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Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013

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Page 1: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Inertial Technology For North Finding Steve Clarke, Applications Engineer.

December 2013

Page 2: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

To be the leading provider of affordable, high

performance, high integrity MEMS inertial products

and foundry services

2

Page 3: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Contents

• Who we are

• What a gyroscope does

• Current products

• Typical applications

• MEMS gyroscopes – how they work.

• High precision gyroscope

• North finding

– Techniques

– Important parameters

– Test Results

• Summary

• Questions/Discussion

3

Page 4: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

A UTC/SPP Joint Venture Company

4

Silicon Sensing

Systems Japan

UTC Aerospace

Systems

Sumitomo

Precision

Products

Silicon Sensing

Systems Ltd

Silicon Sensing

Products Japan

Silicon Sensing

Products UK

Page 5: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Who we are

5

BAE Systems

acquires

Condor Pacific &

forms

Inertial Products

(2002)

J.F. Lehman

acquires Inertial

Products &

forms Atlantic

Inertial Systems

(2007)

UTC acquires

Goodrich and

forms UTC

Aerospace

Systems

(2012)

Goodrich

acquires AIS

(2009)

Page 6: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

What a gyroscope does

• Angular rate sensors, are used whenever rate of turn sensing is required without a fixed

point of reference. This separates gyros from any other means of measuring rotation,

such as a tachometer.

• Traditionally, gyros (gyroscopes) were much like the children’s toy – a spinning mass

supported such that its position in inertial space remains fixed and allowing rotation of its

support structure to be measured.

• The world of inertial sensors has turned on its head with the emergence of ’solid state’

non-rotating rate sensors, still colloquially known as gyros. Their construction in silicon

(or sometimes quartz) explains their other descriptive name of ‘MEMS’ (Micro-machined

Electro-Mechanical Systems) devices.

• MEMS gyros emerged through the need to overcome the biggest problems associated

with traditional spinning wheel gyros – mechanical issues such as fragility, reliability,

stiction, wear, backlash and overall life.

• Based on a vibrating element, MEMS gyros sense rotation rate through a phenomenon

known as coriolis.

6

Page 7: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Current Product Range

• Single Axis Gyroscopes

– PinPoint®

– CRS09/CRS39

– CRH01

– CRG20

– CRS03/CRS07

• Combination Sensors

– Orion ®

• Accelerometers

– Gemini ®

• Multi-axis

– DMU02

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Page 8: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Applications

• Platform Stabilisation:

Camera Stabilisation

• Antennas

• Agriculture Spray Booms

Cranes

• Fork Lift Trucks

• Vehicle Dynamic Measurements

• Proving and Qualification

• Motorsport

Black box/accident recorders

• Lean Angle Measurement

Ride monitoring

• Flight Instruments and Avionics

• AHRSs, VRUs, VRSs

Autopilots

UAVs

8

Page 9: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Applications

• GPS Integration and Augmentation:

Autosteer – Precision Agriculture

Auto-helms

Tilt Compensation – Precision Agriculture

Navigation

• Guidance Navigation and Control:

Vehicle Navigation

Position Monitoring

Surveying

Vehicle Guidance and Control

• Rail:

Surveying and Track Condition Monitoring

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Page 10: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Applications

• Automotive:

Black box/accident recorders

Navigation

• Technical Toys

Model Helicopters

Robotics

Education Kits

Inverted Pendulum

• Plant and Power Equipment:

Power Tools, safety and control

Lawn Mowers

Domestic/Industrial Robots

Torque Wrenches

Robotic Vacuum Cleaners

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Page 11: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

A Vibrating Structure Gyroscope, VSG

Sensor Head

A Gyroscope consists of a vibrating structure plus controlling electronics.

11

Page 12: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

• Silicon Sensing’s gyroscopes are Vibrating Structure Gyroscopes, VSGs

• These VSGs use shell (cylinder or ring) structures and work on the Coriolis principle where forces are observed when a linear motion occurs in a rotating frame.

• The closed loop technology provides excellent scale factor and performance over wide rate and temperature ranges.

• The technology has a very rugged design and construction and delivers superior performance than its competitors using other structures (e.g. tuning fork).

Vibrating Structure Gyro (VSG) Technology

VSG5

2010

“Evolution not Revolution”

12

Page 13: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

SGH01 Head

• Deep trench etched in bulk silicon

• Stable and robust crystalline silicon - 100µm thick

• Planar construction

• Single crystal pane

• Stability of key parameters (fn, f1-f2, Q1-Q2)

• 8 dog Legs to support the vibrating ring.

• Ring diameter: 6mm

• Leg width: 60m

• Each leg carries three electric tracks

13

Page 14: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

How the VSG works

No angular rate applied

n

n

n

n n

n

n

n

c

n

n

n

n n

n

n n

n

n

n n

n

n

n

14

Page 15: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

With angular rate applied

How the VSG works

n

n

n

n

F c = Coriolis Force

n

n

n

n

F c

F c

F c

Resultant

Radial Motion

Applied Rate n

n

n

n n

n

n

n

F c = Coriolis Force

n

n

n

n n

n

n

n

F c

F c

F c

Resultant

Radial Motion

Applied Rate

15

Page 16: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

VSG3 Sensor Head Construction

can base

support glass lower pole

upper pole

silicon

magnet

can lid

pedestal glass

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Page 17: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Electronic Control Closed Loop Operation

Sensor Head

Electronic control loop and the sensor head needed to make a gyroscope. Electronic control loop and the sensor head needed to make a gyroscope.

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Page 18: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

• CRS09

• Rate Ranges ± 100º/s and ± 200º/s

• Bias Instability ~ 0.6º/h

• CRS39-01 (unpackaged) CRS39-02 (packaged)

• Rate Range ± 25º/s

• Bias Instability ~ 0.3º/h typical

• CRS39-03 (unpackaged)

• Rate Range ± 25º/s

• Bias Instability ~ 0.08º/h typical

• CRH01 and CRH02

• Rate Range ± 25º/s ± 100º/s ± 200º/s and ± 400º/s

• Bias Instability ~ 0.2º/h (CRH01), ~ 0.1º/h (CRH02) typical

• CRH01

High Performance MEMS Gyroscopes

18

CRS09

CRS39-01

CRS39-03

CRS39-02

CRH01

CRH02

Page 19: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

North Finding – Indexing Technique.

Sensitive Axis

Table

Indexing Table

CRS39

NORTH

Measurement 1

Measurement 2

Measurement 3

Measurement 4

180°

90°

270°

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Page 20: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

North Finding – Indexing Technique.

Measurement 1

Measurement 2

Measurement 3

Measurement 4

180°

90°

270°

Heading = ATAN2 ( Meas1 – Meas2)

( Meas3 – Meas4)

where

Meas1 = EarthRate1+FixedErrors1+VariableErrors1

Meas2 = EarthRate2+FixedErrors2+VariableErrors2

Meas3 = EarthRate3+FixedErrors3+VariableErrors3

Meas4 = EarthRate4+FixedErrors4+VariableErrors4

but

EarthRate2 =-EarthRate1 and EarthRate4 = -EarthRate3

FixedErrors2=FixedErrors1 and FixedErrors4=FixedErrors3

therefore

( Meas1 – Meas2) = 2xEarthRate1 + ΔVariableErrors12

( Meas3 – Meas4) = 2xEarthRate3 + ΔVariableErrors34

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Page 21: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Bias Instability and Angle Random Walk

• The standard deviation of the bias changes between successive averages is plotted against the averaging period (or Correlation Time).

• Raw noise from the gyroscopes can be seen at the sampling frequency (there is no averaging here) at the left side of the chart, i.e. at 0.002 seconds above.

• Angle Random Walk can be calculated from the point where the -0.05 Gradient for a particular plot intercepts the 1 second point and then divided by 60. For the CRS09 above, the gradient intercepts at 2.8 deg/h, giving an ARW = 0.047 deg/√h.

• Bias Instability is read from the lowest part of the plots, 0.6 deg/h for CRS09.

Allan Variance

0.1

1.0

10.0

100.0

1000.0

10000.0

0.001 0.010 0.100 1.000 10.000 100.000 1000.000

Correlation Time (sec)

Bia

s S

tan

dar

d D

evia

tio

n

deg

/h

CRS09 CRG20 PinPoint

Gradient = -1

Gradient = -0.5

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Page 22: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

CRS39: Allan Variance.

CRS39-01 CRS39-03

Bias instability improved from 0.3º/h to 0.08º/h

Angle Random Walk improved from 0.013º/√h to 0.0083º/√h

22

Page 23: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

North Finding Accuracy – Raw Measurements

Single Measurements Unit 2. Single Measurements Unit 1.

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Page 24: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

North Finding Accuracy – Improvements

• Use more than one device

• Use n devices to get √n improvement factor.

• Use multiple measurements

• Use n measurements to get √n improvement factor.

• Ensure the device is warmed up

• Stable temperature improves bias instability.

24

Page 25: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

North Finding Accuracy – Averaged

Averaged Measurements. Single Measurements.

25

Page 26: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

North Finding Accuracy – After Warm Up.

Averaged Measurements Unit 2

After Warm Up.

Averaged Measurements Unit 1

After Warm Up.

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Page 27: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Summary

• Who we are

• What a gyroscope does

• Current products

• Typical applications

• MEMS gyroscopes – how they work.

• High precision gyroscope

• North finding

– Techniques

– Important parameters

– Test Results

• Summary

• Questions/Discussion

27

Page 28: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Questions/Discussion

Contact Details:

Silicon Sensing Systems Ltd.,

Clittaford Road

Plymouth

Devon

PL6 6DE

Tel: +44 (0) 1752 723330

www.siliconsensing.com

28

Page 29: Inertial Technology For North Finding - Silicon Sensing · Inertial Technology For North Finding Steve Clarke, Applications Engineer. December 2013 . Silicon Sensing is a joint venture

Silicon Sensing is a joint venture between Atlantic Inertial Systems and Sumitomo Precision Products

Inertial Technology For North Finding

December 2013