Lab seminar, September 11, 2014, Jin Ho Shin – 1

Fab-level Preventive Maintenance SchedulingA

- Fundamental thesis to express semiconductor fab -

Jin Ho Shin

Department of Industrial and Systems Engineering KAIST, South Korea

Thursday, September 11, 2014

Lab seminar, September 11, 2014, Jin Ho Shin – 2

Presentation Overview

• Introduction– Preventive Maintenance– Semiconductor Manufacturing Factory– Queueing Network– Fab-level PM

• Fundamental Thesis– “The Queueing Network Analyzer” by W.WHITT– Decomposition with Aggregation (DWA)– “A Queuing Network Model for Wafer Fabrication Using Decomposition without Aggregation” By Dean Grosbard, Adar Kalir, Israel Tirkel, and Gad Rabinowitz

• Future works – Minho’s PM research– Autosched AP

• Concluding remarks

Lab seminar, September 11, 2014, Jin Ho Shin – 3

Introduction

• Preventive Maintenance in semiconductor manufacturing - Complex and essential than any other manufacturing system- Need to be scheduled carefully- Availability vs Reliability

Preventive Maintenance

Semiconductor Manufacturing

Factory

Queueing Net-work

Fab-level PM

Lab seminar, September 11, 2014, Jin Ho Shin – 4

Introduction

• Semiconductor Manufacturing FacilityPreventive Maintenance

Semiconductor Manufacturing

Facility

Queueing Net-work

Fab-level PM

- 4 complicating stages

(2) Probing (3) Assembly or Packing (4) Final Testing(1) Fabrication

(1) Fabrication

(2)(3)(4)

Lab seminar, September 11, 2014, Jin Ho Shin – 5

Introduction

• Semiconductor Manufacturing Facility, Fab- Complex manufacturing system- Toolsets are linked each other- Toolsets are affected by each other

Preventive Maintenance

Semiconductor Manufacturing

Facility

Queueing Net-work

Fab-level PM

Lab seminar, September 11, 2014, Jin Ho Shin – 6

Introduction

• Queueing Network- Networks of queues have proven to be useful models to analyze the performance of complex systems- To analyze fab, Node: Toolset / Customer: Wafer / Tools: Number of servers

Preventive Maintenance

Semiconductor Manufacturing

Factory

Queueing Net-work

Fab-level PM

Lab seminar, September 11, 2014, Jin Ho Shin – 7

Introduction

• Preventive maintenance in fab level- Currently, PM is scheduled based on toolset- One toolset can affect many other toolsets

Preventive Maintenance

Semiconductor Manufacturing

Facility

Queueing Net-work

Fab-level PM

Lab seminar, September 11, 2014, Jin Ho Shin – 8

Fundamental Thesis

• The Queueing Network Analyzer- W.WHITT / THE BELL SYSTEM TECHNICAL JOURNAL, VOL. 62,No. 9, 2779-2812, November 1983

QNA

DWA

QNM using DWOA

?

?

Lab seminar, September 11, 2014, Jin Ho Shin – 9

Fundamental Thesis

• Deterministic routesQNA

DWA

QNM using DWOA

Lab seminar, September 11, 2014, Jin Ho Shin – 10

Fundamental Thesis

• Deterministic routesQNA

DWA

QNM using DWOA

Lab seminar, September 11, 2014, Jin Ho Shin – 11

Fundamental Thesis

• Variability of intel-arrivalQNA

DWA

QNM using DWOA

Lab seminar, September 11, 2014, Jin Ho Shin – 12

Fundamental Thesis

• Decomposition with Aggregation- Performed well over a wide range of queueing networks- Three basic linear operators / Superposition, Departure, Splitting

QNA

DWA

QNM using DWOA

Lab seminar, September 11, 2014, Jin Ho Shin – 13

Fundamental Thesis

• A Queuing Network Model for Wafer Fabrication Using Decomposi-tion without Aggregation

- Dean Grosbard, Adar Kalir, Israel Tirkel, and Gad Rabinowitz / THE BELL SYSTEM TECHNICAL JOURNAL, VOL. 62,No. 9, 2779-2812, November 1983

- Bitran & Tirupati / “Splitting is the main cause of poor estimation”

QNA

DWA

QNM using DWOA

Lab seminar, September 11, 2014, Jin Ho Shin – 14

Fundamental Thesis

• A Queuing Network Model for Wafer Fabrication Using Decomposi-tion without Aggregation

- One stream to several operations

QNA

DWA

QNM using DWOA

Lab seminar, September 11, 2014, Jin Ho Shin – 15

Future works

• Minho’s PM research- Change the -> - Change the form to apply (Time-based PM, Assumption, etc.)

• Autosched AP- Simulation result for comparison- Currently: Follow existing demo fab-simulation

Lab seminar, September 11, 2014, Jin Ho Shin – 16

Concluding Remarks

• So far, fab-level PM optimization is not saturated topic • Targeting: Applying the to queueing network and find the fab-level PM optimiza-

tion model during this semester• Consistently accustom to Autosched AP

Lab seminar, September 11, 2014, Jin Ho Shin – 17

Thank you!

Fab-level Preventive Maintenance SchedulingA

Part1. Fundamental thesis to express semiconductor fab

Jin Ho Shin

Department of Industrial and Systems Engineering KAIST, South Korea