mems capacitive accelerometers for instrumentation and industrial

MEMS capacitive accelerometers for Instrumentation and Industrial Market

Bahram Arbab, Sales Director Europe & Asia

September 2011SENSORS + SYSTEMS2

Content

Purposes :MEMS Capacitive Accelerometer for

Instrumentation and Industrial Market

Instrumentation and Industrial Conditions

Sensors Classification & Comparison

Sensors used in Instrumentation and Industrial market

Our target markets

What does an accelerometer measure?

Typical Industrial Application for MEMS Capacitive Accelerometer

Why Colibrys product is successful for Instrumentation and Industrial


Instruments & Industrial conditions

Instruments = Sensors and Actors

– Instruments are distinguished by output:Binary (on/off)Analog (continuous)

Industrial conditions:

– temperature range commercial: (0°C to +70°C)industry (-40°C..+85°C)extended industrial(–55°C..+125°C)

– mechanical resilience (shocks and vibrations) EN 60068– protection: Electro-Magnetic (EM)-disturbances EN 55022, EN55024)– protection: NEMP (Nuclear EM Pulse) - water distribution, civil protection– mounting and replacement– robust connectors– power: DC mostly 24V= because of battery back-up, sometimes 48V=)


Sensor Classifications

Vibration and Acceleration measurement:

voltage created from capacitive charge or piezoelectric materials

Position and Speed measurement:

rate or voltage of output signal changes with input

Stress and Strain measurement:

applied force results in changes in resistance

Temperature measurement:

resistance or voltage of output signal changes with temp

Pressure and Flow measurement:

often derived from sensors listed above


Comparison Accelerometer Sensor Type

No DC response

Limited stability and temp. performance

Large bandwidth

High g range

Piezo-electric sensor(vibration sensor)

Low bandwidth (up to 5000 HZ)

Relatively Fragile (up to 20’000g)

Measures DC acceleration

Reliable & Accuracy

Excellent price performance

MEMS capacitive accelerometers

Long term stability

Poor temperature performance

Measures DC acceleration

High G

Piezo-resistive sensors(vibration and shock

sensor)

Fragile

Expensive

High PerformanceElectro-mechanical sensors

DisadvantagesAdvantagesSensor Type


Example of products

Electro-mechanical

Piezo Resistive

Piezo Electrical

MEMS Capacitive


What is MEMS?

• MEMS or Micro Electro Mechanical Systems is a technique of combining Electrical and Mechanical components together to produce a system of miniature dimensions

• By miniature, we mean dimensions less than the thickness of human hair !!!!

Die attach

packaging

Mechanical Die

Low power ASIC

Micro-controller

Temperature sensor

2mm

3mm


Out of plane MEMS Silicon sensor

MEMS technologyBulk silicon micromachining– Wet and DRIE etching

Assembly of 3 wafers– High temp. Fusion Bonding (SFB)– Sealing at low and controlled

pressure

Full functional test at wafer level, including capacitive response


Accelerometer’s market

The market segments for the accelerometers differentiate themselves by the performance vs volume.– Low volume can generally afford high performances and higher associated cost– High volume are in principle fully driven by cost

Annual volume1 K 10 K 100 K 1 M 100 M

Low10 M

High

Perf

orm

ance

/ R

elia

bilit

y

MEMS capacitive accelerometers combine performance and cost– High performance products are now available for medium to high volume (few

hundreds K) industrial applications at reduced costs


MEMS Sensors in Industrial & Instrumentation Markets

Accelerometers

Gyroscopes

Pressure sensors

Gas sensors

Thermal sensors

Micro-fuel cells

Mass flow controllers

Chemical sensors

Acoustic sensors

Optical sensors


MEMS for Industrial applications

Industrial, Instrumentation and Energy markets are taking advantage of the high end MEMS capacitive technology

Attractiveness of the products is ensured by a better control of costs without concessions on performances

The Capacitive technology allows measurement of different physical parameters:

1. Tilt products

2. Vibration and shock products

3. Seismic products

4. Inertial products


What does an Accelerometer Measure?

1. Tilt:Measurement of static gravitational force

e.g. Tilt and inclination


Tilt products for industrial applications

From Colibrys product to high accurate instrumentation for tilt measurement

Digital Compass InstrumentationColibrys Product

MS9001.D


Tilt products for industrial applications

Many industrial applications require precision tilt measurements– Platform stabilization (antenna, camera, solar cells, instrumentation table…)– Railway technology (tilting trains)– Structure monitoring (dams, bridges, nuclear plants…)– Industrial reference systems– Geodesic measurements– Pointing and distance measurement

Latest Colibrys tilt sensors, the MS9001, has been specifically designed for platform stabilization– MS9001, MS9002 and MS8002 products– 1g and 2g with good long term stability, low

power and low temperature coefficients

Colibrys can adapt and offer industrial grade products at lower costs for volume requirements– Custom MS9001 product



2. Vibration:Measurement of dynamic acceleration

e.g. Vibration and shock measurement


Vibration and shock for industrial applications

From Colibrys product to bogie monitoring on high speed train

Repacked and qualified for train

High Speed Train Siemens VelaroColibrys Product

VS9000.D


Vibration and shock products for industrial applications

Vibration measurement is a pure industrial application – Industrial machinery vibration control– Preventive maintenance– Railway security, safety and comfort– Structure monitoring (bridges, building, wind turbine towers…)– Testing (automotive, truck, planes…)

The VS9000 family of products is advantageously replacing traditional piezo-resistive solutions– VS9000 product family available from 2g

to 200g with a bandwidth > 1kHz @ -5%– Performances inherited from the high end

inertial products (DC response, long term stability, low temperature coefficients, high reliability under harsh environments)

Colibrys can adapt and offer industrial grade products at lower costs for volume requirements– Custom VS9000 products



3. Seismic:Measurement of dynamic acceleration

e.g. Earthquake measurement


Seismic products for industrial applications

From Colibrys product to high accurate instrument for seismic measurement

Seismic Measurement Instrument

Structural Health MonitoringColibrys Product

SF1500SF2006


Seismic products for industrial applicationsMEMS capacitive products from Colibrys offer a unique solution for ultra low noise seismic sensing – Strong motion earthquake monitoring– Free field seismic monitoring– Structure health monitoring (HUMS)– Homeland security (perimeter, border security)– Railway (track monitoring)

The seismic products are advantageously replacing traditional geophones– SF2006 and SF1600 are both class B

seismic sensors– Technology can reach class A performance

(< 0.1µg/√Hz) ongoing developments

Three axis solutions will soon be available (SF3600 and SF3006 products)



4. Inertia:Inertial measurement of velocity and position

Acceleration single integrated for velocity

Acceleration double integrated for position


Inertial products for industrial applications

From Colibrys product to Industrial Application for Navigation Systems

Inertial Measurement Unit - IMU

Navigation System for industrialColibrys Product

MS9000.D


Inertial products for industrial applicationsInertial measurements are used in a wide range of applications– Railway technology– GPS backup – Dead reckoning– Land and sea civilian guidance and navigation (i.e. blind people)– Robotics– Directional drilling

Colibrys offers advanced solutions for high end and small / medium volume requirements– MS8000 and MS9000 families of products– 1g to 200g with good long term stability, low

temperature coefficients, low VRE

Colibrys can adapt and offer industrial grade products at lower costs for volume requirements– Custom MS9000 like family of products– 1g to 30g


Typical Accelerometer Application

TILT / INCLINATION

SEISMIC / VIBRATIONINERTIA


Advanced manufacturing techniques

COLIBRYS is a world-leading supplier of standard and semi-custom MEMS based motion sensors to the harsh-environments (Military, Aerospace and Energy) and safety critical (Industrial and Instrumentation) applications.

(MEMS: Micro Electro Mechanical Systems)

Business focus: – High performance motion sensors for Energy, Mil/Aerospace and Industrial

markets– Contract Manufacturing services

Colibrys has the full breadth of MEMS capability, undertaking:– MEMS sensor and systems design– Sensor manufacturing – Packaging and Test


Colibrys value proposition

Products based on unique high performance sensor technology– Performance: stability 100 ppm (near term target 10 ppm)– Noise S/N up to >140 dB– Robustness up to 20’000 g– Near term products up to 200°C– Cost / performance ratioRobust Technology with proven manufacturing recordPartnership with key customers– Alignment of product roadmaps– Product customizing and qualification – Custom sub-systems developmentSecurity of supply– In-house wafer fab and assembly line– Qualified off-shore assembly line for low cost / high volume products– Qualified and proven processes (ISO9001)– No ITAR restrictions


Thank you for your attention

mems capacitive accelerometers for instrumentation and industrial

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