mems & nems technology represented by k.r. bhardwaj
DESCRIPTION
PAPER REPRESENTER KHUSHI RAM BHARDWAJ FROM D.A.V. INSTITUTE OF ENGINEERINFG & TECHNOLOGY(JALADHAR)TRANSCRIPT
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KHUSHI RAM BHARDWAJEE 4TH YEAR
359/07
DAVIET(JALANDHAR)
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Introduction Electromechanical Systems MEMS Current Applications NEMS and Nanotechnology Impact of Miniaturization Challenges and Possibilities References
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MEMS IS SIMPLY KNOWN AS MICRO ELECTRO MECHANICAL SYSTEM.IT IS THE ART OF MINIATURIZING.MINITUARIZING ART WAS VERY OLDLY USED BY WATCH MAKER IN 13TH CENTURY.
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Figure 5.1: Jonathan Swift.
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Introduction, Continued
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MST - Microsystems Technology . MEMS - Microelectromechanical
System. Manmade devices created using compatible
microfabrication techniques that are capable of Converting physical stimuli, events and
parameters to electrical, mechanical & optical signals
Performing actuation, sensing and other functions
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Definition and Terms
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Electromechanical SystemsFunctional Block Diagram
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Materials Crystallography – Forms of Silicon
Amorphous Polycrystalline Crystalline
“Miller Planes”
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MEMSMicrostructure Fabrication
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Pattern definition Photolithography
Deposition Oxidation, chemical-vapor
deposition, ion implantation Removal
Etching, evaporation
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-Structural layer-Sacrificial layer
deposit
pattern
etch
Microstructure Fabrication, Continued
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MEMS Advantages
The advantages of MEMS devices include
• Size
• High sensitivity
• Low noise
• Reduced cost
The applications for MEMS are so far reaching that a multi-billion dollar market is forecast. Key industry applications include transportation, telecommunications and healthcare.
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AccelerometersMicro Optical Electro Mechanical Systems
(MOEMS)Digital Mirror Devices (DMD) used in Projection
DevicesDeformable mirrors Optical Switches
Inkjet Print heads (Microfluidics)Pressure Sensors Seismic Activities - Thermal transfer
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Current Applications
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Micro-arrayed biosensorsVirus detectionNeuron probes (nerve damage/repair)Retina/Cochlear ImplantsMicro NeedlesChemLabMicro Fluidic Pumps
- Insulin Pump (drug delivery)
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Biomedical
Current Applications, Continued
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Hand held detectors – biological & chemical microsensorsChem’s Lab on a Chip (security applications)
Data Storage Systems IBM Millipede storage system – AFM tip writes
data bit by melting a depression into polymer mediaum and reads data by sensing depressions.
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Detection systems
Current Applications, Continued
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Nanotechnology manipulation of
matter at the nanometer scale.
Nanomaterials Started with carbon. Behavior depends
on morphology.
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carbon and carbon nanotube
NEMS and Nanotechnology
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Quantum dots Nanowires Quantum films
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Quantum Dots.
NEMS and Nanotechnology, Continued
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• Electrostatic manipulation• Moving one electron or molecule at a time
• Patterning• Dip Pen Lithography • Electron Beam Lithography
Nano Fabrication
NEMS and Nanotechnology, Continued
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Cantilever Sensors Mass Storage
(IBM) Millipede chipNanochip
Molecular ElectronicsTransistorsMemory cellsNanowires Nanoswitches
Merging of technologies
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Cantilever sensors are essentially MEMS cantilevers with chemical arrays attached. The cantilevers, acting much like tuning forks, have a natural frequency of vibration which changes as more mass is attached (nano function). The change in frequency is sensed by the MEMS device indicating a measurable presence in the system of particular reacting compound.
Selective chemical layer
Reacting compound
cantilever
Cantilever sensor
Merging of technologies
NEMS and Nanotechnology, Continued
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Potential Positive Impacts Reduction of disease. Job opportunities in new fields. Low-cost energy. Cost reductions with improved efficiencies. Improved product and building materials. Transportation improvements
Potential Negative Impacts Material toxicity Non-biodegradable materials. Unanticipated consequences. Job losses due to increased manufacturing efficiencies.
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Impact of Miniaturization
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Fundamental and applied research Engineering and technological
developments Low Cost Fabrication “Molecular manufacturing”
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Challenges and Possibilities
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Gad-el-Hak, M. MEMS, Design and Fabrication, Second Edition. (2005)
Lyshevski, S., MEMS and NEMS, CRC Press LLC. (2002)
Maluf, N. and Williams, K., An Introduction to Micromechanical Systems Engineering, Second Edition, Artechouse, Inc. (2004)
Microsytems, Same-Tec 2005 Preconference Workshop, July 25 &26, 2005.
Taylor and Francis, MEMS Introductory Course, Sandia National Laboratories, June 13-15, 2006.
What is MEMS technology? MEMS and Nanotechnology Clearinghouse. http://www.memsnet.org/mems/what-is.html.
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