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MEMS-Sensors for Automotive Business

Robert Bosch GmbHDr. Georg Bischopink

Vice President EngineeringSensor Development

1.Short Overview Bosch

2.MEMS Background and Portfolio

3.Future Trends in MEMS for Automotive Business

AE/ESE | 3/30/2016© Robert Bosch GmbH 2016. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights.

2

Bosch 2015 Key Figures*

One of the world’s largest suppliers ofautomotive technology

Industrial Technology

Energy andBuilding Technology

Bosch Group 70,6 billion euros in sales 375 000 associates

MobilitySolutions

Leading in drive and control technology, packaging, and process technology

Leading manufacturer of securitytechnology

Global market leader of energie-efficentheating products and hot-water solutions

Consumer Goods

Leading supplier of power toolsand accessories

Leading supplier of household appliances

60%share

of sales

40%share

of sales

*Preliminary figures as of 01.15


3

MEMS-Portfolio Automotive

Rollover sensorfor occupant protection

Central/peripheral acceleration sensor

for occupant protection

Yaw rate sensorfor VDC

Low pressure sensorfor engine control

High pressure sensorfor engine and brake

systems

Acceleration sensors

Inertial sensors

Pressure sensorfor occupant protection

Mass flow sensors

Pressure sensors

Angular rate sensors

Mass flow sensorfor engine management

Combined inertial sensor (3-axis)(yaw rate and

acceleration sensor) for VDC and RoSe

Combined inertial sensor (6-axis)(yaw rate and

acceleration sensor) for navigation and

non-safety applications

Mid-pressure sensorfor transmission

controlLow-g acceleration sensors

for VDC, RoSe and active suspension

Angular rate sensor(3-axis)

for navigation andnon-safety applications

Low-g accelerationsensor (3-axis)

for navigation andnon-safety applications


4

MEMS-Portfolio Consumer

3-axis sensors environmental

Absolute Orientation Sensor

Application Specific Sensor Nodes (incl. μC)

Barometric PressureSensor

Integrated Environmental Unit

microphones9-axis sensors

Analog and digital MEMS microphones (Akustica)

High quality voice input for mobile devices

Accelerometer Gyroscope Magnetometer

6-axis sensors

eCompass IMU

Sensor data-fusion software ties everything together


5

MEMS-Sensors for Automotive BusinessVolume MEMS Production at Bosch

Trend towards combi sensors reduces volume increase

0

1000

2000

3000

4000

5000

6000

7000A

ccum

ulat

ed S

enso

r Pro

duct

ion

(mio

)


6

MEMS-Sensors for Automotive BusinessTop 10 MEMS Suppliers (2015)

Bosch by far world’s largest MEMS supplier

0

200

400

600

800

1000

1200

1400

Bosc

h TI

Avag

o

HP

Qor

vo (T

riQui

nt)

STM

icro

.

Know

les

Inve

nSen

se

NXP

(Fre

esca

le)

Can

on

Rev

enue

(Mio

USD

) 2012201320142015

Top 10 MEMS manufacturers by revenue, in millions of US dollars - foundry sales not included Source: IHS MEMS Competitive Analysis 2015 – Preliminary results

+17% in EUR-1% in USD

sensors DLP filters inkjet filters sensors sensors sensors inkjetμphone


7

Top 10 Automotive MEMS Suppliers(2015)

Bosch by far world’s largest MEMS automotive supplier


8

MEMS-Sensors for Automotive BusinessSMI7: Inertial Sensor Platform

Spec Product

zay, ax

Adaptive Cruise ControlActive Front steering

HighHill-Hold Control

ESP®

xaz, (ay)

Roll-Stability ControlActive Damping High

Rollover Sensing Basic

SMI700BGA7x7

SMI710BGA7x7

SMI720BGA7x7


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MEMS-Sensors for Automotive BusinessSpecification SMI700


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MEMS-Sensors for Automotive BusinessThe Precision of Yaw Rate Sensors

Device sensitivity mechanical sensitivity:

Sm ~ 5.2 pm / (°/s) electrical sensitivity:

Se ~ 2.3 *10-18 F / (°/s)

Resolution limit ~3 °/h (0.005 Hz) amplitude change ~4 *10-15 m

(compares to ~0.00001 * Si-Si distance or ~ radius of atomic nucleus)

capacitance change ~2 *10-21 F(compares to charge variation of~0.06 electrons (at 5V))


11

MEMS-Sensors for Automotive BusinessThe Idea behind Mobility Sensors

SMx130non-safety

automotive applications

Consumere.g. mobile

no safety relevanceshort product availability

Automotivee.g. ESPsafety-critical long product availabilityAEC-Q100

Cost efficient compared to sensors optimized for functional safety

• AEC-Q100 qualification• Product availability > 10 years• Increased testing scope• Limited quality and change management


12

MEMS-Sensors for Automotive BusinessApplications for Mobility Sensors

Overview of applications will follow!!!

Car Alarm Vehicle

Dynamics Data

Logging

Platform Stabili-zation

Inclination Measure-

ment

eCall

Car Key Module

Tele-matics

Navi-gation

Toll Collec-

tion

Bank Angle


13

MEMS-Sensors for Automotive BusinessApplications for Micromirrors

Interactive projection

gesture recognition

3D scanner

CE-LIDAR

HMI - interactivity

Con

sum

erEmbedded projection

Emerging automotive applications

Auto

mot

ive Head lamps Head up displays Long range LIDAR Short range LIDAR


14

MEMS-Sensors for Automotive Businessμ-Mirror for LIDAR

LIDAR application

LIDAR Concept


15

μ-Mirror for Laser-based Headlight

Optical converter

Laser

MEMS μ-mirror Headlight lenses

illuminated

faded out

Sample picture: AudiIn

tens

ity [a

.u.]

Deflection angle [°]-12-16 -8 -4 0 +4 +8 +12 +16

MEMS μ-Mirror


16

MEMS-Sensors for Automotive Businessμ-Mirror SMO150 for Headlight

General properties MEMS

Magnetic drive

Scan frequencies up to 200 Hz

Optimisation for 450 ± 10 nm

Hermetically sealed

Robust

Packaging concept

Aluminium-base with handling-/alignment mark

Additional marks on μ-Mirror

Electrical Contact of (separate) driver electronics via

Flex-PCB

Magnet with flux concentrator on backside of MEMS

~ 17 mm

~ 55 mm

~ 16 mm

Parameter Value (preliminary)

Mirror area 1.5 x 5 mm2

Optical area 0.81* 4.36 mm2

Mechanical angle ± 6°

Reflectivity mirror > 99% @ 440nm – 460nm

Reflectivity window < 0.5% @ 440nm – 460nm

Tilt angle window 9°

Elongated mirror with flexible contactingEnhanced flexibility for system design and package

Confidential | AE/ESI4 | March 2016 | © Robert Bosch GmbH 2016. All rights reserved, also regarding any disposal, exploitation, reproduction, editing, distribution, as well as in the event of applications for industrial property rights.

ITR 2016 – Multimarket Development @AE/NE4

Automotive Electronics

AMRA: Asset Monitoring for Rail Applications

Rail Road Tracker

Featureslocalization & geo-fencing,record of mileage data, monitoring of temperature of transported freight, misuse detection,6 years self-sustaining

External customers

InterfacesBluetooth LE, GPS, GSM (data to cloud), hub for peripheral sensors

MEMS Sensor 3D acceleration,3D Hall, temperature

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MEMS-Sensors for Automotive BusinessTransport Condition Monitoring

Vision: End to End Condition Monitoring

AccelerationTemperatureHumidityLight

Mechanical shock Parts rejection

Result

KLTKLT KLT

TraQGateway

TraQ-Sensor

Localizationover GPS

INSTSensorCloud

Localization and Condition data

DecisionSensors

RFID gate

Parts to drying stockExcessive humidity

Detection of theftOpened box (light)

THANK YOU

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