high-throughput laser processing using direct laser interference...

High-throughput laser processing using Direct Laser

Interference Patterning

High-throughput laser processing using DLIP

MW – IF – LMO / Nikolai Schröder

Almelo // October 10th, 2019

Slide 2

The CAMP - Center for Advanced Micro-Photonics

Dresden, Saxony, Germany

From basic research to industrial applications




Slide 3

Nature is inspiring us!

3 µm

Pla

nt

lea

fB

utt

erf

lyB

ug

50 µm

Wa

ter

rep

ell

en

t

Se

lf-c

lean

ing

De

co

rati

ve

fin

ish

An

tib

ac

teri

al

Nature ApplicationSurface

https://www.ecnmag.com/news/2015/08/solar-

cell-research-funded-us-department-energy

Z. Schnepp, Butterfly wings, https://schneppgroup.wordpress.com

Hensel et al., NPG Asia Materials, 5, e37, 2013

Ensikat et al., Beilstein, 2011

10 µm

http://www.muc-con.org/sticker-

maker-online-customize.htm

https://foot<age.framepool.com/de/

editorial/medicine/




Slide 4

The technologies at the CAMP

Direct Laser Writing (DLW) Direct Laser Interference Patterning (DLIP)

5 – 30 µm 150 nm – 30 µm

Faster micro

fabrication speedSlower micro

fabrication speedEnergy distribution Energy distribution




Slide 5

How many interference patterns?

Thousands of patterns are possible!

S. Indrišiūnas, B. Voisiat, M. Gedvilas, G. Račiukaitis, Journal of Laser Applications, 29(1), 11501 (2017).

C. Zwahr, B. Voisiat, A. Welle, D. Günther, A.F. Lasagni, Adv. Eng. Mater., 20, 1800160 (2018)

B. Voisiat, C. Zwahr, A. Rank, S. Alamri, A.F. Lasagni, Appl. Surf. Sci., 471 1065–1071 (2019)

Number of

laser beamsPolarization




Slide 6

Our milestones for customers

Adhesion of cells

Colorful finishing

Self-cleaning1

2

3

4

5

Antibacterial

surfaces

Water repellence

https://blog.marvelapp.com/wp-

content/uploads/2016/09/Design-

is-brand-Car-4.png

http://dreamicus.com/aircraft.html#photo_6

http://www.thestickerprinting.c

om/printing/security-hologram/

https://www.dentistry.co.uk/2018/05/17

/techniques-treatment-first-dental-

implant-procedure/

https://foot<age.framepool.com/de/

editorial/medicine/

…and even more!




Slide 7

Superhydrophobic properties: water repellence

10 µm

3 µm




Slide 8

Superhydrophobic properties: self-cleaning

Test of water drops bouncing off the

Fraunhofer IWS treated area prior to

installation on an aircraft

Structured samples bonded and

sealed around the leading edge of

the slat




Slide 9

Colorful individual finishing

Target image:




Slide 10

Colorful individual finishing

…and more colorful applications:

© Erich Utsch AG © Erich Utsch AG




Slide 11

Bio-functional surfaces

Adhesion of cells

DLIP implant State-of-the-art implant

Fluorescence microscopic image after 7 days

10 µm

Implant in jawbone

Anti-bacterial surfaces

Reference 0.5 µm 1.0 µm 5.0 µm

Interference patterns on photo resist (SU-8) with Staphylococcus Epidermidis (Ø 1 µm)

human

cell

culturehttp://www.cae-

wiki.info/wikiplus/images/e

/e7/Infoplaner2010-2-

Seite18-19-Medical-

Dentaurum.pdf




Slide 12

From lab to fab: DLIP for production

DLIP-High-Speed

▪ High-Speed structuring of large areas

▪ Fixed structure geometry and size

▪ Processing speeds up to 0.36 m²/min (metals) and

0.90 m²/min (polymers)

DLIP-High-flexibility

▪ Individualized surface functionalization

▪ Variable structure geometry and size

▪ Processing speeds up to 1.5 cm²/min (with

translational stages) and 12 cm²/min (with scanner)

IWS, patented

IWS, patented




Slide 13

Structuring of DC04 steel (frontal and lateral views, real time)

Spatial period: ~ 10 µm

Material: Steel DC04

Wavelength: 1064 nm

Laser power: 180 W

Rep. Rate.: 5 KHz

Stage speed: 0.5 – 1 m/s

Beam shaping: ~ 180 µm x 13 mm

Elongated interference patterning area

IWS, Patented

Throughput: 0.36 – 0.90 m²/min already achieved

From lab to fab: DLIP-High-Speed




Slide 14

Module DLIP-Head standard

UV, ns, ps

Module DLIP-Head Scanner

UV, ns, ps

Target image:

10 mm

12

mm

From lab to fab: DLIP-High-flexibility

Material: PET

Pulse energy: 10 µJ

Wavelength: 263 nm

Rep. Rate: 1 kHz

Power: < 0.1 W

Spatial period: ~ 2 µm

https://www.google.de/url?url=https://www.xing.com/profile/Andres_Lasagni&rct=j&frm=1&q=&esrc=s&sa=U&ved=0ahUKEwiXiuT-8ufSAhXpDMAKHcJBD48QwW4IHjAE&usg=AFQjCNEn8eLxxK9TSnc9Dq7JWMjfVmfPbg




Slide 15

Can we be faster?With LAMpAS




Slide 16

From lab to fab: The European project “LAMpAS”

“Multi-beam high-speed processing” with interference

patterns on large spots delivered to the material surface by

polygon scanners!

Interference

Patterning

Polygon

scanner

High-power

USP laser

Process

control

High resolution multi-

beam processing

High-speed beam

deflection

Ultra-short pulse

laser ablation

In-line monitoring




Slide 17

How can we help you?

Nikolai Schröder

Technische Universität Dresden - Zeunerbau

George-Bähr-Str. 3c

01069 Dresden, Germany

Phone +49 351 463-34641

Fax +49 351 463-37755

E-Mail [email protected]




Slide 18

What we can do for us?

Process

development

and integration

Problem definition

& surface function

Topography

design

Surface function

evaluation




Slide 19

2-Beam Interference

pattern

3-Beam Interference

pattern

( )

sin3=p

( )

sin2=p

Characteristics:

▪ Interference patterns result

when coherent laser beams are

overlapped

▪ Material is locally modified at

interference maxima positions

▪ Spatial period depends on sub-

beam angle (θ) and laser

wavelength (λ)

Limitation:

only periodic structures

but…. (example for p = 1 µm)

1,000,000 individual spots/mm²

SIMULTANEOUSLY

Direct Laser Interference Patterning




Slide 20

Unfair advantages

▪ Materials: polymers, metals,

ceramics, coatings

▪ Spatial periods: 150 nm to 20-30 µm

▪ Throughput: up to 0.9 m²/min

▪ Surface functions: friction,

antibacterial, biocompatibility

improvement, decoration/ product

protection, electrical resistance

reduction

▪ Treated areas: e.g. cylinders 0.28 m²

(300 mm diameter x 300 mm length)

▪ Complexity: full automatized control

of pattern geometry (2, 3 and 4

beams) and spatial period

Oxides (TCO)

Coatings (ta-C)

10 µm

Pulse durations: fs, ps,

ns laser sources

Wavelength: 266 –

1064 nm (10.6 µm)

Polymers (PS)

Metals (steel)

Metals (Al)

T. Roch, E. Beyer, A. Lasagni, Diamond and Related Materials 2010, Vol. 9, 1472-1477.

A.F. Lasagni, D. Langheinrich, S. Eckhardt, Plastic Research Online 2012, DOI 10.2417/spepro.004281.

J. Berger, T. Roch, S. Correia, J. Eberhardt, A.F. Lasagni, Thin Solid Films, 2016, 612, 342–349.

M. Duarte, A. Lasagni, R. Giovanelli, J. Narciso, E. Louis, F. Mücklich, Advanced Engineering

Materials, 2008, 10, 6, 554-558

S. Milles, B. Voisiat, M. Nitschke, A.F. Lasagni, J. of Mater. Process. Technol, 2019, 270, 142-151




Slide 21

Superhydrophobic properties: anti-icing

The sampleLet’s freeze it!

-20 °CLet’s drop it!

Refe

rence

DLW

+ D

LIP

textured aluminum surface

21 seconds

9 seconds




Slide 22

Λ(d) =𝑚𝜆

sin 𝜃𝑖 − sin )θobs2(𝑑

No-Rainbow color

RedOrangeGreenBlue

Variable spatial period

B. Voisiat, W. Wang, M. Holzhey, and A.F. Lasagni: Sci. Reports (accepted for publication).

New optical applications: decorative elements




Slide 24

This presentation was presented at

EPIC Meeting on High Power Laser Systems 2019

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