micro heater with pt-cr thin film thermo-couple for high speed biological measurements fujita...
TRANSCRIPT
Micro Heater with PT-CR thin film Thermo-Couple for high speed
Biological Measurements
Fujita Laboratory, IIS, cIRMM, the University of
Tokyo ,JAPAN F. Gillot, H. F. Araa, F. O. Morin, D. Collard
and H. Fujita
Tranducer 2007
報告人: 蘇聖欽
Outline
• Introduction
• Manufacturing Process
• Biological Application
• Conclusion
• References
Outline
• Introduction
• Manufacturing Process
• Biological Application
• Conclusion
• References
Thermo-Couple
• Thermoelectric voltage :
TmVAB
m : number of couples legs
ΔT : temperature between hot and cold junctions
αAB : seebeck coefficient
Outline
• Introduction
• Manufacturing Process
• Biological Application
• Conclusion
• References
Fabrication of PT-CR
Hot junction has 2.5-um * 2.5-um area
PT-CR couple offers a high Seebeck coefficient(17.4uV/K)
Device Calibration
Thermal device behavior using finite element analysis (FemLab 3.1)
Micro TFTC coupled with a 471Ω CMS resistor ramping the voltage by steps of 0.1V (waiting time of at least 30s)
Output voltage of Thermocouple
4-noctyl-4-cyanobiphenyl(8CB)
Separation line between the nematic and the smectic phase on 1.2V applied
(a)-(c) pictures taken by a BX 51 Olympus(20x)
Outline
• Introduction
• Manufacturing Process
• Biological Application
• Conclusion
• References
Unzipping dsDNA into ssDNA
Syber green binds to dsDNA but not to ssDNA
The final quick decrease corresponded to unzipping of a DNA that completed within 52 ms(stage 3)
16um long λDNA together with fluorecent on the thermodevice
Outline
• Introduction
• Manufacturing Process
• Biological Application
• Conclusion
• References
Conclusion
• Showing fast thermal shifting as well as thermal sensing in the ms range.
• Thermocouple can use for other application (actuator).
References
[1] F. Gillot, H. F. Araa, F. O. Morin, D. Collard and H. Fujita, “Micro Heater with PT-CR thin film Thermo-Couple for high speed Biological Measurements”, Transducer, pp. 21-23, 2007.
[2] F Gillot, FO Morin, HF Arata, R Guégan, H Tanaka, “On-chip thermal calibration with 8 CB liquid crystal of micro-thermal”, Lab on a Chip, pp. 1600 – 1602, 2007.