june 1, 2014 multipole for uniformity control of ribbon ion beam nick white
TRANSCRIPT
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April 10, 2023
Multipole for uniformity control of ribbon ion beam
Nick White
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Uniformity Control Concept
Steel
Coils
Ion Beamtravel
US Patent 7,078,713
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Operation of Multipole
• The following pictures show the effect of adjusting a single pair of coils
• Note how the beam that passes between these coils is compressed in one direction and expanded in the other
• The current density in the rest of the beam is unaffected– But there is a slight correctable change in
beam overall width
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Operation (cont)• The following sequence shows the effect of this
adjustment on the beam current profile along the longer beam dimension
• The beam is shown with its density profile overlaid.
• Note that the profile scale changes. It is linked to the highest density present– The current density at the sides of the beam is
not changing
• The process is entirely linear (unlike the VIISta-80)
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Beam is initially non-uniform
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Beam is tuned for best uniformity