mems: biosensors and nanosensors

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MEMS: Biosensors and Nanosensors

Published on August 2013

Report Summary

STUDY BACKGROUND

This report is an update of an earlier BCC Research report published in 2011. Microelectromechanical systems (MEMS), biochips,

and nanosensors (referred to collectively in this report as microsensors) make up one of the fastest-growing technology areas, with

sales of more than $8.5 billion in 2012 that are expected to grow at a compound annual growth rate (CAGR) of 10.7% between 2013

and 2018.

Microsensors have proven to be a key enabling technology for developments in sectors such as transportation, telecommunications,

and health care, but the range of microsensors' applications covers nearly every sector. The most significant advantage of

microsensors is their ability to communicate easily with semiconductor chips. Other advantages include microsensors' compact size,

reduced power consumption, lower cost, and increased reliability. The growth in the use of microsensors has also led to the creation

of supporting industries in areas such as design software, design services, specialty fabrication equipment, and fabrication facilities.

BCC has surveyed individual segments of the microsensor industry previously'for example, in its recent studies of the global market

for MEMS, automotive sensors, medical device sensors, and environmental sensors. BCC initiated the present study to bring together

these related markets as well as update the findings and conclusions of the earlier reports.

The range of microsensor products and applications has grown rapidly in the past few years, but it is important to avoid 'hyping' their

prospects. Although some types of microsensors (airbag accelerometers, for example) have had great commercial success, other

types (such as most types of nanosensors) have enjoyed less success. Still other technologies remain at the discovery and

developmental stages, and their eventual commercialization will require the commitment of substantial resources, with long payback

periods and substantial financial risk.

To the extent that hype results in exaggerated investor expectation, it can divert investment from microsensor technologies that have

real commercial potential. In the worst case, disappointed expectations can lead to a drying-up of investment funds, similar to the one

that occurred in the dot-com sector after 2000. This report takes a hard look at the market for microsensors and tries to provide a road

map for the technologies and applications that are likely to enjoy the greatest commercial success in the years through 2018.

GOALS AND OBJECTIVES

The goal of this report is to provide investors and others with information on the commercial potential of various microsensor

technologies and applications to assist them in making the key business decisions that lie ahead. Specific objectives include

identifying segments of the microsensor market with the greatest commercial potential in the near term to mid-term (2013 to 2018),

projecting future demand in these segments, and evaluating the challenges that must be overcome for each segment to realize its

potential.

INTENDED AUDIENCE

While it contains descriptions of microsensor technologies, this report is intended especially for microsensor marketing executives and

other executives charged with asset allocation and corporate strategy, as well as entrepreneurs, investors, venture capitalists, and

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other readers with a need to know where the market for microsensors is headed in the next five years. The report is written primarily

for lay readers rather than technologists, but it should also be useful to readers in the research and development community who

seek to anticipate future flows in R&D funding. Officials of related government programs such as the U.S. National Nanotechnology

Initiative should also find the report interesting.

SCOPE OF REPORT

The report addresses the global market for microsensors, including the following:

' MEMS: Sensing devices that integrate mechanical elements, sensors, actuators, and electronics on a common silicon substrate, and

typically have dimensions in the 1-micron to 100-micron range (1 micron = 1 millionth of a meter).

' Biochips: Silicon chip'based detection devices that integrate a living organism or product derived from living systems (e.g., an

enzyme or an antibody) and a transducer to provide an indication, signal, or other form of recognition of the presence of a specific

substance in the environment (Biological detection devices that do not generate an analytical signal, such as pregnancy tests or

conventional glucose test strips, do not meet this report's definition of sensors.).

' Nanosensors: Sensors that are nanoscale or incorporate nanoengineered structures such as nanotubes.

The study format includes the following major elements:

' Executive summary.

' Definitions.

' Milestones in the development of microsensors.

' Current and developmental microsensor technologies and applications.

' Microsensor technologies and applications with the greatest commercial potential through 2018.

' Global microsensor market trends, 2012'2018.

' Microsensor market shares and industry structure.

METHODOLOGY AND INFORMATION SOURCES

The methodologies and assumptions used to develop the market projections in this report are discussed at length in the detailed

market estimates and projections for each microsensor technology. The report carefully documents data sources and assumptions.

This way, readers can see how the market estimates were developed and, if they so desire, test the impact of changing assumptions,

such as about price, on the final numbers.

This section makes some general observations concerning the report's approach to estimating the market for developmental

technologies whose commercial potential has not been demonstrated, which is always a challenging task. BCC used a multiphase

approach to identify the microsensor technologies with the greatest commercial potential and to quantify the market for these

applications, as described below.

In the first phase of the analysis, BCC identified a 'long list' of potential microsensor technologies (including technologies that are still

under development) and mapped them against potential applications and end-user industries, such as information

technology/electronics, biotechnology, and health care.

In the second phase, BCC eliminated those microsensor technologies that appear to have little likelihood of making it into commercial

production in the next five years, through a literature review and statements by industry sources. The result of phase two was a 'short

list' of technologies and applications with the greatest near-term to mid-term commercial potential. The third phase focused on

quantifying the potential market for each microsensor technology on the short list and identifying the main prerequisites for

commercial success.

The base year for analysis and projection is 2012. With 2012 data as a baseline, market projections were developed for 2013 to

2018. These projections are based on a combination of a consensus among the primary contacts combined with BCC's









understanding of the key market drivers and their impact from a historical and analytical perspective.

ANALYST'S CREDENTIALS

Andrew McWilliams, the author of this report, is a partner in the Boston-based international technology and marketing consulting firm,

43rd Parallel LLC. McWilliams is the author of several other BCC reports on sensor technologies and markets, including the previous

edition of this report, Microelectromechanical Systems (MEMS) Technology: Current and Future Markets (SMC051C); Biosensors and

Bioelectronics (BIO039B); and Nanosensors(NAN035A). Other related studies that McWilliams has prepared for BCC include Analog

and Mixed Signal Devices(SMC065A); Nondestructive Testing (MFG016F); Materials Characterization Instruments (IAS015A);

Microelectronic Medical Implants: Products, Technologies and Opportunities (HLC016D); Patient Monitoring (HLC038C); Smart and

Interactive Textiles (AVM050B); and Gas Sensing and Gas Metering: Applications and Markets (IAS012B).

REPORT HIGHLIGHTS

This report provides:

' An overview of the global market for microelectromechanical systems (MEMS), which consist of sensing devices that integrate

mechanical elements, sensors, actuators, and electronics on a common silicon substrate, and typically have dimensions in the

1-micron to 100-micron range; as well as biosensors and nanosensors

' Analyses of global market trends, with data from 2012, estimates for 2013, and projections of compound annual growth rates

(CAGRs) through 2018

' Discussion of how microsensors have proven to be a key enabling technology of developments in sectors such as transportation,

telecommunications, and healthcare, but the range of microsensors applications covers nearly every sector

' Identification of technologies that are still at the discovery and developmental stages, with an explanation as to why their eventual

commercialization will require the commitment of substantial resources, with long payback periods and substantial financial risk

' Examination of industry structure, market dynamics, and market shares

' Comprehensive company profiles of major players.

Table of Content

TABLE OF CONTENTS

CHAPTER 1 INTRODUCTION 2

STUDY BACKGROUND 2

GOALS AND OBJECTIVES 2

INTENDED AUDIENCE 3

SCOPE OF REPORT 3

METHODOLOGY AND INFORMATION SOURCES 3

ANALYST'S CREDENTIALS 4

RELATED BCC RESEARCH 4

BCC ONLINE SERVICES 5

DISCLAIMER 6

CHAPTER 2 EXECUTIVE SUMMARY 8

SUMMARY TABLE GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2018









($ MILLIONS) 8

SUMMARY FIGURE GLOBAL MICROSENSOR MARKET PROJECTIONS, 2012-2018 ($

MILLIONS) 8

CHAPTER 3 MICROSENSORS OVERVIEW 11

GENERAL DESCRIPTION 11

DEFINITIONS 11

Sensors 11

Microsensors 11

Microelectromechanical Systems (MEMS) 12

Biosensors 12

Nanosensors 13

HISTORICAL PERSPECTIVE 13

MICROSENSOR TECHNOLOGIES AND APPLICATIONS 14

TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS 14

ACCELEROMETERS 15

GYROSCOPES 16

PRESSURE MICROSENSORS 16

CHEMICAL AND GAS MICROSENSORS 16

THERMAL MICROSENSORS 16

MAGNETIC MICROSENSORS 17

OTHER MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS 17

BIOCHIPS 17

MINIATURE BIOSENSORS 18

NANOCHEMICAL SENSORS 18

NANOFORCE SENSORS 18

NANOBIOSENSORS 19

NANO-RADIATION SENSORS 19

NANO-THERMAL SENSORS 19

MICROSENSOR MARKETS 20

TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($

MILLIONS) 20

FIGURE 1 PROJECTED GLOBAL MICRO MARKET TRENDS, 2012'2018 ($ MILLIONS) 21

TABLE 3 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE,

THROUGH 2018 ($ MILLIONS) 21

FIGURE 2 PROJECTED TRENDS IN THE GLOBAL MICROSENSOR MARKET BY END

USER SEGMENT, 2012-2018 (PERCENT OF TOTAL SALES) 22

CHAPTER 4 ENABLING TECHNOLOGIES FOR MICROSENSORS 24

MATERIALS TECHNOLOGIES 24

FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS

TECHNOLOGIES BY TYPE, 2012 AND 2018 (PERCENT OF TOTAL MEMS SHIPMENTS) 24

SILICON 25

POLYMERS 25

METALS 25

NANOMATERIALS 25









Nanoparticles 26

Carbon Nanotubes 26

Graphene 27

Nanoribbons 27

Nanowires 28

Nanoceramics 28

Other Nanostructured Materials 29

MANUFACTURING TECHNOLOGIES 29

MICROMACHINING 29

Surface Micromachining 30

FIGURE 4 SACRIFICIAL LAYER ETCHING 30

Bulk Micromachining 31

LIGA 31

FIGURE 5 LIGA PROCESS DIAGRAM 31

Wafer Bonding 32

Anodic Bonding 32

Intermediate-Layer Assisted Bonding 32

Direct Bonding 33

Flip-Chip Bonding 33

ETCHING 33

Wet Anisotropic Etching 33

FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING 33

Dry Etching 34

Reactive Ion Etching 34

Deep Reactive Ion Etching 34

LASER MICROFABRICATION 35

Laser Micromachining 35

Laser-Assisted Chemical Etching 35

Laser-Assisted Deposition 36

Stereolithography 36

Laser Surface Modification 36

Laser-Assisted Manipulation and Assembly 37

Laser Microbending 37

Physical Manipulation of Parts 37

Laser Joining 37

NANOPATTERNING 37

Nanoimprint Lithography 38

Hot Embossing Lithography 39

Ultraviolet Nanoimprint Lithography 39

Microcontact Printing 40

Dip-Pen Nanolithography 40

Laser-Based Particle Deposition 41

Other Technologies 42

Powder Blasting 42

Micro-Molding 42

CHAPTER 5 ACCELEROMETERS 44









TECHNOLOGIES 44

OPERATING MECHANISM 44

TABLE 4 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER

TECHNOLOGIES 44

Capacitive 45

Electromagnetic 46

Piezoelectric 46

Piezoresistive 46

Optical 47

Tunneling 47

Thermal 48

AXES OF MEASUREMENT 48

LOW-G ACCELEROMETERS 49

APPLICATIONS 49

TABLE 5 COMMERCIAL ACCELEROMETER APPLICATIONS 49

AUTOMOTIVE APPLICATIONS 49

Airbag Actuation 49

Stability Systems 50

Vehicle Navigation 50

Other Applications 50

LIFE SCIENCES 50

Rate-Responsive Heart Pacemakers 50

Actigraphs 51

ENERGY 51

Oil and Gas Exploration 51

MILITARY/AEROSPACE 52

INFORMATION TECHNOLOGY 52

Hard Disk Drop Protection 52

CONSUMER PRODUCTS 53

"Smart" Sporting Goods 53

Personal Electronics 53

MISCELLANEOUS APPLICATIONS 54

ACCELEROMETER MARKET 54

SUMMARY 54

TABLE 6 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL

SYSTEMS (MEMS) ACCELEROMETERS, THROUGH 2018 ($ MILLIONS) 55

FIGURE 7 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS)

ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT,

2012-2018 (PERCENT OF TOTAL SHIPMENTS) 55


TABLE 7 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE

ACCELEROMETER APPLICATIONS, THROUGH 2018 ($ MILLIONS) 56

Airbag Sensors 56

TABLE 8 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2018

(MILLION UNITS) 57

FIGURE 8 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF AIRBAG MODULES,

2012-2018 (MILLION UNITS) 57

TABLE 9 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR









VEHICLES, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 58

Vehicle Stability Control Systems 58

TABLE 10 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH

STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION VEHICLES) 59

FIGURE 9 PROJECTED TRENDS IN GLOBAL SALES OF LIGHT VEHICLES WITH

STABILITY CONTROL SYSTEMS, 2012-2018 (MILLION VEHICLES) 59

TABLE 11 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE

STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 60

Navigation Systems 60

TABLE 12 PROJECTED GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION

SYSTEMS WITH INTEGRATED INERTIAL NAVIGATION SYSTEMS (INS), THROUGH

2018 (MILLION VEHICLES) 60

FIGURE 10 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF VEHICLE IN-DASH

NAVIGATION SYSTEMS, 2012-2018 (MILLION SYSTEMS SHIPPED) 60


SYSTEMS (MEMS) ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS,

THROUGH 2018 (MILLION UNITS/$ MILLIONS) 61

LIFE SCIENCES APPLICATIONS 62

TABLE 14 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN

THE LIFE SCIENCES, THROUGH 2018 ($ MILLIONS) 62

Rate-Responsive Heart Pacemakers 62

TABLE 15 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH

2018 (THOUSANDS OF PACEMAKERS) 63

FIGURE 11 PROJECTED TRENDS IN GLOBAL SALES OF CARDIAC PACEMAKERS,

2012-2018 (THOUSAND UNITS) 63

TABLE 16 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE

RESPONSIVE HEART PACEMAKERS, THROUGH 2018 (THOUSAND UNITS/$ MILLIONS) 63

Activity Monitoring Systems 64

TABLE 17 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN

ACTIGRAPHS, THROUGH 2018 (THOUSAND UNITS/$ MILLIONS) 65

ENERGY APPLICATIONS 65

Seismic Detection Systems 65

TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN SEISMIC

DETECTION EQUIPMENT, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 66

MILITARY/AEROSPACE APPLICATIONS 66

TABLE 19 PROJECTED GLOBAL SALES OF GLOBAL POSITION SYSTEMS (GPS) FOR

MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 ($ MILLIONS) 66

FIGURE 12 PROJECTED TRENDS IN GLOBAL MILITARY/AEROSPACE MARKET FOR

GLOBAL POSITION SYSTEMS (GPS), 2012-2018 ($ MILLIONS) 66


MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 (THOUSAND UNITS/$

MILLIONS) 67

INFORMATION TECHNOLOGY APPLICATIONS 67


SYSTEMS (MEMS) ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2018 ($









MILLIONS) 68

Hard Disk Drive Drop Protection 68

TABLE 22 GLOBAL MARKET PROJECTIONS FOR HARD DRIVE-EQUIPPED LAPTOP

COMPUTERS, THROUGH 2018 (MILLION UNITS) 68

FIGURE 13 PROJECTED GLOBAL TRENDS IN SALES OF HARD DRIVE-EQUIPPED

LAPTOP COMPUTERS, 2012-2018 (MILLION DEVICES) 68

TABLE 23 GLOBAL MARKET PROJECTIONS FOR LAPTOP COMPUTER HARD DRIVE

DISK (HDD) PROTECTION APPLICATIONS, THROUGH 2018 (MILLION UNITS/$

MILLIONS) 69

Hard Disk Read/Write Head Tracking Mechanism 70

TABLE 24 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)

ACCELEROMETERS IN HARD DISK DRIVE (HDD) READ/WRITE HEAD TRACKING

SYSTEMS, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 70

CONSUMER PRODUCTS APPLICATIONS 70



MILLIONS) 71

Mobile Phone User Interface 71

TABLE 26 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS,

THROUGH 2018 (MILLIONS OF HANDSETS) 71

FIGURE 14 PROJECTED TRENDS IN GLOBAL SALES OF MOBILE PHONE HANDSETS,

2012-2018 (MILLIONS OF HANDSETS) 71


SYSTEMS (MEMS) ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH

2018 (MILLION UNITS/$ MILLIONS) 72

Electronic Gaming User Interface 73


SYSTEMS (MEMS) ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH

2018 (MILLION UNITS/$ MILLIONS) 73

Digital Camera Image-Stabilization Systems 73

TABLE 29 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2018 (MILLIONS

OF CAMERAS) 74

FIGURE 15 PROJECTED GLOBAL UNIT SALES OF DIGITAL CAMERAS, 2012-2018

(MILLION UNITS) 74


SYSTEMS (MEMS) ACCELEROMETERS IN DIGITAL CAMERA IMAGE-STABILIZATION


"Smart" Sporting Goods 75


SYSTEMS (MEMS) ACCELEROMETERS IN "SMART" SPORTING GOODS, THROUGH

2018 (THOUSAND UNITS/$ MILLIONS) 75

OTHER APPLICATIONS 75

TABLE 32 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN OTHER

NONMILITARY APPLICATIONS, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 76

CHAPTER 6 GYROSCOPES 78

TECHNOLOGIES 78









TABLE 33 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPE

TECHNOLOGIES 78

TUNING FORK GYROSCOPES 79

WINE GLASS RESONATOR GYROSCOPES 79

RING RESONATOR GYROSCOPES 79

VIBRATING WHEEL GYROSCOPES 80

SPINNING-WHEEL GYROSCOPES 80

MICRO-OPTICAL-ELECTROMECHANICAL SYSTEMS (MOEMS) GYROSCOPES 80

Interferometric Micro-Optical-Electromechanical Systems (MOEMS)

Gyroscopes 80

APPLICATIONS 81

TABLE 34 GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS)

APPLICATIONS 81

AUTOMOTIVE 81

Vehicle Stabilization Systems 81

Rollover Detection 82

Vehicle Navigation Systems 82

LIFE SCIENCES 82



Personal Transportation Devices 83

Robotic Toys 83

Household Robots 83



Mobile Industrial/Service Robots 84

GYROSCOPE MARKET 84

SUMMARY 84


SYSTEMS (MEMS) GYROSCOPES, THROUGH 2018 ($ MILLIONS) 85

FIGURE 16 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS)

ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT,

2012-2018 (% OF TOTAL SHIPMENTS) 85

AUTOMOTIVE 86

TABLE 36 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC

MICROELECTROMECHANICAL SYSTEMS (MEMS) IN AUTOMOTIVE APPLICATIONS,


Stability Control 86


SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE STABILITY CONTROL SYSTEMS,


Rollover Detection 87

FIGURE 17 PROJECTED TRENDS IN GLOBAL SALES OF VEHICLES WITH ROLLOVER

DETECTION SYSTEMS, 2012'2018 (MILLION UNITS) 87


SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE ROLLOVER DETECTION SYSTEMS,


Navigation Systems 88










SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS,




MICROELECTROMECHANICAL SYSTEMS (MEMS) IN CONSUMER PRODUCTS,




SYSTEMS (MEMS) GYROSCOPES IN DIGITAL CAMERA IMAGE-STABILIZATION


Personal Transportation Devices 90

FIGURE 18 PROJECTED GLOBAL SALES OF SEGWAY HUMAN TRANSPORTERS,

2012'2018 (UNITS) 90


SYSTEMS (MEMS) GYROSCOPES IN SEGWAY HUMAN TRANSPORTERS, THROUGH

2018 (THOUSAND UNITS/$ MILLIONS) 91



SYSTEMS (MEMS) GYROSCOPES USED IN MILITARY/AEROSPACE APPLICATIONS,



Mobile Industrial/Service Robots 92

FIGURE 19 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF MOBILE

INDUSTRIAL/SERVICE ROBOTS, 2012'2018 (UNITS) 92


SYSTEMS (MEMS) GYROSCOPES IN MOBILE INDUSTRIAL/SERVICE ROBOTS,

THROUGH 2018 (UNITS/$ MILLIONS) 94

CHAPTER 7 PRESSURE SENSORS 96

TECHNOLOGY 96

APPLICATIONS 96

TABLE 45 ESTABLISHED PRESSURE-SENSING MICROELECTROMECHANICAL

SYSTEMS (MEMS) APPLICATIONS, 2012 96


Manifold Absolute Pressure (MAP) Sensors 97

Tire Pressure Sensors 97

LIFE SCIENCES APPLICATIONS 97

Blood Pressure Monitors 97


Appliance Pressure Sensors 97


PRESSURE SENSOR MARKET 98

SUMMARY 98


SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS, THROUGH 2018 ($ MILLIONS) 98

FIGURE 20 PROJECTED GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS)









PRESSURE SENSOR MARKET SHARES BY APPLICATION SEGMENT, 2012-2018

(PERCENT OF TOTAL SHIPMENTS) 98

AUTOMOTIVE 99

TABLE 47 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE

MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS,


Manifold Absolute Pressure Sensors 100


SYSTEMS (MEMS) MANIFOLD ABSOLUTE PRESSURE SENSORS, THROUGH 2018

(MILLION UNITS/$ MILLIONS) 100

Tire Pressure Sensors 100


SYSTEMS (MEMS) TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2018


LIFE SCIENCES 101

Blood Pressure Monitors 101


SYSTEMS (MEMS) BLOOD PRESSURE SENSORS, THROUGH 2018 (MILLION UNITS/$

MILLIONS) 102


Appliance Pressure Sensors 102


SYSTEMS (MEMS) PRESSURE SENSORS IN HOME APPLIANCES, THROUGH 2018


CHAPTER 8 CHEMICAL AND GAS SENSORS 104

TECHNOLOGIES 104

ELECTROCHEMICAL SENSORS 104

MASS SENSORS 104

OPTICAL SENSORS 105

APPLICATIONS 105

TABLE 52 MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND GAS

SENSOR APPLICATIONS 105

AUTOMOTIVE 106

Exhaust and Cabin Air Quality Sensors 106

LIFE SCIENCES 106

Blood Gas Monitors 106

ENVIRONMENTAL PROTECTION 106

Portable/Personal Air Quality Detectors 106

MILITARY/PUBLIC SAFETY 106

Chemical Agent Detectors 106


Industrial Leak Detection and Process Control 107

MARKETS 107

TABLE 53 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND

GAS SENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2018 ($

MILLIONS) 107









FIGURE 21 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) CHEMICAL AND

GAS SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2012-2018

(PERCENT OF TOTAL SHIPMENTS) 107

AUTOMOTIVE 108


SYSTEMS (MEMS) GAS SENSORS USED IN AUTOMOTIVE APPLICATIONS, THROUGH

2018 ($ MILLIONS) 109

Exhaust Gas and Cabin Air Quality Sensors 109

TABLE 55 PROJECTED NUMBER OF CATALYTIC CONVERTER-EQUIPPED VEHICLES

PRODUCED WORLDWIDE, THROUGH 2018 (MILLION UNITS) 109

FIGURE 22 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH

CATALYTIC CONVERTERS, 2012-2018 (MILLION VEHICLES) 110

LIFE SCIENCES 110

Blood Gas Monitors 110

TABLE 56 PROJECTED GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2018

(UNITS) 111

FIGURE 23 PROJECTED TRENDS IN GLOBAL SALES OF BLOOD GAS MONITORS,

2012-2018 (UNITS) 111


SYSTEMS (MEMS) BLOOD GAS SENSORS, THROUGH 2018 (UNITS/$ MILLIONS) 112

ENVIRONMENTAL PROTECTION 112

Air Quality Monitoring 112

TABLE 58 GLOBAL SALES OF AIR POLLUTION MONITORING EQUIPMENT, THROUGH

2018 ($ BILLIONS) 112

FIGURE 24 PROJECTED GLOBAL AIR POLLUTION MONITORING AND SENSING

EQUIPMENT MARKET TRENDS, 2012-2018 ($ BILLIONS) 112


SYSTEMS (MEMS) USED IN PORTABLE/PERSONAL AIR QUALITY MONITORS,

THROUGH 2018 (UNITS/$ MILLIONS) 113


Chemical Agent Detectors 114


SYSTEMS (MEMS) USED IN PORTABLE CHEMICAL WARFARE (CW) AGENT

DETECTORS, THROUGH 2018 (THOUSAND UNITS/$ MILLIONS) 114

PROCESS INDUSTRIES 114

Industrial Process Control and Leak Detection 115

TABLE 61 GLOBAL MARKET PROJECTIONS FOR OTHER TYPES OF

MICROELECTROMECHANICAL SYSTEMS (MEMS) INDUSTRIAL CHEMICAL AND GAS

SENSORS, THROUGH 2018 ($ millions) 115

CHAPTER 9 THERMAL SENSORS 117

TECHNOLOGIES 117

THERMOCOUPLES 117

THERMORESISTORS 117

MICROBOLOMETERS 117

MICROCANTILEVERS 118

OTHER TECHNOLOGIES 119









APPLICATIONS 119

AUTOMOTIVE 119


OTHER 120

MARKETS 120

TABLE 62 GLOBAL MARKET PROJECTIONS FOR THERMAL MICROSENSORS BY

APPLICATION SEGMENT, THROUGH 2018 (THOUSAND UNITS/$ MILLIONS) 120

FIGURE 25 GLOBAL MICROELECTROMECHANICAL SYSTEMS (MEMS) INFRARED

SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2012-2018 (%

OF TOTAL SHIPMENTS) 121


TABLE 63 GLOBAL MILITARY/PUBLIC SAFETY MARKET FOR INFRARED

MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS, THROUGH 2018

(THOUSAND UNITS/$ MILLIONS) 122

AUTOMOTIVE 122

Night-Vision Systems 122

TABLE 64 GLOBAL AUTOMOTIVE MARKET PROJECTIONS FOR INFRARED

MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS, THROUGH 2018

(THOUSAND UNITS/$ MILLIONS) 123


TABLE 65 GLOBAL MARKET FOR INFRARED MICROELECTROMECHANICAL SYSTEMS

(MEMS) SENSORS IN OTHER APPLICATIONS, THROUGH 2018 ($ MILLIONS) 124

CHAPTER 10 MAGNETIC SENSORS 126

TECHNOLOGIES 126

RESONANT SENSORS 126

FLUXGATE SENSORS 126

HALL SENSORS 126

GIANT MAGNETORESISTIVE SENSORS 127

MAGNETIC TUNNELING JUNCTION SENSORS 127

ANISOTROPIC MAGNETORESISTIVE (AMR) MAGNETIC SENSORS 127

APPLICATIONS 128

TABLE 66 MAGNETIC SENSOR APPLICATIONS 128


LIFE SCIENCES 128



MARKETS 129

TABLE 67 GLOBAL MAGNETIC MICROSENSOR MARKET PROJECTIONS BY

APPLICATION SEGMENT, THROUGH 2018 ($ MILLIONS) 130

FIGURE 26 GLOBAL MAGNETIC MICROSENSOR MARKET SHARE PROJECTIONS BY

APPLICATION SEGMENT, 2012-2018 (% OF TOTAL SHIPMENTS) 130

AUTOMOTIVE 131

LIFE SCIENCES 131











CHAPTER 11 OTHER MICROELECTROMECHANICAL SYSTEMS (MEMS) SENSORS 133

TABLE 68 GLOBAL STRAIN MICROSENSOR MARKET PROJECTIONS, THROUGH 2018

($ MILLIONS) 133

CHAPTER 12 BIOCHIPS 135

TECHNOLOGIES 135

SAMPLE MANIPULATION TECHNOLOGIES 135

Microchannels 135

Micropumps 136

Mechanical Micropumps 136

Piezoelectric Pumps 136

Pneumatic Pumps 136

Thermopneumatic Pumps 136

Electrostatic Pumps 137

Nonmechanical Pumps 137

Capillary Pumps 137

Electrohydrodynamic Pumps 137

Electrokinetic Pumps 137

Magneto-Hydrodynamic Pumps 138

Phase Difference Pumps 138

Micronozzles 138

Microvalves 138

Passive Microvalves 138

Active Microvalves 139

Micromixers 139

Active Mixers 139

Surface Acoustic Wave (SAW) Mixers 139

Magneto-Hydrodynamic Mixers 139

Passive Mixers 139

Microreactors 140

SENSING MEDIATOR 140

Enzyme Biochips 140

Affinity Biochips 140

TRANSDUCER 141

APPLICATIONS 141

TABLE 69 BIOCHIP APPLICATIONS 141

LIFE SCIENCES 141


Chemical and Biological Agent Detectors 142


Food Quality Testing 143

MARKETS 143

TABLE 70 GLOBAL BIOCHIP MARKET PROJECTIONS BY APPLICATION SEGMENT,


FIGURE 27 GLOBAL BIOCHIP MARKET SHARE PROJECTIONS BY APPLICATION

SEGMENT, 2012-2018 (% OF TOTAL SHIPMENTS) 143









LIFE SCIENCES 144

TABLE 71 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN THE LIFE SCIENCES BY

APPLICATION, THROUGH 2018 ($ MILLIONS) 145

Life Sciences Research 145

TABLE 72 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN LIFE SCIENCE

RESEARCH APPLICATIONS, THROUGH 2018 ($ MILLIONS) 145

Diagnostic Biochips 145

TABLE 73 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN LABS-ON-A-CHIP (LOC)

DIAGNOSTIC DEVICES, THROUGH 2018 ($ MILLIONS) 146


TABLE 74 GLOBAL MARKET PROJECTIONS FOR MICROFLUIDIC BIOCHIPS USED IN

CHEMICAL AND BIOLOGICAL WARFARE (CBW) SENSORS, THROUGH 2018 ($

MILLIONS)

147


Food Testing 147

TABLE 75 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN FOOD TESTING

APPLICATIONS, THROUGH 2018 ($ MILLIONS) 147

CHAPTER 13 NANOCHEMICAL SENSORS 149

TECHNOLOGIES 149

TABLE 76 NANOCHEMICAL SENSOR TECHNOLOGIES 149

NANOTUBES 150

Carbon Nanotubes 150

Other Types of Nanotubes 151

NANORIBBONS 151

NANOWIRES 152

NANOCANTILEVERS 152

NANOPARTICLES 153

NANOCERAMICS 154

GRAPHENE SENSORS 154

APPLICATIONS 155

TABLE 77 NANOCHEMICAL SENSOR APPLICATIONS 155

LIFE SCIENCES 156

Respiratory Monitoring 156


Leak Detection 156

MARKET 157

TABLE 78 GLOBAL SALES PROJECTIONS FOR NANOCHEMICAL SENSORS BY

APPLICATION SEGMENT, THROUGH 2018 ($ MILLIONS) 157

CHAPTER 14 NANOFORCE SENSORS 159

TECHNOLOGIES 159

APPLICATIONS 160

LIFE SCIENCES 160

INFORMATION TECHNOLOGY 160










MARKETS 161

TABLE 79 GLOBAL SALES PROJECTIONS FOR NANOFORCE SENSORS (ATOMIC

FORCE MICROSCOPES) BY APPLICATION SEGMENT, THROUGH 2018 ($ MILLIONS) 161

CHAPTER 15 NANOBIOSENSORS 163

TECHNOLOGIES 163

TABLE 80 NANOBIOSENSOR TECHNOLOGIES 163

SILICON NANOWIRES 164

NANOCANTILEVERS 164

FIBER OPTIC 164

NANOTUBES 165

NANOSTRUCTURED MEMBRANE 165

PHOSPHOLIPIDS 166

DNA-SENSITIZED GRAPHENE VAPOR SENSORS 167

NANOGAP SENSOR ARRAY 167

APPLICATIONS 167

TABLE 81 NANOBIOSENSOR APPLICATIONS 168

LIFE SCIENCES 168

Molecular Diagnostics 168

MARKETS 168

LIFE SCIENCES 168

TABLE 82 PROJECTED GLOBAL SALES OF NANOBIOSENSORS TO THE LIFE

SCIENCES MARKET, THROUGH 2018 ($ MILLIONS) 169

Molecular Diagnostics 169

FIGURE 28 GLOBAL MARKET SHARE PROJECTIONS FOR IN VITRO MOLECULAR

DIAGNOSTIC EQUIPMENT VS. CONSUMABLES, 2012 (%) 169

TABLE 83 GLOBAL MARKET PROJECTIONS FOR NANOBIOSENSOR POINT- OF-CARE

(POC) MOLECULAR DIAGNOSTIC EQUIPMENT, THROUGH 2018 ($ MILLIONS) 170

CHAPTER 16 NANO-RADIATION SENSORS 172

TECHNOLOGIES 172

NANOCANTILEVER SENSORS 172

GRAPHENE SENSORS 172

APPLICATIONS 173

TABLE 84 NANO-RADIATION SENSOR APPLICATIONS 173

MARKET 173

CHAPTER 17 NANO-THERMAL SENSORS 175

TECHNOLOGIES 175

NANOPOWDER-BASED SENSORS 175

MARKETS 175

APPLICATIONS 175

TABLE 85 NANO-THERMAL SENSOR APPLICATIONS 176









CHAPTER 18 INDUSTRY CHARACTERISTICS 178

NUMBER/SIZE OF FIRMS 178

FIGURE 29 GLOBAL MICROSENSOR INDUSTRY CONCENTRATION, 2012 (PERCENT

OF TOTAL MICROSENSOR SHIPMENTS) 178

MARKET SHARES 178

FIGURE 30 OVERALL GLOBAL MICROSENSOR MARKET SHARES BY COMPANY, 2012

(PERCENT OF TOTAL MICROSENSOR SHIPMENTS) 179

CHAPTER 19 COMPANY PROFILES 182

AFFYMETRIX INC. 182

ANALOG DEVICES INC. 182

ARCHANGEL SYSTEMS INC. 183

ASAHI KASEI MICRODEVICES CORP. 183

ROBERT BOSCH GMBH 183

BOSTON MICROSYSTEMS INC. 184

BRUKER AXS 184

CALIPER LIFE SCIENCES 184

CEPHEID THERAPEUTICS 185

COLIBRYS SA 185

COMBIMATRIX CORP. 185

CONTINENTAL AG 186

CUSTOM SENSORS AND TECHNOLOGIES 186

DELPHI AUTOMOTIVE LLP 186

ENDEVCO CORP. 187

ENZO LIFE SCIENCES 187

EUROGENTEC 187

FEBIT AG 188

FLIR SYSTEMS INC. 188

FREESCALE SEMICONDUCTOR INC. 188

GE SENSING 189

GENETIX LTD. 189

GMA INDUSTRIES INC. 189

INTEGRATED NANO-TECHNOLOGIES LLC 190

I-STAT CORP. 190

KIONIX INC. 190

KNOWLES ELECTRONICS 191

LOCKHEED MARTIN CORP. 191

MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD. 191

M-BIOTECH INC. 192

MEASUREMENT SPECIALTIES INC. 192

MEMSIC INC. 192

MICROCHEMICAL SYSTEMS SA 193

MURATA MANUFACTURING CO. LTD. 193

NANOMIX INC. 193

NIPPON DENSO CORP. 194

OMRON CORP. 194









ROCHE NIMBLEGEN INC. 195

SENSONOR AS 195

SILICON DESIGNS INC. 195

SILICON SENSING SYSTEMS 196

SONY CORP. 196

SPHERE MEDICAL LTD. 196

STMICROELECTRONICS 197

SYNKERA TECHNOLOGIES INC. 197

TOSHIBA CORP. 197

ULIS 198

VTI TECHNOLOGIES OY 198

XEOTRON CORP. 198

CHAPTER 20 PATENT ANALYSIS 200

PATENTS BY TYPE OF MICROELECTROMECHANICAL SYSTEM (MEMS) 200

FIGURE 31 RECENT U.S. MICROSENSOR-RELATED PATENTS BY TYPE OF SENSOR

(PERCENT OF PATENTS ISSUED BETWEEN JANUARY 1, 2005 AND JULY 1, 2013) 200

MICROELECTROMECHANICAL SYSTEMS (MEMS) PATENT ASSIGNEES 201

TABLE 86 LARGEST U.S. MICROSENSOR HOLDERS (NUMBER OF PATENTS ISSUED

BETWEEN 1/1/2005 AND 7/15/2013) 201

LIST OF TABLES

SUMMARY TABLE GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($

MILLIONS) 8

TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS 14

TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2018 ($

MILLIONS) 20

TABLE 3 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE,


TABLE 4 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) ACCELEROMETER

TECHNOLOGIES 44

TABLE 5 COMMERCIAL ACCELEROMETER APPLICATIONS 49

TABLE 6 GLOBAL MARKET PROJECTIONS FOR MICROELECTROMECHANICAL SYSTEMS

(MEMS) ACCELEROMETERS, THROUGH 2018 ($ MILLIONS) 55

TABLE 7 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE

ACCELEROMETER APPLICATIONS, THROUGH 2018 ($ MILLIONS) 56

TABLE 8 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2018

(MILLION UNITS) 57

TABLE 9 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR VEHICLES,


TABLE 10 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH

STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION VEHICLES) 59

TABLE 11 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE

STABILITY CONTROL SYSTEMS, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 60









TABLE 12 PROJECTED GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION

SYSTEMS WITH INTEGRATED INERTIAL NAVIGATION SYSTEMS (INS), THROUGH 2018

(MILLION VEHICLES)

60


SYSTEMS (MEMS) ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS,

THROUGH 2018 (MILLION UNITS/$ MILLIONS)

61

TABLE 14 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN

THE LIFE SCIENCES, THROUGH 2018 ($ MILLIONS) 62

TABLE 15 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH

2018 (THOUSANDS OF PACEMAKERS) 63

TABLE 16 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE

RESPONSIVE HEART PACEMAKERS, THROUGH 2018 (THOUSAND UNITS/$ MILLIONS) 63


ACTIGRAPHS, THROUGH 2018 (THOUSAND UNITS/$ MILLIONS) 65

TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN SEISMIC

DETECTION EQUIPMENT, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 66

TABLE 19 PROJECTED GLOBAL SALES OF GLOBAL POSITION SYSTEMS (GPS) FOR

MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 ($ MILLIONS) 66


MILITARY/AEROSPACE APPLICATIONS, THROUGH 2018 (THOUSAND UNITS/$

MILLIONS)

67



MILLIONS)

68

TABLE 22 GLOBAL MARKET PROJECTIONS FOR HARD DRIVE-EQUIPPED LAPTOP

COMPUTERS, THROUGH 2018 (MILLION UNITS) 68

TABLE 23 GLOBAL MARKET PROJECTIONS FOR LAPTOP COMPUTER HARD DRIVE DISK

(HDD) PROTECTION APPLICATIONS, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 69

TABLE 24 GLOBAL MARKET FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)

ACCELEROMETERS IN HARD DISK DRIVE (HDD) READ/WRITE HEAD TRACKING

SYSTEMS, THROUGH 2018 (MILLION UNITS/$ MILLIONS)

70



MILLIONS)

71

TABLE 26 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS,

THROUGH 2018 (MILLIONS OF HANDSETS) 71


SYSTEMS (MEMS) ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH 2018

(MILLION UNITS/$ MILLIONS)

72


SYSTEMS (MEMS) ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH









2018 (MILLION UNITS/$ MILLIONS)

73

TABLE 29 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2018 (MILLIONS

OF CAMERAS) 74


SYSTEMS (MEMS) ACCELEROMETERS IN DIGITAL CAMERA IMAGE-STABILIZATION


74


SYSTEMS (MEMS) ACCELEROMETERS IN "SMART" SPORTING GOODS, THROUGH

2018 (THOUSAND UNITS/$ MILLIONS)

75

TABLE 32 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN OTHER

NONMILITARY APPLICATIONS, THROUGH 2018 (MILLION UNITS/$ MILLIONS) 76

TABLE 33 MAJOR MICROELECTROMECHANICAL SYSTEMS (MEMS) GYROSCOPE

TECHNOLOGIES 78

TABLE 34 GYROSCOPIC MICROELECTROMECHANICAL SYSTEMS (MEMS)

APPLICATIONS 81


SYSTEMS (MEMS) GYROSCOPES, THROUGH 2018 ($ MILLIONS) 85


MICROELECTROMECHANICAL SYSTEMS (MEMS) IN AUTOMOTIVE APPLICATIONS,

THROUGH 2018 ($ MILLIONS)

86


SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE STABILITY CONTROL SYSTEMS,


87


SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE ROLLOVER DETECTION SYSTEMS,


88


SYSTEMS (MEMS) GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH

2018 (MILLION UNITS/$ MILLIONS)

89


MICROELECTROMECHANICAL SYSTEMS (MEMS) IN CONSUMER PRODUCTS,

THROUGH 2018 ($ MILLIONS)

89


SYSTEMS (MEMS) GYROSCOPES IN DIGITAL CAMERA IMAGE-STABILIZATION


90


SYSTEMS (MEMS) GYROSCOPES IN SEGWAY HUMAN TRANSPORTERS, THROUGH

2018 (THOUSAND UNITS/$ MILLIONS)

91










SYSTEMS (MEMS) GYROSCOPES USED IN MILITARY/AEROSPACE APPLICATIONS,


92


SYSTEMS (MEMS) GYROSCOPES IN MOBILE INDUSTRIAL/SERVICE ROBOTS,

THROUGH 2018 (UNITS/$ MILLIONS)

94

TABLE 45 ESTABLISHED PRESSURE-SENSING MICROELECTROMECHANICAL SYSTEMS

(MEMS) APPLICATIONS, 2012 96


SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS, THROUGH 2018 ($ MILLIONS) 98

TABLE 47 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE

MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR APPLICATIONS,

THROUGH 2018 ($ MIL








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