lecture 6opilab.utb.edu.co/optical-metrology-2019/lectures/... · 2019. 4. 26. · example of a...
TRANSCRIPT
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Optical MetrologyLecture 6: Interferometry
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� Introduction
� General Description
� Coherence
� Interference between 2 plane waves
– Laser Doppler velocimetry
� Interference between spherical waves
� Interferometry
– Wavefront Division
– Amplitude Division
� Heterodyne Interferometry
Outline
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� Waves have a wavelength
� Waves have a frequency
Light as Waves
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Interference in water waves…
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Overlapping Semicircles
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Superposition
t
+1
-1
t
+1
-1
t
+2
-2
+
Constructive Interference
In Phase
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t
+1
-1
t
+1
-1
t
+2
-2
+
Destructive Interference
Out of Phase
180 degrees
Superposition
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Superposition
+
Different f
1) Constructive 2) Destructive 3) Neither
-1.5
-1
-0.5
0
0.5
1
1.5
-1.5
-1
-0.5
0
0.5
1
1.5
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Superposition
+
Different f
1) Constructive 2) Destructive 3) Neither
-1.5
-1
-0.5
0
0.5
1
1.5
-1.5
-1
-0.5
0
0.5
1
1.5
-2
-1.5
-1
-0.5
0
0.5
1
1.5
2
2.5
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Interference Requirements
� Need two (or more) waves
� Must have same frequency
� Must be coherent (i.e. waves must have definite
phase relation)
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General Description
� Interference can occur when two or more waves overlap each
other in space. Assume that two waves described by
and overlap
� The electromagnetic wave theory tells us that the resulting field
simply becomes the sum
� The observable quantity is intensity (irradiance) I which is
� Where eiI = (cosI + isin I) and
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General Description� Resulting intensity is not just (I1 + I2).
� When 2 waves interfere is called the interference
term
� We also see that when then
and I reaches minima (cos 180°) which means destructive
interference
� Similarly when then and I
reaches maxima (cos 0°) constructive interference
� When 2 waves have equal intensity I1 = I2 = I0
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Coherence� Detection of light is an averaging process in space and
time
� We assume that ul and u2 to have the same single
frequency
� Light wave with a single frequency must have an infinite
length
� However sources emitting light of a single frequency do
not exist
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Coherence� Here we see two successive wave
trains of the partial waves
� The two wave trains have equal
amplitude and length Lc, with an abrupt,
arbitrary phase difference
� a) shows the situation when the two
waves have traveled equal paths. We
see that although the phase of the
original wave fluctuates randomly, the
phase difference remains constant in
time
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Coherence� In c) wave 2 has traveled Lc longer
than wave 1. The head of the wave
trains in wave 2 coincide with tail of
the corresponding wave trains in
partial wave 1.
� Now the phase difference fluctuates
randomly as the successive wave
trains pass by
� Here cos 'I varies randomly between
+1 and -1 and for multiple trains it
becomes 0 (no interference) I = I1 + I2
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Coherence� In b) wave 2 has traveled l longer than
wave 1 where 0<l<Lc.
� For many wavetrains the phase
difference varies in time proportional
to
� we still can observe an interference
pattern but with a reduced contrast
� is the coherence length and
is the coherence time
� For white light, the coherence length is
1 micron
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Plane Wave Interference� When two plane wave interfere the
resultant fringe spacing is given by
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Interference between other Waves� By measuring the distance between interference
fringes over selected planes in space, quantities
such as the angle and distance can be found.
� One further step would be to apply for a wave reflected from a rough
surface
� By observing the interference - can determine the surface topography
� For smoother surfaces, however, such as optical components (lenses,
mirrors, etc.) where tolerances of the order of fractions of a wavelength
are to be measured, that kind of interferometry is quite common.
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Interferometry� Light waves interfere only
if they are from the same
source (why???)
� Most interferometers have the following elements
� light source
� element for splitting the light into two (or more) partial waves
� different propagation paths where the partial waves undergo
different phase contributions
� element for superposing the partial waves
� detector for observation of the interference
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Interferometry
� Depending on how the light is split,
interferometers are commonly classified
� Wavefront division interferometers
� Amplitude division interferometers
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Wavefront Division
� Example of a wavefront dividing interferometer, (Thomas Young)
� The incident wavefront is divided by passing through two small
holes at SI and S2 in a screen 1.
� The emerging spherical wavefronts from SI and S2 will interfere,
and the pattern is observed on screen 2.
� The path length differences of the light reaching an arbitrary point
x on S2 is found from Figure
� When the distance D between screens is much greater than the
distance d between S1 and S2, we have a good approximation
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m=0
m=1
m=1
m=2
m=2
q
D
y
Wavefront Division
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ym mDd
dsinq
dsinq m m = 0,1,2,3... Maximum
dsinq (m 12
) m = 0,1,2,3... Minimum
tanq ymD
or ym Dtanq Dsinq
m ym +/-
0123
0D/d2D/d3D/d
Maximam ym +/-
0123
D/2d3D/2d5D/2d7D/2d
Minima
ym (m 1/2)D
d
Wavefront Division
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13E Suppose that Young’s experiment is performed with blue-green light of 500 nm. The slits are 1.2mm apart, and the viewing screen is 5.4 m from the slits. How far apart the bright fringes?
From the table on the previous slide we see that the separation between bright fringes is
��
DO /d
��
DO /d (5.4m)(500u10�9m) /0.0012m 0.00225m 2.25mm
Wavefront Division
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Wavefront Division
A) Fresnel Biprism
B) Lloyds Mirror
C) Michelsons Stellar Interferometer
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Amplitude Division
� Example of a amplitude dividing interferometer, (Michelson)
� Amplitude is divided by beamsplitter BS which partly reflects and
partly transmits
� These divided light go to two mirrors M1 and M2 where they are
reflected back.
� The reflected lights recombine to form interference on the
detector D
� The path length can be varied by moving one of the mirrors or by
mounting that on movable object (movement of x give path
difference of 2x) and phase difference
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Amplitude Division� As M2 moves the
displacement is measured by
counting the number of light
maxima registered by D
� By counting the number of
maxima per unit time will give
the velocity of the object.
� The intensity distribution is
given by
Ezekiel, Shaoul. RES.6-006 Video Demonstrations in Lasers and Optics, Spring 2008. (Massachusetts Institute of Technology: MIT OpenCourseWare), http://ocw.mit.edu (Accessed 15 May, 2012). License: Creative Commons BY-NC-SA
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Michelson Interferometer
Split a beam with a Half Mirror, the use mirrors to recombine the two beams.
Mirror
Mirror
Half Mirror
Screen
Lightsource
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If the red beam goes the same length as the blue beam, then the two beams will constructively interfere and a bright spot will appear on screen.
Mirror
Mirror
Half Mirror
Screen
Lightsource
Michelson Interferometer
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If the blue beam goes a little extra distance, 's, the the screen will show a different interference pattern.
Mirror
Mirror
Half Mirror
Screen
Lightsource
's
Michelson Interferometer
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If 's = O/4, then the interference pattern changes from bright to dark.
Mirror
Mirror
Half Mirror
Screen
Lightsource
's
Michelson Interferometer
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If 's = O/2, then the interference pattern changes from bright to dark back to bright (a fringe shift).
Mirror
Mirror
Half Mirror
Screen
Lightsource
's
Michelson Interferometer
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By counting the number of fringe shifts, we can determine how far 's is!
Mirror
Mirror
Half Mirror
Screen
Lightsource
's
Michelson Interferometer
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If we use the red laser (O=632 nm), then each fringe shift corresponds to a distance the mirror moves of 316 nm (about 1/3 of a micron)!
Mirror
Mirror
Half Mirror
Screen
Lightsource
's
Michelson Interferometer
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Amplitude Division
� Twyman Green Interferometer
� Mach Zehnder Interferometer
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Dual Frequency Interferometer
� We stated that two waves of different frequencies do not produce
observable interference.
� By combining two plane waves
� The resultant intensity becomes
� If the frequency difference VI - V2 is very small and constant, this
variation in I with time can be detected
� This is utilized in the dual-frequency Michelson interferometer for
length measurement
� Also called as Heterodyne interferometer
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� Interferometry Examples
� Moire and Phase Shifting Interferometry
� Theory
� Types of measurement
� Applications (form and stress measurement)
� Theory of phase shifting
� Types of phase shifting methods available,
� Errors associated with phase shifting
Outline
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Twyman Green InterferometerFlat Surfaces
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Twyman Green InterferometerSpherical Surfaces
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Mirau Interferometer
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Mirau Interferometer
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Diffraction
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DiffractionTypes of diffraction
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DiffractionDouble Slit
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DiffractionDouble Slit
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DiffractionDouble Slit
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DiffractionDouble Slit
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DiffractionTriple Slit
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DiffractionTriple Slit
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DiffractionMultiple Slit
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DiffractionMultiple Slit
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dsinq m m = 0,1,2,3..
d = w/N where w is the entire width of the grating
w
DiffractionGrating -- N slits or rulings
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DiffractionGrating -- N slits or rulings
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tanq (ym y0) /D
Measure angles of diffracted lines with a spectroscope usingformula below. Then relate to wavelength
= dsinq /m
Diffraction GratingsMeasure Wavelength of Light
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Diffraction GratingsMeasure Wavelength of Light
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��
R O /'O Nm
Resolving power of grating.Measure of the narrowness of lines
Diffraction GratingsResolving Power
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Diffraction GratingsResolving Power
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Moire Interferometry
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� Dark fringe - when the dark lines are out of step one-half period
� Bright fringe - when the dark lines from one fall on the dark lines
for of the other
� If the � between the two gratings is increased the separation
between the bright and dark fringes decreases
Moire Interferometry
Moiré pattern formed
by two line gratings
rotated by small �
MO = 2y sinD
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� Dark fringe - when the dark lines are out of step one-half period
� If the gratings are not identical, the moiré pattern will not be
straight equi-spaced fringes
� How are moiré patterns related to interferometry?
� The grating shown in Fig. can be a “snapshot” of plane wave
traveling to the right, and the grating lines distance = O of light.
Moire Interferometry
MO = 2y sinD
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� It becomes like interfereing two plane waves at an angle 2D
� Where the two waves are in phase, bright fringes result, and
where they are out of phase, dark fringes result
� The spacing of the fringes on the screen is given by previous
eqn. where O is now the wavelength of light (MO = 2y sinD)
� Thus, the moiré of two gratings correctly predicts the centers of
the interference fringes produced by interfering 2 plane waves
� Since binary gratings are used, the moiré does not correctly
predict the sinusoidal intensity profile of the interference fringes.
Moire Interferometry
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� Fig shows the moiré
produced by superimposing
two computer-generated
interferograms.
� First interferogram (a) has
50 waves of tilt across the
radius
� Second interferogram (b)
has 50 waves of tilt plus 4
waves of defocus.
Moire Interferometry
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� If they are aligned such that
the tilt is same for both, tilt
cancels and the 4 waves of
defocus remain (c).
� In (d), the two inferograms
are rotated wrt each other so
that the tilt will quite cancel.
� These results can be
described mathematically
using two grating functions:
Moire Interferometry
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� Gratings used in Moire measurements are usually
transparencies and if this is placed in contact with
object, the phase of this grating will be modulated
depending on the object displacement - np for maxima
and (n+1/2) P for minima
� It there is a model grating as well, then the deformation
produces fringes, with which the displacement can be
computed
� The model grating can be placed over the grating, or
imaged over the grating or imaged on
photographic film
Moire – In Plane Measurement
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� Out of plane displacements are
measured by using a single
grating and an interference with
the shadow of the grating itself
� The most successful application
of shadow moire is in Medicine
� Useful in coarse measurements
on large surfaces with complex
contours
Shadow Moire – Out of Plane
� W = out of plane displacement� p = grating pitch; D = light angle � E = observation angle
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Fringe Projection
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Fringe Projection
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Phase Shifting InterferometryParameters Fringe
skeletonizingPhase stepping/
shiftingFourier
transformTemporal
heterodyningNo of interferograms to be reconstructed
1 Minimum 3 1 (2) One per detection point
Resolution (O) 1 to 1/10 1/10 to 1/100 1/10 1/30 1/100 to 1/1000
Evaluation between intensity extremes
No Yes Yes Yes
Inherent noise suppression Partially Yes No (yes) Partially
Automatic sign detection No Yes No (yes) Yes
Necessary experimental manipulation
No Phase shift No (phase shift)
Frequency
Experimental effort Low High Low Extremely high
Sensitivity to external influences
Low Moderate Low Extremely high
Interaction by the operator
Possible Not possible Possible Not possible
Speed of evaluation Low High Low Extremely low
Cost Moderate High Moderate Very high
Comparison of phase evaluation methods
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� In phase shifting interferometers, the reference wave is
shifted wrt the test wave, changing their phase difference.
� By measuring the irradiance changes for different phase
shifts, it is possible to determine the phase of test wave.
� The intensity pattern of any interfering beams at any given
point is governed by the following equation
�
� where I is the phase difference distribution across the
interference pattern and V is the modulation of the fringes.
Phase Shifting Interferometry
}]cos{1[0 DI �� VII
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� With CCDs, the intensity at multiple points can be recorded
and processed simultaneously at high speeds. Therefore,
the equation can be:
�
� where I(x, y) is the intensity of the interference pattern at the
corresponding pixel of the CCD camera, I(x, y) is the phase
difference at that particular pixel
� 3 unknowns in I0, V and I. Therefore, a minimum of three
phase-shifted images is required to find out the phase I
value of a particular point
Phase Shifting Interferometry
}]),(cos{1)[,(),( 0 DI �� yxVyxIyxI
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� 2 waves derived from a common source, the phase difference
between the two waves is given by
� where 'I is the phase difference, 'P is the path difference between
them and, O the wavelength.
� The phase difference could be introduced by introducing path
difference and vice versa
� In most of the phase shifting interferometric techniques, changing
the path length of either the measurement, or the reference beam,
by a fraction of the wavelength provides the required phase shifts
ISO' '
2p
Phase Shifting Interferometry
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Phase Shifting Interferometry
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Phase shifting with rotating glass plate.
Glass plate of thickness 't' rotated by an angle q
q
q1
Phase Shifting Interferometry
))cos()cos(( 1 qq nkt � K =2/
� n is refractive index of the plate
qqqq
)sin(
)cos()cos(1
1 1nkt � Phase shift achieved by rotating
the glass plate by small angle
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a b
Phase shifting by moving grating and Bragg cell.
Phase Shifting Interferometry
ydn'
SD 2 � Where d is the period of the grating
and n is the order of diffraction
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Phase Shifting Interferometry
� the frequency of
the source is
changed by
injecting electrical
current to the
laser and using a
large optical path
difference
between the
measurement and
reference beams
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Object
Reference
PZT to move fraction
of a wavelength
Incident Beam BS
Detector
From Source
Interference Sensor
ISO ' '2p
� 'P is the path difference between the two beams
� 'I is the phase difference between them
� O the wavelength of the light source
Phase Shifting Interferometry
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‘I(x, y)’ is the intensity of the interference pattern,
‘(x, y)’ is the phase difference between object and reference,
‘V’ is the modulation of the fringes
( )cos1),(),( 01 VyxIyxI
Phase Shifting Interferometry
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Phase Shifting Interferometry
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Mirror with linear transducer
Rotating glass plate
Moving diffraction grating
Laser feedback
Polarization based phase shifting
Incident Beam Object Reference
PZTBS
Glass plate of thickness 't' rotated by angle q
q q1qq
)sin(
)cos()cos(1
1 1nkt
Where K =2/ and
‘n’ is the refractive index
Where d =grating period‘n’ is the refractive index
ydn
2
q 2 Where = phase shift q = angle of rotation
Where ‘phase shift’ is proportional to path difference and ‘temporal frequency’
Where is wavelength
p is the path difference
p 2
Phase Shifting Techniques
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Three step method
Four step method
Carré method
Five step method
Other algorithms like ‘Integrated Bucket Technique’ for continuous phase shifting and ‘multi-step techniques’ have been used
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Phase Shifting Algorithms
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Linear phase error
Non linear phase error
Light detector anomalies
Vibration & air turbulence
Other random errors
All these are errors associated with mechanical phase shifters
Phase Shifting Errors
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