Granted in the Metal Finishing Field Printed copies of patents are furnished by the Patent and Trademark Office for $3.00 each. Address orders to: Commissioner of Patents and Trademarks, Washington, D.C. 20231.

IMPROVING CONFORMITY OF SPUlTERED TITANIUM NITRIDE

U.S. Patent 5,833,817. Nov. 10, 1998 C.S. Tsai et al., assignors to Taiwan Semiconductor Mfg. Co. Ltd., Hsin- Chu, Taiwan

A method of improving step cover- age and conformity of a layer of material deposited by a physical- vapor-deposition technique onto a substrate having vertical walled openings with aspect ratios greater than 0.3 comprising depositing a first layer of material whereby non- uniform coverage is produced be-

coming progressively thinner along the said walls; depositing a pho- toresist layer over the first layer of material; subjecting the substrate to an etching technique; removing the photoresist layer; and deposit- ing a second layer material onto the substrate by a physical-vapor- deposition technique.

COPPER FOIL FOR A PRINTED CIRCUIT BOARD

U.S. Patent 5,833,819. Nov. 10, 1998 M. Ohara et al., assignors to Mitsui Mining & Smelting Co. Ltd., Tokyo

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IS0 9002 cemticate Number 34240

Circle 066 on reader information card

An apparatus for producing an electrolytic copper foil for a printed wiring board comprising a rotary cathode; a primary anode installed opposite to the rotary cathode; means for applying an electric cur- rent having a current density to the primary anode; means for supply- ing a copper electrolyte; and an electrodeposition starting surface.

ELECTROPLATING APPARATUS

U.S. Patent 5,833,820. Nov. 10, 1998 V. Dubin, assignor to Advanced Micro Devices Inc., Sunnyvale, Calif:

DUAL INPUT pH/ORP CONTROLLER Reduce Costs, Save Space, Simplify Operation

Dual electrode inputs allows one controller to control two channels - independently.

Easy to configure: pH/pH, pH/ORP or ORP/ORP.

4 on/off control relays or 4 pulse pro- portional control relays or 2 & 2 of each.

Optional 4-20 mA outputs, single or dual

All models feature a dedicated diag- nostic alarm relay

WDP Series Dual Input

pH/ORP Controller

Pre-wired, wall mount NEMA 4X enclosure for simple, plug-in installa- tion & reduced cost

Each relay may be configured for High or low alarm High or low set point

WALCHEM In-range output

Sensors, Pumps, Controls Out-of-range alarm Probe wash activation

Available with differential electrode with quick disconnect cartridge

Five Boynton Road Holliston, MA 01746 USA

tel 508-429-1110 Fax 508-429-7433 www.walchem.com

Circle 073 on reader information card

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