marie’s slides...
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![Page 1: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/1.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Automated alignment procedure for s3tching with a focused ion beam
Marie Verbist
17 June 2010
![Page 2: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/2.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nano
![Page 3: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/3.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nano photonics
![Page 4: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/4.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nano photonics very very small photonic chips
![Page 5: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/5.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nano photonics very very small photonic chips fabricated with nanometer precision
![Page 6: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/6.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nanophotonics
focused ion beam
alignment procedure
Automated alignment procedure for s3tching with a focused ion beam
![Page 7: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/7.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nanophotonics
focused ion beam
alignment procedure
Automated alignment procedure for s3tching with a focused ion beam
waveguides by focused ion beam s3tching
![Page 8: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/8.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nanophotonics
focused ion beam
alignment procedure
Automated alignment procedure for s3tching with a focused ion beam
confining and guiding light
photonic components
fabrica3on
![Page 9: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/9.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Light can be confined by refrac3ve index contrast
light
low n
high n
low n
![Page 10: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/10.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Light can be confined by refrac3ve index contrast
layer sandwich of materials with different refrac3ve index (n)
light
low n
high n
low n
![Page 11: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/11.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Light can be confined by refrac3ve index contrast
layer sandwich of materials with different refrac3ve index (n)
total internal reflec3on light stays in the core with higher n
light
low n
high n
low n
![Page 12: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/12.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Light can be confined by refrac3ve index contrast
layer sandwich of materials with different refrac3ve index (n)
total internal reflec3on light stays in the core with higher n
higher index contrast smaller core and sharper bends
light
low n
high n
low n
![Page 13: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/13.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Waveguides are the basis of many nanophotonic components
cross‐sec3on air (n=1)
Si (n=3.4)
SiO2 (n=1.4)
top view
![Page 14: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/14.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Waveguides are the basis of many nanophotonic components
cross‐sec3on air (n=1)
Si (n=3.4)
SiO2 (n=1.4)
top view
![Page 15: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/15.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
CMOS fabrica.on tools ideal for industry
?? ideal for research
mass fabrica3on prototype fabrica3on
long development cycle short development cycle
not all materials all materials
CMOS technology is not ideal for prototyping
![Page 16: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/16.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
CMOS fabrica.on tools ideal for industry
?? ideal for research
mass fabrica3on prototype fabrica3on
long development cycle short development cycle
not all materials all materials
CMOS technology is not ideal for prototyping
![Page 17: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/17.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
CMOS fabrica.on tools ideal for industry
?? ideal for research
mass fabrica3on prototype fabrica3on
long development cycle short development cycle
not all materials all materials
CMOS technology is not ideal for prototyping
![Page 18: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/18.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
CMOS fabrica.on tools ideal for industry
?? ideal for research
mass fabrica3on prototype fabrica3on
long development cycle short development cycle
not all materials all materials
CMOS technology is not ideal for prototyping
Focused Ion Beam tool
![Page 19: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/19.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nanophotonics
focused ion beam
alignment procedure
Automated alignment procedure for s3tching with a focused ion beam
working principle
need for s3tching
![Page 20: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/20.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
An ion beam is focused scanned blanked
A focused ion beam tool enables milling and imaging
target
Ga+ beam
![Page 21: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/21.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
An ion beam is focused scanned blanked
Impact causes atoms to be spuTered away
A focused ion beam tool enables milling and imaging
target
Ga+ beam
spuTered atoms
![Page 22: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/22.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
An ion beam is focused scanned blanked
Impact causes atoms to be spuTered away
This allows for milling holes
A focused ion beam tool enables milling and imaging
target
Ga+ beam
spuTered atoms
![Page 23: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/23.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
An ion beam is focused scanned blanked
Impact causes atoms to be spuTered away electrons to be released
This allows for milling holes
A focused ion beam tool enables milling and imaging
target
Ga+ beam
secondary electrons
spuTered atoms
![Page 24: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/24.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
An ion beam is focused scanned blanked
Impact causes atoms to be spuTered away electrons to be released
This allows for milling holes imaging (through electron detec3on)
A focused ion beam tool enables milling and imaging
target
Ga+ beam
secondary electrons
spuTered atoms
![Page 25: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/25.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Large structures need to be s3tched
same number of pixels for any field width
field width
![Page 26: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/26.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Large structures need to be s3tched
same number of pixels for any field width for a certain required scan resolu3on, the FW is limited
large FW small FW
low resolu3on high resolu3on
![Page 27: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/27.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Large structures need to be s3tched
same number of pixels for any field width for a certain required scan resolu3on, the FW is limited
structures larger than the field width have to be s3tched i.e. etch part of the structure, move stage, etch next part, …
large FW small FW
low resolu3on high resolu3on
![Page 28: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/28.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nanophotonics
focused ion beam
alignment procedure
Automated alignment procedure for s3tching with a focused ion beam
adjus3ng the beam rota3on
adjus3ng the beam shi[
![Page 29: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/29.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Problem 1 : misalignment of beam and stage axes
Beam axes and stage axes are slightly misaligned
![Page 30: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/30.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Problem 1 : misalignment of beam and stage axes
Beam axes and stage axes are slightly misaligned
![Page 31: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/31.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Problem 1 : misalignment of beam and stage axes
Beam axes and stage axes are slightly misaligned
![Page 32: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/32.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Problem 1 : misalignment of beam and stage axes
Beam axes and stage axes are slightly misaligned
![Page 33: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/33.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 1 : adjust beam rota3on
Determine angle between stage and beam axes move stage to the corners of a square mill alignment markers in each corner and image calculate angle from rotated square
![Page 34: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/34.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 1 : adjust beam rota3on
mill & image
Determine angle between stage and beam axes move stage to the corners of a square mill alignment markers in each corner and image calculate angle from rotated square
![Page 35: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/35.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 1 : adjust beam rota3on
mill & image move stage
Determine angle between stage and beam axes move stage to the corners of a square mill alignment markers in each corner and image calculate angle from rotated square
![Page 36: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/36.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 1 : adjust beam rota3on
mill & image move stage
Determine angle between stage and beam axes move stage to the corners of a square mill alignment markers in each corner and image calculate angle from rotated square
image & match
![Page 37: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/37.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 1 : adjust beam rota3on
mill & image move stage
Determine angle between stage and beam axes move stage to the corners of a square mill alignment markers in each corner and image calculate angle from rotated square
image & match
![Page 38: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/38.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 1 : adjust beam rota3on
mill & image move stage
Determine angle between stage and beam axes move stage to the corners of a square mill alignment markers in each corner and image calculate angle from rotated square
image & match
![Page 39: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/39.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Problem 2 : inaccuracy of stage moves
Stage moves are too inaccurate causing overlap or space between the several milled parts
![Page 40: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/40.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Problem 2 : inaccuracy of stage moves
Stage moves are too inaccurate causing overlap or space between the several milled parts
![Page 41: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/41.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Problem 2 : inaccuracy of stage moves
Stage moves are too inaccurate causing overlap or space between the several milled parts
![Page 42: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/42.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Problem 2 : inaccuracy of stage moves
Stage moves are too inaccurate causing overlap or space between the several milled parts
![Page 43: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/43.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 44: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/44.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 45: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/45.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 46: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/46.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 47: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/47.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image move & match
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 48: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/48.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image move & match
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 49: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/49.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image move & match mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 50: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/50.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image move & match mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 51: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/51.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image move & match mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 52: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/52.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image move & match mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 53: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/53.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image move & match mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
![Page 54: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/54.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Solu3on 2 : adjust beam shi[
mill & image move & match mill & image
Determine beam shi[ to compensate for stage inaccuracy based on image recogni3on of markers
The waveguide itself is never imaged to avoid damage/losses
![Page 55: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/55.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nanophotonics
focused ion beam
alignment procedure
Automated alignment procedure for s3tching with a focused ion beam
![Page 56: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/56.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
nanophotonics
focused ion beam
alignment procedure
Automated alignment procedure for s3tching with a focused ion beam
waveguides by focused ion beam s3tching
![Page 57: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/57.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Long waveguides could be s3tched
£
80 μm
![Page 58: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/58.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Long waveguides could be s3tched
£
80 μm
![Page 59: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/59.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Structures are unlimited in size
80 μm
1.5 mm
![Page 60: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/60.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Structures are unlimited in size except by the size of the sample
80 μm
1.5 mm
![Page 61: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/61.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
Photonics Research Group www.photonics.intec.ugent.be
nanophotonics
![Page 62: Marie’s slides !#$%&'()&*+,-%'-#)./$0'(/'))prcen.upr.edu/uploads/doc/ECS-03-07-02-Marie-s...Marie’s slides Watch this presentation on © 2010 Marie Verbist (Photonics Research](https://reader031.vdocuments.net/reader031/viewer/2022013021/5f052f6c7e708231d411b30c/html5/thumbnails/62.jpg)
Marie’s slidesWatch this presentation on www.scitable.com
© 2010 Marie Verbist (Photonics Research Group, Universiteit Gent / imec)
as large as we want nanophotonics
Photonics Research Group www.photonics.intec.ugent.be