Kempur Microelectronics Inc.

The Company was founded on August 13, 2004 in Tongzhou Beijing. It moved to

the current location in Shunyi District, Beijing Tianzhu Free Trade Zone in August of

2006. Kempur is the only company capable of developing, manufacturing, and

selling advanced IC photoresist in China.

Legal representative: Cindy Chen Economic nature: Joint Venture Company US and China

About Us

Kempur Beijing Site Map

Kempur Beijing Site Map Tianzhu, HQ /R&D/MFG

Fengyuan, Sales Office

Yanshan, MFG

Manufacturing capacity:

•500 ton/year G/I line photoresist

•30 ton/year KrF photoresist

•1000 ton/year photoresist ancillaries.

•300 ton/year polyisoprene photoresist

•1000 ton/year negative photoresist ancillaries.

货物出口

办公入口

Kempur Manufacturing Capacity

KemLab, Inc. was founded in 2012 to fill needs in R&D, engineering, scale-up and custom solutions.

KemLab and Kempur are partnered to serve US and Asian markets.

The partnership allows KemLab to be agile and flexible with the strength of Kempur to solve problems both large and small.

www.KemLab.com sales@KemLab.com 254 West Cummings Pk, Woburn, MA 781-281-0174

Partnership: +

2004 2006 2008 2010 2011 2012 2013 2014 2015

First Advanced

I-Line

Production

Line

First KrF

Production

Line

First

Lift-Off

Resist for

IC/LED

Fab

First ArF

Dry Pilot

sample

First I-Line

Resist for

IC- Fab 6

inch

First I-

Line

Resist

for IC-

8” Fab

First KrF

Resist for

8” Fab

First

Internatio

nal Resist

Sales

90 nm 45 nm 65 nm 14 nm 32 nm 22 nm

International Technology Roadmap for Semiconductors

China’s Technology Roadmap for Semiconductors

Kempur’s Technological Achievements

90 nm 28 nm 65 nm 40 nm

Technical Development at Kempur – 8 firsts

ISO 9001 and 14001 Certification

Product Control (Our Product) Example: IC Resist: 5315

Management of Raw Materials

All vendors provide CoA’s

We test all incoming materials to verify they meet

requirements

Logistics department is responsible for planning, ordering and

ensuring sufficient onsite supply of raw materials

Variations from specification are negotiated with vendors

How has the China materials supply chain changed and what

is anticipated for the future?

China is pushing to localize their IC supply chain, and is

focused on reducing the demand on imported materials. It’s

intent is to be able to supply it’s local fabs with domestically

made materials.

We expect to increase the fraction of our raw materials

sourced from local vendors

What do fabs inside China need to do to get better and more

reliable materials in a predictable lead times?

Switch to (or second source) domestic vendors.

产业布局

Shenzhen sales

Suzhou, Warehouse

Beijing, Headquarter

Shenzhen, Sales Office

Anhui Quanjiao, MFG (UC)

Why it is difficult to ship materials to fabs in China, and

what can be done to make this easier? -- This is not an issue

for us (please see next page)

Logistics

Logistics Team that works very closely with purchasing departments to

prepare for any upcoming events that may disturb regular shipments.

e.g. APEC Meeting in Beijing

G20 Summit in Hangzhou

Beijing Olympics

Nanjing Youth Olympics

Internal Quarterly Meetings to discuss possible national events that may

disrupt shipments for certain customers.

Disaster Recovery capabilities

e.g. Tianjin Port closure

We have a localized logistics team with high expertise.

Issues with local suppliers

Although China has a lot of chemical manufacturers,

it is difficult for them to produce electronic grade

materials (The market demand is still small).

There are small institutes and vendors that are

capable of producing electronic grade materials but

most lack the quality control system and engineering

to produce stable batch to batch materials.

What do fabs outside of China need to do to get materials

from a China supplier without interruption?

We consider this doable

We have a partner in the US that can help support demand

there

We have a distributor supporting us in Taiwan

Please describe what you would consider your Supply Chain

risks – short term (6‐12 months) and long term (3‐5 years)

Short Term

Difficult to import new materials into China (Customs

Restrictions)

We use partnership with Kemlab to do some testing of new

materials, where appropriate

Long Term

Geopolitical instability

Finding local vendors to supply electronic grade materials.

KMP CPxxxx Positive tone

Thick Film resist

Kempur Resist Portfolio

10mm FT

1mm FT

100mm FT

50mm FT

25mm FT

5mm FT

2mm FT

0.5mm FT

KrF Resist I line Resist Crossover

Resist

Broadband/

G line

DK

1xxx R

esis

t

seri

es for

L/S

C5xxx,

C6xxx,

C7xxx a

nd

C8xxx

seri

es R

esis

t fo

r L/S

E3xxx s

eri

es N

eg.

Resis

t fo

r Lift off

EP

3xxx s

eries

Pos. R

esis

t off

BN

xxx s

eri

es

Neg. cycliz

ed

rubb

er

resis

t

Permanent

Resist

HA

RE

SQ

Epoxy r

esis

t fo

r

ME

MS

and o

ther

applic

ations

KrF Resists

DK1080 – High

resolution

material for use

on Silicon

DK1087 – Thick

resist for use on

silicon (implants,

metal levels)

DK1088 – Line

and space

material for use

on BARC

DK1086 –

Contact Hole

resist under

development

350nm L/S 300nm L/S 250nm L/S

350nm L/S 300nm L/S 250nm L/S

1um L/S at 3um Film Thickness

400nm C/H 300nm C/H 250nm C/H

I line Resists

C7500 – High

resolution

material for use

on Silicon

C8315 for 1 to 2um

thick resist for good

thermal flow

C6111A1 space

resist

C5315 line and

space resist

0.5um 0.45um 0.4um

1.5um 1.0um 0.75um

1.0um 0.8um 0.6um

4.0um L/S at 5.0um Film Thickness

Lift Off Resists

E3130A – 2 to 5um

material for lift off

applications

E3260 – 5 to 10um

material for lift off

applications

E3175 – 2 to 5um

high resolution

material for lift off

applications

5um 4um 3um

5um 4um 3um

4um 3um 2um

FT: 8um

FT: 3.8um

FT: 3.8um

Broad Band Resists

EP3200A – 1 to

2um thick line

and space

positive resist

EN3120 – x to xx

thick negative tone

resist for high heat

resistance

BN series

cyclized rubber

resist

5um L/S Before HB 5um L/S After 200C HB

4um L/S 2um L/S

Photospeed

60mJ/cm2

2.0um 1.5um 1.0um

Thick Film Resists

CP4000 – TMAH

developable material

for 10 to 25um

thickness applications

HARE SQ epoxy resist

for permanent high

aspect ratio features

Negative tone thick film materials are also under development

CP1000 – TMAH

developable material

for 5 to 10um

thickness applications

25um Post 25um C/H 15um L/S 10um L/S

Logo at 50um Film thickness 5um L/S at 25um Film Thickness

Under development

KemLab Photoresists for i-Line, g-line, & broadband;

designed for use with industry standard 0.26N TMAH

Product Suite Attributes

KL Lift Off 1600 Negative Tone

Negative Lift Off Retrograde profile

2 - 10 mm FT

KL Image Reversal Negative / Positive tone

Lift Off Lift off Profile

1 - 2.5 mm FT

KL 5300 Positive tone

Advanced Photoresist 0 - 2 mm FT

for IC fabrication CD 0.55 mm

KL 6000 Positive tone

Thick Photoresist 2 - 12 mm FT

no PEB required

KL 8000-HR Positive tone

Increased Heat Resistance 0 - 2 mm FT

Increased Heat resistance

Short Term Technology Roadmap

Support new, smaller nodes for KrF resists

Improve packaging resist product line

Develop high heat resistance I line materials

Long Term Roadmap

Expand types of products Kempur produces

Grow sales to export markets

Improve synthetic capability

Research quantities made in house

Partner or other arrangement for supply of materials for new products

that require Kempur developed materials

Explore production of ArF materials

Strength of Our Market

The market for replacement I line and G line resists is large and many

opportunities exist in China

The Chinese KrF and ArF resist market is growing strongly

The overall IC market in China is growing rapidly as new fabs are built

1 new 8” line in 2016

12 new 12” lines in 2016

For cyclized rubber resist, global demand is shrinking but the related

device production is moving to the far east.

There are opportunities for this material in China and Taiwan for Kempur

Our sales have been constrained by supply

New capacity coming on line in 2017

Business Outlook

Kempur’s business outlook is strong

Growing markets in China

Strong interest in locally produced photoresists

Kempur is introducing new materials in response to

this demand

New factory for cyclized rubber coming on line in

2017. Will enable serving more customers