intel 22nm soc briefing

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Intel 22 nm Tri-Gate SoC Technology 2012 IEDM Paper Preview 1 Mark Bohr Chia-Hong Jan Intel Senior Fellow Intel Fellow December 6, 2012

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Intel 22nm SoC Briefing

TRANSCRIPT

Intel 22 nm Tri-Gate SoC Technology 2012 IEDM Paper Preview

1

Mark Bohr Chia-Hong Jan Intel Senior Fellow Intel Fellow

December 6, 2012

Key Messages

2

• Intel is presenting a paper describing it’s 22 nm Tri-Gate SoC technology at the International Electron Devices Meeting in San Francisco on December 10

• Intel develops both CPU and SoC versions of each technology generation to support a wide range of products from high performance servers to low power cell phones

• 22 nm Tri-Gate SoC transistors cover a wide range from high performance to ultra-low leakage

• Additional devices on this SoC technology include high voltage I/O transistors, precision resistors, capacitors and inductors

• Intel’s 22 nm SoC technology will be ready for high volume manufacturing in 2013

Intel Logic Technology Roadmap

3

Intel develops both CPU and SoC versions of each generation

32 nm 22 nm 14 nm 10 nm

Name: P1268 P1269 P1270 P1271 P1272 P1273 P1274 P1275

Product: CPU SoC CPU SoC CPU SoC CPU SoC

Manufacturing Development Research

Transistor Performance vs. Leakage

4

32nm45nm1x

0.1x

0.01x

0.001x

65nm 22nm

LaptopUltrabook™

Tablet

Pocket Device

Server

Desktop

A wider range of transistors is needed for a wider range of products

Low

er T

rans

istor

Lea

kage

Higher Transistor Performance

22 nm SoC Transistor Options

5

Transistor Type High Speed Logic Low Power Logic High Voltage

OptionsHigh

Performance(HP)

Standard Perf./ Power

(SP)

Low Power(LP)

Ultra Low Power(ULP)

1.8 V 3.3 V

Vdd (Volt) 0.75 / 1 0.75 / 1 0.75 / 1 0.75/1.2 1.5/1.8/3.3 3.3 / >5

Gate Pitch (nm) 90 90 90 108 min. 180 min. 450Lgate (nm) 30 34 34 40 min. 80 min. 280

N/PMOS Idsat/Ioff (mA/um)

1.08/ 0.91@ 0.75 V,100 nA/um

0.71 / 0.59@ 0.75 V,1 nA/um

0.41 / 0.37@ 0.75 V30 pA/um

0.35 / 0.33@ 0.75 V15 pA/um

0.92 / 0.8@ 1.8 V

10 pA/um

1.0 / 0.85@ 3.3 V

10 pA/um

Mix-and-match flexibility of transistor types

22 nm SoC Transistor Performance

6

0.001

0.01

0.1

1

10

100

0 0.5 1

Ioff

(nA

/um

)

IDNsat (mA/um)

30 pA

Logic (HP)

Logic (SP)

30 pA

Low Power (LP)

@ 0.75V

30 pA

NMOS

1 nA

100 nA

Low Power (ULP)

30 pA

32 nm [3]

15 pA

32 nm [3]

0.001

0.01

0.1

1

10

100

0 0.5 1

Ioff

(nA

/um

)

IDPsat (mA/um)

PMOS

30 pA

100 nA Logic (HP)

Logic (SP)

30 pALow Power

(LP)

1 nA

@ 0.75V

30 pA30 pA30 pA

Low Power (ULP)

30 pA30 pA30 pA 30 pA

32 nm [3]

32 nm [3]

15 pA

Higher Performance Higher Performance

Low

er L

eaka

ge

22 nm Tri-Gate SoC outperforms 32 nm Planar by 20-65% and covers more than four orders of magnitude in leakage current

22 nm SoC Transistor Characteristics

7

1.E-11

1.E-10

1.E-09

1.E-08

1.E-07

1.E-06

1.E-05

1.E-04

1.E-03

1.E-02

-1 0 1

Ids

(A/u

m)

Vgs (V)

NMOSPMOSHP

SP

Vds = .75V

LP

Vds = -.75 V

Vds = .05 VVds = -.05 V

HP: S.S. = 71 mV/decSP: S.S. = 66 mV/decLP: S.S. = 64 mV/dec

DIBL = 30 mV/V

HP: S.S. = 72 mV/decSP: S.S. = 66 mV/decLP: S.S. = 63 mV/dec

DIBL = 35 mV/V

Sub-threshold Slope and DIBL: The lower the better

22 nm Tri-Gate SoC exhibits superior short channel control with near-ideal sub-threshold slope and DIBL

22 nm Tri-Gate Analog Performance

8

0

5

10

15

65nm Planar

45nm Planar

32nm Planar

22nm Tri-gate

GM

* R

out

GM*Rout@Vgs=peak GM, Vds=1.1 V, NMOS

Improved Analog Performance

Significant gain in Gm*Rout on 22 nm Tri-Gate provides improved analog circuit performance

22 nm SoC Advanced Passive Devices

9

High Q InductorsMIM Capacitor

MetalInsulator

Metal

Precision Resistor

R C L

Normalized Resistance

+ 15%- 15%

10090 110

Advanced passive features include precision resistors, MIM capacitors and high Q inductors

Key Messages

10

• Intel is presenting a paper describing it’s 22 nm Tri-Gate SoC technology at the International Electron Devices Meeting in San Francisco on December 10

• Intel develops both CPU and SoC versions of each technology generation to support a wide range of products from high performance servers to low power cell phones

• 22 nm Tri-Gate SoC transistors cover a wide range from high performance to ultra-low leakage

• Additional devices on this SoC technology include high voltage I/O transistors, precision resistors, capacitors and inductors

• Intel’s 22 nm SoC technology will be ready for high volume manufacturing in 2013