The two-channel C-867.260 controller

Preliminary Specs

video at: http://www.youtube.com/watch?v=eT617ackIOw

M-545.2P piezomotor stages are mainly designed for automated positioning applications in mi-croscopy. The form factor of the M-545 is optimized for a low profile height of 30 mm only; the mounting pattern is compatible with many PI piezo nanoposition-ing stages.

Space Saving Piezomotors Compared to conventional mo-torized translation stages, the M-545 provides a lower profile and smaller footprint. The com-pact PILine® piezoelectric linear motors and linear encoders make both, the lead screw duct and the flanged, bulky stepper motors

employed in traditional stages obsolete. In addition, the piezo-motors are self-locking at rest and hold the stage in a stable position without generating heat.

Compatibility to PI Nanoposi-tioning and Scanning Stages A number of standard PI piezo flexure stages can be mounted on the M-545 stage. Depending on the application, these highly specialized, ultra-precise na-nopositioning systems are availa-ble as fast XYZ scanners (for fluorescence microscopy), as vertical Z positioners (3D imag-ing), or with up to 6 degrees of freedom.

Limit and Reference Switches For the protection of your equip-ment, non-contact Hall-effect limit and reference switches are in-stalled. The direction-sensing reference switch supports ad-vanced automation applications with high precision.

Advantages of PILine® Mi-cropositioning Systems The ultrasonic piezoceramic drives used in PILine® microposi-tioners have a number of ad-vantages over classical drives:

Higher Acceleration, Speed

Smooth Motion, no Vibrations

Small Form Factor

Self-Locking when Powered Down, no Dither, no Energy Consumption

No Shafts, Gears or Other Rotating Parts

Non-Magnetic , Vacuum Compatible Drive Principle

Ordering Information

XY Microscope Stage System with Closed-Loop PILine® Piezomotor Drives, 25 x 25 mm, 0.5 µm Linear Encoder, Includes C-867.260 2 Axis Controller and Joystick. MD5422LOU for Olympus Microscopes MD5422LNU for Nikon Microscopes MD5422LZU for Zeiss Microscopes The following PI stages can be used with the M-545: P-545 PInano™: all versions P-5x7 & P-528: all versions P-561 & P-562: all versions P-541 & P-542: all versions P-736 PInano™-Z: Adapter P-736.AP1 required Ask about custom designs

Application Examples

Biotechnology Microscopy Scanning microscopy Confocal microscopy Semiconductor testing Handling

Integrated Closed-Loop Linear Piezomotor Drives Provide Smooth Motion and High Speed to 50 mm/s

Travel Ranges 25 x 25 mm Integrated Linear Encoders with 0.5 µm Resolution Compact Design: 30 mm Profile Height, Mounts Directly to Microscopes Self-Locking at Rest, with no Servo Dither Compatible with PI Piezo Nanopositioning / Scanning

Stages

The M-545.2P microscope stage with closed-loop ultrasonic piezo motors provides 25 x 25 mm travel range and very high stability

M-545 XY Microscope Stage with Ultrasonic Linear Drives High Stability, Low Profile, High Speed, Direct Position Measurement

PInano™ XYZ piezo scanner mounted on a M-545.2P Microscope stage. The XYZ piezo nanopositioning stage provides <1 nm resolution and 200x200x200µm scanning range. The high sta bility and autolocking feature of M-545 provides significant ad-vantages over other microscope stage designs when using fast piezo scan-ning stages.

Preliminary Specs

Model M-545.2P

Active axes XY Travel range 25 x 25 mm Integrated sensor Linear encoder Sensor resolution 0.5 µm (no dither at rest) Min. incremental motion 1 µm Unidirectional repeatability 1 µm Bidirectional repeatability 2 µm Max. velocity 50 mm/s Load Capacity 50*N Max. push/pull force 5 N Max. lateral force 4 N Motor type PILine® U-164 Operating voltage 67 V (RMS)*** Electrical power 10 W / Axis** Operating temperature range 10 to +30 °C Material Aluminum (black anodized) Mass 3.2 kg Cable length 1.7 m Connector 2 x MDR connector, 14-pin Controller/driver C-867.260 2-a xis Controller/Driver

M-545 dimensions in mm, Olympus version shown, call for other versions

* 10 N for max. velocity. ** For drive electronics *** Piezomotor drive voltage; controller requires 12 VDC

+

+

Travel Direction

25Travel

25Travel

42

12

.51

2.5

12.512.5

30

270

Focal Point

4x M6x1.0

16x M4x0.7

3x C’Bore Hole forM4 Pan Head Screw

Cable, 1.7 m1 each for X and Y axes

17.5

166

184

100

84

21

5

270

149

13

4

22

8

3.8

201

12

5

2 x M4 x0.7

MD5422LZU for Zeiss Microscopes

Long-Range Motion for Sample Positioning

M-545 Manual XY Microsope Stage w/ Motor Upgrade Option

The M-545, 25 x 25 mm micro-scope stage, is designed to pro-vide a stable platform for piezoscanning stages of the P-545PInano™ series. These high-speed, high-resolution XY / XYZpiezo stages allow nanometer-precision adjustment of the spec-imen holder in up to threedimensions over 200 µm. TheM-545 is also compatible withthe following capacitive-feed-back type piezo stages: P-733,P-5x7, P-5x8, P-54x and P-56x(s. p. 2-72).The basic M-545 model isequipped with manual microme-ters.

Motorizing for

Automated Tasks

The M-545 XY-stage can be sup-plemented with motorized actu-ators M-229 (s. p. 1-44). Theproduct number M-545.USCcomprises the complete packageof two stepper linear actuatorswith controller and joystick.M-545.USG includes two stepperlinear actuators with mounting

� Stable Platform for P-545 PInano™

Piezo Nanopositioning Systems

� Low Profile for Easy Integration: 30 mm

� 25 mm x 25 mm Travel Range

� Micrometer Screws, Motor Upgrade Available

� For Nikon, Zeiss, Leica and Olympus Mikroscopes

Ordering Information

M-545.2MO

XY Microscope Stage, 25 x 25 mm,Micrometer Drive, High Stability,Compatible with PI Piezo Stages,for Olympus Microscopes

M-545.2MN

XY Microscope Stage, 25 x 25 mm,Micrometer Drive, High Stability,Compatible with PI Piezo Stages,for Nikon Microscopes

M-545.2ML

XY Microscope Stage, 25 x 25 mm,Micrometer Drive, High Stability,Compatible with PI Piezo Stages,for Leica Microscopes

M-545.2MZ

XY Microscope Stage, 25 x 25 mm,Micrometer Drive, High Stability,Compatible with PI Piezo Stages,for Zeiss Microscope

Versions for other microscopes on

request.

Accessories

M-545.USC

Factory Installed Stepper-MikeUpgrade for M-545 XY MicroscopeStages: Includes Stepper-Mikes,Joystick and Controller

M-545.USG

Factory Installed Stepper-MikeUpgrade for M-545 XY MicroscopeStages: Includes Stepper-Mikes,Joystick

M-545.SHP

Adapter Plate for Sample Holdersfor M-545 XY Microscope Stages

Accommodates the following PI

nanopositioning stage series:

P-517/ 518/ 527/ 528, P-541/ 542,P-560 PIMars and P-545 PInano™

Adapter available for P-733

nanopositioners:

P-733.AP1

Adapter Plate for Mounting ofP-733 Piezo Stages on M-545 XYMicroscope Stage

Additional accessories on request.

M-545.2MO, M-545.2MN dimensions in mm.Mounting adapters for Olympus and Nikon microscopesrespectively included in delivery

©P

hys

ikIn

stru

men

te(P

I)G

mb

H&

Co

.KG

2009

.Su

bje

ctto

chan

ge

wit

ho

ut

no

tice

.All

dat

aar

esu

per

sed

edb

yan

yn

ewre

leas

e.T

he

new

est

rele

ase

for

dat

ash

eets

isav

aila

ble

for

do

wn

load

atw

ww

.pi.w

s.R

310

/06/

09.0

M-545.2ML dimensions in mm

M-545 manual XY microscopy stage with 25 x 25 mmtravel shown with optional PInano™ piezo nanopositioner(200 µm motion in X, Y und Z) on top. The M-545 stage wasdesigned to provide a stable basis for piezo stages, especiallywhen the highest step-and-settle performance is required

M-545.2MZ dimensions in mm

Technical Data

Model M-545.2M Unit Tolerance

Active axes XY

Motion and positioning

Displacement 25 x 25 mm

Min. incremental motion 1 µm typ.

Min. incremental motion with 1 µm typ.M-229 stepper linear actuators

Velocity with M-229 stepper linear actuators 1.5 mm/s max.

Mechanical properties

Max. load 50 N

Preload 10 N

Miscellaneous

Material Aluminum,stainless steel

Mass 4 kg ±5%

Find further specifications on M-229 stepper linear actuators in the datasheet (s. p. 1-44)

3. Accessories

The following accessories are available for the M-545 Stage. Accessory kits can beordered from PI and are supplied with fasteners

M6 x 8mm Pan Head Screw

M2 x 3mm Screw

P-545.PD3 or P545.SH3Sample Holder

M-545 Top Plate

P-736.AP1 P-736 Mounting KitFor mounting the high speed P-736 Z slide scanner to the M-545 Stage

M-545.SHP Sample Holder AdapterFor mounting 1x3 microscope slides or 35mm Petri dishes directly to the M-545

M3 x 10mm Screw

M6 x 8mmPan Head Screw

P-736.ZR1 orP-736.ZR2

M-545 Top Plate

3. Accessories (continued)

P-733.AP1 P-733 Mounting KitAdaper kit for mounting a P-733 to the M-545.

M4 x 25 mm Socket Head Screw

M6 x 10mm Socket Head Screw

M5 x 10mm Flat Head Screw

P-733 Stage Body

M545 Stage Top Plate

M-229.25S Stepper Motor Actuator

Can be mounted in front or rear positionRear position requires factory installation

M-229.25S Stepper Motor Actuator

M-545.USG Mounting Kit for M-229 Stepper Motor Actuators (requires controllers)Adapter kit for mounting motorized actuators to the M-545 Stage. Controllers arerequired and can be ordered separately.

1. Model Survey

The M-545 Series of stages is designed for use with inverted microscopes from theleading manufacturers (Nikon, Olympus, Leica and Zeiss). The stages aredesigned to allow full rotation of the lense turret throughout the Z motion range ofThe turret.

M-545. 2 M N

| | |

“2” 2 active axes (XY)

“M” Manual Micrometer Drive

2. Compatibility

The M-545 is designed to provide a highly stable mounting platform for the PI nanoseries of piezo electric nanopositioning stages. The PI nano was designed formicroscopy applications and has accessories that facilitate mounting the samplenear the bottom surface of the stage and within the focal range of the microscopes.

The M-545 also has mounting holes for a variety of other PI nanopositioningstages.

The following is a list of PI stages that can be used with the M-545:

P-545 PInano™ Series XY and XYZ Stages, all versions

P-736 PInano™ Series Z high speed Z scannerAdapter kit P-736.AP1 required

P-5x7 and PI Multi-Axis Piezo Scanner, all versionsP-528

P-561 and PIMars™ XYZ Piezo System, all versionsP-562

P-541 and PI Low Profile Nanopositioning Stage, all versionsP-542

P-733 Compact, High Precision XYZ nanopositioning stageAll versionsAdapter kit P-733.AP1 required

Manufacturer“N” Nikon“O” Olympus“L” Leica“Z” Zeiss

5.1. M-545.2MO Mounting (for Olympus Microscopes)

Spacer plates are used to adapt the M-545 stage to the Olympus microscope base.

The proper hardware sizes are shown below.

4x M4x16 Socket Head Screw

Microscope Base

M545E0006 Spacer

4x M5x16Socket Head Screws

5. Mounting

5.2. M-545.2MN Mounting (for Nikon Microscopes)

Spacer plates are used to adapt the M-545 stage to the Nikon microscope base.

The proper hardware sizes are shown below.

4x M4x16 Socket Head Screw

Microscope Base

M545E0007 Spacer

4x M5x16Socket Head Screws

5.3. M-545.2ML Mounting (for Leica Microscopes)

No spacers or adapters are required for the Leica DMI Microscope base.

Fits Leica Models DMI 4000, DMI 5000 and DMI 6000.

The proper hardware sizes are shown below.

4x M4x16 Socket Head Screw

Microscope Base

3x M4x10Pan Head Machine Screws

4x M4x16 Socket Head Screw

Microscope Base

3x M4x10Pan Head Machine Screws

5.4. M-545.2MZ Mounting (for Zeiss Microscopes)

No spacers or adapters are required for the Zeiss Observer Microscope base.

Fits Zeiss Axio Observer Models A1, D1 and Z1.

The proper hardware sizes are shown below.

6.0. Focal Point Location

PI has designed the P-545 stage to be easily integrated to commercial microscopes through the use of theM-545 stage. M-545 stages are available for Nikon, Olympus, Zeiss and Leica inverted microscopes.These stages mount directly to the microscope base and accept the P-545.3R2 and P-545.2R2 as well asseveral other PI stages. The M-545 stages can be manually driven through micrometers or using PI’sprecision motorized actuators. Contact your PI sales representative for details.

When used in a microscope application, the focal plane for the microscope is located near the bottom ofthe stage. It is for this reason that the stage has a lower mounting surface. The figure below shows thenominal location of the focal plane. Vertical travel of the objective varies based on the microscope used.

A series of accessories is available from PI to assist with mounting a sample holder to the stage. The P-545.SH1 is available to hold standard 1”x 3” (25mm x 75mm) microscope slides and the P-545.PD1 isoffered for holding 35mm Petri Dishes.

Upper Focal Planeapprox. 3 mm above mounting surface

Bottom of Objective travelApprox. 10 mmVaries by microscopeMicroscope Objective

M-545 Stage

M-545k manual microscopy stages are deigned to accom- modate the P-545 PInano™ series of XY / XYZ Piezo stages as w ell as the P-5x7, P-5x8, P-56x and P-541/2 series stages.

Ordering Information

M-545k001 Manual Translation Stage, 25 mm, stackable Ask about custom designs

Application Examples

Biotechnology Micromanipulation Microscopy R&D Quality assurance testing

For P-545 PI nano™ and all P-5xx Nanopositioning Stages 25 mm Travel Motor Mike Upgrade with M-232 Actuators and C-863 Controllers For Bread Board Mount on 1/4-20 -1" Centers

M-545k Manual Microscope Stage For Bread-Board Mount / PI Piezo Stages

S

Stack of two M-545k manual stages

Stack of two M-545k manual stages with P-545 PInano™ Piezo Stage (not included)Preliminary Specs

©P

I199

8-20

09S

ub

ject

toch

ang

ew

ith

ou

tn

oti

ce.T

his

dat

ash

eet

issu

per

sed

edb

yan

yn

ewre

leas

e.T

he

new

est

rele

ase

isav

aila

ble

for

do

wn

load

atw

ww

.pi.w

s.09

/10/

06.0

PI nano™ 1x3 XYZ & XY Piezo Stage SystemsLow-Profile, Low-Cost, Nanopositioning Systems for Super-Resolution Microscopy

Long Travel, Low Profile,Optimized for Microscopy

The new PInano™XY andPInano™XYZ low-profile piezoscanning stages are optimizedfor easy integration into high-resolution microscopes. Theyfeature a very low profile of 0.8“(20 mm), a large aperture, andlong travel ranges of up to

200x200x200 µm with sub-nanometer closed-loop reso-lution–ideal for leading-edgemicroscopy and imaging appli-cations.

Longest lifetime is guaranteedby the integrated ceramic-encapsulated PICMA® piezoactuators. Due to the signifi-cantly higher humidity resist-ance, the patented PICMA®

design provides up to 10 timeslonger life than conventionalpiezo actuators.

Cost Effective Design,High Performance

PInano™ series piezo posi-tioning stages are designed toprovide high performance atminimum cost. For highly-stable, closed loop operation,piezoresistive sensors areapplied directly to the movingstructure and precisely meas-

ure the displacement of thestage platform. The very highsensitivity of these sensorsprovides optimum positionstability and responsiveness aswell as sub-nanometer reso-lution. A proprietary servo con-troller significantly improvesthe motion linearity comparedto conventional piezoresistivesensor controllers.

Working Principle / Reliability

Flexures optimized with FiniteElement Analysis (FEA) areemployed to guide thePInano™ series stages. FEAtechniques give the design thehighest possible stiffness in,and perpendicular to, thedirection of motion, and tominimize linear and angularrunout. Flexures allow ex-tremely high-precision motion,no matter how minute, as theyare completely free of play andfriction. The award-winningPICMA® piezo drives are morerobust than conventional piezo

actuators, featuring superiorlifetime and performance inboth dynamic and static appli-cations. Because guidance,actuators and sensors are allmaintenance-free, these nano-positioning systems achieveoutstanding levels of reliability.

Ordering Information

P-545.2R7PInano™XY NanopositioningSystem, 1x3" Aperture, Slide Holder200x200 µm, PiezoresistiveSensors, 24 Bit /USB controller.

P-545.3R7PInano™XYZ NanopositioningSystem, 1x3" Aperture, Slide Holder200x200x200 µm, PiezoresistiveSensors, 24 Bit /USB controller.

Application Examples

� Super-resolution microscopy

� 3D Imaging

� Laser technology

� Mask / wafer positioning

� Interferometry

� Metrology

� Biotechnology

� Micromanipulation

Background: The piezo controller is included and comes with a 24-bit resolution USB port as well as ethernet, RS-232 and an analog interface.

Foreground: The optional M-545 manual XY stage provides a stable platform for the the PInano™ piezo stage. R2 piezo stage versions (60x60 mm aperture) shown.

� Low Profile for Easy Integration: 20 mm (0.8“)� Large Aperture for 1x3"Slides. Accessories & Holders Available� All Parts Black Anodized for Minimum Reflections� 200µm Standard Travel Range, Longer Ranges Available� Longest Lifetime with Proprietary PICMA® Piezo Technology� Cost Effective due to Low-Cost Piezoresistive Sensors� Compatible w/ Leading Image Acquisition Software Packages� Closed-Loop Control for High Repeatability and Accuracy

� Millisecond Step Time, ideal for Super-Resolution Microscopy

� Recessed Sample Holders for Maximized Utility

PInano™ series nanopositioning stages feature a very low profile of 20 mm (0.8”),a large aperture for 1x3" slides and deliver highly accurate motion with

sub-nanometer resolution in up to 3 axes. Slide / petri dish holders optional.

P-545.2R2PInano™XY NanopositioningSystem, 60x60 mm Aperture,200x200 µm, PiezoresistiveSensors, 24 Bit /USB controller.

P-545.3R2PInano™XYZ NanopositioningSystem, 60x60 mm Aperture,200x200x200 µm, PiezoresistiveSensors, 24 Bit /USB controller.

ters & Specimen Holdersor Slides, Petri Dishes, Hea

w: Large Aperture fNe

Technical Data

Model PInano XY PInano XYZ Units Tolerance

Active axes X, Y X, Y, Z

Motion and positioning

Integrated sensor Piezoresistive Piezoresistive

Closed-loop travel 200 x 200 200 x 200 x 200 µm

*Resolution <1 <1 nm typ.

Linearity % typ.

Repeatability <5 <5 nm typ.

Mechanical properties

±20%

Push/pull force capacity in motion direction 100 / 30 100 / 30 N Max.

Max. payload 500 500 g Max.

Drive properties

Ceramic type PICMA® P-885 PICMA® P-885

Electrical capacitance per axis 6 6 (X, Y), 12 (Z) µF ±20%

Miscellaneous

Recommended operating temperature range 20 to 30 20 to 30 °C

Material Aluminum Aluminum

Mass 1 1.2 kg ±5%

Cable length 1.7 1.7 m ±10 mm

Sensor / voltage connection Sub-D 25 Sub-D 25

*Resolution of PI Piezo Nanopositioners is not limited by friction or stiction.Value given is noise equivalent motion measured with interferometer.

Objective Scanners & Mirrors Z/Tip/TiltStages

XY / XYZ Stages

6-AxisStages

Actuators /Linear Motors

Piezo Controllers

News & Applications

XY/XYZ Stages

+/- 0.1 +/- 0.1

The P-545 piezo stage can be mounted on the optional M-545 manual XY stage. This high-stability stage is recommended as a basis for the piezo stage, especially when the highest step-and- settle performance is required. It is available for Olympus,

Nikon, Zeiss and Leica microscopes and can also be upgraded with motorized micrometers.