Microelectromechanical systems (MEMS)

B. Santosh Kumar11P71A0480

CONTENTS

MEMS I nt r oduct ion MEMS Manuf act ur ing Technology Applicat ions

MEMs Sensor Mar ine Science Medical Science Milit ar y

Advant ages and DisAdvant ages Cur r ent Challenges Conclusion

INTRODUCTION

Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology..

MEMS are also referred to as micromachines, or micro systems technology – MST.

MEMS Manuf act ur ing Technology

Bulk Micromachining

Surface Micromachining

High Aspect Ratio (HAR) Silicon Micromachining

APPLICATIONS

MEMs SensorMarine ScienceMedical ScienceMilitary

MechanicalAccelerometersstrain gauges

Opticaldirect sensors(lightelectronic signal)Indirect sensors(light intermediate energy electronic signal)

Applications in Medical Science Applications in Medical Science

Bio cavity laser : This device distinguishes cancerous from non cancerous cells thus aiding the surgeons in operation

Smart pill : Implanted in the body Automatic drug delivery(on demand) Sight for blind :MEMs based array that may be inserted in the retina of a blind person to provide partial sight.

Applications in Marine Science

Sensing in marine environment maybe

done for various reasons:

Oil exploration and related

applications

Global weather predictions

Monitor water quality for any

contamination

Measure parameters detrimental to

the “health” of structures in the sea

( like oil rigs and ships )

Study of aquatic plants and animals

In military operations

MILITARY APPLICATIONS

An array of MEMS sensors spread on the ocean floor could detect the presence of enemy submarines.

MEMS sensors (pressure sensors, accelerometers etc.) are being used in anti-torpedo weapons on submarines and ships.

MEMS sensors in torpedoes are responsible forDetonating the torpedo at the right timeHitting the target in a crowded environmentPrevent any premature explosion

Advantages

Minimize energy and materials use in manufacturing

Cost/performance advantages Improved reproducibility Improved accuracy and reliability Increased selectivity and sensitivity.

DisadvantagesDisadvantages

Farm establishment requires huge investments

Micro-components are Costly compare to macro-components

Design includes very much complex procedures

Prior knowledge is needed to integrate MEMS devices.

CURRENT CHALLENGES

LIMITED OPTIONSMost companies who wish to explore the potential of MEMS andNanotechnology have very limited options for prototyping or manufacturing devices, and have no capability or expertise in microfabrication technology.

PACKAGINGThe packaging of MEMS devices and systems needs to improve considerablyfrom its current primitive state.

FABRICATION KNOWLEDGE REQUIREDCurrently the designer of a MEMS device requires a high level of fabricationknowledge in order to create a successful design.

MEMS promises to be an effective technique of , producing sensors of high quality at lower

.costs

Thus we can conclude that the MEMS can , create a proactive computing world connected

, computing nodes automatically acquire and act - , on real time data about a physical environment

, helping to improve lives promoting a better understanding of the world and enabling people

. to become more productive

CONCLUSION

QUESTIONS