M A G N E T I C A L L Y L E V I T A T E D

Service Network for Turbo Molecular Pump

SH IMADZU MAGNET ICALLY LEV ITATED TURBO-MOLECULAR PUMP

MOLECULAR PUMP

FEATURES◎A full range of pumps available to suit your application◎Compact digitally controlled power supply◎Compatible with a variety of transmission protocols●Standard: RS-232C, RS-485●Options: DeviceNet◎RoHS compliant

C675-E085B

SINGAPORESHIMADZU (ASIA PACIFIC) Pte. Ltd.79 Science Park Drive, #02-01/08, Cintech IVSingapore Science Park 1, Singapore 118264PHONE:65-6778-6280 FAX:65-6779-2935

Block E, No. 570 West Huaihai Road, Shanghai, 200052Phone: 86-21-2201-3816 Fax: 86-21-2201-3800

79 Science Park Drive, #02-01/08, Cintech IV Singapore Science Park 1,Singapore 118264Phone: 65-6778-6280 Fax: 65-6779-2935

VKLP DG] X##+DVLD##SDFLI LF,##Swh1#Owg1

2 3

10-2 10-1 100 101 102

104

103

102

10-9Pa level(TMP-803LM, TMP-1003LM)

Features

Optimal exhaust performance can be selected for the processThe pump's rotational speed can be set between 25 % and 100 %, to tune the pump exhaust performance. The chamber pressure can be tuned via the rotational speed settings. A maximum of 10 minutes is required to reach the set rotational speed. The conductance valves can also be cut if the pump is used under fixed conditions.

Conceptual diagram of 5-axis magnetic bearingsA 5-axis magnetic bearing system has been adopted. This completely eliminates the use of oil (grease).

At outlet pressures of 133 Pa and less, partial pressure of the residual gases excluding Ar and H2 does not vary, and thus a stable ultra-high vacuum is obtained.

The pump stops safely, even in the event of a power failure.During a power failure, magnetic levitation is sustained by power generated by regenerative braking. The touchdown bearings are designed to withstand touchdown from 260 power failures.

The LCD indicators on the front panel indicate motor current, rotational speed, and degree of imbalance, as well as error occurrences. The control timer provided keep track of maintenance times. Further, an RS-232C port is provided on the front panel. This can be used to download the operational status to a PC even while the pump is operating. Comparison with normal status leads to early detection of problems (a rise in back pressure due to the deposition of reaction by-products), which contributes to system preventative maintenance.

Air in-rush testThis confirms restart after an inrush of air.This assures against operational failures.

Because of the compatibility of the turbo molecular pump with cable and power supply system combinations, retuning is unnecessary, even if the combination is changed. The cable length can be set between 3 m and 30 m.

The shared power supply system can be used with all pump models. It is no longer necessary to change the power supply when the model of connected pump is changed. (Enquire about applicable models.)

Exhaust Performance by Rotational Speed TMP-3304LMC (Argon gas)

Inlet pressure (Pa)

Flow

rate

(mL/

min

)

10-4

10-5

10-6

10-7

10-8

10-9

Inle

t pr

essu

re (P

a)

Typical Ultimate Pressure of the TMP-1003LMMagnetically Levitated Turbo Molecular Pump

(36hours bake out)

5.1×10-9 Pa

1 10 100

Time (hr)

10-10

10-11

10-12

10-13

10-14

Ion

curr

ent

(A)

10-5

10-6

10-7

10-8

10-9

Tota

l pre

ssur

e (P

a)

1 10 102 5×102

Outlet pressure (Pa)

Total pressure

Symbol Molecularweight Example

2 H2

16 O

18 H2O

28 CO, N2

32 O2

40 Ar

Changes of Residual Gases on the Inlet Side whenArgon is Introduced into the Outlet.

(Model: TMP-1003LM Magnetically Levitated Turbo Molecular Pump)

A

B

Air

Air

From the outletFrom the inlet

1

2

3

4

5

High-frequency motor

Connector

Shaft

Rotor blades

Stator blades

11

12

13

14

Inlet flange

Outlet flange

Protective net

Cooling water pipe

6

7

8

9

10

Spacers

Radial magnetic bearing

Axial magnetic bearing

Touchdown bearings

Gap sensors

14

6

5

4

9

7

8

12

10

11

1

3

2

Gas flow

To backing vacuum pump

13

X2

Y2

Y2

X1 Y1

Y1 X1

X2

1.　X1−X１2.　Y1−Y１3.　X2−X24.　Y2−Y25.　Z−Z

Z

Z

Typical front panel display

Status monitor

・ Rotational speed・ Motor current・ Imbalance monitor

Maintenance of operating time

・ Maintenance-call timer・ Cumulative operating time

Display showing error occurrence

・ Display switches automatically when an error occurs・ Error log can also be displayed

★CE marking, TUV★NRTL (UL61010A-1)★SEMI S2 ★SEMI F47★SEMI E74 compatible

The system is equipped with RS-232C and RS-485 compliant serial communications ports, enabling the monitoring of pump startup/shutdown and other operational conditions, as well as readout of operating logs. Up to 32 pumps can be monitored from a single location.

RS-485

Line monitoring computer

System controller

REMOTE or RS-232C

TMP Power supply

30m

Tuning free

Cable lengthPower supply Pump

20m

15m

10m

7m

5m

3m

Measurement of ultimate pressure

Measurement of Residual Gases

Variable pump rotational speed functionality

Response to power failures

Monitoring functionality

Pump construction

Reliability test

Tuning free

Shared power supply

Compliant with various regulationsIntegrated rotor blades (using die-machined forged materials)

Network connectivity

2 3

10-2 10-1 100 101 102

104

103

102

10-9Pa level(TMP-803LM, TMP-1003LM)

Features

Optimal exhaust performance can be selected for the processThe pump's rotational speed can be set between 25 % and 100 %, to tune the pump exhaust performance. The chamber pressure can be tuned via the rotational speed settings. A maximum of 10 minutes is required to reach the set rotational speed. The conductance valves can also be cut if the pump is used under fixed conditions.

Conceptual diagram of 5-axis magnetic bearingsA 5-axis magnetic bearing system has been adopted. This completely eliminates the use of oil (grease).

At outlet pressures of 133 Pa and less, partial pressure of the residual gases excluding Ar and H2 does not vary, and thus a stable ultra-high vacuum is obtained.

The pump stops safely, even in the event of a power failure.During a power failure, magnetic levitation is sustained by power generated by regenerative braking. The touchdown bearings are designed to withstand touchdown from 260 power failures.

The LCD indicators on the front panel indicate motor current, rotational speed, and degree of imbalance, as well as error occurrences. The control timer provided keep track of maintenance times. Further, an RS-232C port is provided on the front panel. This can be used to download the operational status to a PC even while the pump is operating. Comparison with normal status leads to early detection of problems (a rise in back pressure due to the deposition of reaction by-products), which contributes to system preventative maintenance.

Air in-rush testThis confirms restart after an inrush of air.This assures against operational failures.

Because of the compatibility of the turbo molecular pump with cable and power supply system combinations, retuning is unnecessary, even if the combination is changed. The cable length can be set between 3 m and 30 m.

The shared power supply system can be used with all pump models. It is no longer necessary to change the power supply when the model of connected pump is changed. (Enquire about applicable models.)

Exhaust Performance by Rotational Speed TMP-3304LMC (Argon gas)

Inlet pressure (Pa)

Flow

rate

(mL/

min

)

10-4

10-5

10-6

10-7

10-8

10-9

Inle

t pr

essu

re (P

a)

Typical Ultimate Pressure of the TMP-1003LMMagnetically Levitated Turbo Molecular Pump

(36hours bake out)

5.1×10-9 Pa

1 10 100

Time (hr)

10-10

10-11

10-12

10-13

10-14

Ion

curr

ent

(A)

10-5

10-6

10-7

10-8

10-9

Tota

l pre

ssur

e (P

a)

1 10 102 5×102

Outlet pressure (Pa)

Total pressure

Symbol Molecularweight Example

2 H2

16 O

18 H2O

28 CO, N2

32 O2

40 Ar

Changes of Residual Gases on the Inlet Side whenArgon is Introduced into the Outlet.

(Model: TMP-1003LM Magnetically Levitated Turbo Molecular Pump)

A

B

Air

Air

From the outletFrom the inlet

1

2

3

4

5

High-frequency motor

Connector

Shaft

Rotor blades

Stator blades

11

12

13

14

Inlet flange

Outlet flange

Protective net

Cooling water pipe

6

7

8

9

10

Spacers

Radial magnetic bearing

Axial magnetic bearing

Touchdown bearings

Gap sensors

14

6

5

4

9

7

8

12

10

11

1

3

2

Gas flow

To backing vacuum pump

13

X2

Y2

Y2

X1 Y1

Y1 X1

X2

1.　X1−X１2.　Y1−Y１3.　X2−X24.　Y2−Y25.　Z−Z

Z

Z

Typical front panel display

Status monitor

・ Rotational speed・ Motor current・ Imbalance monitor

Maintenance of operating time

・ Maintenance-call timer・ Cumulative operating time

Display showing error occurrence

・ Display switches automatically when an error occurs・ Error log can also be displayed

★CE marking, TUV★NRTL (UL61010A-1)★SEMI S2 ★SEMI F47★SEMI E74 compatible

The system is equipped with RS-232C and RS-485 compliant serial communications ports, enabling the monitoring of pump startup/shutdown and other operational conditions, as well as readout of operating logs. Up to 32 pumps can be monitored from a single location.

RS-485

Line monitoring computer

System controller

REMOTE or RS-232C

TMP Power supply

30m

Tuning free

Cable lengthPower supply Pump

20m

15m

10m

7m

5m

3m

Measurement of ultimate pressure

Measurement of Residual Gases

Variable pump rotational speed functionality

Response to power failures

Monitoring functionality

Pump construction

Reliability test

Tuning free

Shared power supply

Compliant with various regulationsIntegrated rotor blades (using die-machined forged materials)

Network connectivity

EI-S04M

Retuning is unnecessary if the combination of pump with cable and power supply system is changed

Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)

40 to 80 %RH

Single phase 100 V AC to 120 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

8 kg

TMP-203M / MC / LM / LMC TMP-303M / MC / LM / LMC

450 VA 550 VA

EI-R04MEI-S04M

Retuning is unnecessary if the combination of pump with cable and power supply system is changed

Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)

40 to 80%RH

Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

8 kg

TMP-803M(0) / MC(0) / LM(0) / LMC(0) TMP-1003M / MC / LM / LMCTMP-403M / MC / LM / LMC

Same as left

Same as left

Same as left

Same as left

Same as left

550 VA

Same as left

1.0 kVA

Power Supply

Model

Compatibility

Permitted ambient temperature

Input power source

Weight

Temperature

Humidity

Voltage

Power requirements

Air Cooled Type Turbo Molecular Pump, Standard SpecificationsTurbo molecular pump

Rotor coating

Applicable power supply

Inlet flange

Outlet flange

Cooling method

Ultimate pressure (after baking) Pa (Torr) (Note 1)

Maximum inlet pressure during continuous operation (N2)

Maximum outlet pressure during continuous operation

Pumping speed (Note 2)

Compression ratio

Rated rotation speed

Startup time

Direction of installation

Baking temperature of pump inlet

Vibration, measured by the Shimadzu method

Recommended purge gas flowrate (Note 3)

Recommended pumping speed of backing vacuum pump during gas purging

Operational ambient temperature range

Allowable magnetic flux density Radial directions

Axial directions

Weight

N2

He

H2

N2

He

H2

TMP-203M

EI-S04M

VG100 / ICF152 / ISO100B / ISO100C

KF25

Air cooled

TMP-203MC TMP-303M TMP-303MC

10-8 Pa order 10-7 Pa order

None Coated

EI-S04M

VG100 / ICF152 / ISO100B / ISO100C

KF25

Air cooled

None Coated

10-8 Pa order 10-7 Pa order

1.3 Pa

40 Pa

190 L/s

140 L/s

120 L/s

1×109

6×104

4×103

50000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

9 kg

1.3 Pa

40 Pa

320 L/s

340 L/s

320 L/s

1×109

8×104

1×104

45000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

14 kg

TMP-803M(0)

None

TMP-803MC(0)

Coated

TMP-1003M

None

TMP-1003MC

Coated

10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order

EI-R04M

VG150 / ICF203 / ISO160B

KF40

Air cooled

EI-R04M

VG200 / ICF253 / ISO200B

KF40

Air cooled

1.3 Pa

40 Pa

800 L/s

800 L/s

700 L/s

1×109 min.

8×104

4×103

35000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

33 kg

TMP-403M

None

TMP-403MC

Coated

10-8 Pa order 10-7 Pa order

EI-S04M

VG150 / ICF203 / ISO160B / ISO160C

KF25

Air cooled

1.3 Pa

40 Pa

420 L/s

360 L/s

340 L/s

1×109

8×104

1×104

45000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

14 kg

1.3 Pa

40 Pa

1080 L/s

930 L/s

790 L/s

1×109

8×104

4×103

35000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

32 kg max.

(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 L/s; TMP-303:

300 L/s; TMP-403: 400 L/s; TMP-803(0): 730 L/s; TMP-1003: 970 L/s.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)

Specifications

4 5

EI-S04M

Retuning is unnecessary if the combination of pump with cable and power supply system is changed

Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)

40 to 80 %RH

Single phase 100 V AC to 120 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

8 kg

TMP-203M / MC / LM / LMC TMP-303M / MC / LM / LMC

450 VA 550 VA

EI-R04MEI-S04M

Retuning is unnecessary if the combination of pump with cable and power supply system is changed

Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)

40 to 80%RH

Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

8 kg

TMP-803M(0) / MC(0) / LM(0) / LMC(0) TMP-1003M / MC / LM / LMCTMP-403M / MC / LM / LMC

Same as left

Same as left

Same as left

Same as left

Same as left

550 VA

Same as left

1.0 kVA

Power Supply

Model

Compatibility

Permitted ambient temperature

Input power source

Weight

Temperature

Humidity

Voltage

Power requirements

Air Cooled Type Turbo Molecular Pump, Standard SpecificationsTurbo molecular pump

Rotor coating

Applicable power supply

Inlet flange

Outlet flange

Cooling method

Ultimate pressure (after baking) Pa (Torr) (Note 1)

Maximum inlet pressure during continuous operation (N2)

Maximum outlet pressure during continuous operation

Pumping speed (Note 2)

Compression ratio

Rated rotation speed

Startup time

Direction of installation

Baking temperature of pump inlet

Vibration, measured by the Shimadzu method

Recommended purge gas flowrate (Note 3)

Recommended pumping speed of backing vacuum pump during gas purging

Operational ambient temperature range

Allowable magnetic flux density Radial directions

Axial directions

Weight

N2

He

H2

N2

He

H2

TMP-203M

EI-S04M

VG100 / ICF152 / ISO100B / ISO100C

KF25

Air cooled

TMP-203MC TMP-303M TMP-303MC

10-8 Pa order 10-7 Pa order

None Coated

EI-S04M

VG100 / ICF152 / ISO100B / ISO100C

KF25

Air cooled

None Coated

10-8 Pa order 10-7 Pa order

1.3 Pa

40 Pa

190 L/s

140 L/s

120 L/s

1×109

6×104

4×103

50000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

9 kg

1.3 Pa

40 Pa

320 L/s

340 L/s

320 L/s

1×109

8×104

1×104

45000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

14 kg

TMP-803M(0)

None

TMP-803MC(0)

Coated

TMP-1003M

None

TMP-1003MC

Coated

10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order

EI-R04M

VG150 / ICF203 / ISO160B

KF40

Air cooled

EI-R04M

VG200 / ICF253 / ISO200B

KF40

Air cooled

1.3 Pa

40 Pa

800 L/s

800 L/s

700 L/s

1×109 min.

8×104

4×103

35000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

33 kg

TMP-403M

None

TMP-403MC

Coated

10-8 Pa order 10-7 Pa order

EI-S04M

VG150 / ICF203 / ISO160B / ISO160C

KF25

Air cooled

1.3 Pa

40 Pa

420 L/s

360 L/s

340 L/s

1×109

8×104

1×104

45000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

14 kg

1.3 Pa

40 Pa

1080 L/s

930 L/s

790 L/s

1×109

8×104

4×103

35000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

32 kg max.

(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 L/s; TMP-303:

300 L/s; TMP-403: 400 L/s; TMP-803(0): 730 L/s; TMP-1003: 970 L/s.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)

Specifications

4 5

Wide-Range Turbo Molecular Pump Standard SpecificationsTurbo molecular pump

Rotor coating

Applicable power supply

Inlet flange

Outlet flange

Cooling method

Ultimate pressure (after baking) Pa (Torr) (Note 1)

Maximum inlet pressure during continuous operation (N2)

Maximum outlet pressure during continuous operation

Pumping speed (Note 2)

Compression ratio

Rated rotation speed

Startup time

Direction of installation

Baking temperature of pump inlet

Vibration, measured by the Shimadzu method

Recommended purge gas flowrate (Note 3)

Recommended pumping speed of backing vacuum pump during gas purging

Operational ambient temperature range

Allowable magnetic flux density Radial directions

Axial directions

Cooling water Flowrate

Pressure

Temperature

Weight

TMP-203LM

None

TMP-203LMC

Coated

TMP-303LM

None

TMP-303LMC

Coated

10-8 Pa order 10-7 Pa order 10-8 Pa order 10-7 Pa order

EI-S04M

VG100 / ICF152 / ISO100B / ISO100C

KF25

Water cooled

EI-S04M

VG100 / ICF152 / ISO100B / ISO100C

　KF25

Water cooled

200 Pa

400 Pa

190 L/s

140 L/s

120 L/s

1×109

6×104

4×103

50000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

9 kg

200 Pa

400 Pa

320 L/s

340 L/s

320 L/s

1×109

8×104

1×104

45000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

14 kg

TMP-803LM(0)

None

TMP-803LMC(0)

Coated

TMP-1003LM

None

TMP-1003LMC

Coated

10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order

EI-R04M

VG150 / ICF203 / ISO160B

KF40

Water cooled

EI-R04M

VG200 / ICF253 / ISO200B

KF40

Water cooled

400 Pa

665 Pa

800 L/s

800 L/s

700 L/s

1×109 min.

8×104

4×103

35000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

33 kg

TMP-403LM

None

TMP-403LMC

Coated

10-8 Pa order 10-7 Pa order

EI-S04M

VG150 / ICF203 / ISO160B / ISO160C

KF25

Water cooled

200 Pa

400 Pa

420 L/s

360 L/s

340 L/s

1×109

8×104

1×104

45000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

14 kg

400 Pa

665 Pa

1080 L/s

930 L/s

790 L/s

1×109

8×104

4×103

35000rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

32 kg max.

Dimensions of Power SupplyPower Supply EI-04 series

4-M4

213

198.1

122.

5

132

203

198.1

115

122.

5

196

1211

1

425Panel cut dimensions

Specifications

6 7

N2

He

H2

N2

He

H2

(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 L/s;

TMP-303: 300 L/s; TMP-403: 400 L/s; TMP-803(0): 730 L/s; TMP-1003: 970 L/s.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)

Wide-Range Turbo Molecular Pump Standard SpecificationsTurbo molecular pump

Rotor coating

Applicable power supply

Inlet flange

Outlet flange

Cooling method

Ultimate pressure (after baking) Pa (Torr) (Note 1)

Maximum inlet pressure during continuous operation (N2)

Maximum outlet pressure during continuous operation

Pumping speed (Note 2)

Compression ratio

Rated rotation speed

Startup time

Direction of installation

Baking temperature of pump inlet

Vibration, measured by the Shimadzu method

Recommended purge gas flowrate (Note 3)

Recommended pumping speed of backing vacuum pump during gas purging

Operational ambient temperature range

Allowable magnetic flux density Radial directions

Axial directions

Cooling water Flowrate

Pressure

Temperature

Weight

TMP-203LM

None

TMP-203LMC

Coated

TMP-303LM

None

TMP-303LMC

Coated

10-8 Pa order 10-7 Pa order 10-8 Pa order 10-7 Pa order

EI-S04M

VG100 / ICF152 / ISO100B / ISO100C

KF25

Water cooled

EI-S04M

VG100 / ICF152 / ISO100B / ISO100C

　KF25

Water cooled

200 Pa

400 Pa

190 L/s

140 L/s

120 L/s

1×109

6×104

4×103

50000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

9 kg

200 Pa

400 Pa

320 L/s

340 L/s

320 L/s

1×109

8×104

1×104

45000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

14 kg

TMP-803LM(0)

None

TMP-803LMC(0)

Coated

TMP-1003LM

None

TMP-1003LMC

Coated

10-9 Pa order 10-8 Pa order 10-9 Pa order 10-8 Pa order

EI-R04M

VG150 / ICF203 / ISO160B

KF40

Water cooled

EI-R04M

VG200 / ICF253 / ISO200B

KF40

Water cooled

400 Pa

665 Pa

800 L/s

800 L/s

700 L/s

1×109 min.

8×104

4×103

35000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

33 kg

TMP-403LM

None

TMP-403LMC

Coated

10-8 Pa order 10-7 Pa order

EI-S04M

VG150 / ICF203 / ISO160B / ISO160C

KF25

Water cooled

200 Pa

400 Pa

420 L/s

360 L/s

340 L/s

1×109

8×104

1×104

45000 rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.012 µm (single amplitude)

20 to 30 mL/min

200 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

14 kg

400 Pa

665 Pa

1080 L/s

930 L/s

790 L/s

1×109

8×104

4×103

35000rpm

Within 5 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

32 kg max.

Dimensions of Power SupplyPower Supply EI-04 series

4-M4

213

198.1

122.

5

132

203

198.1

115

122.

5

196

1211

1

425Panel cut dimensions

Specifications

6 7

N2

He

H2

N2

He

H2

(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 L/s;

TMP-303: 300 L/s; TMP-403: 400 L/s; TMP-803(0): 730 L/s; TMP-1003: 970 L/s.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)

Turbo molecular pump

Rotor coating

Applicable power supply

Inlet flange

Outlet flange

Cooling method

Ultimate pressure (after baking) Pa (Torr) (Note 1)

Maximum flowrate of Ar gas (Note 2)

Maximum inlet pressure during continuous operation (N2)

Maximum outlet pressure during continuous operation

Pumping speed (Note 3)

Compression ratio

Rated rotation speed

Startup time

Direction of installation

Baking temperature of pump inlet

Vibration, measured by the Shimadzu method

Recommended purge gas flowrate (Note 2)

Recommended pumping speed of backing vacuum pump during gas purging

Operational ambient temperature range

Allowable magnetic flux density Radial directions

Axial directions

Cooling water Flowrate

Pressure

Temperature

Weight

N2

He

H2

N2

He

H2

TMP-1303LM(0)

None

EI-R04M

Retuning is unnecessary if the combination of pump with cable and power supply system is changed

Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)

40 to 80 %RH

Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

8 kg

TMP-1303LM(0) / LMC(0)

1.0 kVA

TMP-1503LM / LMC TMP-2203LM(0) / LMC(0)

1.2 kVA

TMP-1303LMC(0)

Coated

10-8 Pa order 10-7 Pa order

500 mL/min 800 mL/min

EI-R04M

VG200 / ICF253 / ISO200B

KF40

Water cooled

133 Pa

270 Pa

1300 L/s

1050 L/s

750 L/s

6×108

1×104

1×103

30300 rpm

Within 7 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

600 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

39 kg

TMP-1503LM

None

TMP-1503LMC

Coated

10-8 Pa order 10-7 Pa order

500 mL/min 800 mL/min

EI-R04M

VG250 / ICF305 / ISO250B

KF40

Water cooled

133 Pa

270 Pa

1500 L/s

1200 L/s

800 L/s

6×108

1×104

1×103

30300 rpm

Within 7 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

600 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

42 kg

TMP-2203LM(0)

None

TMP-2203LMC(0)

Coated

10-8 Pa order 10-7 Pa order

1300 mL/min 2000 mL/min

EI-R04M

VG250 / ICF305 / ISO250B

KF40

Water cooled

40 Pa

270 Pa

2140 L/s

2000 L/s

1350 L/s

1.4×108

1×104

1×103

24600 rpm

Within 11 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

800 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

59 kg

Power Supply

Model

Compatibility

Permitted ambient temperature

Input power source

Weight

Temperature

Humidity

Voltage

Power requirements

TMP-3304 series TMP-4304 series

TMP-1003 series TMP-303 series TMP-1503 series

①

②

③

④

⑤

⑥

Example

TMP-① ② ③ ④ ⑤ ⑥

TMP- 100 3 LM T C

Symbol

(Numeral)

(Numeral)

M

LM

T

None

C

None

Description

Exhaust speed is the value multiplied by 10.

Product line

Air-cooled magnetic bearing type

Water-cooled magnetic bearing type

Temperature control function

No temperature control function

Anti-corrosion coating design

No coating

S Rotor overheating detection function(Limited number of models)

*In addition, there are models with special coatings (B, F).

Turbo Molecular Pump Models Integrated Production Factory for Turbo Molecular Pumps (Kyoto)

Photo of Turbo Molecular Pump Products

Specifications

8 9

High Pumping Throughput Turbo Molecular Pump Standard Specifications

(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)(Note 3) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-1303(0): 1130L/s;

TMP-1503: 1380L/s; TMP-2203(0): 2050L/s.

Turbo molecular pump

Rotor coating

Applicable power supply

Inlet flange

Outlet flange

Cooling method

Ultimate pressure (after baking) Pa (Torr) (Note 1)

Maximum flowrate of Ar gas (Note 2)

Maximum inlet pressure during continuous operation (N2)

Maximum outlet pressure during continuous operation

Pumping speed (Note 3)

Compression ratio

Rated rotation speed

Startup time

Direction of installation

Baking temperature of pump inlet

Vibration, measured by the Shimadzu method

Recommended purge gas flowrate (Note 2)

Recommended pumping speed of backing vacuum pump during gas purging

Operational ambient temperature range

Allowable magnetic flux density Radial directions

Axial directions

Cooling water Flowrate

Pressure

Temperature

Weight

N2

He

H2

N2

He

H2

TMP-1303LM(0)

None

EI-R04M

Retuning is unnecessary if the combination of pump with cable and power supply system is changed

Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)

40 to 80 %RH

Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

8 kg

TMP-1303LM(0) / LMC(0)

1.0 kVA

TMP-1503LM / LMC TMP-2203LM(0) / LMC(0)

1.2 kVA

TMP-1303LMC(0)

Coated

10-8 Pa order 10-7 Pa order

500 mL/min 800 mL/min

EI-R04M

VG200 / ICF253 / ISO200B

KF40

Water cooled

133 Pa

270 Pa

1300 L/s

1050 L/s

750 L/s

6×108

1×104

1×103

30300 rpm

Within 7 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

600 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

39 kg

TMP-1503LM

None

TMP-1503LMC

Coated

10-8 Pa order 10-7 Pa order

500 mL/min 800 mL/min

EI-R04M

VG250 / ICF305 / ISO250B

KF40

Water cooled

133 Pa

270 Pa

1500 L/s

1200 L/s

800 L/s

6×108

1×104

1×103

30300 rpm

Within 7 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

600 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

42 kg

TMP-2203LM(0)

None

TMP-2203LMC(0)

Coated

10-8 Pa order 10-7 Pa order

1300 mL/min 2000 mL/min

EI-R04M

VG250 / ICF305 / ISO250B

KF40

Water cooled

40 Pa

270 Pa

2140 L/s

2000 L/s

1350 L/s

1.4×108

1×104

1×103

24600 rpm

Within 11 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

20 to 30 mL/min

800 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

1 to 3 L/min

0.2 to 0.5 MPa

5 to 30 ˚C

59 kg

Power Supply

Model

Compatibility

Permitted ambient temperature

Input power source

Weight

Temperature

Humidity

Voltage

Power requirements

TMP-3304 series TMP-4304 series

TMP-1003 series TMP-303 series TMP-1503 series

①

②

③

④

⑤

⑥

Example

TMP-① ② ③ ④ ⑤ ⑥

TMP- 100 3 LM T C

Symbol

(Numeral)

(Numeral)

M

LM

T

None

C

None

Description

Exhaust speed is the value multiplied by 10.

Product line

Air-cooled magnetic bearing type

Water-cooled magnetic bearing type

Temperature control function

No temperature control function

Anti-corrosion coating design

No coating

S Rotor overheating detection function(Limited number of models)

*In addition, there are models with special coatings (B, F).

Turbo Molecular Pump Models Integrated Production Factory for Turbo Molecular Pumps (Kyoto)

Photo of Turbo Molecular Pump Products

Specifications

8 9

High Pumping Throughput Turbo Molecular Pump Standard Specifications

(Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa. (Note 2) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)(Note 3) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-1303(0): 1130L/s;

TMP-1503: 1380L/s; TMP-2203(0): 2050L/s.

TMP-2804LM / LMC / LMB / LMF TMP-3304LM / LMC

1×109 min.

1×105

6×103

27600 rpm

Within 12 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

30 mL/min

1500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

2 to 4 L/min

0.2 to 0.5 MPa

5 to 25 ˚C

84 kg

Turbo molecular pump

Rotor coating

Applicable power supply

Inlet flange

Outlet flange

Cooling method

Ultimate pressure (after baking) Pa (Torr) (Note 2)

Maximum flowrate of Ar gas (Note 3)

Maximum inlet pressure during continuous operation (N2)

Maximum outlet pressure during continuous operation

Pumping speed (Note 4)

Compression ratio

Rated rotation speed

Startup time

Direction of installation

Baking temperature of pump inlet

Vibration, measured by the Shimadzu method

Recommended purge gas flowrate (Note 3)

Recommended pumping speed of backing vacuum pump during gas purging

Operational ambient temperature range

Allowable magnetic Radial directions

flux density Axial directions

Cooling water Flowrate

Pressure

Temperature

Weight

N2

He

H2

N2

He

H2

TMP-2804LM (Note 1)

None None

EI-R04M EI-R04M

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

TMP-3804LMC / LMFTMP-3304LMB / LMF TMP-4304LMC / LMF

TMP-2804LMC (Note 1)

1250 mL/min 1900 mL/min

[VG250] 2800 L/s

2800 L/s

2100 L/s

[ISO250B] 2500 L/s

2600 L/s

2000 L/s

EI-R04M

VG250 / ISO250B

KF40

Water cooled

10-7 Pa order

40 Pa

270 Pa

TMP-2804LMB (Note 1) TMP-2804LMF (Note 1)

2850 mL/min 2950 mL/min

EI-R04M

VG300 / VG350 / ISO320B

KF40

Water cooled

10-7 Pa order

40 Pa

270 Pa

3200 L/s

3100 L/s

2200 L/s

1×109 min.

1×105

6×103

27600 rpm

Within 12 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

30 mL/min

1500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

2 to 4 L/min

0.2 to 0.5 MPa

5 to 25 ˚C

84 kg

TMP-3304LM (Note 1) TMP-3304LMC (Note 1)

1250 mL/min 1900 mL/min

TMP-3804LMC (Note 1) TMP-3804LMF (Note 1)TMP-3304LMB (Note 1) TMP-3304LMF (Note 1)

1900 mL/min 2800 mL/min2850 mL/min 2950 mL/min

[VG300] 3800 L/s

— 　

2500 L/s

[ISO320B] 4000 L/s

—　

2500 L/s

Coated

EI-R04M

VG300 / ISO320B

KF40

Water cooled

10-7 Pa order

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

40 Pa

270 Pa

1×109 min.

1×105

6×103

24000 rpm

Within 18 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

30 mL/min

1500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

2 to 4 L/min

0.2 to 0.5 MPa

5 to 25 ˚C

105 kg

TMP-4304LMC (Note 1) TMP-4304LMF (Note 1)

1900 mL/min 2800 mL/min

Coated

EI-R04M

VG350

KF40

Water cooled

10-7 Pa order

40 Pa

270 Pa

4400 L/s

—

2600 L/s

1×109 min.

1×105

6×103

24000 rpm

Within 18 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

30 mL/min

1500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

2 to 4 L/min

0.2 to 0.5 MPa

5 to 25 ˚C

105 kg

Power Supply

Model

Compatibility

Permitted ambient temperature

Input power source

Weight

Temperature

Humidity

Voltage

Power requirements

Retuning is unnecessary if the combination of pump with cable and power supply system is changed

Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)

40 to 80 %RH

Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

1.5 kVA

8 kg

Coated Coated

High Pumping Throughput Turbo Molecular Pump Standard Specifications

(Note 1) Models equipped with rotor overheating detection function are optionally available. (TMP-xxxS model)(Note 2) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)(Note 4) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-2804(VG250): 2550L/s;

TMP-2804(ISO250B): 2300L/s; TMP-3304: 2900L/s; TMP-3804(VG300): 3450L/s; TMP-3804(ISO320B): 3600L/s; TMP-4304: 4000L/s.

Specifications

10 11

TMP-2804LM / LMC / LMB / LMF TMP-3304LM / LMC

1×109 min.

1×105

6×103

27600 rpm

Within 12 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

30 mL/min

1500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

2 to 4 L/min

0.2 to 0.5 MPa

5 to 25 ˚C

84 kg

Turbo molecular pump

Rotor coating

Applicable power supply

Inlet flange

Outlet flange

Cooling method

Ultimate pressure (after baking) Pa (Torr) (Note 2)

Maximum flowrate of Ar gas (Note 3)

Maximum inlet pressure during continuous operation (N2)

Maximum outlet pressure during continuous operation

Pumping speed (Note 4)

Compression ratio

Rated rotation speed

Startup time

Direction of installation

Baking temperature of pump inlet

Vibration, measured by the Shimadzu method

Recommended purge gas flowrate (Note 3)

Recommended pumping speed of backing vacuum pump during gas purging

Operational ambient temperature range

Allowable magnetic Radial directions

flux density Axial directions

Cooling water Flowrate

Pressure

Temperature

Weight

N2

He

H2

N2

He

H2

TMP-2804LM (Note 1)

None None

EI-R04M EI-R04M

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

TMP-3804LMC / LMFTMP-3304LMB / LMF TMP-4304LMC / LMF

TMP-2804LMC (Note 1)

1250 mL/min 1900 mL/min

[VG250] 2800 L/s

2800 L/s

2100 L/s

[ISO250B] 2500 L/s

2600 L/s

2000 L/s

EI-R04M

VG250 / ISO250B

KF40

Water cooled

10-7 Pa order

40 Pa

270 Pa

TMP-2804LMB (Note 1) TMP-2804LMF (Note 1)

2850 mL/min 2950 mL/min

EI-R04M

VG300 / VG350 / ISO320B

KF40

Water cooled

10-7 Pa order

40 Pa

270 Pa

3200 L/s

3100 L/s

2200 L/s

1×109 min.

1×105

6×103

27600 rpm

Within 12 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

30 mL/min

1500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

2 to 4 L/min

0.2 to 0.5 MPa

5 to 25 ˚C

84 kg

TMP-3304LM (Note 1) TMP-3304LMC (Note 1)

1250 mL/min 1900 mL/min

TMP-3804LMC (Note 1) TMP-3804LMF (Note 1)TMP-3304LMB (Note 1) TMP-3304LMF (Note 1)

1900 mL/min 2800 mL/min2850 mL/min 2950 mL/min

[VG300] 3800 L/s

— 　

2500 L/s

[ISO320B] 4000 L/s

—　

2500 L/s

Coated

EI-R04M

VG300 / ISO320B

KF40

Water cooled

10-7 Pa order

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

Same as left

40 Pa

270 Pa

1×109 min.

1×105

6×103

24000 rpm

Within 18 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

30 mL/min

1500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

2 to 4 L/min

0.2 to 0.5 MPa

5 to 25 ˚C

105 kg

TMP-4304LMC (Note 1) TMP-4304LMF (Note 1)

1900 mL/min 2800 mL/min

Coated

EI-R04M

VG350

KF40

Water cooled

10-7 Pa order

40 Pa

270 Pa

4400 L/s

—

2600 L/s

1×109 min.

1×105

6×103

24000 rpm

Within 18 minutes

Arbitrary

120 ˚C or lower

Less than 0.01 µm (single amplitude)

30 mL/min

1500 L/min or higher

Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C

3 mT

15 mT

2 to 4 L/min

0.2 to 0.5 MPa

5 to 25 ˚C

105 kg

Power Supply

Model

Compatibility

Permitted ambient temperature

Input power source

Weight

Temperature

Humidity

Voltage

Power requirements

Retuning is unnecessary if the combination of pump with cable and power supply system is changed

Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation)

40 to 80 %RH

Single phase 200 V AC to 240 V AC ±10 % (50 Hz/60 Hz ±2 Hz)

1.5 kVA

8 kg

Coated Coated

High Pumping Throughput Turbo Molecular Pump Standard Specifications

(Note 1) Models equipped with rotor overheating detection function are optionally available. (TMP-xxxS model)(Note 2) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 Pa.(Note 3) mL/min shows the volumetric flowrate at 0 ˚C and 1 atmosphere. (Equivalent to SCCM.)(Note 4) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-2804(VG250): 2550L/s;

TMP-2804(ISO250B): 2300L/s; TMP-3304: 2900L/s; TMP-3804(VG300): 3450L/s; TMP-3804(ISO320B): 3600L/s; TMP-4304: 4000L/s.

Specifications

10 11

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

N2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

100

101

102

103

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

N2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net. Backing Pump : 160L/min mL/min : gas throughput in 20 °C, 1atm

Notes. Without a protective net. Backing Pump : 160L/min

Unit: mm

Inlet

Inlet

Gas purge port

Gas purge port

Unit: mm

Unit: mm

Unit: mm

Connector

Connector

Outlet KF25

Outlet KF25

Cooling water inlet joint

InletGas purge port Outlet KF25

Connector

4-M10 depth 10 for fixing pump

Inlet

Gas purge port

Outlet KF25

Connector

4-M10 depth 10 for fixing pump

Cooling water inlet joint2-RC1/4

TMP-203M and TMP-203MC

Inlet flangeICF152VG100ISO100BISO100C

A252238238238

B154140140140

C122108108108

øDø152ø185ø165ø130

øEø130.3ø160ø145

—

n-ød16-ø8.48-ø128-ø9—

F155141141141

G20121212

TMP-203LM and TMP-203LMC

Pumping Speed (TMP-203LM / LMC) Gas Throughput (TMP-203LM / LMC)

Inlet flangeICF152VG100ISO100BISO100C

A252238238238　

B154140140140

C192178178178

øDø152ø185ø165ø130

øEø130.3ø160ø145

—

n-ød16-ø8.48-ø128-ø9—

F155141141141

G20121212

TMP-303M and TMP-303MC

Inlet flangeICF152VG100ISO100BISO100C

A279272279279

B204197204204

C149142149149

øDø152ø185ø165ø130

øEø130.3ø160ø145

—

n-ød16-ø8.48-ø128-ø9—

G20121212

H227220227227

TMP-303LM and TMP-303LMC

Pumping Speed (TMP-303LM / LMC) Gas Throughput (TMP-303LM / LMC)

Inlet flangeICF152VG100ISO100BISO100C

A279272279279

B204197204204

C231224231231

øDø152ø185ø165ø130

øEø130.3ø160ø145

—

n-ød16-ø8.48-ø128-ø9—

G20121212

H227220227227

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Backing Pump : 670L/min

100

101

102

103

104

10-2 10-1 100 101 102 103

ArN2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa) Notes. Without a protective net. Backing Pump : 670L/min mL/min : gas throughput in 20 °C, 1atm

Dimensions and Pumping Performance

12 13

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

N2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

100

101

102

103

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

N2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net. Backing Pump : 160L/min mL/min : gas throughput in 20 °C, 1atm

Notes. Without a protective net. Backing Pump : 160L/min

Unit: mm

Inlet

Inlet

Gas purge port

Gas purge port

Unit: mm

Unit: mm

Unit: mm

Connector

Connector

Outlet KF25

Outlet KF25

Cooling water inlet joint

InletGas purge port Outlet KF25

Connector

4-M10 depth 10 for fixing pump

Inlet

Gas purge port

Outlet KF25

Connector

4-M10 depth 10 for fixing pump

Cooling water inlet joint2-RC1/4

TMP-203M and TMP-203MC

Inlet flangeICF152VG100ISO100BISO100C

A252238238238

B154140140140

C122108108108

øDø152ø185ø165ø130

øEø130.3ø160ø145

—

n-ød16-ø8.48-ø128-ø9—

F155141141141

G20121212

TMP-203LM and TMP-203LMC

Pumping Speed (TMP-203LM / LMC) Gas Throughput (TMP-203LM / LMC)

Inlet flangeICF152VG100ISO100BISO100C

A252238238238　

B154140140140

C192178178178

øDø152ø185ø165ø130

øEø130.3ø160ø145

—

n-ød16-ø8.48-ø128-ø9—

F155141141141

G20121212

TMP-303M and TMP-303MC

Inlet flangeICF152VG100ISO100BISO100C

A279272279279

B204197204204

C149142149149

øDø152ø185ø165ø130

øEø130.3ø160ø145

—

n-ød16-ø8.48-ø128-ø9—

G20121212

H227220227227

TMP-303LM and TMP-303LMC

Pumping Speed (TMP-303LM / LMC) Gas Throughput (TMP-303LM / LMC)

Inlet flangeICF152VG100ISO100BISO100C

A279272279279

B204197204204

C231224231231

øDø152ø185ø165ø130

øEø130.3ø160ø145

—

n-ød16-ø8.48-ø128-ø9—

G20121212

H227220227227

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Backing Pump : 670L/min

100

101

102

103

104

10-2 10-1 100 101 102 103

ArN2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa) Notes. Without a protective net. Backing Pump : 670L/min mL/min : gas throughput in 20 °C, 1atm

Dimensions and Pumping Performance

12 13

Unit: mm

Unit: mm

Unit: mm

Unit: mm

TMP-403M and TMP-403MC

Inlet flangeICF203VG150ISO160BISO160C

A238235241241

B163160166166

C108105111111

øDø203ø235ø225ø180

øEø181ø210ø200

—

n-ød20-ø8.48-ø128-ø11

—

G22121612

H186183189189

TMP-403LM and TMP-403LMC

Pumping Speed (TMP-403LM / LMC) Gas Throughput (TMP-403LM / LMC)

Inlet flangeICF203VG150ISO160BISO160C

A238235241241

B163160166166

C190187193193

øDø203ø235ø225ø180

øEø181ø210ø200

—

n-ød20-ø8.48-ø128-ø11

—

G22121612

H186183189189

TMP-803M (0) and TMP-803MC (0)

Inlet flangeICF203VG150ISO160B

A356350355

B291285290

C206200205

øDø203ø235ø225

øEø181ø210ø200

n-ød20-ø8.48-ø118-ø11

F296290295

G22

13.617.6

H329323328

Inlet flangeICF203VG150ISO160B

A356350355

B291285290

C211205210

øDø203ø235ø225

øEø181ø210ø200

n-ød20-ø8.48-ø118-ø11

F296290295

G22

13.617.6

H329323328

TMP-803LM (0) and TMP-803LMC (0)

Pumping Speed (TMP-803LM(0) / LMC(0)) Gas Throughput (TMP-803LM(0) / LMC(0))

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Backing Pump : 670L/min

100

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1 ArN2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net. Backing Pump : 670L/min mL/min : gas throughput in 20 °C, 1atm

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

N2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net. Backing Pump : 800L/min

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

N2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net Backing Pump : 800L/min mL/min : gas throughput in 20 °C, 1atm

Inlet

B (S

ame

as t

he g

as p

urge

por

t)

Outlet KF40

Motor connector

Magnetic bearing connector

Gas purge port

Cooling water inlet/outlet port2-RC1/4

4-M10 depth 15 for fixing pump

Inlet

Connector

Gas purge port Outlet KF25

4-M10 depth 10for fixing pump

InletGas purge port

Connector

Outlet KF25

Cooling water inlet joint2-RC1/4

4-M10 depth 10for fixing pump

Inlet

B (S

ame

as t

he g

as p

urge

por

t)

Outlet KF40

Motor connector

Magnetic bearing connector

Gas purge port

4-M10 depth 15 for fixing pump

Dimensions and Pumping Performance

14 15

Unit: mm

Unit: mm

Unit: mm

Unit: mm

TMP-403M and TMP-403MC

Inlet flangeICF203VG150ISO160BISO160C

A238235241241

B163160166166

C108105111111

øDø203ø235ø225ø180

øEø181ø210ø200

—

n-ød20-ø8.48-ø128-ø11

—

G22121612

H186183189189

TMP-403LM and TMP-403LMC

Pumping Speed (TMP-403LM / LMC) Gas Throughput (TMP-403LM / LMC)

Inlet flangeICF203VG150ISO160BISO160C

A238235241241

B163160166166

C190187193193

øDø203ø235ø225ø180

øEø181ø210ø200

—

n-ød20-ø8.48-ø128-ø11

—

G22121612

H186183189189

TMP-803M (0) and TMP-803MC (0)

Inlet flangeICF203VG150ISO160B

A356350355

B291285290

C206200205

øDø203ø235ø225

øEø181ø210ø200

n-ød20-ø8.48-ø118-ø11

F296290295

G22

13.617.6

H329323328

Inlet flangeICF203VG150ISO160B

A356350355

B291285290

C211205210

øDø203ø235ø225

øEø181ø210ø200

n-ød20-ø8.48-ø118-ø11

F296290295

G22

13.617.6

H329323328

TMP-803LM (0) and TMP-803LMC (0)

Pumping Speed (TMP-803LM(0) / LMC(0)) Gas Throughput (TMP-803LM(0) / LMC(0))

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Backing Pump : 670L/min

100

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1 ArN2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net. Backing Pump : 670L/min mL/min : gas throughput in 20 °C, 1atm

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

N2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net. Backing Pump : 800L/min

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

N2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net Backing Pump : 800L/min mL/min : gas throughput in 20 °C, 1atm

Inlet

B (S

ame

as t

he g

as p

urge

por

t)

Outlet KF40

Motor connector

Magnetic bearing connector

Gas purge port

Cooling water inlet/outlet port2-RC1/4

4-M10 depth 15 for fixing pump

Inlet

Connector

Gas purge port Outlet KF25

4-M10 depth 10for fixing pump

InletGas purge port

Connector

Outlet KF25

Cooling water inlet joint2-RC1/4

4-M10 depth 10for fixing pump

Inlet

B (S

ame

as t

he g

as p

urge

por

t)

Outlet KF40

Motor connector

Magnetic bearing connector

Gas purge port

4-M10 depth 15 for fixing pump

Dimensions and Pumping Performance

14 15

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

ArN2H2He

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net Inlet flange : ISO200/VG200 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm

Unit: mmUnit: mm

Unit: mm

TMP-1003M and TMP-1003MC

TMP-1003LM and TMP-1003LMC

Pumping Speed (TMP-1003LM / LMC) Gas Throughput (TMP-1003LM / LMC)

TMP-1303LM (0) and TMP-1303LMC (0)

Inlet flangeICF253VG200ISO200B

A347307312

B290250255

C318278283

øDø253ø300ø285

øEø231.8ø270ø260

n-ød24-ø8.48-ø1312-ø11

F293253258

G25

20.517.6

H320280285

Inlet flangeICF253VG200ISO200B

A315315307

B250250242

C165165157

øDø253ø300ø285

øEø231.8ø270ø260

n-ød24-ø8.48-ø15

12-ø11

F255255247

G251616

H288288280

Inlet flangeICF253VG200ISO200B

A315315307

B250250242

C170170162

øDø253ø300ø285

øEø231.8ø270ø260

n-ød24-ø8.48-ø15

12-ø11

F255255247

G251616

H288288280

Pumping Speed (TMP-1303LM(0) / LMC(0)) Gas Throughput (TMP-1303LM(0) / LMC(0))

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

N2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net. Backing Pump : 800L/min

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Inlet flange : VG200 Backing Pump : 1080L/min

Dimensions and Pumping Performance

16 17

InletMotor connector

Gas purge port

Outlet KF40

4-M10 depth 15for fixing pump

B (S

ame

as t

he g

as p

urge

por

t)

Magnetic bearing connector

Inlet Motor connector

Gas purge port

Outlet KF40

4-M10 depth 15for fixing pump

Cooling water inlet/outlet port2-RC1/4

B (S

ame

as t

he g

as p

urge

por

t)

Magnetic bearing connector

InletMotor connector

Gas purge port

Outlet KF40

For fixing pump5-M12 depth 10 (Regular interval)

Cooling water inlet/outlet port2-RC1/4

B (S

ame

as t

he g

as p

urge

por

t)

Magnetic bearing connector

101

102

103

104

10-2 10-1 100 101 102

N2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa) Notes. With a protective net Backing Pump : 800L/min mL/min : gas throughput in 0˚C, 1atm

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

ArN2H2He

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net Inlet flange : ISO200/VG200 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm

Unit: mmUnit: mm

Unit: mm

TMP-1003M and TMP-1003MC

TMP-1003LM and TMP-1003LMC

Pumping Speed (TMP-1003LM / LMC) Gas Throughput (TMP-1003LM / LMC)

TMP-1303LM (0) and TMP-1303LMC (0)

Inlet flangeICF253VG200ISO200B

A347307312

B290250255

C318278283

øDø253ø300ø285

øEø231.8ø270ø260

n-ød24-ø8.48-ø13

12-ø11

F293253258

G25

20.517.6

H320280285

Inlet flangeICF253VG200ISO200B

A315315307

B250250242

C165165157

øDø253ø300ø285

øEø231.8ø270ø260

n-ød24-ø8.48-ø1512-ø11

F255255247

G251616

H288288280

Inlet flangeICF253VG200ISO200B

A315315307

B250250242

C170170162

øDø253ø300ø285

øEø231.8ø270ø260

n-ød24-ø8.48-ø1512-ø11

F255255247

G251616

H288288280

Pumping Speed (TMP-1303LM(0) / LMC(0)) Gas Throughput (TMP-1303LM(0) / LMC(0))

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

N2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. Without a protective net. Backing Pump : 800L/min

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Inlet flange : VG200 Backing Pump : 1080L/min

Dimensions and Pumping Performance

16 17

InletMotor connector

Gas purge port

Outlet KF40

4-M10 depth 15for fixing pump

B (S

ame

as t

he g

as p

urge

por

t)

Magnetic bearing connector

Inlet Motor connector

Gas purge port

Outlet KF40

4-M10 depth 15for fixing pump

Cooling water inlet/outlet port2-RC1/4

B (S

ame

as t

he g

as p

urge

por

t)

Magnetic bearing connector

InletMotor connector

Gas purge port

Outlet KF40

For fixing pump5-M12 depth 10 (Regular interval)

Cooling water inlet/outlet port2-RC1/4

B (S

ame

as t

he g

as p

urge

por

t)

Magnetic bearing connector

101

102

103

104

10-2 10-1 100 101 102

N2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa) Notes. With a protective net Backing Pump : 800L/min mL/min : gas throughput in 0˚C, 1atm

Inlet

Motor connector

Gas purge port

Outlet KF40

Cooling water inlet/outlet port2-RC1/4

5-M12 depth 10 (Regular interval) for fixing pump

B (S

ame

as th

e ga

s pu

rge

port

)

Magnetic bearing connector

Inlet

Motor connector

Gas purge port

Outlet KF40

Cooling water inlet/outlet port2-RC1/4

Pump fixing tapB-M16 depth 20

C2 (

Coo

ling

wat

er in

let/o

utle

t por

t)

Magnetic bearing connector

C1 (

Coo

ling

wat

er

inle

t/out

let p

ort)

Unit: mmUnit: mm

TMP-1503LM and TMP-1503LMC

Pumping Speed (TMP-1503LM / LMC) Gas Throughput (TMP-1503LM / LMC)

TMP-2203LM (0) and TMP-2203LMC (0)

Inlet flangeICF305VG250ISO250B

A435375405

B345285315

C1294234264

C2439379409

øDø305ø350ø335

øEø284ø320ø310

n-ød32-ø8.412-ø1312-ø11

F354294324

G28

22.517.6

H392332362

I449390420

J507447477

Inlet flangeICF305VG250ISO250B

A296296304

B239239247

C267267275

øDø305ø350ø335

øEø284ø320ø310

n-ød32-ø8.412-ø1512-ø11

F242242250

G2820

17.6

H269269277

Pumping Speed (TMP-2203LM(0) / LMC(0)) Gas Throughput (TMP-2203LM(0) / LMC(0))

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Inlet flange : VG250 Backing Pump : 7000L/min

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

ArN2

H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net Inlet flange : VG250 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Backing Pump : 7000L/min

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

ArN2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm

Dimensions and Pumping Performance

18 19

Inlet

Motor connector

Gas purge port

Outlet KF40

Cooling water inlet/outlet port2-RC1/4

5-M12 depth 10 (Regular interval) for fixing pump

B (S

ame

as th

e ga

s pu

rge

port

)

Magnetic bearing connector

Inlet

Motor connector

Gas purge port

Outlet KF40

Cooling water inlet/outlet port2-RC1/4

Pump fixing tapB-M16 depth 20

C2 (

Coo

ling

wat

er in

let/o

utle

t por

t)

Magnetic bearing connector

C1 (

Coo

ling

wat

er

inle

t/out

let p

ort)

Unit: mmUnit: mm

TMP-1503LM and TMP-1503LMC

Pumping Speed (TMP-1503LM / LMC) Gas Throughput (TMP-1503LM / LMC)

TMP-2203LM (0) and TMP-2203LMC (0)

Inlet flangeICF305VG250ISO250B

A435375405

B345285315

C1294234264

C2439379409

øDø305ø350ø335

øEø284ø320ø310

n-ød32-ø8.412-ø1312-ø11

F354294324

G28

22.517.6

H392332362

I449390420

J507447477

Inlet flangeICF305VG250ISO250B

A296296304

B239239247

C267267275

øDø305ø350ø335

øEø284ø320ø310

n-ød32-ø8.412-ø1512-ø11

F242242250

G2820

17.6

H269269277

Pumping Speed (TMP-2203LM(0) / LMC(0)) Gas Throughput (TMP-2203LM(0) / LMC(0))

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Inlet flange : VG250 Backing Pump : 7000L/min

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

ArN2

H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net Inlet flange : VG250 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm

101

102

103

104

10-3 10-2 10-1 100 101 102 103

10-5 10-4 10-3 10-2 10-1 100

ArN

2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Backing Pump : 7000L/min

101

102

103

104

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

ArN2H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

(Torr)

Notes. With a protective net. Backing Pump : 7000L/min mL/min : gas throughput in 0 °C, 1atm

Dimensions and Pumping Performance

18 19

Inlet

Control cable connectorCooling water inlet joint2-RC1/4 8-M20 depth 30

for fixing pump

Outlet KF40

Gas purge port

Inlet

Control cable connectorCooling water inlet joint2-RC1/4 8-M20 depth 30

for fixing pump

Outlet KF40

Gas purge port

TMP-2804LM series (LMC / LMB / LMF)

Pumping Speed (TMP-2804LM series) Gas Throughput (TMP-2804LM series)

TMP-3304LM series (LMC / LMB / LMF)

Pumping Speed (TMP-3304LM series) Gas Throughput (TMP-3304LM series)

Unit: mm

Inlet flangeVG250ISO250B

A409409

B331331

C303303

øDø350ø335

øEø320ø310

n-ød12-ø1312-ø11

F377377

G16

17.6

Unit: mm

Inlet flangeVG300VG350ISO320B

A365365370

B288288292

C259259264

øDø400ø450ø425

øEø370ø420ø395

n-ød12-ø1312-ø1312-ø13

F333333338

G18.524.522.5

101

102

103

104

10-2 10-1 100 101 102

ArN

2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm 101

102

103

104

10-2 10-1 100 101 102

ArN2H2He

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm 101

102

103

104

10-2 10-1 100 101 102

ArN

2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm 101

102

103

104

10-2 10-1 100 101 102

ArN2H2He

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm

Dimensions and Pumping Performance

20 21

Inlet

Control cable connectorCooling water inlet joint2-RC1/4 8-M20 depth 30

for fixing pump

Outlet KF40

Gas purge port

Inlet

Control cable connectorCooling water inlet joint2-RC1/4 8-M20 depth 30

for fixing pump

Outlet KF40

Gas purge port

TMP-2804LM series (LMC / LMB / LMF)

Pumping Speed (TMP-2804LM series) Gas Throughput (TMP-2804LM series)

TMP-3304LM series (LMC / LMB / LMF)

Pumping Speed (TMP-3304LM series) Gas Throughput (TMP-3304LM series)

Unit: mm

Inlet flangeVG250ISO250B

A409409

B331331

C303303

øDø350ø335

øEø320ø310

n-ød12-ø1312-ø11

F377377

G16

17.6

Unit: mm

Inlet flangeVG300VG350ISO320B

A365365370

B288288292

C259259264

øDø400ø450ø425

øEø370ø420ø395

n-ød12-ø1312-ø1312-ø13

F333333338

G18.524.522.5

101

102

103

104

10-2 10-1 100 101 102

ArN

2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm 101

102

103

104

10-2 10-1 100 101 102

ArN2H2He

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm 101

102

103

104

10-2 10-1 100 101 102

ArN

2

H2

He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm 101

102

103

104

10-2 10-1 100 101 102

ArN2H2He

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 7000L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm

Dimensions and Pumping Performance

20 21

TMP-3804LMC and TMP-3804LMF

Pumping Speed (TMP-3804LMC / LMF) Gas Throughput (TMP-3804LMC / LMF)

TMP-4304LMC and TMP-4304LMF

Pumping Speed (TMP-4304LMC / LMF) Gas Throughput (TMP-4304 LMC / LMF)

Unit: mm

Inlet flangeVG300ISO320B

A420420

B342342

C314314

øDø400ø425

øEø370ø395

n-ød12-ø1312-ø13

F388388

G20.524.5

Unit: mm

Inlet flangeVG350

A370

B292

C264

øDø450

øEø420

n-ød12-ø13

F338

G24.5

101

102

103

104

10-2 10-1 100 101 102

Ar

N2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm

101

102

103

104

10-2 10-1 100 101 102

Ar

N2

H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa) Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm

101

102

103

104

10-2 10-1 100 101 102

ArN2H2He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm

101

102

103

104

10-2 10-1 100 101 102

ArN2H2He

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm

Dimensions and Pumping Performance

22 23

Inlet

Control cable connectorCooling water inlet joint 2-RC1/4 8-M20 depth 30

for fixing pump

Outlet KF40

Gas purge port

Inlet

Control cable connectorCooling water inlet joint 2-RC1/4 8-M20 depth 30

for fixing pump

Outlet KF40

Gas purge port

TMP-3804LMC and TMP-3804LMF

Pumping Speed (TMP-3804LMC / LMF) Gas Throughput (TMP-3804LMC / LMF)

TMP-4304LMC and TMP-4304LMF

Pumping Speed (TMP-4304LMC / LMF) Gas Throughput (TMP-4304 LMC / LMF)

Unit: mm

Inlet flangeVG300ISO320B

A420420

B342342

C314314

øDø400ø425

øEø370ø395

n-ød12-ø1312-ø13

F388388

G20.524.5

Unit: mm

Inlet flangeVG350

A370

B292

C264

øDø450

øEø420

n-ød12-ø13

F338

G24.5

101

102

103

104

10-2 10-1 100 101 102

Ar

N2

H2

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm

101

102

103

104

10-2 10-1 100 101 102

Ar

N2

H2

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa) Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm

101

102

103

104

10-2 10-1 100 101 102

ArN2H2He

Pum

ping

Spe

ed (L

/s)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm

101

102

103

104

10-2 10-1 100 101 102

ArN2H2He

Gas

Thr

ough

put (

mL/

min

)

Inlet Pressure (Pa)

Notes. With a protective net Backing Pump : 5500L/min Pipe : I.D. 40mm, Length 2000mm mL/min : gas throughput in 0 , 1atm

Dimensions and Pumping Performance

22 23

Inlet

Control cable connectorCooling water inlet joint 2-RC1/4 8-M20 depth 30

for fixing pump

Outlet KF40

Gas purge port

Inlet

Control cable connectorCooling water inlet joint 2-RC1/4 8-M20 depth 30

for fixing pump

Outlet KF40

Gas purge port

Power supply Power supply

Power supply

MB cable

MB cable

MB cable

Air-cooling fan cord

Motor cable for air cooling type

Air cooled type turbo molecular pump

Water cooled type turbo molecular pump

Air cooled type turbo molecular pump

Power supplyMB cable

Motor cable for water cooling type

Water cooled type turbo molecular pump

Power supplyPower supply

Power supply

MB cable

MB cable

MB cable

Motor cable for water cooling type

Motor cable for water cooling

Temperature control cable

Temperature control cable

High pumping throughput turbo molecular pump

Power supply

Control cable

High pumping throughput turbo molecular pump

Turbo molecular pump with heating function

Turbo molecular pump with heating function

Turbo Molecular Pump, Air Cooled Type[Pump: 03 series / Power Supply: EI-S04M]

ICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF203VG150ISO160BISO160CICF203VG150ISO160BISO160C

Inlet Flange262-81445-61262-81445-62262-81445-65262-81445-63262-81445-71262-81445-72262-81445-75262-81445-73262-81435-61262-81435-62262-81435-65262-81435-63262-81435-71262-81435-72262-81435-75262-81435-73262-81455-61262-81455-62262-81455-65262-81455-63262-81455-71262-81455-72262-81455-75262-81455-73

Part Number

・EI-S04M・EI-S04M(DN)・EI-S04M(232)

Applicable Power Supply

・MB cable・Air-cooling fan cord

CableTMP-203M

TMP-203MC

TMP-303M

TMP-303MC

TMP-403M

TMP-403MC

Pump Model

Turbo Molecular Pump, Air Cooled Type[Pump: 03 series / Power Supply: EI-R04M]

ICF203VG150ISO160BICF203VG150ISO160BICF253VG200ISO200BICF253VG200ISO200B

Inlet Flange263-18282-61263-18282-62263-18282-65263-18282-71263-18282-72263-18282-75262-81410-61262-81410-62262-81410-65262-81410-71262-81410-72262-81410-75

Part Number

・EI-R04M・EI-R04M(DN)・EI-R04M(232)

Applicable Power Supply

・MB cable・Motor cable for air cooling type

CableTMP-803M(0)

TMP-803MC(0)

TMP-1003M

TMP-1003MC

Pump Model

Turbo Molecular Pump, Water Cooled Type[Pump: 03 series / Power Supply: EI-S04M]

ICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF152VG100ISO100BISO100CICF203VG150ISO160BISO160CICF203VG150ISO160BISO160C

Inlet Flange262-81445-41262-81445-42262-81445-45262-81445-43262-81445-51262-81445-52262-81445-55262-81445-53262-81435-41262-81435-42262-81435-45262-81435-43262-81435-51262-81435-52262-81435-55262-81435-53262-81455-41262-81455-42262-81455-45262-81455-43262-81455-51262-81455-52262-81455-55262-81455-53

Part Number

・EI-S04M・EI-S04M(DN)・EI-S04M(232)

Applicable Power Supply

・MB cable

CableTMP-203LM

TMP-203LMC

TMP-303LM

TMP-303LMC

TMP-403LM

TMP-403LMC

Pump Model

High Pumping Throughput Turbo Molecular Pump[Pump: 03 series / Power Supply: EI-R04M]

ICF253VG200ISO200BICF253VG200ISO200BICF305VG250ISO250BICF305VG250ISO250BICF305VG250ISO250BICF305VG250ISO250B

Inlet Flange263-18283-41263-18283-42263-18283-43263-18283-51263-18283-52263-18283-53262-78773-41262-78773-42262-78773-43262-78773-51262-78773-52262-78773-53263-18286-01263-18286-02263-18286-03263-18286-11263-18286-12263-18286-13

Part Number

・EI-R04M・EI-R04M(DN)・EI-R04M(232)

Applicable Power Supply

・MB cable・Motor cable for water cooling type

CableTMP-1303LM(0)

TMP-1303LMC(0)

TMP-1503LM

TMP-1503LMC

TMP-2203LM(0)

TMP-2203LMC(0)

Pump Model

High Pumping Throughput Turbo Molecular Pump[Pump: 04 series / Power Supply: EI-R04M]

VG250ISO250BVG250ISO250BVG250ISO250BVG250ISO250BVG300VG350ISO320BVG300VG350ISO320BVG300VG350ISO320BVG300VG350ISO320BVG300ISO320BVG300ISO320BVG350VG350

Inlet Flange263-18168-02263-18168-03263-18168-12263-18168-13263-18168-42263-18168-43263-18172-42263-18172-43263-18034-07263-18034-09263-18034-08263-18034-17263-18034-19263-18034-18263-18034-47263-18034-49263-18034-48263-18050-47263-18050-49263-18050-48263-18110-17263-18110-18263-18114-47263-18114-48263-18110-19263-18114-49

Part Number

・EI-R04M・EI-R04M(DN)・EI-R04M(232)

Applicable Power Supply

・Control cable

CableTMP-2804LM

TMP-2804LMC

TMP-2804LMB

TMP-2804LMF

TMP-3304LM

TMP-3304LMC