magazine summer98 p4

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Summer 1998 Yield Management Solutions 4 S ECTIONS Introducing. . . Our industry is increasingly driven by the dual demands of economic value and technology advancement. Requirements for faster time-to-mar- ket, higher performance and greater productivity drive decision making at all levels. While KLA-Tencor has built its business on innovating and delivering high performance inspec- tion and measurement systems, we recognize that superior systems are no longer enough. As the industry has evolved and changed, so too has our focus. Today, we are dedicated to providing integrated yield manage- ment solutions that translate vast amounts of complex yield data into the information critical for decision making throughout the fab. KLA-Tencor strives to build business partnerships with our customers to enhance fab processes, increase productivity and achieve faster return on investment. With a unique combination of advanced technologies and fab-wide expertise, we’re focused on helping you moni- tor and improve your yield. Over the years, we have provided a forum for discussion of key yield manage- ment issues at seminars held around the world. This publication now provides an additional opportunity to address these important topics. We hope you find it stimulating and informative. If there are issues or ideas you would like to see addressed, please let us know. KLA-Tencor is dedicated to advanc- ing yield management and process control technology — and sharing our knowledge with you. CORPORATE HEADQUARTERS KLA-Tencor Corporation 160 Rio Robles San Jose, California 95134 408.875.4200 INTERNATIONAL OFFICES KLA-Tencor France SARL Evry Cedex, France 011 33 16 936 6969 KLA-Tencor GmbH Munich, Germany 011 49 89 8902 170 KLA-Tencor (Israel) Corporation Migdal Ha’Emek, Israel 011 972 6 6449450 KLA-Tencor Japan Ltd. Yokohama, Japan 011 81 45 335 8200 KLA-Tencor Korea Inc. Seoul, Korea 011 822 41 50555 KLA-Tencor (Malaysia) Sdn. Bhd. Johor, Malaysia 011 607 557 1946 KLA-Tencor (Singapore) Pte. Ltd. Singapore 011 65 782 6788 KLA-Tencor Taiwan Branch Hsinchu, Taiwan 011 886 35 335163 KLA-Tencor Limited Wokingham, United Kingdom 011 44 118 936 5700 E DITOR - IN-C HIEF Roberta Emerson MANAGING E DITOR Judy Dale C ONTRIBUTING E DITORS Kern Beare Carol Johnson Kavitha Kannan Robert Mendoza Holly Nielsen ASSOCIATE E DITOR Lars Ahntholz E DITORIAL ASSISTANTS Kevin Clover Petra Donnelly Janet Ely ART DIRECTOR AND P RODUCTION MANAGER Shirley Short DESIGN C ONSULTANT Carlos Hueso C IRCULATION Cathy Correia Y ield M anagement S olutions KLA-Tencor Worldwide Ken Schroeder Roberta Emerson President and Chief Operating Officer Vice President, Corporate Communications Welcome to our new publication Yield Management Solutions — Yield Enhancement and Process Control Strategies for the Semiconductor Industry. This magazine is dedicated to bringing you valuable information about new ideas, trends and develop- ments in yield management and process control — areas which are critical to the success of the semiconductor industry worldwide. Y ield Management Solutions

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S E C T I O N S

EDITOR-IN-CHIEFRoberta Emerson

MANAGING EDITORJudy Dale

CONTRIBUTING EDITORSKern Beare Carol Johnson Kavitha Kannan Robert MendozaHolly Nielsen

ASSOCIATE EDITORLars Ahntholz

EDITORIAL ASSISTANTSKevin Clover Petra DonnellyJanet Ely

ART DIRECTOR AND

PRODUCTION MANAGERShirley Short

DESIGN CONSULTANTCarlos Hueso

CIRCULATION

Yield ManagementSolutions

Introducing. . .Yield Management SolutionsWelcome to our new publication Yield Management Solutions — Yield Enhancementand Process Control Strategies for the Semiconductor Industry. This magazine is dedicated to bringing you valuable information about new ideas, trends and develop-ments in yield management and process control — areas which are critical to the success of the semiconductor industry worldwide.

CORPORATE HEADQUARTERSKLA-Tencor Corporation160 Rio RoblesSan Jose, California 95134408.875.4200

INTERNATIONAL OFFICESKLA-Tencor France SARLEvry Cedex, France011 33 16 936 6969

KLA-Tencor GmbHMunich, Germany011 49 89 8902 170

KLA-Tencor (Israel) CorporationMigdal Ha’Emek, Israel011 972 6 6449450

KLA-Tencor Japan Ltd.Yokohama, Japan011 81 45 335 8200

KLA-Tencor Korea Inc.Seoul, Korea011 822 41 50555

KLA-Tencor (Malaysia) Sdn. Bhd.Johor, Malaysia

Cathy Correia

KLA-Tencor Worldwide

Our industry is increasingly drivenby the dual demands of economicvalue and technology advancement.Requirements for faster time-to-mar-ket, higher performance and greaterproductivity drive decision makingat all levels. While KLA-Tencor hasbuilt its business on innovating anddelivering high performance inspec-tion and measurement systems, werecognize that superior systems areno longer enough. As the industryhas evolved and changed, so too hasour focus. Today, we are dedicated toproviding integrated yield manage-ment solutions that translate vastamounts of complex yield data intothe information critical for decisionmaking throughout the fab.

KLA-Tencor strives to build businesspartnerships with our customers to

Summer 1998 Yield M4

enhance fab processes, increase productivity and achieve fasterreturn on investment. With aunique combination of advancedtechnologies and fab-wide expertise,we’re focused on helping you moni-tor and improve your yield. Overthe years, we have provided a forumfor discussion of key yield manage-ment issues at seminars held aroundthe world. This publication nowprovides an additional opportunityto address these important topics.We hope you find it stimulatingand informative. If there are issuesor ideas you would like to seeaddressed, please let us know.

KLA-Tencor is dedicated to advanc-ing yield management and processcontrol technology — and sharingour knowledge with you.

011 607 557 1946

KLA-Tencor (Singapore) Pte. Ltd.Singapore011 65 782 6788

KLA-Tencor Taiwan BranchHsinchu, Taiwan011 886 35 335163

KLA-Tencor Limited

Ken Schroeder

President and Chief Operating Officer

Roberta Emerson

Vice President, Corporate Communications

anagement Solutions

Wokingham, United Kingdom011 44 118 936 5700