marketech integrated | the professional technology service...
TRANSCRIPT
![Page 1: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/1.jpg)
![Page 2: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/2.jpg)
![Page 3: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/3.jpg)
![Page 4: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/4.jpg)
![Page 5: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/5.jpg)
![Page 6: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/6.jpg)
![Page 7: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/7.jpg)
![Page 8: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/8.jpg)
![Page 9: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/9.jpg)
Cu Pillar % µ-Bump Ag% µ-Bump Ag% (Sn-Ag)
W CMPSilicideHKMGHfOx
SOI/SiGe/Si:C
Cu Seed & Barrier
Metal Cu CMP
Non VisualCrystalline
defects
UBM thickness Waf
erLe
vel
Pack
aging
Cu M
etall
izatio
nGa
teSiG
e,HK
MG
Subs
trate
BOXSiGe SiGe STISiGe
X-RayTechnologies
3D geometry
Metal Cu CMP
XRR
GI-XRF
HRXRD
XRDI
WAXRD
XCD
![Page 10: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/10.jpg)
![Page 11: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/11.jpg)
![Page 12: Marketech Integrated | The Professional Technology Service ...marketech.com.sg/catalog/Brochure_18cmx28cm_V3RFA_Pathed.pdf · UBM thickness Wafer Level Packaging Cu Metallization](https://reader034.vdocuments.net/reader034/viewer/2022042411/5f29baa6f0ebe8303d1302a4/html5/thumbnails/12.jpg)