me382: experiments in micro/nano science and engineering a review on carbon nanotube probes for...
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ME382: Experiments in Micro/Nano Science and Engineering
A Review on Carbon Nanotube Probes for Microscopy Applications
Wei Chen, Yuan Yao and YunYoung Kim
Department of Mechanical EngineeringNorthwestern University, Illinois 60201, USA
ME382: Experiments in Micro/Nano Science and Engineering
Contents
1. Introduction (YunYoung Kim)
2. Gluing Method (Wei Chen)
3. Growng Method (Yuan Yao)
4. Biological Applications (YunYoung Kim)
ME382: Experiments in Micro/Nano Science and Engineering
Atomic Force Microscopy (AFM) - Indispensable device for micro/nano scale phenomena studies - Surface topology measurement - Micro/nano structure manipulation
Introduction
Carbon Nanotube (CNT) - A new material that has exceptional properties
- Promising possibilities of applications (composites, FEP display, chemical sensors, etc.)
Hafner et al., Prog. Biophys. Mol. Biol. 77, 73-110 (2001).
Hafner et al., Prog. Biophys. Mol. Biol. 77, 73-110 (2001).
ME382: Experiments in Micro/Nano Science and Engineering
CNT-Probed AFM - A CNT (either SWNT or MWNT) is attached on the apex of the
conventional silicon AFM cantilever tip.
Tang et al., Nano Lett. 5(1), 11-14 (2005).
Si Tip
CNT Probe
Wong et al., J. Am. Chem. Soc. 120, 603-604 (1998).
Si Tip
CNT Probe
Introduction
ME382: Experiments in Micro/Nano Science and Engineering
The Synergy Effect of CNT-Probed AFM - Resolution enhancement
- Precise measurements of high aspect ratio structures
Chang et al., Jpn. J. Appl. Sci. 43(7B), 4517-4520 (2004). Guo et al., Appl. Surf. Sci. 228, 53-56 (2004).
Dai et al., Nature 384(14), 147-150 (1996).
Introduction
Si Tip
Si TipCNT Probe CNT Probe
CNT ProbeSi Tip
ME382: Experiments in Micro/Nano Science and Engineering
- High wear-resistance
Chang et al., Jpn. J. Appl. Phys. 43(7B), 4517-4520 (2004).
Si Tip
CNT Probe CNT Probe Si Tip
Introduction
- Biomolecule manipulation
Chang et al., Jpn. J. Appl. Phys. 43(7B), 4517-4520 (2004).
Biotin Ligand
Streptavidin Receptor
ME382: Experiments in Micro/Nano Science and Engineering
Overview: Two Ways of CNT-Tip Fabrication - Gluing Method
- Growing Method
Hafner et al., Prog. Biophys. Mol. Biol. 77, 73-110 (2001).
Tang et al., Nano Lett. 5(1), 11-14 (2005).
Introduction
ME382: Experiments in Micro/Nano Science and Engineering
Gluing Method
Pick-up method
SWNT0.9~2.8nm in diameter
Lieber et al. J. Phys. Chem. B 2001
First trial-”glue”
MWNT5~20nm in diameter0.25~1μm in length
Dai, H. et al. Nature 1996
ME382: Experiments in Micro/Nano Science and Engineering
Gluing Method
Disadvantage
• Manual assembly method is time-consuming, needs proficient experimental technique, the fabrication yield is restricted.
• Spacial resolution is compromised by the large diameters of attached CNTs, since only thick CNTs can be viewed under optical microscope.
ME382: Experiments in Micro/Nano Science and Engineering
Gluing Method
Magnetic field-aligned• Sputter coat the Au film
on AFM probes;• Fix the AFM tips;• Prepare and stir CNTs
suspension (5mL);• Apply alternative
magnetic field (Amplitude B0=0.1T);
• CNTs are aligned and attached onto the tips.
Hall, A. et al. Appl. Phys. Lett. 2003
Average protruding angle: 35o
Length: 100-500nm
ME382: Experiments in Micro/Nano Science and Engineering
Gluing Method
Physical Principle oflux BAChange in flux ~(Induced potential)
L
BAAI ocurrentflux
Induced Current
fluxAIm Dipole moments
3
0
2)(
r
mmrU CNTtip
Potential Energy
Attraction Force
Aflux
Magnetic
Flux
Induced
Current
ME382: Experiments in Micro/Nano Science and Engineering
Gluing Method
Dip-Coating & Dielectrophoresis• Introduce the CNTs into
the TiO2 SG solution;• W tip was dipped into SG
solution containing CNTs;• Apply DC voltage between
the tip and the solution;• CNTs was deposited on
the tip, and the SG was coated on it as well,
• Withdraw the tip and anneal it under infra-red lamp.
A. Brioude et al. Appl. Surf. Sci. 221 (2004)
Diameter: ~9.2nm Length: ~950nm
ME382: Experiments in Micro/Nano Science and Engineering
Strong adhesion
A. Brioude et al. Appl. Surf. Sci. 221 (2004)
• Many CNTs entangle together into fiber, CNTs break near the apex of tips since the sudden strong current;
• The SG thin film works like a sheath, which integrates the CNTs and tip as a whole.
Potential for large-scale fabrication
Gluing Method
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Pore-growth method (first direct growth, Hafner et al., Nature 1999)
1. Flatten the conventional silicon (Si) tip at its apex by contact AFM imaging;
2. Anodize the tip in hydrogen fluoride to create nano-pores of 50–100 nm diameter along the tip axis;
3. Electrodeposit iron catalyst into the nano-pores from FeSO4 solution;
4. Use Chemical Vapor Deposition (CVD) to grow carbon nanotubes with ethylene and hydrogen at 750 for 10 min. ℃
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
• The pore-growth method demonstrated the great potential of thermal CVD to grow directly controlled diameter nanotube tips.
1μm 20nm
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Limitation:The preparation of a porous layer can be time consuming and may not place individual SWCNTs at the optimal location on the flattened apex.
ME382: Experiments in Micro/Nano Science and Engineering
Surface-growth method (Hafner et al., J. Am. Chem. Soc. 1999)
1. Deposit catalyst onto the pyramidal tip of a commercial cantilever; (Fe-Mo and colloidal Fe-oxide catalysts are electrophoretically deposited on the tip)
2. grow the SWCNT probe using thermal CVD at 800 ℃ for 3 min. (ethylene is used as carbon source -- C2H4 : H2 : Ar = 1 : 200 : 300)
Growing Method
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Surface-growth method
SEM cannot provide an accurate measure of the tip diameters. TEM analysis was able to demonstrate that the tips consist of individual SWCNT and small SWCNT bundles.
20nm200nm
ME382: Experiments in Micro/Nano Science and Engineering
Individual SWNT tips can be prepared by lowering the catalyst density on the surface such that only 1 nanotube reaches the apex.
Hence, by controlling the catalyst density , it is possible to produce well-defined individual SWNT tips.
Surface-growth method
Growing Method
10nm
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Mass production ?Erhan Yenilmez, et al., Appl. Phys. Lett. 2002
How to place catalyst on each of the 375 Si tips on a 4-in wafer ?
How to grow SWCNTs on a wafer-scale large substrate using CVD?
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Catalyst patterning
1. Spin coat polymethylmethacrylate (PMMA) onto the wafer at a low spin speed of 1000 rpm and bake the wafer on a hot plate at 180 ℃ for 5 min. Repeat the PMMA spin coating and baking step for three times.
2. Spin coat the catalyst suspension onto the wafer at a low spin speed of 250rpm
3. Liftoff the PMMA layer in acetone. The catalyst coated around the pyramidal surfaces of the tips will be left.
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
The system is heated to 900 in an Ar flow after a thorough ℃purge of the system by Ar. Then ultrahigh purity methane (99.999% purity, flow rate of 1500 sccm) is piped through the system together with hydrogen (flow rate of 125 sccm) for a growth time of 7 min. At last, the system is cooled to room temperature in a H2 flow.
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Their method yields SWCNTs protruding from more than 90% of the 375 Si tips on a wafer.
ME382: Experiments in Micro/Nano Science and Engineering
• CNT location, density, length, and orientation can not be welled controlled by the thermal CVD methods. Although we can get many tips through one thermal CVD process, seldom of them has individual free-standing and well-oriented CNTs. The yield of readily usable tips is very low.
• After CNT tip fabrication, a one-at-a-time manipulation approach is required to shorten the extruding CNTs for AFM use. This shortening process decreases the efficiency of mass production.
• In addition, nearly all of the previous approaches (including both attaching methods and direct growth methods) rely on commercially available silicon tips or prefabricated commercial silicon probe wafers.
Limitations:
Growing Method
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Qi Ye et al., Nano Lett. 2004
They integrated nanopatterning and nanomaterials synthesis with traditional silicon cantilever microfabrication technology, and produced 244 CNT probe tips on a 4-in. wafer with controlled CNT location, diameter, length, and orientation.
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Qi Ye et al., Nano Lett. 2004
PECVD – Plasma Enhanced CVD
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
Qi Ye et al., Nano Lett. 2004
PECVD – Plasma Enhanced CVD
ME382: Experiments in Micro/Nano Science and Engineering
Qi Ye et al., Nano Lett. 2004
Growing Method
ME382: Experiments in Micro/Nano Science and Engineering
Growing Method
1. No prefabricated silicon probe wafers needed;2. Better control of the CNT location, density, length,
and orientation by PECVD; 3. No need to conduct post-fabrication treatment to
remove and/or shorten the CNT tips.
Advantages of their approach:
Qi Ye et al., Nano Lett. 2004
ME382: Experiments in Micro/Nano Science and Engineering
Biological Applications
Biomolecule Structure Characterization
Wong et al., J. Am. Chem. Soc. 120, 603-604 (1998)
- Amyloid-β fibrils are measured with CNT tips.
- The small effective tip radii result in 12~30% increase of resolution.
- Observed widths are 3~8 nm smaller for MWNT tips than those for Si tips.
An image of Aβ40 fibril
A Y-branch A defect
A staggered end
ME382: Experiments in Micro/Nano Science and Engineering
Biological Applications
- Significant resolution improvement for SWNT tips (full width at half maximum is 5±1 nm for SWNT tip and 15±1 nm for Si tip)
- More refined measurements are possible with SWNT tips.
An image of double-stranded DNA on mica Height cross-section of the DNA
SWNT Tip
FWHM=5.6 nm
Si Tip
FWHM=14.4 nm
Wong et al., Appl. Phys. Lett. 73, 3465-3467 (1998)
ME382: Experiments in Micro/Nano Science and Engineering
Biological Applications
AFM image of DNA taken using a CNT tip AFM image of DNA taken using a Si tip
- Improvement in resolution by a factor of 2
- The diameter ranges from 12 to 15 nm with a Si tip, but 7 to 8 nm with a CNT tip.
- Blurred image is observed when the CNT tip with a ~10 nm diameter is longer than 500 nm
Nishijima et al., Appl. Phys. Lett 74, 4061-4063 (1999)
ME382: Experiments in Micro/Nano Science and Engineering
An Issue about the Length of CNTs
Biological Applications
- To avoid a mechanical instability, the length should be less than 500 nm for MWNTs and 50nm for SWNTs1.
- Akita et al. also reports that L < 500 nm is required for a stable and high-resolution imaging2.
)(424.0
44
32
baY
kTLu
Vibration amplitude,
a: outer radii of the nanotube (5 nm)
b: inner radii of the nanutube (2.5 nm)
Y: Young’s modulus (1TPa)
- For example, L > 500 nm results in u > 0.5 nm and degradation of resolution by a factor of ten. 1) Chang et al., Jpn, J. Appl. Phys. 43, 4517-4520 (2004)
2) S. Akita et al., J. Phys. D.: Appl. Phys. 32, 1044-1048 (1999)
ME382: Experiments in Micro/Nano Science and Engineering
Biological Applications
Manipulation of Wettability of CNTS - Hydrophobic CNTs are chemically incompatible in aqueous e
nvironments.
- Stevens et al. reported a failure of MWNT probe during the measurement in DI H2O.
A MWNT tip before immersing in DI water A MWNT tip after immersing in DI water
Stevens et al., IEEE Trans. Nanobio. 3, 56-60 (2004)
ME382: Experiments in Micro/Nano Science and Engineering
Biological Applications
- The wettability can be adjusted by depositing ethylendiamine (DE) on the sidewalls of CNTs.
- Amine groups can be absorbed onto CNT sidewalls by exchanging of electrons, and render the CNT to be hydrophilic.
- The deposition do not change the chemical property of the tip end, and thus do not affect the probe resolution.
Si tip, in air CNT tip, untreated, in air CNT tip, treated, in air CNT tip, treated, in H2O
Stevens et al., IEEE Trans. Nanobio. 3, 56-60 (2004)
ME382: Experiments in Micro/Nano Science and Engineering
Summary
1. CNT-probed AFM is reviewed.
2. CNT-probes can be fabricated by
- the gluing method, in which a grown CNT is picked up by a Si tip using adhesives, electric or magnetic fields.
- the growing method, in which a CNT is directly grown on the pyramidal surfaces of a silicon tip.
3. Examples of CNT-probe applications for biological studies are presented.