high barrier multi-layer parylene coating...comelec sa, rue de la paix 129, 2301 la chaux de fonds,...
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Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
High Barrier Multi-Layer Parylene Coating
Technology overview
Surface Technolgy 2018
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
▪ Swiss company founded in 1979
▪ Experts in Parylene coating technology
▪ Parylene Equipment
▪ Export rate 60%
▪ Part of the Incabloc group
Company Profile
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Our services
▪ Pre-treatment and activation of the substrate
▪ Masking and unmasking
▪ Parylene Coating
▪ Parylene etching and Plasma technologies
▪ Post-treatment for modification of the Parylene surface
(hydrophil, hydrophob)
▪ High Barrier Multi-Layer Parylene Coating
▪ Parylene equipment
▪ Sale of raw material
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
▪ Transparent coating 0,05 to 100 µm▪ Technical polymer free of additives▪ physically and chemically inert
▪ Biocompatible USP Class VI, biostable, ▪ FDA and Food compliant
▪ Diffusion barrier against chemicals, solvents and moisture
▪ Compatible with most sterilization techniques: Steam, EtO, H2O2, irradiation
Parylene Key Properties
▪ Solid lubricant with excellent dry film lubricity - friction coefficients 0.15-0.30
▪ Dielectric barrier (~ 200 V / µm)
▪ High thermal stability up to 350°C
▪ High power of penetration▪ Completely uniform without
pinholes
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Parylene Technology
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Parylene Static Process
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Parylene Tumble Process
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Parylene Equipment
C30-S: semi-industrial scale equipment
C22-T: Tumble process C50-S: Industrial scale equipment
C20-S: Laboratory equipment
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Our Certifications
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Parylene Applications
MEDICAL: Protection layer (eg: Biocompatible)
for medical devices systems
SPACE: Dielectric for sensor and
electronics modules used in space
mission
CHEMICAL INDUSTRY: protection layer against chemical
attack of sensors
MICROTECHNICS: Lubricant, electrical insulation
and corrosion resistant layer
FOOD PROCESSING: Protection layer according to
FDA and ISO 10/2011
MILITARY: Dielectric layer for electronic
module or sensors according
to IPC-CC-830
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Why combining Parylene with oxide material? The synergetic effect…
Parylene C 25µm :
WVTR => ~ 4 g/m2/day
O2TR=> ~ 120 cm3/m2/day
Targeted performance for long term AIMD
High Barrier Multi-Layer Parylene Coating
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Polymer (Parylene-C) layers can be grown pin-hole
free and conformal. However they are not tight at
molecular level.
Oxide materials layers are tight at molecular level,
however they grow under high stress creating
pinholes and cracks.
Improved thickness/permeability ratio up to factor 100
High Barrier Multi-Layer Parylene Coating
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Why there is no universal multilayer solution?
For the oxide material deposition, PECVD or ALD has been privileged due to the quality
of the obtained layer. Both have benefit or drawbacks and depend on the business case
Barrier
properties
Access to 3D
shape?
Production
scale
Room
temperature
deposition
Cost
Parylene Good Excellente Very good Room + +
ALD multilayer Excellente Excellente Good 80°C mini ++++
PECVD
multilayer
Very good Bad Very good Room +++
High Barrier Multi-Layer Parylene Coating
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Quantitative result : OTR, WTR
0,001
0,01
0,1
1
10
100
1000
Parylene 10 µm Parylene multilayer ALD 1 repeted unit Parylene multilayer PECVD 3 reapetedunit
Permeability to O2 and Water vapor
OTR in cc.mm/m2/day/bar WTR g/m2/day
High Barrier Multi-Layer Parylene Coating
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
500µm
WN 100nm WN 100nm
SiO2 400nm
Si
Encapsulation coating
PBS solution, 67°C
Qualitative result on standard PBS solution : Testing protocol
SiO2 400nm
Si
WN 100nm WN 100nm
SiO2 400nm
Si
1 2 3
▪ Production of structured silicon wafer with a passivation layer of SiO2
and pads made of tungsten nitride WN
▪ This structure is representative of an typical miniaturized implant
▪ The WN is used for the testing needs due its extreme sensitivity to
water
▪ The structure is encapsulated with wether Parylene C, Parylene AF4
or Multilayer PECVD Parylene/SiOx
▪ The structure is then soaked in PBS solution at 67°C for 4 months
▪ The interface are then observed by Scanning electron microscopy
High Barrier Multi-Layer Parylene Coating
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Par. AF4 – 15 µm
Par. C – 15 µm SiOx/ParC Multilayer– 15 µm
✓ WN not dissolved
✓ Adhesion to substrate NOK :
initial failure mode due to water ingress
✓ WN not dissolved
✓ Adhesion between layers and with substrate OK :
midterm reliability confirmed
Qualitative result on standard PBS solution : After 4 months soaking
High Barrier Multi-Layer Parylene Coating
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
On going actions
• Multi-Layer Biocompatibility evaluation (made of biocompatible materials)
• Integrated equipment for Parylene / inorganic layers
• Simulation studies: mechanical stresses, effects of statistics of defects
• Integration in any kind of product: your application is welcome !
• A European project focused on thin layers based packaging of a new
active implantable device. Starts in 2018.
High Barrier Multi-Layer Parylene Coating
Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland
Contact Information
Helena Schneider
B.A. Communication Studies
Business Development Assistant
Büro Deutschland
Tel +49 7147 2700889
Patrick Schneider
Dipl. Wirtsch.- Ing.
Business Development Manager
DE, AUT, GS-CH,
Büro Deutschland
Tel. +49 7147 2700886
Tina Heim
B.Eng.
Business Development Assistant
Büro Deutschland
Tel +49 7147 2700889