDry Pumps


CRYOPUMP ACCESSORIES

synergy

systems�corp



SynSysCo Supports Legacy Cryogenic Equipment

At SynSysCo we fully appreciate the value of an installed base of well-maintained legacy

cryogenic equipment which is critical to production up-time and financial performance.

In addition to new equipment sales we rebuild and sustain most manufacturers’ makes

and models of legacy cryogenic equipment.

OMNIs Replace Legacy Equipment

As we rebuild and sustain your existing cryogenic equipment, we can also replace end

of life equipment with OMNI® Helium Compressors and Marathon® cryopumps in an

incremental approach as determined by your operational needs.

OMNIs Upgrade Equipment Incrementally

Since the OMNI® Helium compressor can drive a mix of different manufacturer’s

pumps on the same tool at the same time, you can incrementally upgrade one

compressor or one pump at a time. There is no need to replace a multiple cryo pump

set all at once with a new multiple cryopump set when you need to upgrade equipment.

OMNIs Provide Exceptional Warranties

The OMNI® Helium Compressor line of equipment comes with a standard 2 year

warranty and a 30,000 hour (42 month) Adsorber change.

SUPPORT

synergy

systems�corp


Global Service

SynSysCo is the North American Distributor of the Sumitomo line of Marathon® cryogenic pumps and compressors. All system application and configuration support is conducted from our Montrose, Colorado facility. Our team supports the full line of SHI Marathon® cryopumps and compressors, our line of OMNI® compressors, and a large selection of 3rd party cryopumps and compressors. All Cryogenic system repairs are managed through our Montrose, CO office and we work interactively with Sumitomo worldwide facilities to support OMNI® and Marathon® equipment and systems.

Service Turnaround: USA

Service turnaround time is typically 10 to 20 working days after receipt of goods. Expedited services are available.

Contact Us

Feel free to contact us by phone or email. We will be happy to discuss the advantages of OMNI® helium compressors and the Marathon® equipment line.

SynSysCo 2510 North Townsend Avenue

Montrose, Colorado USA 866-DRY-PUMP866-379-7867

[email protected]


SUPPORT


synergy

systems�corp


For Information in:Asia Sumitomo Heavy Industries, Ltd.ThinkPark TowerCryogenics Division, Sales Department1-1, Osaki 2-Chome, Shinagawa-KuTokyo 141-6025, JapanPhone: +81-3-6737-2550Fax: +81-3-6866-5114E-mail: [email protected]

Cryogenics Division, Service Department2-1-1, Yato-cho, Nishitokyo-cityTokyo 188-8585, JapanPhone: +81-42-468-4265Fax: +81-42-468-4254E-mail: [email protected]

United States Sumitomo (SHI) Cryogenics of America, Inc. 1833 Vultee StreetAllentown, PA 18103Phone: +1 610-791-6700Fax: +1 610-791-0440E-mail: [email protected]

Sumitomo (SHI) Cryogenics of Europe, Ltd.3 Hamilton Close, Houndmills Industrial EstateBasingstoke, Hampshire RG21 6YT United KingdomPhone: +44 (0) 1256 853333Fax: +44 (0) 1256 471507E-mail: [email protected]

Sumitomo Heavy Industries (Shanghai) Management, Ltd.10F, SMEG PLAZANo.1386, Hongqiao RoadShanghai 200336, P.R. ChinaPhone: +86-21-3462-7660Fax: +86-21-3462-7661E-mail: [email protected]

Room 107-110, Building 5No.100, Zixiu RoadShanghai 201103, P.R. ChinaPhone: +86-21-6070-5200Fax: +86-21-6070-5086E-mail: [email protected]

Sumitomo (SHI) Cryogenics of America, Inc.1700 Wyatt DriveSuite 8Santa Clara, CA 95054Phone: +1 408-736-4406Fax: +1 408-736-7325

Sumitomo (SHI) Cryogenics of Europe, GmbHDaimlerweg 5aDarmstadt D-64293, GermanyPhone: +49 (0) 6151 860 610Fax: +49 (0) 6151 800 252E-mail: [email protected]

Sumitomo (SHI) Cryogenics Korea Co., Ltd.Room 619-620, Venture Valley#958 Goseck-Dong, Kwonsun-GuSuwon-City, Gyeonggi-Do, South KoreaPhone: +82-31-278-3050Fax: +82-31-278-3053E-mail: [email protected]

Sumitomo (SHI) Cryogenics Taiwan Co., Ltd.4th Floor, No. 3Lane 216, Gongyuan Rd.Hsinchu City 300, Taiwan ROC Phone: +886 3 561 2557Fax: +886 3 562 3400

SynSysCo Inc. 2510 North Townsend Avenue Montrose, Colorado USA 866-DRY-PUMP866-379-7867 [email protected]

World Wide Web: www.synsysco.com

© SynSysCo 6/18

Europe













© SynSysCo 6/18

Europe













© SynSysCo 6/18

Europe

helium compressors & cryo systems - synsyscosynergy systemsficorp 6 210 n tonsend ae montrose co...

Documents