hiden eqp applications€¦ · quadrupole mass spectrometers for advanced science electron...

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Hiden EQP ApplicationsMass/Energy Analyser for Plasma Diagnostics and Characterisation


Quadrupole Mass Spectrometers for Advanced Science

EQP Overview

The Hiden EQP System is an advanced plasma diagnostic tool with combined high transmission ion energy analyser and quadrupolemass spectrometer, acquiring both mass spectra at specified ion energies and ion energy distributions of selected plasma ions.

The advanced EQP ioniser allows neutral and radical detection, the electron attachment ionisation feature further enhancing the detection capability for radicals in electronegative plasma chemistries.



rf

Ions

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a b

The NIST GEC Test Cell



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41 amu – ArH+

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40 amu – Ar+

NIST GEC Example Energy Spectra



As the rf amplitude is increased both Ar+ and ArH+ show:

• Increases in Plasma Potential

• Increases in Ion Energy

• Splitting of the high energy peaks

- transition time across the sheath rf

• Ar+ also exhibits high concentrations of lower energy ions

- due to inelastic collisions between Ar / Ar+

NIST GEC Example Data - Conclusions



Detection of Negative Hydrogen Ions from bombardment of a Carbon Sample in a Capacitively Coupled Plasma

• Negative Ion Distribution Functions (NIDFs) obtained using the 45º Sector Field Energy Analyser.



Positive Ion Species from a HIPIMS Plasma

• HIPIMS Discharge on a 200x600 mm2 Ti Target.

• Peak Current Density: 3 A.cm-2, Peak Power Density 3 kW.cm-2.

Ti+

TiN+

N+

Ti2+

Ar+



A comparison of the electron energy spectra for the principle cluster ions formed by Fullerene

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C60+ (m/z = 720)

C60++ (m/z = 360)

C60+++ (m/z = 240 )

The data compares the appearance potentials for the principle cluster ions formed from Buckminsterfullerene

Electron Energy Spectra



Electron Attachment Cross-Sections

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Attachment cross-sections for CO2 (Rapp and Briglia)

O- ex CO2, Plasma off

O- ex CO, Plasma off. (residual CO2 yields 8.2 eV peak)

O- ex neutrals ex CO2, Plasma on

a is O- ex CO2

b is O- ex CO2 + e- → CO2- → CO+ O-

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b



ccl2f2 plasma off -on -off. 18mTorr chamber preasure.

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5 9.16667 13.3333 17.5 21.6667 25.8333 30ccl2f2 plasma off -on -off. 18mTorr chamber preasure.

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• Two parent species for CF2

+ can be seen when the plasma is active.

• The plasma derived species produce a characteristic feature at lower energies.

Electron Energy Spectra for CF4 Plasma



Electron Attachment SpectraHAL4 EQP Low Energy #DE33

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HAL4 EQP Low Energy #DE33

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• O- species may be formed from various precursors e.g. CO, CO2, N2O via electron attachment and subsequent dissociation.

• The low energy resonant electrons required for this process are characteristic of the precursor involved.

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Formation of F- species can occur in the absence of plasma but the under working conditions there is a dramatic increase in F- concentration and type from plasma derived precursors.

Electron Attachment in a CF4 Plasma



Plasma Analysis using the Driven Electrode

2mTorr ar -65vbias -75v ext.

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Ar+ 2 mTorr

VB VP

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10mTorr ar -65v bias -75v ext.

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Ar+ 25 mTorr

Energy V Energy V

Ar H+ 10 mTorr

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Plasma Analysis using the Driven Electrode


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Time 14:54:06 Date 13/03/97

Ar+ 44 mTorr

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Time 14:08:36 Date 13/03/97

Ar+ 50 mTorr

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• Negative energy ions due to influence of the biased electrode (Vb)

• Vpeak corresponds to centre of characteristic rf split peak feature

• As the pressure in the plasma increases inelastic collisional broadening / energy loss of Ar+ (not ArH+) is seen to dominate



Energy Analysis of Plasma Components8mTorr ar sf6 -40vbias --50v ext.

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SF+

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SF2+

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SF3+

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F+ ions

Even in an apparently homogeneous plasma the individual component species can exhibit a wide variation in energies.



EQP Studies of a D.C. Magnetron Plasma

Vc= -300 V to -380 V

Magnetron Cathode: Cu, Al, Mo or GraphiteWorking Gas: Argon or Sulfur Hexafluoride

EQP PROBE

5x10-7 Torr

10-3 Torr500 m orifice

6 cm

5cmD.C.

-500 V to 0 V

D.C. MAGNETRON



D.C. Magnetron Plasma Data

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Power : 40 Watts

Ar pressure : 5 mTorr

Magnetron / EQP

Distance : 3.0 cm

High Energy tail (>5 eV) - energetic copper atoms ejected from magnetron cathode and ionised in the Ar plasma close to the EQP orifice and reflect the kinetic energies with which the atoms leave the cathode.

Fast Neutral Species



D.C. Magnetron Plasma Data

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Power : 40 Watts

Current : 300 mA

Ar pressure : 5 mTorr

Magnetron / EQP

Distance : 3.0 cm

nb. The EQP was set to reject ionsfrom plasma hence small backgroundof ca. 20 c/s above 15 eV.

2 components, one due to strong, thermal energy + weaker feature extending up to 15 eV. Plasma off – no copper detected above 3 eV, indicating all kinetic ions produced in the ioniser / cage.

Fast Neutral Species



Selected Publications

• Latest publications

• Negative-ion surface production in hydrogen plasmas: modelling of negative-ion energy distribution functions and comparison with experiments. 2013. A Ahmad et al. Plasma Sources Sci. Technol. 22 025006

• Spacially enhanced Langmuir probe measurements of a magnetically enhanced hollow cathode arc plasma. 2011. B Zimmermann et al. Surface and coatings technology 205 5393-5396

• Quantification of the deuterium ion fluxes from a plasma source. 2011. A Manhard et al. Plasma Sources Sci. Technol. 20 015010

• Advantages of highly ionized pulse plasma magnetron sputtering of silver for improved E. coli inactivation. 2012. O Baghriche et al. Thin Solid Films 520 3567-3573

• Influence of high power impulse magnetron sputtering plasma ionization on the microstructure of TiN thin films. 2011. AP Ehiasarian. J. Appl. Phys. 109 104314

http://scholar.google.co.uk/scholar?hl=en&q=hiden+EQP&btnG=&as_sdt=1,5&as_sdtp=



Selected Hiden EQP Users

• INP Greifswald

• Xi’an Modern Chemistry Institute

• Universite d’Orleans

• Southwest Research Institute

• KRICT

• Applied Materials

• Fraunhofer IWS

• Ruhr-Universität Bochum



• High performance probe for mass and energy analysis of ions, radicals and neutrals from a plasma.

• A large number of options are available in order to sample from a variety of plasma types.

• The EQP sees use worldwide in a variety of plasma applications.

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Summary

hiden eqp applications€¦ · quadrupole mass spectrometers for advanced science electron...

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