Copyright 2011. Advanced Materials Research Center, AMRC, International SEMATECH Manufacturing Initiative, and ISMI are servicemarks of SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.

Metadata Conformance Analyzer

(MCA)Lance RistAutomation ConsultantAustin, TXlance.rist@risttex.net512-814-1134

18 July 2011 2

Metadata Conformance AnalyzerMetadata Conformance Analyzer

• MCA is a stand-alone application It operates off-line – no link to the equipment Metadata is put in a standard format

Seven files, one per E125 service response These files are the input to the MCA tool

• MCA has only the metadata It has no knowledge about the equipment It has no knowledge about the SECS interface

• The power of MCA is in the details Checking links & references Looking for expected constructs Many of the checks involve thousands of elements

This would be impractical for manual analysis• MCA is a valuable supplement to human analysis

XML Log

Equipment Metadata(7 File Format)

18 July 2011 3

ISMI/NIST Joint DevelopmentISMI/NIST Joint Development

• Approach: Use freely available tools:

Java Drools rules engine (http://www.jboss.org/drools)

Develop rules to test Standards and ISMI Guidelines Off-line evaluation of Metadata Metadata often harvested from communication log excerpts

Test on ISMI TrackSys and supplier metadata Common Metadata defines “known good” metadata set Many suppliers provided metadata for evaluation Some provided to NIST, balance used to confirm results

18 July 2011 4

MCA ReleasesMCA Releases

• MCA Releases MCA 1105 V1.0 – Sept. 2010 (ISMI members only)

Provided initial feedback

MCA 1105 V1.1 – March 2011 (public release) V1.0 was an internal ISMI release for initial feedback V1.1 updated to latest ISMI EDA 1105 Guidance

MCA 0710 V1.0 release in June Capability comparable to MCA 1105 V1.1 Reflects ISMI EDA 0710 Guidance

• MCA is freely available http://ismi.sematech.org/emanufacturing/mca/

18 July 2011 5

MCA Install and RunMCA Install and Run• MCA11.exe – install package for MCA• jre-6u16-windows-i586-s.exe – Java install

Required to run MCA• MCAGuide11.pdf – included in MCA11.exe

How-to guide

18 July 2011 6

MCA RulesMCA Rules

• MCA implements 112 rules 28 rules from EDA standards

Stated and inferred requirements 84 rules from ISMI EDA Guidance

Some presented as warnings only These rules are now included in the proposed

Common Metadata standard

• Rules may result in errors or warnings Errors denote clear problems in the metadata Warnings highlight areas where problems might

exist Requires the user to investigate and analyze

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Example Inferred RequirementsExample Inferred Requirements• Metadata delivered in

7 separate messages• Message responses

reference one another NodeDescriptions

reference Nameables, Objects, StateMachines, Exceptions, and Units

Broken references are a problem

StateMachineInstance

stateMachineInstances

EquipmentNodeDescription CEM:Nameable

SEMIObjType ExceptionReference SimpleEvent Parameter

0..* 0..* 0..* 0..*

0..* 11

1..*

node

parameterssimpleEventsexceptionsobjTypes

GetUnits( ) : Unit[ ]GetTypeDefinitions( ) : TypeDefinition[ ]GetStateMachines( ) : StateMachine[ ]GetSEMIObjTypes( ) : ObjType[ ]GetExceptions( ) : Exception[ ]GetEquipmentStructure( ) : Equipment[ ]GetEquipmentNodeDescriptions(in : EquipmentNodeId) : NodeDescription[ ]GetLatestRevision( ) : RevisionNotifyOnRevisions (in : enable)

<<interface>>EquipmentMetadataManager

• Broken references are a problem

• Unreferenced entries indicate probable issues

18 July 2011 8

MCA Rules DetailMCA Rules Detail• MCAGuide11.pdf – included in MCA11.exe

18 July 2011 9

MCA Monitor WindowMCA Monitor Window

• Shows: Metadata location Parsing of the

metadata files Any validation errors

show here Total errors found

• “File Generated” = done• Monitor information

captured to log.txt File saved to

installation directory If an execution error

occurs, send this file to us for debugging

18 July 2011 10

Main MCA ScreenMain MCA Screen

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Results SummaryResults Summary

• # Validation errors Validation against the standard E125 XML schema

• # Rules with errors Count of rules with non-zero #Errors results

• Avg Rule Score Each rule give a % result #Errors/Elements #Elements is the number of chances to make an error Avg Rule Score averages the % result for all the rules

18 July 2011 12

Avg Rule ScoreAvg Rule Score

• The goal of the MCA is to help the supplier reach 100% conformance AVG Rule Score is provided to show progress

toward that goal• The MCA is not intended to show:

Degree of completion Some rules are more difficult to implement than others

Comparison of two suppliers Some rules are more important than others

18 July 2011 13

Schema Validation ErrorsSchema Validation Errors• MCA checks each metadata file against the

standard XML schemas The schema contains rules that must be followed

for content and structure of the metadata Where validation errors exist, the MCA results may

not be accurate Correct the validation errors and re-execute the MCA

18 July 2011 14

Equipment Counter SummaryEquipment Counter Summary

• The counter summary give the user a feel for the size and detail of the metadata model This can help point to areas of focus for the

manual analysis of the metadata

18 July 2011 15

Equipment Structure TabEquipment Structure Tab

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MCA Errors TabMCA Errors Tab

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Detail Behind The ErrorsDetail Behind The Errors

18 July 2011 18

GetEquipmentNodeDescriptionsResponse.xml Investigating Errors

Investigating Errors

• Filename and line number help locate the problem

GetEquipmentStructureResponse.xml

18 July 2011 19

Metadata WarningsMetadata Warnings• Warnings alert the user to areas where

problems might exist In many cases, warnings are acceptable

18 July 2011 20

EDA Evaluation MethodEDA Evaluation Method

• ISMI developed the EDA Evaluation Method as a companion to the ECCE Goal: Provide a simple method for a user to perform basic

happy-path testing for EDA EDA metadata evaluation was added later

• Metadata Evaluation was based on experience Samsung assignee Taihyung Kim performed extensive ad hoc

evaluation on early EDA implementations The resulting process was captured in the Evaluation Method

This is a manual process The MCA tool can now perform most of these steps Some steps must still be performed manually

18 July 2011 21

Beyond the MCABeyond the MCA• Manual evaluation must answer questions such as:

Does the equipment structure match the actual equipment? Are the major components clearly identified Are the descriptions included sufficient to understand the purpose of

each node/parameter/state machine/etc. ? Are the parameters your engineers need included in EDA?

Is all the key SECS variable data available in EDA? Are the parameters defined on the appropriate nodes? Are the data types and units appropriate?

Are the tool specific state machines adequate/useful? Are the metadata definitions reflected via data collected in the actual

operation of the tool? Events reported, data valid, object instances created, etc.

• There are also many details that must be manually reviewed The MCA highlights some of these in the Warnings tab

18 July 2011 22

MCA ReleasesMCA Releases

• MCA Releases MCA 1105 V1.0 – Sept. 2010 (ISMI members only)

Provided initial feedback

MCA 1105 V1.1 – March 2011 (public release) V1.0 was an internal ISMI release for initial feedback V1.1 updated to latest ISMI EDA 1105 Guidance

MCA 0710 V1.0 release in June Capability comparable to MCA 1105 V1.1 Reflects ISMI EDA 0710 Guidance

• MCA is freely available http://ismi.sematech.org/emanufacturing/mca/

Copyright 2011. Advanced Materials Research Center, AMRC, International SEMATECH Manufacturing Initiative, and ISMI are servicemarks of SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.

Thank You

Metadata Conformance Analyzer

RistTex.net

Lance Rist Automation Consultant

5004 Flaming Oak Cove Austin, TX 78749 Phone: 512-814-1184 Mobile: 512-782-5382 lance.rist@risttex.net

18 July 2011 24

Your PresenterYour Presenter• Lance Rist / Independent Consultant

BS/MS in Chemical Engineering Working in factory automation for 25+ years

Digital Equipment Corporation SEMATECH (Assignee) Motorola ISMI for the last 10 years

• Factory Systems SEMATECH CIM Framework State-machine based reticle tracking Next Generation Factory System requirements

• Equipment Control and AMHS One of the first automated photo bays AMHS control system specification and configuration SEMI Communication Standards

SEMI E30 GEM Standard SEMI E120 Common Equipment Model (1st EDA std) SEMI E139 Recipe and Parameter Management SEMI E157 Module Process Tracking Wait Time Measurement (on-going)

• Process Control Circuit board manufacturing factory-wide process control

RistTex.net

Lance Rist Automation Consultant

5004 Flaming Oak Cove Austin, TX 78749 Phone: 512-814-1184 Mobile: 512-782-5382 lance.rist@risttex.net