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ContentsGeneral description of function1. Application

1.1 Designated use 1.2 Non-designated use1.3 Technical data

2. Safety instructions3. Identification4. Flow diagram5. Installation6. Start-up

6.1 Start-up (all gas types except fluorine mixtures)

6.2 Operation6.3 Purge and passivation regulation

7. Changing cylinders8. Shut down9. Maintenance/Repair

General description of functionThe purge block SBE/3 is connected with the pressure regulator E61/62 (Fig.1). The purge and connection block SBE/3 is used for purging the complete sytem when starting up for the first time when changing cylinders without contaminating the regulator.

. During the critical process of the cylinder change after opening the shut-off valve at the circulation gas inlet the purge gas flows through the

capillary tube into the inside of the closed cylinder valve. It then flows, loaded with the contaminated material, around the capillary tube towards the shut-off valve at the purge

gas output. For gas types with a low vapour pressure the purge block SBE/3 with a pressure gauge is

available (Fig.2).

The system has to be used according to these instructions for use and especially the safety instructions!

8. Shut down

9.

For long term ending operation or after maintenance work on the fitting system (opening thesystem) the whole system must be flushed through, in accordance with Section 6.

8.1 Short term ending operation (< 12 h)a)Close shut-off valve at the consumer.b)Close shut-off service gas valve.

8.2 Long term ending operation (> 12 h)a)Close the shut-off valve at the consumer. Close the service gas shut-off valve. Close service gas cylinder valve. b)Open purge gas output shut-off valve (relieving pressure) and close again.c)Turn the handle left to release the pressure on the pressure control.

Maintenance / Repair9.1 General Instructions:

All purge blocks and fittings are free of oil and grease and free of foreign parts and therefore suited for spotlessly clean gas areas. When handling it is essential that contact or

contamination with oil or grease are avoided.The total share of halogenated hydrocarbons as hydrocarbons is reduced to a minimum by a special cleaning process. Fittings for the ultra-trace analytics (< ppb) are available on request.When using fittings with ECD detectors the fittings must not come into contact with or be

purged with halogen containing hydrocarbons (e.g. TRI, tetra or freon).The function and tightness of the fitting systems must be checked regularly. If there are faults in operation they are to be immediately taken out of operation and be taken for repair to the appropriate Messer dealer.Unauthorised repairs and alterations will lead to retraction of the guarantee and liability

conditions.9.2 Materials:

When using corrosive and corroding gases resistance is only available with dry gas and dry purged fittings in the long term. Errors in handling or the use of gases which are not quite

dry can therefore easily lead to wear and tear of materials and a restriction in their working lifespan.We therefore advise a regular check of the fittings at suitable time intervals in accordance with the conditions for use.The fittings must be stored in a dry place, in order to avoid atmospheric humidity penetration.

9.3 Repair:Repairs may only be carried out by qualified persons in authorised workshops.Only original spare parts may be used. The materials are prepared in accordance with the particular type of gas, so always state the type of gas.Following repair the fittings are checked for function, tightness and cleanliness of the surfaces which come into contact with the gases. When start-up commences again an adequate flushing must take place (see Section 6.).If repairs are unauthorised or spare parts which are not original are used, any responsibility for damage arising there from and the manufacturer's guarantee are cancelled.When sending back fittings, ensure that they have been sufficiently purged and confirm in writing that the fittings have been purged thoroughly!

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Fig.1 SBE/3-E61/62

Fig.2 SBE/3 with pressure gauge

GES_SBE3_E61E62 Edition 0211Änderungen vorbehalten© Spectron Gas Control Systems GmbH

R

spectrocemInstructions of use

SBE/3 - E61/62Purge block with pressure regulator

for specialty gases

10/20/50 bar

1,7 kg

max. 1,5/4 bar

1,9 kg1,6 kg

Materials:

Diaphragm pressure

Valve seat sealing:Diaphragm purge block:

Purge gas in-/outlet/process gas outlet:

SS 316L

PVDF PCTFE

PCTFE

Weight:

SS 301

1/4-18 NPT female1/4-18 NPT female

Hastelleoy C276

E61SBE/3 E62

max. 200 barmax. 20 m³/h N2 max. 5 m³/h N2

Connection sealing pressure reg.:Inlet pressure connection:

Outlet pres. connection pres. reg.:

1DIN 477 ), according to gas type

Inlet pressure P :V

Outlet pressure P :H

Flow rate Q:

Body:

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6.3.1 Passivation processa) Before passivation the whole gas-flow surface area must be purged in accordance with

Section 6.1.3 to 6.1.4 with a purging gas whose quality is at least 5.0.b) All shut-off valves are closed, the pressure regulator is released (by turning the handle

to the left). Open the service gas shut-off valve and turn the handle of the pressure control approx. 1-2 turns to the right.

c) Slowly open the service gas cylinder valve until the admission pressure control shows 10 bar and the outlet pressure gauge approx. 1-2 bar. Then close the cylinder valve again immediately.

d) Set the pressure control to maximum back pressure by turning the handle to the right.e) Slowly open the topped shut-off valves and let the fluorine mixture stand up to the consumer (approx. 30 mins).f) The passivation process 6.3.1 b) to e) must be repeated at least once.

Attention: If during the passivation the place becomes warmer, the pressure control must immediately be released and process 6.3.1 must be repeated.

6.3.2 Start-up (after the passivation process):a) Slowly open the service gas cylinder valveb) Possibly readjust the pressure control c) Ready for extraction

Also adhere to the passivation regulations for changing the cylinder (Section 7.2)!

Changing the cylinderFor each change of the service gas cylinder the cylinder connection must be checked for tightness. It is also recommended to replace the cylinder connection seal every time a cylinder is replaced.

7.1 Changing the cylinder (for types of gas other than fluorine mixtures):Set purging gas pressure of at least 3 bar (Medium e.g. nitrogen 5.0). Ensure that all

exhaust gas leads are connected and that the purging gas can be safely removed.a) Close the shut-off valve at the consumer. Close service gas cylinder valve. Close service

gas shut-off valve. Open purging gas output shut-off valve and close it again (relieving pressure).

b) Open purging gas input shut-off valve and close again after 1 sec (pressure build-up)c) Open purging gas output shut-off valve and close it again (relieving pressure)d) Repeat steps b) and c) at least 10 timese) Detach cylinder connection. Close the cylinder valve output of the cylinder which has

been emptied with the safety cap and screw the safety cap over the cylinder valve.f) Replace the service gas cylinder and connect in accordance with Sections 6.1.1 and

6.1.2.g) Check tightness of cylinder connection. h) Carry out steps b) and c) at least 5 times.i) Slowly open the cylinder valve. Slowly open the service gas shut-off valve and start the

operating cycle.Attention: For fluorine mixtures observe the passivation regulations in Section 7.2!

7.2 Cylinder exchange and passivation regulations for fluorine mixtures:a) Carry out service gas cylinder exchange in accordance with Section 7.1 up to and

including step h).b) Slowly open the service gas cylinder valve and then close it again immediately. Let the

fluorine mixture stand for approx. 30 min. c) Open shut-off valve purge gas output (relieving pressure) and close it again.d) Repeat steps b) and c) at least once.e) Slowly open the cylinder valve. Slowly open service gas shut-off valve. If necessary

readjust the pressure control.f) Ready for extraction

7.

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1. Application1.1 Designated use

Use with gas cylinders for gases or gas mixtures with corrosive or toxic components, where the presence of atmospheic air (particularly humidity) is harmful.

1.2 Use which is not in accordance with regulations Do not use for liquid gases!Do not use for unsuitable types of gas!Do not use at temperatures below -30°C or above +60°C.

1.3 Technical data

1)Cylinder connections for cylinder pressure reduction in accordance with DIN 477 or CGA (US-Norm), BS (British Standard), UNI (Italy), NFE (France), Scandinavia or in accordance with the current country regulations.

Process gas-outlet

Purge gasoutlet

Cylinder valve

Shut off valvePurge gas outlet

Shut off valvepurge gas inlet

Shut off valveProcess gas

Purge gas-inlet

Fig. 3

Capillary tube

Connection supportPurge block

Cylinder valve

Process gas

Cylinderconnection seal

Fig. 2

Purge gas

process gas

purge gt ase l in

purge gas outle

t

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2. Safety instructions2.1 All items of information marked are valid as special safety instructions.2.2 These pressure regulators adhere to state-of-the-art technology and

to the demands of the exsiting standards and regulations.2.3 Changes or modifications are not allowed to be made to the pressure regulator without the

prior consent of the manufacturer.2.4 The result of improper handling and improper use as intended can involve

risks for the user and other persons as well as damage to the device.2.5 The equipment must be operated by suitable trained personnel only.2.6 Regulations to be adhered to:2.6.1 Accident prevention regulations

-BGR A1 „General regulations“-BGR 104 „Guidelines for the avoidance of danger of explosion“-BGR 132 „Guidelines for the avoidance of danger of explosion following electrostatical supercharging- BGR 500, Charpers 2.26, 2.31, 2.32 und 2.33- Technical roules for liquified gases

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Fig.5 Purge block:

process gas

tel pn ui r gs e ag

purge gas outle

t

3. Labelling

Fig. 8 Purge block with pressure regulator:

1

2

3

4

5

6789

10

11

process gas pus rga eg

1 Connection sealing2 Cylinder valve 8 Shut-off valve - purge gas inlet3 Pressure gauge - inlet pressure 9 Shut-off valve - process gas4 Relief valve 10 Transition part5 Pressure gauge - outlet pressure 11 Pressure regulator6 Pressure regulator - handknob

7 Shut-off valve - purge gas outlet

6.2 Operation

To substitute the purge gas in the fittings by using process gas, repeat the pressure build up at least 4-5 times. This is to homogenize the system.a) Open purge gas inlet valve. Close the valve after 1 sec.b) Open shut-off valve service gas. The pressure of the gas cylinder will be shown on the pressure gauge of the pressure regulator.c) Adjust the required outlet pressure on the pressure regulator. Pressure will be shown on the pressure gauge. d) Open shut-off valve outline of the pressure regulator. Let the gas escape and then close the valve. Open the shut-off valve of the gas cylinder after the last cycle of pressure build up and begin the working process.

6.3 Purge and passivation regulationsFluorine mixtures are very strong toxic and corrosive gases. Strong reactions can occur if surfaces which have not been passivated come into contact with fluorine mixtures or are linked with (atmospheric) humidity!

Therefore purging and passivation regulations must be adhered to in the outmost detail! It is also strongly recommended to replace the cylinder connection seal whenever the cylinder is replaced!

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2.6.2 Laws, prescriptions, technical regulations- Laws relating to technical working substances, (apparatus safety act, FTA) with general

management regulations, as well as indexes A and B of the GtA.- Prescription relating to pressure containers, pressure gas containers and filling

equipment, pressure container prescription) and general management regulations as well as appendices to the pressure container prescription.

- Technical regulations pressure gases TRG, particularly TRG 280- Technical regulations TRR pipelines, particularly TRR 100- Ordinance relating to electrical equipment in rooms where there is a danger of explosion (ElexV).- Electrical equipment which is set up in areas where there is a danger of explosion VDE

0170 / DIN 57165- Electrical operating material for areas where there is a danger of explosion

VDE0170/DIN 57 165

2.6.3 Code of practice and guidelines- Guidelines for the avoidance of danger of explosion following electrostatic supercharging- EU-Guideline for pressure equipment devices (97/23/EG)- Guidelines for laboratories ZH1/119- Code of practice when handling pressure gas cylinders (DVS 0212)- Safety data sheets relating to the current sort of gas

2.7 Use only for gas types the pressure regulator is labelled for (see item 3).2.8

2.9 Do not use at temperatures below -30°C or above +60°C.2.10 The valve has always to be opened slowly! 2.11 All parts coming into contact with oxygen must be kept in oil-free and grease-free condition.

Fire or explosion hazard!2.12 Smoking or open fire (e.g. candles) in the vicinity of the system is strictly prohibited.

Fire and explosion hazard!2.13 Protect gas cylinders against falling.2.14

- High voltage protection equipment VDE 0185/DIN 57 185- Instructions for the inclusion of pipelines in safety measures of high voltage equipment

with a nominal voltage of up to 1000 V, VDE 0190

In case of flammable gases, thedischarge of the gas from the relief valve (4) must be ensured. For this use connector 1/8-NPT/6mm pipe (art. no. 0291677).

No adapters must be used between the gas cylinder valve and the pressure regulator.

1 Max. operating pressure2 Material identification3 Charge number4 Control stamp showing material test passed5 Number of the gas cylinder connections

in accordance with DIN 477:1 W21.8 x 1/14 LH, 3 Clamp clip,5 1” LH, 6 W21.8 x 1/14,7 G5/8 inside, 8 1”,9 G 3/4, 10 W24.32 x 1/14,11 G3/8, 13 G5/8 outside,14 M19 x 1.5 LH

or identification of gas cylinder connections for the specific country

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4. Flow diagram

5. Installation

5.1

5.2

5.2.1

.5.2.2

Mount the purge gas pipe onto the clamping ring screw fitting on the purge gas inlet of the purge block (see Fig. 3, Fig. 9a).

When using toxic or inflammable gases it must be ensured that the purge gas is diverted in a safe manner.

The waste gas pipes are to be connected to the clamping ring screw fitting on the purge gas output of the purge block (see Fig. 3, Fig. 9a) and on the relief valve of the pressure controlInsert the pipes into the screw fitting(s) and tighten with a union nut and 1 ¼ turns.

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Fig. 6 6.1 Start-up (for all gas types except fluorine mixtures)6.1.1 Before screwing on the purge block check whether the screw thread of the cylinder

valve is in perfect condition. Clean the cylinder outlet valve (Kleenex-cloth with acetone)

6.1.2 Check that the thread of the connection nut as well as the cylinder connection seal on the purge block are in perfect condition (see Fig. 2, 3). Screw the purge block unit by

hand on the service gas cylinder valve and tighten with a spanner, do not use a spanner extension piece! Check and ensure that the purge gas supply pipe and purge gas drain(s)

are connected in accordance with installation instructions. Ensure there is safe drainage of the waste gas from the purge gas output and relief valve!

6.1.3 Set the purge gas pressure at least 3 bar (medium e.g. N2 5.0)!Close all shut-off valves like- service gas cylinder valve- service gas valve purge block- purge gas inlet valve purge block- purge gas output valve purge block- service gas shut-off valve (with SE40) as well as all station topped shut-off valves.Release the pressure on the pressure regulator by turning the handle to the left.

6.1.4 Service gas shut-off valve/purge block (before and after changing gas cylinder)a) Open purge gas inlet valve (pressure build up). Close after 1 sec.b) Open purge gas outlet valve. Let the gas escape and close the valve.Repeat steps a) and b) at least 4-5 times.

CV1

V4

SBE/3

V3V2

V1

PR1

F1

RV1

Consumer

Purge gas inlet

Purge gas outlet

PI2

PI1

E61/62

SBE/3-E61P1: 200 bar P2:20 bar

718. …0041 Manufacturing date

Article No.

Max. inlet pressure

Max. adjustable outlet pressure

Type

Nameplate:

Key to Flow diagram:

V4

V2

V1 Service gas cylinder valve

Shut-off valve purge gas output

Shut-off valve service gasV3

Nonreturn valve purge gasCV1

Particle filterF1

Shut-off valve purge gas input

Relief valveRV1

PI2 Outlet pressure gauge

Inlet pressure gaugePI1

PR1 Pressure control

6. Start-upBefore start-up the identification should be checked (see section 3.), to ensure the purge blockand extraction fitting are suited to the envisaged purpose.The purge block and the pressure regulator should always be only used for the type of gas,

that was named on the order e.g. a particular mixture of gases with reactive components. Theinitial start-up of the fittings should also take place with this sort of gas.

Attention: When using fittings for gas mixtures with a fluorine content of up to 10% the passivation regulations in section 6.3 are particularly to be applied! Fluorine mixtures are

very strong toxic and corrosive gases. Strong reactions can occur with surfaces areas which have not been passivated with fluorine mixtures or linked with (atmospheric) humidity!

6.1.5 Service gas shut-off valve/purge block/pressure regulator a) Open purge gas inlet valve. Close the valve after 1 sec.b) Open service gas valve.c) Set the required outlet pressure by turning the hand knob of the pressure regulator clockwise (outlet pressure will be shown on the outlet pressure gauge)d) Open purge gas outlet valve. Let the gas escape and then close the valve.e) Repeat steps a) to d) at least 4-5 times.

6.1.6 Service gas shut-off valve/purge block/pressure regulator/consumer (first start-up)a) Open purge gas inlet valve. Close the valve after 1 sec.b) Service gas valve is still open, pressure regulator is still adjusted. c) Open shut-off valve outline of the pressure regulator. d) Open shut-off valve outline of the consumer. Let the gas escape and then close the valve. e) Repeat steps a) to d) at least 4-5 times.All shut-off valves are closed, pressure regulator is released. Check connections for leakage while purging.

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Fig.7

Purge gas inlet

Waste gas outlet

Relief valve connection

Service gas outlet