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© 2008 IBM Corporation The Impact of Hot Carrier Injection on Voltage Control Oscillator Lifetime Prediction Chih-Hsiang Ho (Purdue University) Keith Jenkins, Herschel Ainspan, Emily Ray and Peilin Song (T. J. Watson Research Center, IBM) © 2014 IBM Corporation 1 IRPS 2014

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© 2008 IBM Corporation

The Impact of Hot Carrier Injection on Voltage Control Oscillator Lifetime Prediction

Chih-Hsiang Ho (Purdue University)Keith Jenkins, Herschel Ainspan, Emily Ray and Peilin Song (T. J. Watson Research Center, IBM)

© 2014 IBM Corporation

1

IRPS 2014

IBM Research

© 2008 IBM Corporation

Introduction– Reliability tests– Degradation mechanisms: NBTI (negative-bias temperature instability) &

HCI (hot-carrier injection)– LC voltage-controlled oscillator

Effect of ramped voltage stress (RVS) Effect of constant voltage stress (CVS) Analysis of degradation by simulation

– Simulation flow– RelXpert results

Conclusion

© 2014 IBM Corporation

Overview

2

IBM Research

© 2008 IBM Corporation

Unlike single devices, circuit reliability involves multiple degradation mechanisms, such as positive- and negative-bias temperature (PBTI and NBTI) and hot-carrier injection (HCI)

Since each reliability mechanism has different time and voltage exponents, accelerated aging in reliability tests may shift the dominant degradation mechanisms leading to erroneous reliability prediction

Accelerating conditions should be limited to a regime which allows correct extrapolation to real-use conditions.

Analog circuit degradation may differ from digital circuit degradation.

Introduction

© 2014 IBM Corporation 3

IBM Research

© 2008 IBM Corporation

Accelerated aging

Constant Voltage Stress (CVS)

© 2014 IBM Corporation

Measure

Stress

Ramped Voltage Stress (RVS)

4

Stress

Measure

Accelerated voltage can be applied two ways:

IBM Research

© 2008 IBM Corporation

Reliability tests for lifetime prediction – CVS & RVS

Constant Voltage Stress (CVS)

Stress using constant voltage Repeat measurement with different time

(stress voltage) to determine n (m) Extrapolate to operating conditions

© 2014 IBM Corporation

Measure

Stress

5

If BTI is the only degradation mechanism:

Log (VStress)

Log

(D

egra

dat

ion

)

Slope = m

Log (tStress)

Log

(D

egra

dat

ion

)

Slope = n

IBM Research

© 2008 IBM Corporation

Reliability tests for lifetime prediction – CVS & RVS

Ramped Voltage Stress (RVS)

Stress voltage is stepped Sequential CVS with different

voltages Repeat measurement with ramp rate

RR (VRVSMAX) to get n (m+n) Extrapolate to operating conditions

© 2014 IBM Corporation

Log (VStress)

Log

(D

egra

dat

ion

)

Slope = m+n

Log (Ramp Rate)

Log

(D

egra

dat

ion

)

Slope = n

ΔtiΔVi

VRVSMAX

6

 

If BTI is the only degradation mechanism:

IBM Research

© 2008 IBM Corporation

Vout

Vin

V

t (s)

BTI Stress

BTI Stress

HCI Stress

© 2014 IBM Corporation

Reliability tests in device and circuit Levels

Stress conditions can be properly controlled for a specific mechanism in device level

Multiple degradation mechanisms occur in circuit level test (especially under accelerated aging conditions) due to dynamic stress

GND

GND

Vstress NBTIStress

Device Level Circuit Level

Vin Vout

*NBTI: Negative Bias Temperature Instability*HCI: Hot Carrier Injection

7

IBM Research

© 2008 IBM Corporation© 2014 IBM Corporation

Negative bias temperature instability & hot carrier Injection

Accumulated holes in silicon/oxide interface result in breaking of Si-H bonds

The higher temperature, the greater the degradation

Time exponent n ~ 0.2 Independent of switching frequency

NBTI

VGS,GD <0

S D

G

HCI

Hot carriers due to high electric field in the drain side cause breaking of Si-H bonds and traps oxide bulk

Degradation decreases if temperature is too high

Time exponent n ~ 0.5 Linear frequency dependence Strong voltage dependence

VDS >0

S D

G

8

IBM Research

© 2008 IBM Corporation

• Simple and basic building block of many analog circuits

• Differential pair is used as negative resistance

• 45nm SOI technology (no high-k gate oxide; no PBTI of the nFET)

• Frequency is determined by the voltage-controlled capacitors, gate capacitors and inductor

© 2014 IBM Corporation

Tested circuit – LC voltage control oscillator (VCO)

nFET pFET Tail_nFET

Width 8.0 mm 8.0 mm 80 mm

9

IBM Research

© 2008 IBM Corporation© 2014 IBM Corporation

Tested circuit – LC voltage control oscillator VCO)

• Start-up voltage: governed by gain of the cross-coupled pair

• Large signal but requires slow iterative measurement

Internal swing amplitude degrades, but is masked by dividers

• Center frequency: effective capacitance of the pFETs changes as voltage amplitude is reduced

• Small signal but quick measurement

• Phase noise probably sensitive, but measurement time is too long

10

Determining parameters to monitor to detect aging

IBM Research

© 2008 IBM Corporation

Introduction– Reliability tests– Degradation mechanisms: NBTI (negative-bias temperature instability) &

HCI (hot-carrier injection)– LC voltage-controlled oscillator

Effect of ramped voltage stress (RVS) Effect of constant voltage stress (CVS) Analysis of degradation by simulation

– Simulation flow– RelXpert results

Conclusion

© 2014 IBM Corporation

Overview

11

IBM Research

© 2008 IBM Corporation

1.0 1.5 2.0 2.5 3.00.01

0.1

stress time=5000 sec

T=60 oC

f

(%)

stress voltage (V)

1.0 1.5 2.0 2.5 3.0

1

10

stress time=5000 sec

T=60 oC

V

sta

rtu

p (

%)

stress voltage (V)

Ramped voltage stress - voltage dependence

Startup Voltage Degradation Frequency Degradation

Different slopes shown in high and low stress voltage regimes

n+m is not constant so more than one mechanism is involved

*Startup Voltage is the minimum supply voltage required for oscillation

© 2014 IBM Corporation12

IBM Research

© 2008 IBM Corporation

1.0 1.5 2.0 2.5 3.0

0.1

1

10

V

sta

rtu

p (

%)

4.4 GHz VCO

6 GHzVCO

8 GHz VCO

stress voltage (V)

4 5 6 7 8 94

5

6

7

8

9

10

11 at 2.6 V stress voltage

V

sta

rtu

p (

%)

oscillator frequency (GHz)

Ramped voltage stress – frequency dependence Low and high voltage regime show different frequency dependence The dependence in high voltage regime is linear suggesting HCI

© 2014 IBM Corporation13

IBM Research

© 2008 IBM Corporation

Introduction– Reliability tests– Degradation mechanisms: NBTI (negative-bias temperature instability) &

HCI (hot-carrier injection)– LC voltage-controlled oscillator

Effect of ramped voltage stress (RVS) Effect of constant voltage stress (CVS) Analysis of degradation by simulation

– Simulation flow– RelXpert results

Conclusion

© 2014 IBM Corporation

Overview

14

IBM Research

© 2008 IBM Corporation

1.6 1.8 2.0 2.2 2.4

0.2

0.3

0.4

0.5

0.6

frequency

startup voltage

po

we

r la

w s

lop

e,

n

stress voltage (V)

Constant voltage stress - voltage dependence

© 2014 IBM Corporation

Time exponent n (POWER LAW SLOPE?) depends on stress voltage n increases with stress voltage indicating the shift of dominant

degradation mechanism from NBTI to HCI

15

1000 10000

0.1

1

10

V

sta

rtu

p (

%) 2.2 V

2.4 V

1.6 V

2.0 V

stress time (s)

IBM Research

© 2008 IBM Corporation

1.6 1.8 2.0 2.2 2.4

0.4

0.5

0.6

0.7 8.4 GHz oscillator

6.0 GHz oscillator

po

we

r la

w s

lop

e,

n

stress voltage (V)

Constant voltage stress – frequency dependence

© 2014 IBM Corporation

High frequency oscillators have larger time exponents, as expected if HCI is dominant

16

IBM Research

© 2008 IBM Corporation

Introduction– Reliability tests– Degradation mechanisms: NBTI (negative-bias temperature instability) &

HCI (hot-carrier injection)– LC voltage-controlled oscillator

Effect of ramped voltage stress (RVS) Effect of constant voltage stress (CVS) Analysis of degradation by simulation

– Simulation flow– RelXpert results

Conclusion

© 2014 IBM Corporation

Overview

17

IBM Research

© 2008 IBM Corporation

RelXpert integrated reliability analysis

The generated sub-circuit model for degraded transistorHCI and NBTI/PBTI Analysis Flow

© 2014 IBM Corporation18

Courtesy of Cadence Design Systems,Inc.

IBM Research

© 2008 IBM Corporation

1.0 1.5 2.0 2.5 3.0

0.0

0.1

0.2

0.3

0.4

0.5

f (%

)

RelExpert

measured

stress voltage (V)

RelXpert degradation prediction

© 2014 IBM Corporation19

Simulations have been scaled for best match

frequency change under ramped voltage stress

IBM Research

© 2008 IBM Corporation

1.0 1.5 2.0 2.5 3.00.00

0.05

0.10

0.15

0.20

0.25

NBTI

HCI

total

V

th (

V)

stress voltage (V)

RelXpert analysis nFET (IBM 45nm) is insensitive to HCI and BTI degradation VCO Degradation is mainly from pFET NBTI dominates in low voltage regime while HCI dominates in high

voltage regime

© 2014 IBM Corporation

pFET Degradation

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IBM Research

© 2008 IBM Corporation© 2014 IBM Corporation

Conclusions

The voltage dependence of n in constant voltage stress and n+m in ramped voltage stress is due to the impact of HCI

The dominant degradation mechanism shifts from NBTI to HCI as the stress voltage increases

Degradation of VCO is mainly contributed by the pFETs in the differential pair

The break point observed in RVS test can served as a guideline to define the proper range of stress voltage for suppressing HCI effect and better lifetime prediction

Failure to identify the role of HCI in total stress degradation can lead to large errors in predicting lifetime by extrapolating to real-use conditions

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IBM Research

© 2008 IBM Corporation© 2014 IBM Corporation

Acknowledgements

The authors would like to thank Kevin Stawiasz, who initiated the idea of this work, and Barry Linder and Michael Hauser for technical discussions and encouragement.

This work was supported by the Defense Advanced Research Projects Agency (DARPA) under SSC Pacific contract HR0011-0060. Any opinions, findings, and conclusions or recommendations expressed in this publication are those of the authors and do not necessarily reflect the views of the DARPA or U.S. Government.

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