mattson ast2800, single chamber rtp, s/n 94060103, vintage...
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Mattson AST2800, Single Chamber RTP, S/N 94060103, Vintage 1994 Page1/6
Mattson-Steag-AST SHS2800_01_SN Tag_94060103 Mattson-Steag-AST SHS2800_02_Front
Mattson-Steag-AST SHS2800_03_Monitor,Keyboard Mattson-Steag-AST SHS2800_04_Front-Bottom(opened)
Mattson-Steag-AST SHS2800_05_Front-Left Mattson-Steag-AST SHS2800_06_Front-Center_01
Mattson AST2800, Single Chamber RTP, S/N 94060103, Vintage 1994 Page2/6
Mattson-Steag-AST SHS2800_07_Front-Center_02 Mattson-Steag-AST SHS2800_08_Front-Right
Mattson-Steag-AST SHS2800_09_Side-Left_Top Mattson-Steag-AST SHS2800_10_Side-Left_Bottom
Mattson-Steag-AST SHS2800_11_Side-Right_Top Mattson-Steag-AST SHS2800_12_Side-Right_Middle
Mattson AST2800, Single Chamber RTP, S/N 94060103, Vintage 1994 Page3/6
Mattson-Steag-AST SHS2800_13_Side-Right_Bottom Mattson-Steag-AST SHS2800_14_Rear
Mattson-Steag-AST SHS2800_15_Rear_Top-Left,Gas Box Mattson-Steag-AST SHS2800_16_Rear_Top-Right,Gas Box
Mattson-Steag-AST SHS2800_17_Rear_Middle Mattson-Steag-AST SHS2800_18_Rear_Bottom-Left_01
Mattson AST2800, Single Chamber RTP, S/N 94060103, Vintage 1994 Page4/6
Mattson-Steag-AST SHS2800_19_Rear_Bottom-Left_02 Mattson-Steag-AST SHS2800_19_Rear_Bottom-Right_Controllers
Mattson-Steag-AST SHS2800_20_Rear_Bottom-Right_Controllers,Details Mattson-Steag-AST SHS2800_20_Rear_Bottom-Right_Utility
Mattson-Steag-AST2800_Details_01_Robot Tag.JPG Mattson-Steag-AST2800_Details_02_Aligner Tag.JPG
Mattson AST2800, Single Chamber RTP, S/N 94060103, Vintage 1994 Page5/6
Mattson-Steag-AST2800_Details_03_MFC Tag(Ar)_Brooks#1 Mattson-Steag-AST2800_Details_04_MFC Tag(Ar)_Brooks#2
Mattson-Steag-AST2800_Details_05_MFC Tag(N2)_Horiba-STEC#1 Mattson-Steag-AST2800_Details_06_MFC Tag(N2)_Horiba-STEC#2
Mattson-Steag-AST2800_Details_07_MFC Tag(NH3)_Brooks#1 Mattson-Steag-AST2800_Details_08_MFC Tag(NH3)_Brooks#2
Mattson AST2800, Single Chamber RTP, S/N 94060103, Vintage 1994 Page6/6
Mattson-Steag-AST2800_Details_09_MFC Tag(NH3)_Brooks#3 Mattson-Steag-AST2800_Details_10_MFC Tag(O2)_Brooks#1
Mattson-Steag-AST2800_Details_11_MFC Tag(O2)_Brooks#2