lubricant on steel measurement
TRANSCRIPT
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8/17/2019 Lubricant on Steel Measurement
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83 Pine Hill Rd. Southborough, MA 01772Phone +1.617.388.6832 Fax. +1.508.858.5473
email: [email protected] http://www.semiconsoft.com
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LUBRICANT ON STEEL MEASUREMENT
I. SUMMARY
Steel sample with lubricated surface was measured using MProbeVis-Micro with 40ummeasurement spot size. Measurements were done at 3 points. Dispersion of the lubricantwas represented using Cauchy approximation assuming R.I. ~ 1.43. Steel dispersion wasrepresented using standard library material. Surface of the steel has someroughness/grains that caused light scattering. Effective roughness was determined fromthe measurement.The results of the measurements are summarized in the Table I.
Measurementpoint
Thickness, nm(of lubricant)
Effective roughness, nm
1. (left side) 77 242. (right side) 129 343. (center) 147 43
Table 1 . Results of the lubricant thickness measurement
Fig. 1 Measured reflectance spectra at 3 points.
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8/17/2019 Lubricant on Steel Measurement
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83 Pine Hill Rd. Southborough, MA 01772Phone +1.617.388.6832 Fax. +1.508.858.5473
email: [email protected] http://www.semiconsoft.com
Fig. 2 Measurement points location
II. DETAILS
Fig. 3 Point #1 measurement vs. model fit. Measured parameters: layer thickness andsurface roughness
Point#1
Point # 3
Point #2
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83 Pine Hill Rd. Southborough, MA 01772Phone +1.617.388.6832 Fax. +1.508.858.5473
email: [email protected] http://www.semiconsoft.com
Fig. 4 Point #2 measurement vs. model fit. Measured parameters: layer thickness andsurface roughness
Fig. 5 Point #3 measurement vs. model fit. Measured parameters: layer thickness andsurface roughness
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83 Pine Hill Rd. Southborough, MA 01772Phone +1.617.388.6832 Fax. +1.508.858.5473
email: [email protected] http://www.semiconsoft.com
Fig.6 Lubricant dispersion represented using Cauchy approximation