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LTCC TECHNOLOGY FOR MESOSYSTEMS
Mário Ricardo Gongora-Rubio
LTCC TECHNOLOGY
–LTCC was originally developed by Hughes and DuPont for Military Electronic Systems.
– The (LTCC) technology can be defined as a way to produce multilayercircuits with the help of single tapes, which are to be used to apply conductive, dielectric and / or resistive pastes on.
–These single sheets have to be laminated together and fired in one step all.
Multi Chip Module Bluetooth Interface (National)
Meso Meso
SystemSystem
ModuleModule
TECHNOLOGY VISION
ActuatorMicro
Fluidics
LTCC DEVICE FABRICATION PROCESS
LTCC FLOW SENSORS
A-A
Layer
Layer 2 Layer 3
Layer 4 Layer 5 Cross-section A-A
L1
L2
L3
L4
L5
Layer 1
Fabricated Device
0 1 2 3 420
25
30
35
40
45
50
Dissipation factor Vs. Flow velocity k = 18,79 + 31,03 * e(-vf / 1,66) for exponential regression
Diss
ipat
ion
Fact
or (W
att/K
elvin
)
Flow Velocity (SLM)
Experimental Set-Up
Device Lay-out
Front view
Side view2 mm
MESO-SCALE PLASMA GENERATOR
OXYGEN SENSORS
The dissolved oxygen (DO) sensor is one of the most important sensors forenvironmental monitoring.A Clark-type DO sensor using
(LTCC) targeted for continuous monitoring applications wasimplemented.
0 20 40 60 80 1000
100
200
300
400
500
-I(nA
)
dissolved oxygen (%)
3D MICRO MIXERS IN LTCC
3D Serpentine Micromixers can be used for chemical Microreactors in order to fabricateemulsions, particle packaging and nanomaterial fabrication
10 mm
LedFT
A/DSalidas digitalesPCL 812
Puerto serie
LTCC Device
Ordenes y respuestas
LedFT
A/DD/A OUTPUT
CONTROL
LAB ON A PACKAGE APPLICATION TO ANALYTICAL PROCEDURES
HEAVY METAL DETECTION
–Among several electroanalytical methods, differential pulse anodic stripping voltammetry (DPASV) and square-wave anodic stripping voltammetry (SWASV) are candidates for this application due to theirs inherent characteristics of pre-concentration, achieving part-per-billion sensitivity.
–Gold is a chosen material for the detection electrode due its sharp and high stripping peaks.
FIA MANIFOLD WITH SENSOR ELECTRODES
Fluid Merging Passive Mixer Measuring Cavity
Sensor Array
Nozzle
Inlets
Fluid Outlet
CHLORIDE ION WITH POTENTIOMETRIC DETECTION
[Cl-] (ppm)
1 10 100 1000
Pea
k he
ight
(mV
)
0
20
40
60
80
100
120
140
Time (s)
0 20 40 60 80 100 120 140 160 180
Pote
ntia
l (m
V)
-260
-240
-220
-200
-180
-160
-140
-1205ppm
10ppm
20ppm
40ppm
50ppm
80ppm
100ppm
200ppm
250ppm
500ppm
DiscAg2S/AgCl
Cable
599±70603S6
31.2±0.833.2S5
26±222.8S4
17±214S3
11.5±0.87S2
16±212S1
Cl- (ppm)LTCC (n=3, 95%)
Cl- (ppm)CESample
NoInterception:3±3Slope:0.99±0.01 r2=0.9999
Linear regressionLTCC vs CE
Notcal=1.065, ttab=2.571 tcal<ttabPaired t test
LAB ON A PACKAGE APPLICATIONS
Grupo de Sensores y Biosensores
Universidad Autónoma de Barcelona (GSB)
Radiografía RX
Cobalt disc
Cable
3cm
6cm
ab
c
d
e
gh
f
f1 f2
f3
f4
ION PHOSPHATE ANALYZER WITH POTENTIOMETRIC DETECCION
Grupo de Sensores y Biosensores
Universidad Autónoma de Barcelona (GSB)
[H2PO4-] (ppm)
0.1 1 10 100
Pot
enci
al (m
V)
0
20
40
60
80
100
Cali1: E=-21.86+83.94·log(x+1.974); LD=1.57 ppmCali2: E=-22.83+84.85·log(x+1.925); LD=1.78 ppmCali3: E=-13.18+76.91·log(x+1.615); LD=1.65 ppmCali4: E=-16.88+76.61·log(x+1.779); LD=1.62 ppmTemps (min)
0 2 4 6 8 10 12
Pot
enci
al (m
V)
320
340
360
380
400
420
440
0.2ppm 0.5ppm1ppm 2ppm 4ppm 8ppm 10ppm 15ppm 20ppm
Carrier [KHP]=0.025MSample Volumen: 2.4-3.2mlFlow: KHP: 1.6ml/min; Sample: 1.2ml/min
LOD : 1.8±0.3ppm
ION PHOSPHATE ANALYZER WITH POTENTIOMETRIC DETECCION
Grupo de Sensores y Biosensores
Universidad Autónoma de Barcelona (GSB)
NITRITE ION ANALYZER WITH COLORIMETRIC DETECTION
OpticWindow RX
Time (s)
0 20 40 60 80 100 120 140 160 180
Abso
rban
ce
-0,1
0,0
0,1
0,2
0,3
0,4
0,5
0,6
0.1ppm0.5ppm1ppm2ppm5ppm7ppm10ppm
[NO2-] (ppm)
0 2 4 6 8 10 12
AB
SOR
BAN
CIA
0.0
0.5
1.0
1.5
2.0
2.5
Q=5.83µl/sVol. sample & reactant =29µlRange 0.1-10ppmr2=0.9959
Abs=-3.31·10-3+0.048·[NITRITE]
Grupo de Sensores y Biosensores
Universidad Autónoma de Barcelona (GSB)
Lab on a Package
LTCC Device
Conectores: 3Entrada: 3
Canal superior: 2Conexión canales: 3
Canal inferior: 2Base: 2
TOTAL: 15 CAPASMIXER
ION AMMONIUM ANALYZER WITH POTENTIOMETRIC DETECCION
Grupo de Sensores y Biosensores
Universidad Autónoma de Barcelona (GSB)
PVC
PVC
PVDF
NH4+ + OH-
NH3
MostraAigua
NaOHWaste
TRIS
WasteESI REF
MostraAigua
NaOHWaste
TRIS
WasteESI REF
[NH4+] (ppm)
0.1 1 10
Alçada de pic (m
V)0
20
40
60
80
100
120
E=20.27+62.62·log([NH4+]+1.044)
r2=.99318
OPTIMIZED PARAMETRES:Accumulation time: 2minLOD=1.044ppmTRIS: 0.01MNaOH: 0.1M
E=20.27+62.62·log([NH4+]+1.044)
Grupo de Sensores y Biosensores
Universidad Autónoma de Barcelona (GSB)
ION AMMONIUM ANALYZER WITH POTENTIOMETRIC DETECCION