REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

UNO/DUO 35/65, DUO 35/65 M

Pfeiffer

KIT BILL OF MATERIALS CAN BE FOUND LISTED ON THE ‘KIT COMPONENTS’ PAGES IMMEDIATELY FOLLOWING CORRESPONDING PUMP PAGES.

ALL AVAILABLE SPARES FOR THIS SERIES CAN BE FOUND LISTED ON THE ‘INDIVIDUAL SPARES’ PAGES AT THE END OF THIS SECTION.

KITS

FEATURED SPARES

SEAL KITS SEAL KITS INCLUDE SIGHT GLASS GASKET, O-RINGS, & SHAFT SEALS FOR MINOR MAINTENANCE. MODEL(S) PART NUMBERALL PKE20001T

OVERHAUL KITS OVERHAUL KITS INCLUDE ALL COMPONENTS OF SEALS KITS PLUS SIGHT GLASSES, SPRINGS, VALVES, VANES & OTHER COMPONENTS FOR PUMP OVERHAUL. MODEL(S) PART NUMBERUNO 35 PKE22001TUNO 65 PKE22003TDUO 35 PKE22005TDUO 65 PKE22011TDUO 35 M PKE22010TDUO 65 M PKE22012T

VANES MODEL(S) PART NUMBERUNO/DUO 35, DUO 35 M 230073(1ST STAGE)

UNO/DUO 65, DUO 65 M 230071(1ST STAGE)

DUO 35/65, DUO 35/65 M 230072(2ND STAGE)

SHAFT SEALS MODEL(S) PART NUMBERALL 310104

PFEIFFER-1

REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

UNO/DUO 35/65, DUO 35/65 M

KIT COMPONENTS

PFEIFFER-2

UNO/DUO 35/65 UNO 35 UNO 65 DUO 35 DUO 35M DUO 65 DUO 65M

PART NUMBER

ITEM DESCRIPTION

SEAL PKE20001T

OVERHAUL PKE22001T

OVERHAUL PKE22003T

OVERHAUL PKE22005T

OVERHAUL PKE22010T

OVERHAUL PKE22011T

OVERHAUL PKE22012T

390014 BALL,STAINLESS STL., 7MM 1 1 1 1 1 1390015 BALL,STAINLESS STL., 8MM 1 1 1 1 1 1640019 BUFFER,30 X 30 X 3.2 4 4 4 4 4 4360060 COUPLING,SPIDER 1 1 1 1440026 DISC,DISTANCE RING 1 1 1 1 1 1780032 FILTER,MESH,SIEVE II 1 1 1 1780034 FILTER,MESH,SIEVE,UNO 35 1780033 FILTER,MESH,SIEVE,UNO 65 120011245 FINGER, EXHAUST 2 4 2 2 3 3300167 GASKET,SIGHT GLASS 2 2 2 2 2 2 24070166 O'RING,VITON,10 X 2.5 2 2 2 2 2 2 2320332 O'RING,VITON,12 X 1.5 1 1 1 1 1 1 1320337 O'RING,VITON,132 X 2.5 1 1 1 1 1 1 14070259 O'RING,VITON,15 X 2.5 2 2 2 2 2 2 2320210 O'RING,VITON,2.1 X 1 1 1 1 1 1 1 14070420 O'RING,VITON,24 X 2.5 4 4 4 4 4 4 44070465 O'RING,VITON,27 X 2.5 1 1 1 1 1 1 1320338 O'RING,VITON,270 X 3 1 1 1 1 1 1 14070621 O'RING,VITON,38 X 3.0 1 1 1 1 1 1 1900068 O'RING,VITON,40 X 5 3 3 3 3 3 3 3320333 O'RING,VITON,42 X 3 1 1 1 1 1 1 148655900 O'RING,VITON,44 X 3 2 2 2 2 2 2 24070065 O'RING,VITON,5 X 1.5 2 2 2 2 2 2 2320152 O'RING,VITON,50 X 3 2 2 2 2 2 2 24070874 O'RING,VITON,59 X 3 1 1 1 1 1 1 14070088 O'RING,VITON,6 X 2.2 1 1 1 1 1 1 191311560300 O'RING,VITON,68 X 3 1 1 1 1 1 1 1320334 O'RING,VITON,78 X 5 1 1 1 1 1 1 1320335 O'RING,VITON,85 X 2.5 1 1 1 1 1 1 1320336 O'RING,VITON,94 X 2.5 1 1 1 1 1 1 1580044 PISTON, HYDRAULIC, VITON 1 1 1 1 1 1440025 RING,DISTANCE 1310104 SEAL,SHAFT,25 X 37 X 7 2 2 2 2 2 2 2780031 SCREEN,FILTER FOR OIL PUMP 1 1 1 1 1 1500023 SIGHT GLASS, 4.5 X 1 X .5 1 1 1 1 1 1490059 SPRING,.8 DIA X 8.4 X 11 LG. 1 1 1 1 1 13838132SV SPRING,PFEIFFER UNO1.5A 1 1 1 1 1 1490052 SPRING,PRESSURE,STAINLESS STL 2 5 4 4 7 7380018 VALVE PLATE, BLUE SPRING STL 1 1 1 1 1 1230071 VANE,GX,1ST STAGE 2 2 2230072 VANE,GX,2ND STAGE 2 2 2 2230073 VANE,GX,2ND STAGE,UNO/DUO 35 2 2 2

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REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

DUO 2.5/5/10/20, DUO 2.5/5/10/20 C

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KIT BILL OF MATERIALS CAN BE FOUND LISTED ON THE ‘KIT COMPONENTS’ PAGES IMMEDIATELY FOLLOWING CORRESPONDING PUMP PAGES.

ALL AVAILABLE SPARES FOR THIS SERIES CAN BE FOUND LISTED ON THE ‘INDIVIDUAL SPARES’ PAGES AT THE END OF THIS SECTION.

KITS

FEATURED SPARES

SEAL KITS SEAL KITS INCLUDE GASKETS, O-RINGS, & COUPLINGS FOR MINOR MAINTENANCE. MODEL(S) PART NUMBERDUO 2.5 PKE00002TDUO 2.5 C PKE00020TDUO 5, DUO 5 C PKE30005TDUO 10, DUO 10 C PKE30001TDUO 20, DUO 20 C PKE30008T9

MAJOR OVERHAUL KITS MAJOR OVERHAUL KITS INCLUDE ALL COMPONENTS OF SEALS KITS PLUS EXHAUST FILTERS, LEAK NOZZLES, HYDRAULIC PISTONS, SIGHT GLASSES, SPRINGS, VALVES & VANES FOR MAJOR OVERHAUL. MODEL(S) PART NUMBERDUO 2.5 PKE02008TDUO 2.5 C PKE02030TDUO 5 PKE32008TDUO 5 C PKE32006TDUO 10 PKE32001TDUO 10 C PKE32004TDUO 20 PKE32011TDUO 20 C PKE32013T

SHAFT SEALS MODEL(S) PART NUMBERDUO 2.5, DUO 2.5 C 310061

CASE GASKETS MODEL(S) PART NUMBERDUO 2.5 (CORK) 194081DUO 2.5 C (VITON) 194081V

SIGHT GLASSES MODEL(S) PART NUMBERDUO 2.5, DUO 2.5C 500015DUO 5/10/20 C 550046

RECOMMENDED OILS TYPE PART NUMBERPLUS 19 (20L/5.28GAL) PP19001GENERAL PURPOSE OIL

PLUS GOLD (1L/1.06QT) PPGOLD001FULLY SYNTHETIC OIL

PLUS FF (20L/5.28GAL) PPFF001FLUSHING FLUID

PFEIFFER-3

REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

DUO 2.5/5, DUO 2.5/5 C

KIT COMPONENTS

PFEIFFER-4

DUO 2.5 DUO 2.5 DUO 2.5C DUO 2.5C DUO 5/5C DUO 5 DUO 5C

PART NUMBER

ITEM DESCRIPTION

SEAL PKE00002T

OVERHAUL PKE02008T

SEAL PKE00020T

OVERHAUL PKE02030T

SEAL PKE30005T

OVERHAUL PKE32008T

OVERHAUL PKE32006T

640017 BUFFER, FOOT, .75" DIA 4 4420043 COUPLING, WASHER,CRS,PFEIFFER DUO 2.5/2 1 1360054 COUPLING,QUICK,VITON 1 1 1300166 FELT PAD 1 120011245 FINGER,EXHAUST 1 1194081 GASKET,CASE,CORK 1 1194081V GASKET,CASE,VITON 1 1300165 GASKET,CORK 1 1300057 GASKET,RING,VITON,BROWN 1 1 1 1194109 GASKET,SIGHT GLASS,VITON 1 1 1360055 HALF COUPLING 1380020 LEAK NOZZLE, 304 SS,PFEIFFER DUO 5/20 1 179569 O'RING,VITON,10.3 X 2.4 MM 2 2 2 2 1 1 14070259 O'RING,VITON,15 X 2.5MM 1 1 1 1 1 1 1320176 O'RING,VITON,15X1.5MM 1 1 1 1 2 2 2320174 O'RING,VITON,16 X 1.0 MM 1 1 2 24071536 O'RING,VITON,165X3.0MM 1 1 14070321 O'RING,VITON,18 X 5.0 MM 3 3 2 2 2 2 2320210 O'RING,VITON,2.1 X 1MM 1 1 1 123970016 O'RING,VITON,22 X 1.5 MM 2 2 2 223970410 O'RING,VITON,22 X 3 MM 1 1 14070420 O'RING,VITON,24 X 2.5MM 1 1320180 O'RING,VITON,25X3.0MM 1 1 123970436 O'RING,VITON,27 X 2.5 MM 1 1 123963115 O'RING,VITON,38 X 3 MM 1 1 1320181 O'RING,VITON,48.9X2.62MM 1 1 14070065 O'RING,VITON,5 X 1.5 MM 1 1 2 24070874 O'RING,VITON,59X3.0MM 1 1 14070088 O'RING,VITON,6 X 2.2 MM 3 3 2 2 3 3 34070949 O'RING,VITON,65X5.0MM 1 1 1320182 O'RING,VITON,75X3.0MM 1 1 123970149 O'RING,VITON,8 X 2 MM 1 1 1 1 1 1 1580044 PISTON,HYDRAULIC,VITON 1 1 1 1310061 SEAL,SHAFT,VITON,SINGLE LIP 1 1 1 1550046 SIGHT GLASS, 2.5 X.78 X.11 INCHES 1 1500015 SIGHT GLASS,ASSEMBLY, PFEIFFER DUO 2.5/2 1 1490046 SPRING,PRESSURE,PFEIFFER DUO 2.5/2.5C 1 1490037 SPRING,PRESSURE,STAINLESS STEEL 4 4490041 SPRING,PRESSURE,STAINLESS STEEL 1 1490036 SPRING,PRESSURE,STAINLESS STL. 4 4640018 VALVE BUFFER,ALUMINUM,PFEIFFER DUO 1 1580043 VALVE FLAP,LONG,STAINLESS STEEL 1 1580042 VALVE FLAP,ROUND,STAINLESS STEEL 1 1570002 VALVE PLATE ASSY, PFEIFFER DUO 2.5/2.5C 1 1380018 VALVE PLATE, STEEL .005"THK,PFEIFFER 1 1192122 VALVE,PLATE,VITNIB UNO/DUO1.5A 1 1230061 VANE,GX,PFEIFFER 1 1230062 VANE,GX,PFEIFFER 2

230063 VANE,GX,PFEIFFER 4230064 VANE,GX,PFEIFFER 1 1230060 VANE,GX,PFEIFFER, DUO 5, DUO 10 2230063C VANE,PEEK,DUO 2.5C 4230062C VANE,PEEK,DUO 5C 2230060C VANE,PEEK,DUO 5C/10C 2

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REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

DUO 10/20, DUO 10/20 C

PFEIFFER-5

KIT COMPONENTS

DUO 10/10C DUO 10 DUO 10C DUO 20/20C DUO 20 DUO 20C

PART NUMBER

ITEM DESCRIPTION

SEAL PKE30001T

OVERHAUL PKE32001T

OVERHAUL PKE32004T

SEAL PKE30008T

OVERHAUL PKE32011T

OVERHAUL PKE32013T

390010 BALL,STAINLESS STL,5MM 1 1 1 1640017 BUFFER, FOOT, .75" DIA 4 4 4 4400056 CHEESE HEAD SCREW,ZINC-PLATED,M4X8 1 1360054 COUPLING,QUICK,VITON 1 1 1 1 1 120011245 FINGER,EXHAUST 1 1 1 1194109 GASKET,SIGHT GLASS,VITON 1 1 1 1 1 1A22305067 INLET STRAINER ASSY RV 2 2380020 LEAK NOZZLE, 304 SS,PFEIFFER DUO 5/20 1 1 1380021 LEAK NOZZLE, 304 SS,PFEIFFER UNO 30M/DUO 179569 O'RING,VITON,10.3 X 2.4 MM 1 1 123949217 O'RING,VITON,100 X 3 MM 2 2 24070259 O'RING,VITON,15 X 2.5MM 1 1 1 2 2 24071536 O'RING,VITON,165X3.0MM 1 1 1320177 O'RING,VITON,18X2.0MM 1 1 1320213 O'RING,VITON,205 X 3MM 1 1 123970410 O'RING,VITON,22 X 3 MM 1 1 1320180 O'RING,VITON,25X3.0MM 1 1 1900178 O'RING,VITON,26 X 3MM 1 1 123970436 O'RING,VITON,27 X 2.5 MM 1 1 1 1 1 102124025 O'RING,VITON,28 X 5 MM 2 2 2 2 2 24070542 O'RING,VITON,32 X 3MM 2 2 2 2 2 223963115 O'RING,VITON,38 X 3 MM 1 1 1 1 1 1320181 O'RING,VITON,48.9X2.62MM 1 1 223970211 O'RING,VITON,50 X 3 MM 1 1 1 1 1 1320152 O'RING,VITON,50 X 3 MM 1 14070088 O'RING,VITON,6 X 2.2 MM 1 1 1 3 3 3320212 O'RING,VITON,62 X 2.5MM 1 1 148652700 O'RING,VITON,66X2MM 1 1 1320182 O'RING,VITON,75X3.0MM 1 1 123970149 O'RING,VITON,8 X 2 MM 1 1 1 1 1 1320215 O'RING,VITON,88 X 3MM 1 1 1580044 PISTON,HYDRAULIC,VITON 1 1 1 1470016 RING,RETAINING,10X1 MM 2 2550046 SIGHT GLASS, 2.5 X.78 X.11 INCHES 1 1 1 1400057 SOCKET HEAD CAP SCREW M5X10 IN-V1 A2-70 1 1490052 SPRING,PRESSURE,PFEIFFER DUO 20 4 4490037 SPRING,PRESSURE,STAINLESS STEEL 4 4490040 SPRING,PRESSURE,STAINLESS STEEL 1 1 1 1640018 VALVE BUFFER,ALUMINUM,PFEIFFER DUO 1 1380018 VALVE PLATE, STEEL .005"THK,PFEIFFER 1 1 1 1192122 VALVE,PLATE,VITNIB UNO/DUO1.5A 1 2230068 VANE,GX, PFEIFFER DUO 10 2230065 VANE,GX, PFEIFFER DUO 20 2230066 VANE,GX, PFEIFFER DUO 20 2230061 VANE,GX,PFEIFFER 1 1 1 1

230060 VANE,GX,PFEIFFER, DUO 5, DUO 10 2230068C VANE,PEEK,DUO 10C 2230065C VANE,PEEK,DUO 20C 2230066C VANE,PEEK,DUO 20C 2230060C VANE,PEEK,DUO 5C/10C 2

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REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

UNO/DUO 1.5/004/008/012/30 A, UNO/DUO 30 M

PFEIFFER-6

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KIT BILL OF MATERIALS CAN BE FOUND LISTED ON THE ‘KIT COMPONENTS’ PAGES IMMEDIATELY FOLLOWING CORRESPONDING PUMP PAGES.

ALL AVAILABLE SPARES FOR THIS SERIES CAN BE FOUND LISTED ON THE ‘INDIVIDUAL SPARES’ PAGES AT THE END OF THIS SECTION.

KITS

FEATURED SPARES

VANE KITSUNO & DUO 1.5 A VANE KITS INCLUDE VANES, LEAK NOZZLE, SPRING & WASHER. MODEL(S) PART NUMBERUNO 1.5 A 080030ITDUO 1.5 A 080130IT

MODEL(S) PART NUMBERUNO 004 A VANE KITS CONTAIN VANES ONLY.

UNO 004 A 080430IT

MODEL(S) PART NUMBERDUO 004 A VANE KITS CONTAIN VANES & THRUST PLATE.

DUO 004 A 080530IT

MODEL(S) PART NUMBERDUO 30 A VANE KITS CONTAIN VANES, COUPLING WASHER & CENTERING RING.

DUO 30 A PKE081130T

SEAL KITSSEAL KITS INCLUDE COUPLING, SIGHT GLASS GASKET & O-RINGS. MODEL(S) PART NUMBERUNO 30 M PKE30006T

REPAIR KITSUNO/DUO 1.5 A REPAIR KITS INCLUDE SIGHT GLASS, OIL BOX GASKET, SHAFT SEAL, VALVE PLATE, FLAP VALVE, CENTERING RING, VANE SPRINGS, LOCKING CAPS & O-RINGS. MODEL(S) PART NUMBERUNO/DUO 1.5 A 080010

UNO/DUO 004/008/012 A REPAIR KITS INCLUDE SIGHT GLASS, PIL BOX GASKET, SHAFT SEAL, SUPPORT RINGS, VANE SPRINGS, ROTOR KEY, O-RINGS & WASHERS.

MODEL(S) PART NUMBERUNO/DUO 004/008/012 A 080410

UNO 30 M REPAIR KITS INCLUDE ALL COMPONENTS OF SEAL KITS PLUS VANE SPRINGS, SIGHT GLASS, PRESSURE VALVE, HYDRAULIC PISTON & OTHER COMPONENTS NEEDED FOR ROUTINE PUMP MAINTENANCE.

MODEL(S) PART NUMBERUNO 30 M PKE32009T

SHAFT SEALS MODEL(S) PART NUMBERUNO/DUO 1.5 A 4083174UNO/DUO 004/008/012 A 4083269

CASE GASKETS MODEL(S) PART NUMBERUNO/DUO 1.5 A (CORK) 192124UNO/DUO 004-012 A (CORK) 210136

SIGHT GLASSESMODEL(S) PART NUMBERUNO/DUO 1.5A 192127UNO/DUO 004-012 A 192127UNO 30 M 550046

RECOMMENDED OILS TYPE PART NUMBERPLUS 19 (20L/5.28GAL) PP19001GENERAL PURPOSE OIL

PLUS GOLD (1L/1.06QT) PPGOLD001FULLY SYNTHETIC OIL

PLUS FF (20L/5.28GAL) PPFF001FLUSHING FLUID

REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

UNO/DUO 1.5/004/008/012 A

PFEIFFER-7

KIT COMPONENTS

UNO 1.5A DUO 1.5A UNO/DUO 1.5A UNO 004A DUO 004A U/D 004-012A

PART NUMBER

ITEM DESCRIPTION

VANE 080130IT

VANE 080130IT

REPAIR 080010

VANE 080430IT

VANE 080530IT

REPAIR 080410

192124 GASKET,CORK,OILBOX,UNO/DUO1.5A 1210136 GASKET,CORK,UNODUO 004-012A 122116156 KEY,ROTOR,16/8A 1192126 LOCKING CAP, UNO/DUO 1.5A 2220170A NOZZLE LEAK PFEIFFER UNO1.5A 1 14070333 O'RING,VIT.19X2.5MM,UNO/DUO1.5 14070015 O'RING,VIT.2.2X1MM,UNO/DUO1.5A 14070259 O'RING,VITON,15 X 2.5MM 24070262 O'RING,VITON,15 X 5MM 24070420 O'RING,VITON,24 X 2.5MM 1 24070488 O'RING,VITON,28 X 5MM 24070542 O'RING,VITON,32 X 3MM 123970412 O'RING,VITON,6 X 2 MM 4 54071016 O'RING,VITON,71 X 3MM 14070166 O'RING,VITON.10 X 2.5MM 1 1220135 PLATE,THRUST,DUO 004A 1210166 RING, CENTERING, UNO/DUO 1.5 A 1 24088022 SEAL,DOWTY,UNO/DUO 1.5A 14083269 SEAL,SHAFT 14083174 SEAL,SHAFT, UNO/DUO 1.5A 1192127 SIGHT GLASS,UNO/DUO 1.5A 1 13838132SV SPRING PFEIFFER UNO1.5A 1 1004522 SPRING, VANE, UNO/DUO 004/012A 103836534 SPRING, VANE-UNO/DUO 1.5A 4210227 SUPPORT RING 14085450KV SUPPORT RING VI. 1192348 VALVE FLAP,UNO/DUO 1.5A 1192122 VALVE,PLATE,VITNIB UNO/DUO1.5A 1116650G VANE GX PFEIFFER UNO004 2 4192109G VANE GX PFEIFFER UNO1.5A 4 44085450AV WASHER DOMED 13502860 WASHER, FLAT, STEEL 1192121 WASHER,COUPLING,PFEIFFER 1 1

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REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

DUO 30 A, UNO 30 M

KIT COMPONENTS

PFEIFFER-8

Pfeiffer

DUO 30A UNO 30M UNO 30M

PART NUMBER

ITEM DESCRIPTION

VANE PKE081130T

SEAL PKE30006T

REPAIR PKE32009T

390010 BALL,STAINLESS STL,5MM 1640017 BUFFER, FOOT, .75" DIA 4360054 COUPLING,QUICK,VITON 1 1194109 GASKET,SIGHT GLASS,VITON 1 1380021 LEAK NOZZLE, 304 SS,PFEIFFER UNO 30M/DUO 123949217 O'RING,VITON,100 X 3 MM 1 14070259 O'RING,VITON,15 X 2.5MM 2 2320213 O'RING,VITON,205 X 3MM 1 1900178 O'RING,VITON,26 X 3MM 1 123970436 O'RING,VITON,27 X 2.5 MM 1 102124025 O'RING,VITON,28 X 5 MM 2 24070542 O'RING,VITON,32 X 3MM 2 223963115 O'RING,VITON,38 X 3 MM 1 123970121 O'RING,VITON,55 X 3 MM 1 14070088 O'RING,VITON,6 X 2.2 MM 3 3320212 O'RING,VITON,62 X 2.5MM 1 123970149 O'RING,VITON,8 X 2 MM 1 1320215 O'RING,VITON,88 X 3MM 1 1580044 PISTON,HYDRAULIC,VITON 1580045 PRESSURE VALVE,ASSY 4520015 RING,CENTERING,PFEIFFER DUO 30A 1560011 SIEVE, ALUMINUM EXPANDED METAL 1560010 SIEVE, SS WIRE MESH 1550046 SIGHT GLASS, 2.5 X.78 X.11 INCHES 1004522 SPRING, VANE, UNO/DUO 004/012A 4490040 SPRING,PRESSURE,STAINLESS STEEL 1640018 VALVE BUFFER,ALUMINUM,PFEIFFER DUO 1380018 VALVE PLATE, STEEL .005"THK,PFEIFFER 1230069 VANE,GX, PFEIFFER DUO 30A 2230070 VANE,GX, PFEIFFER DUO 30A 2230061 VANE,GX,PFEIFFER 1230067 VANE,GX,PFEIFFER 2420042 WASHER,COUPLING,PFEIFFFR DUO 30A 1

REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

TPH/THU 050/060/062/065/071/170/190/260/330/510/520

KITS

REPAIR KITS REPAIR KITS INCLUDE BEARINGS, SEALS & OIL WICK OR FELT WASHER. MODEL(S) PART NUMBERTPH/TPU 050 PB050RKTPH/TPU 060 PB060RKTPH/TPU 062 PB062RKTPH/TPU 065 PB065RKTPH/TPU 071 PB071RKTPH/TPU 170 PB170RKTPH/TPU 190 PB190RKTPH/TPU 260/261/262 PB260RKTPH/TPU 330 PB330RKTPH/TPU 510 PB510RKTPH/TPU 520 PB520RK

TOOL KITS & REPAIR MANUALS TOOL KITS INCLUDE SPECIALTY TOOLS & INSTRUCTIONAL STEP-BY-STEP CD FOR TURBO PUMP BEARING REPLACEMENT. MODEL(S) PART NUMBERTPH/TPU 050 PB050TKTPH/TPU 060/062/065 PB060TKTPH/TPU 062 PB062TKTPH/TPU 170 PB170TKTPH/TPU 190 PB190TKTPH/TPU 260/261/262 PB260TKTPH/TPU 330 PB330TKTPH/TPU 510 PB510TKTPH/TPU 520 PB520TK

PFEIFFER-9

TURBO PUMPS Pfeiffer

REV 9/15PRICES & SPECIFICATIONS SUBJECT TO CHANGE WITHOUT NOTICE. PRECISION PLUS VACUUM PARTS IS PART OF EDWARDS VACUUM LLC & EDWARDS GmbH

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PFEIFFER-10

INDIVIDUAL SPARES

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CAPS192126 LOCKING CAP, UNO/DUO 1.5A 1.5AUNODUO

COUPLINGS360054 COUPLING,QUICK,VITON DUO 5, DUO 5C420043 COUPLING, WASHER,CRS,PFEIFFER DUO 2.5/2 DUO 2.5,DUO 2.5C500501190001 ELEMENT,COUPLING,YELLOW D05

FILTERS780030 FILTER,SCREEN,ST.STL. D05

GASKETS192124 GASKET,CORK,OILBOX,UNO/DUO1.5A 1.5AUNODUO194081 GASKET,CASE,CORK DUO 2.5194081V GASKET,CASE,VITON DUO 2.5C194109 GASKET,SIGHT GLASS,VITON DUO 5, DUO 5C210136 GASKET,CORK,UNODUO 004-012A 0 04A,012AUNODUO300057 GASKET,RING,VITON,BROWN UNO/DUO 2.5A,DUO 2.5, UNO 5A

HARDWARE192121 WASHER,COUPLING,PFEIFFER 1.5AUNODUO3502860 WASHER, FLAT, STEEL 004-012A UNO/DUO400056 CHEESE HEAD SCREW,ZINC-PLATED,M4X8 DUO 10400057 SOCKET HEAD CAP SCREW M5X10 IN-V1 A2-70 DUO 10400067 SCREW,SET, M5 X .08 X 5MM LG, 3004085450AV WASHER DOMED 004-012A UNO/DUO420042 WASHER,COUPLING,PFEIFFFR DUO 30A DUO 30A660103 WASHER,RUBBER,VITON M8C,M12C

KITS080010 KIT,REPAIR,UNO/DUO 1.5A 1.5A UNO/DUO080030IT KIT VANE G11 1.5A W/PARTS 1.5AUNO080130IT KIT VANE G11 1.5ADUO W/PARTS 1.5ADUO080410 KIT,REPAIR,UNO/DUO OO4-012A 004-012A UNO/DUO080430IT KIT VANE G22 UNO004A 004A UNO080530IT KIT,VANE,G11,004A DUO,W/PARTS 004A DUOPB065RK KIT,REPAIR TPH/TPU065PB071RK KIT,REPAIR TPH/TPU071PB1600RK KIT,REPAIR TPH/TPU1600PB190RK KIT,REPAIR TPH/TPU190PB190TK KIT,TOOL AND REPAIR MANUAL TPH/TPU190PB520RK KIT,REPAIR TPH/TPU520PB520TK KIT,TOOL AND REPAIR MANUAL TPH/TPU520PKE00002T KIT,SET OF SEALS DUO 2.5PKE00020T KIT, SEAL, DUO 2.5C DUO 2.5CPKE02008T KIT,MAJOR OVERHAUL,DUO 2.5 DUO 2.5PKE02030T KIT,OVERHAUL,DUO 2.5C DUO 2.5CPKE081130T KIT,VANE,DUO 30A DUO 30APKE20001T KIT,SET OF SEALS,UNO/DUO 35-65 UNO/DUO 35/65, DUO 35/65 MPKE22001T KIT,OVERHAUL,UNO 35 UNO 35PKE22003T KIT,OVERHAUL,UNO 65 UNO 65PKE22005T KIT,OVERHAUL,DUO 35 DUO 35PKE22010T KIT,OVERHAUL,DUO 35 M DUO 35 MPKE22011T KIT,OVERHAUL,DUO 65 DUO 65PKE22012T KIT,OVERHAUL,DUO 65 M DUO 65 MPKE30001T KIT, SEAL, DUO 10, DUO 10C DUO 10, DUO 10CPKE30005T KIT, SEAL, DUO 5, DUO 5C DUO 5, DUO 5CPKE30006T KIT,SET OF SEALS,DUO 30M DUO 30MPKE30008T KIT, SEAL, DUO 20, DUO 20C DUO 20, DUO 20CPKE32001T KIT,OVERHAUL,DUO 10 DUO 10PKE32004T KIT,OVERHAUL,DUO 10C DUO 10CPKE32006T KIT,OVERHAUL,DUO 5C DUO 5CPKE32008T KIT,OVERHAUL,DUO 5 DUO 5PKE32009T KIT,MAJOR OVERHAUL,UNO30M UNO 30MPKE32011T KIT,OVERHAUL,DUO 20 DUO 20PKE32013T KIT,OVERHAUL,DUO 20C DUO 20C

MISC.210227 SUPPORT RING 004-012A UNO/DUO220170A NOZZLE LEAK PFEIFFER UNO1.5A 1.5AUNODUO380020 LEAK NOZZLE, 304 SS,PFEIFFER DUO 5/20 DUO 10380021 LEAK NOZZLE, 304 SS,PFEIFFER UNO 30M/DUO DUO 10C390010 BALL,STAINLESS STL,5MM DUO 5, DUO 5C4085450KV SUPPORT RING VI. 004-012A UNO/DUO

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MISC. (CONT.)580044 PISTON,HYDRAULIC,VITON UNO 2.5, UNO 2.5A, DUO 2.5A,UNO 5A, DUO 5, DUO 5C640017 BUFFER, FOOT, .75” DIA DUO 10820048 BOX,WHITE,14.5 X 10.5 X 2.5” D40BCS,D65BCS

O-RINGS320174 O’RING,VITON,16 X 1.0 MM UNO 5A 320176 O’RING,VITON,15X1.5MM DUO 5 DUO 5C320177 O’RING,VITON,18X2.0MM DUO 5, DUO 5C320180 O’RING,VITON,25X3.0MM DUO 5, DUO 5C320181 O’RING,VITON,48.9X2.62MM DUO 5, DUO 5C320182 O’RING,VITON,75X3.0MM DUO 5, DUO 5C320210 O’RING,VITON,2.1 X 1MM DUO 2.5C320212 O’RING,VITON,62 X 2.5MM DUO 30M320213 O’RING,VITON,205 X 3MM DUO 30M320215 O’RING,VITON,88 X 3MM DUO 10, DUO 10C4070015 O’RING,VIT.2.2X1MM UNO/DUO1.5A 1.5A4070065 O’RING,VITON,5 X 1.5 MM UNO/DUO 2.5A,DUO 2.5, UNO5A4070088 O’RING,VITON,6 X 2.2 MM UNO/DUO 2.5A,DUO 2.5, UNO5A4070125 O’RING,VITON,8 X 2.0 MM4070166 O’RING,VITON.10 X 2.5MM UNO/DUO 1.5A4070259 O’RING,VITON,15 X 2.5MM 004-012A UNO/DUO4070262 O’RING,VITON,15 X 5MM 1.5A UNO/DUO4070321 O’RING,VITON,18 X 5.0 MM UNO/DUO 2.5A,DUO 2.5, UNO5A4070333 O’RING,VIT.19X2.5MM,UNO/DUO1.5 1.5A UNO/DUO4070420 O’RING,VITON,24 X 2.5MM 1.5A UNO/DUO4070488 O’RING,VITON,28 X 5MM 004-012A UNO/DUO4070542 O’RING,VITON,32 X 3MM 004-012A UNO/DUO4070874 O’RING,VITON,59X3.0MM DUO 5, DUO 5C4070949 O’RING,VITON,65X5.0MM DUO 5, DUO 5C4071016 O’RING,VITON,71 X 3MM 004-012A UNO/DUO4071536 O’RING,VITON,165X3.0MM DUO 5, DUO 5C900048 O’RING,VITON,4.42 X 2.62 MM SV65B900178 O’RING,VITON,26 X 3MM DUO 30M

PLATES220135 PLATE,THRUST,DUO 004A 004A DUO

RINGS210166 RING, CENTERING, UNO/DUO 1.5 A 1.5A,004A,012AUNODUO470016 RING,RETAINING,10X1 MM DUO 10520015 RING,CENTERING,PFEIFFER DUO 30A DUO 30A

SEALS310061 SEAL,SHAFT,VITON,SINGLE LIP UNO 2.5A,DUO 2.5A,DUO 2.5,UNO 5A310104 SEAL,SHAFT UNO/DUO 35/65, DUO 35/65 M4083174 SEAL,SHAFT, UNO/DUO 1.5A 1.5A UNO/DUO4083269 SEAL,SHAFT 004-012A UNO DUO4088022 SEAL,DOWTY,UNO/DUO 1.5A 1.5A UNO/DUO

SIGHT GLASSES192127 SIGHT GLASS,UNO/DUO 1.5A 1.5A,004A,012AUNODUO500015 SIGHT GLASS,ASSEMBLY, PFEIFFER DUO 2.5/2 DUO 2.5,DUO2.5C550046 SIGHT GLASS, 2.5 X.78 X.11 INCHES DUO 5,DUO 5C

SPRINGS004522 SPRING, VANE, UNO/DUO 004/012A 004-012A UNO DUO3836534 SPRING, VANE-UNO/DUO 1.5A 1.5A UNO DUO3838132SV SPRING PFEIFFER UNO1.5A 1.5A UNO DUO490028 SPRING,COMPRESSION,STL/ST D05490029 SPRING,COMPRESSION,STL/ST D05490030 SPRING,COMPRESSION,STL/ST D05490031 SPRING,TORSION,SPECIAL END S D05490032 SPRING,TORSION,SPECIAL ENDS D05490033 SPRING,TORSION,SPECIAL ENDS D18,D28490034 SPRING,VANE D05490036 SPRING,PRESSURE,STAINLESS STL. UNO/DUO 2.5A,DUO 2.5, UNO5A490037 SPRING,PRESSURE,STAINLESS STEEL DUO 5, DUO 5C490040 SPRING,PRESSURE,STAINLESS STEEL DUO 5, DUO 5C490041 SPRING,PRESSURE,STAINLESS STEEL DUO 5, DUO 5C490046 SPRING,PRESSURE,PFEIFFER DUO 2.5/2.5C DUO 2.5,DUO 2.5C490052 SPRING,PRESSURE,PFEIFFER DUO 20 DUO 20

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VALVES192122 VALVE,PLATE,VITNIB UNO/DUO1.5A 1.5A UNODUO192348 VALVE FLAP,UNO/DUO 1.5A 1.5A UNODUO380018 VALVE PLATE, STEEL .005”THK,PFEIFFER DUO 5,DUO 5C,DUO 10,DUO10C,DUO 20,DUO 20C390009 PLATE,VALVE COUPLER,S/S & VITON UNO 2.5A,DUO 2.5A,UNO 5A570002 VALVE PLATE ASSY, PFEIFFER DUO 2.5/2.5C DUO 2.5,DUO 2.5C580042 VALVE FLAP,ROUND,STAINLESS STEEL UNO/DUO 2.5A,DUO 2.5, UNO5A580043 VALVE FLAP,LONG,STAINLESS STEEL UNO/DUO 2.5A,DUO 2.5, UNO5A640018 VALVE BUFFER,ALUMINUM,PFEIFFER DUO 5,DUO 5C,DUO 20,DUO20C

VANES116650G VANE GX PFEIFFER UNO004 004A UNO192109G VANE GX PFEIFFER UNO1.5A 1.5AUNODUO230060 VANE,GX,PFEIFFER, DUO 5, DUO 10 DUO 10230060C VANE,PEEK,DUO 5C/10C DUO 10C230061 VANE,GX,PFEIFFER DUO 10230062 VANE,GX,PFEIFFER DUO 5230062C VANE,PEEK,DUO 5C DUO 5C230063 VANE,GX,PFEIFFER DUO 2.5230063C VANE,PEEK,DUO 2.5C D UO 2.5C230064 VANE,GX,PFEIFFER DUO 2.5,DUO 2.5C230065 VANE,GX, PFEIFFER DUO 20 DUO 20230065C VANE,PEEK,DUO 20C DUO 20C230066 VANE,GX, PFEIFFER DUO 20 DUO 20230066C VANE,PEEK,DUO 20C DUO 20C230068 VANE,GX, PFEIFFER DUO 10 DUO 10230068C VANE,PEEK,DUO 10C DUO 10C230069 VANE,GX, PFEIFFER DUO 30A DUO 30A