Epameinondas Anastasiou

23/02/2014

Meet the scientist

Nodas Anastasiou

23/02/2014

Meet the scientist

• Who am I?

• How did I end up here?

• Introducing ASML

• Lithography - How do we do it?

• What am I doing here?

Agenda 22 January 2014

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Slide 3

Who am I?

22 January 2014

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Slide 4

• Full name: Nodas Anastasiou

• Born in Karditsa, Greece almost 3 decades ago

22 January 2014

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Slide 5

Who am I?

• Moved to Thessaloniki for studies in 2003

• Physics at Aristotle University of Thessaloniki

• Master in Computational Physics

22 January 2014

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Slide 6

Who am I?

• Physics at Aristotle University of Thessaloniki

• Experimental and computational physics of elementary particles (not as fancy as it sounds! If I did it, you can do it as well )

• In other words, it was not just experiments and theory, but also

programming

• Master in Computational Physics

• Data analysis techniques and numerical problem solving in

several fields such as nuclear physics , high energy

physics, electromagnetism etc

22 January 2014

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Slide 7

Who am I?

• Physicist

• Background in software development

• Software engineer in the metrology department of

ASML since June

22 January 2014

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Slide 8

Who am I?

How did I end up here?

22 January 2014

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Slide 9

• Moved to Belgium in 2011 as part of my master thesis

and never left (BENELUX is more interesting than you think!)

• Worked for a year at the University of Antwerp, Belgium

• Applied for a position at the Metrology Department of

ASML

22 January 2014

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Slide 10

How did I end up here?

Microchips are everywhere

22 January 2014

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Slide 11

It’s hard to imagine a world without microchips 22 January 2014

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Slide 12

More than 180 billion microchips are made every year 22 January 2014

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Slide 13

Data: WSTS

• 25 for every man, woman

and child on the planet.

0

20

40

60

80

100

120

140

160

180

2001

99

1

199

2

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0

200

1

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9

201

0

201

1

201

2

IC units, in billions

Introducing ASML

22 January 2014

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Slide 14

ASML builds the machines that make those microchips 22 January 2014

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Slide 15

• Lithography is the critical tool for

producing microchips

• All of the world’s top microchip

makers are our customers

− Intel,

− Samsung,

− Toshiba (incl. SanDisk)

− Sony

• We have departments in

Europe, Asia and Northern

America

• More than 12.000 employees

Source: Wikipedia

Moore’s Law 22 January 2014

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Slide 16

2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015

Source: Gartner. High quality Flash

Lith

og

raph

y c

ost p

er

unit o

f m

em

ory

$/G

Byte

Moore’s Law makes microchips cheaper…

10000

100

10

1

1000

22 January 2014

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Slide 17

$1,162 for 1 GB

$0.17 for 1 GB

… and more energy-efficient Computations per Kilowatt hour double every 1.5 years

Source: Jonathan Koomey, Lawrence Berkeley National Laboratory and Stanford University, 2009

Dell Optiplex GXI

486/25 and 486/33 Desktops

IBM PC-AT IBM PC-XT

Commodore 64

DEC PDP-11/20

Cray 1 supercomputer

IBM PC

SDS 920

Univac I

Eniac EDVAC

Univac II

Univac III (transistors)

Regression results: N = 76 Adjusted R-squared = 0.983 Comps/kWh = exp(0.440243 x year – 849.259) Average doubling time (1946 to 2009) = 1.57 years

IBM PS/2E + Sun SS1000

Gateway P3. 733 MHz

Dell Dimension 2400

SiCortex SC5832

2008 + 2009 laptops 1.E+16

1.E+15

1.E+14

1.E+13

1.E+12

1.E+11

1.E+10

1.E+09

1.E+08

1.E+07

1.E+06

1.E+05

1.E+04

1.E+03

1.E+02

1.E+01

1.E+00

Co

mp

uta

tio

ns p

er

kW

h

1940 1950 1960 1970 1980 1990 2000 2010

22 January 2014

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Slide 18

Doing more in less space

Cray 1: The first supercomputer

• 8 megabytes of memory

• 5.5 tons

• 150 kilowatt power supply

• “Innovative Freon cooling

system”

• $8.8 million ($30 million in

today’s dollars)

1976

22 January 2014

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Slide 19

1976 2014

The supercomputer in your pocket:

a fraction of the

materials,

price,

power consumption

16 October 2013

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Slide 20

Doing more in less space

Key to Moore’s Law: Making smaller transistors 22 January 2014

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Slide 21

The first integrated circuit on

silicon, on a wafer the size of

a fingernail (Fairchild Semiconductor, 1959)

Today: More than a

billion transistors on

the same area

Transistor length has

shrunk by a million

How do we do it?

22 January 2014

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Slide 22

How a lithography system works 22 Januar!2014

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Slide 23

http://www.youtube.com/watch?v=ShYWUlJ2FZs until 3:18 https://www.youtube.com/watch?v=p1cNvS3OMrU#t=61 until 3:02

Lithography is critical for shrinking transistors 22 January 2014

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Slide 24

Like a photo printed on a

photographic paper, lithography

forms the image of chip patterns

on a wafer

What am I doing here?

22 January 2014

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Slide 25

• Mind the oven!

• It needs a thermostat,

• a timer and

• a thermometer

• You need three tools in a machine that costs ~500

euros (and makes bread) in order to make sure that it

will be ok at the end - three types of measurements

• Imagine what happens in a complex machine that costs

80M euros

22 January 2014

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Slide 26

What am I doing here?

• Member of the Metrology department (metrology = the science of measurement)

• We measure every single aspect that could affect the

process of making a microchip

• Identifying and correcting a problem

• Use that knowledge in preventing that problem in the

future

22 January 2014

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Slide 27

What am I doing here?

What can go wrong? 22 January 2014

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Slide 28

Firing a laser on a tin droplet 40,000 times a second 22 January 2014

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Slide 29

CO2 drive laser

Collector

Tin droplets

plasma

What can go wrong?

22 January 2014

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Slide 30

What can go wrong?

• The worst enemy of the machine is the human

presence and metrology can’t help on that

• That is why we need a controlled and filtered

environment to work on (a clean room!)

http://www.youtube.com/watch?v=7anmVvUnbQQ#t=148