microfiltration - asiannet gas and solvent purification 1997 ptfe membrane filters with hdpe...

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MICROFILTRATIONfor Microelectronics and Semiconductor applications

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INDEXINTRODUCTION

• Microelectronics 4

MEMBRANE CARTRIDGES AND CAPSULES• Fluoroflow XF 13• Fluoroflow-SELECT-UC 15• Fluoroflow-SELECT 17• Fluoroflow-HSA-UC 19• Fluoroflow-HSA 21• Fluoroflow-UC 23• Fluoroflow 25• Fluorocap XF 27• Fluorocap-SELECT 29• Fluorocap 31• Chemflow XF 33• Chemflow-PE 35• Proflow II-E-SELECT 37• Proflow II-E 39• Proflow II-G 41• Clariflow-E-SELECT 43• Clariflow-E 45• Clariflow-G 47• Clariflow-WE/WG 49• Polyflow Membrane-SELECT 51• Polyflow Membrane 53

DEPTH CARTRIDGES• Polyflow 57• Polyflow-G 59

MINI-CARTRIDGES• Proflow II-E 63• Clariflow-E 65• Polyflow 67

MINI-CAPSULES• Proflow II-E 71• Clariflow-E 73• Polyflow 75

HOUSING• Trufluor + 79

COMPATIBILITY AND RECOMMENDATIONS • Filter recommendation by application 83• Chemical compatibility chart 84

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OV

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ION

OuTlINE hIsTOry

1984 All-fluoropolymerfiltercartridges

1987 All-polypropylenedepthcartridgesforeconomical prefiltration

1994 Hydrophilicpolyethersulfone(PES) membraneforliquidfiltrationapplications

1994 HydrophobicPTFEmembranefiltersforgeneral purposegasandsolventpurification

1997 PTFEmembranefilterswithHDPEstructureto maintainchemicalpurity

1998 Encapsulatedall-fluoropolymercartridgefor aggressivechemicalfiltration

2003 SELECTpleattechnology:optimizingeffective filtrationareatoprovidedoubledlifetime

2005 Ultracleantechnology:leadingtheindustry incleanlinessofferingfiltrationproductswith <5ppbmetalsextractableslevel

2005 AcquiredbyParkerHannifincorporation

2006 XFtechnology:providessuperiorflowrates

MANufAcTurINg EXcEllENcE

ParkerHannifinCorporationiscommittedtomanufacturingexcellence.

Our state-of-the-art of manufacturing facility features:

AfullyequippedlaboratoryandtestingcenterCertifiedcontrolledcleanroomenvironments

quAlITy MANAgEMENT AND IsO 9001

QualityisofparamountimportancetoParkerAdvancedFiltration.Allproductsaremanufacturedundercontrolledenvironmentalconditionsandaresubjectedtodemandingprogramsofqualityassurance.

Parker Hannifin Corporation Filtration is ISO 9001 certified.

Withsalesofficesin26countries,distributionchannelsactivein63countries,andmanufacturingoperationsin6countries,Parkerspecializesinprovidingfiltrationandseparationproductstoawidevarietyofmarketsincludingthemicroelectronics,pharmaceutical,foodandbeverage,manufacturing,automotive,oilandgas,anddefenseindustries.

pArKEr hANNIfINLeader in process filtration, separation and purification

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Themicroelectronicsindustryisarapidlygrowingworldmarketthatdrawsuponcoreareasofourfiltrationexpertise.Includedwithin,thismarketarethebroadrangeofelectronicsproductsthatrequirehighlyeffectivefiltrationintheirmanufacturingprocesses.

Theseproductsinclude: semiconductorsandwafers flatpaneldisplays harddiskdrives printedcircuitboards

ThroughourTechnical,R&DandCustomerServiceteamsweofferawiderangeofservicestoensuretotalcustomersatisfaction.

TEchNIcAl cApAbIlITIEs

OurTechnicalServicesteamisdedicatedtotheneedsofthemicroelectronicsindustry.Wehaveanextensiverangeofstate-of-theartanalyticalinstrumentationandahighlyqualifiedteamofscientistsandengineersgeneratinginnovativesolutionstoawidevarietyoffiltrationneeds.Westrivetooptimizeourcustomers’filtrationapplicationsbyofferingfulltechnicalsupportthatincludes: processfailureanalyses contaminationanalyses processandcostimprovementaudits on-sitetestingservices

rEsEArch AND DEVElOpMENT

OurR&Dteamsareconstantlyworkingtoinnovatenewproductsanddiscovertechnologiesthatwillenhancetheperformanceofprocessfiltration,andthuskeepusattheforefrontofprocessfiltrationtechnology.

cusTOMEr sErVIcE

Anexperiencedteamofprofessionalsdedicatedtorespondquicklyandcomprehensivelytoorders-bothforstandardandcustomizedproducts–andensuretheiron-timedeliveryworldwide.

cO

MM

ITM

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TMIcrOElEcTrONIcs:A core expertise

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2color(1235andBlack)

6

EX

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rI

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cE

MOOrE’s lAw40yearsago,Intelco-founderGordonMooreissuedafamousanalysisthat

proposedthenumberoftransistorsonanintegratedcircuit(IC)doubledevery18

months.Thisanalysis(oftenreferredtoasMoore’slaw)stillholdstruetoday.Thenumberoftransistorsperchipnowruns

intothebillionswithline-widths<100nanometers.

ThE MIcrOElEcTrONIcs MArKETMicroelectronicsarefoundeverywherefromconsumerelectronicstosatellites,

fromcorporatedatacenterstomicrowaveovens.

TheMicroelectronicsmarketisfast-pacedandcyclical,drivenbytheconstantdemandtosupplynewproductsthatareeverfaster,withhighercapacitiesandsmallerfootprints.ThemanufacturingofthenewestgenerationsofICchipswouldnot

bepossiblewithouteffectivefiltration.

MIcrOElEcTrONIcs:Applications

InthemicroelectronicsIndustry,filterprocessfallintothreecategories:

chEMIcAl fIlTrATION

•EtchingSietch(HF/HN03/ActecAcid)SiO2etch(BOE/BHF-HF/NH4F)Si3N4etch(HotH3PO4upto180°C)Aletch(H3PO4/HNO3/AceticAcid)•StrippingHydroxy/aminobasedGlycol/NH4FbasedDMSO/aminobased•CleaningPiranha(hotH2SO4/H2O2upto150°C)SC1(NH4OH/H202/H2Oupto90°C)SC2(HCL/H2O2/H2Oupto90°C)•Bilkchemicaldistribution

phOTOchEMIcAl fIlTrATION

•Photoresistapplicationsl-line,g-lineandDUV248/193nm)•Anit-reflectivecoatingapplications(BARC/TARC)•Solvent/Developing(<3%TMAH97%H20)

chEMIcAl MEchANIcAlplANArIzATION (cMp)

•Oxide•Metal

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sEMIcONDucTOrs & wAfErs:

Thefiltersusedinsemiconductorproductionprocessesneedtoprovidethelowestpossiblelevelsofmetalsextractablesandhighparticleretentionefficiencies.However,sincetheseprocessescombinetheuseofaggressivechemicalsandhighprocesstemperatures,wehavedevelopedawiderangeoffluoropolymerfiltersthatpossesshighchemicalandthermalresistanceandaresuitedforallprocessesinthemanufacturingofsemiconductors.

Ourfluoropolymerfiltersareavailablewiththefollowingoptions:

SELECT-highsurfaceareaandflowrates Ultraclean-<5ppbmetalsextractables Wet-packed Capsules

Highparticleretentionefficiencies

TE

ch

NO

lO

gy

pIrANhA clEANINg sEquENcE

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hArD DIsK MEDIA

Crucialtothemanufactureofdiskmediaisthenickel-platingofthedisks.Thisprocessishighlysensitivetobothchemistrychangesandinteractions,andtocontaminationfromhighmetallicdirtloadings.Understandingtheplatingrequirementsinthedifferentpartsofthisprocess,weoffervariousrangesoffilters:

fluoroflow:fluoropolymerfilterssuitablefortheaggressivechemicalenvironmentfoundintheplatingprocessfluoroflow sElEcT: ahigh-flowversionofFluoroflowwithlongerlife

clariflow: polyethersulfonemembranefiltersthatprovideextremelyhighbathrecoveryratesduringdiskcleaning

clariflow sElEcT: ahigh-flowversionofClariflowwithlongerlife

Allproductsenablehighproductyieldsandlowrejectrates,allowingforthelowestCPU(costperunit).

flAT pANEl DIsplAys

Intheproductionofflatpaneldisplays,thehighestpriorityistoremoveparticulatecontaminationfromprocesschemicals,includingawidevarietyofphotoresists,developers,etchantsandotherchemicalstrippers.

Toensureconsistentchemistryacrossallthesechemistries,weofferrangesoffiltersthatcombinehighflowcapacitieswithhighparticlereductionefficiencies:

polyflow:polypropylenedepthmedia

polyflow membrane:polypropylenemembrane

proflow:PTFEmembrane

Polarizer attachment

Testing of LCD screen

Glass substrate

LCD inspection & end-sealing

Cleaning Thin-film deposition

Photoresist application

Exposure &

developmentEtching

Photoresist stripper

Test and cleaning

Polyimide film printing

RubbingScaling

and assembly

Scribe and breaking

2 color (1235 and Black)

Aluminum substrate

Cleaning and rinsing

Nickel plating

Polishing and CMP

Hard coating and lubricating

Mechanical texturing

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© All rights reserved

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MIcrOfIlTrATION prODucTsEngineered for microelectronic and semiconductor applications

flAT pANEl DIsplAys

Parkeroffersawiderangeofmicrofiltrationproductsforcriticalliquidandgasapplications,withparticleremovalratingsfrom0.02to40micron.Ourproductswillconsistentlymeetyourexactingperformanceandcompatibilityrequirements–eveninprocessesusingaggressivechemicals.Ourproductscanoffermetalextractables<5ppb.

MIcrOfIlTrATIONAtParkerweseeeverysemiconductorandmicroelectronicsapplicationasanopportunitytoprovideatotalfiltrationsolution.Wehavethiscapabilityduetoourconstantdrivetobeattheleadingedgeoffiltrationtechnology.Ourinnovativeengineeringteamsworkcloselywithourdedicatedworldwidesupportnetworkresultinginunparalleledcustomersatisfaction.

FLUOROFLOW®

100%Fluoropolymerconstruction

FLUOROCAP®100%Fluoropolymercapsules

CHEMFLOW®PEPTFEMembrane/HighDensityPolyethyleneconstruction

CLARIFLOW®Polyethersulfone(PES)Membrane/Polypropyleneconstruction

PROFLOWII™PTFEMembrane/Polypropyleneconstruction

POLyFLOW®MEMBRANEPolypropyleneMembrane/Polypropyleneconstruction

POLyFLOW®Polypropyleneabsolute-andnominal-rateddepthmediaPolypropylenestructureA wide variety of housings is available. Contact your Parker Filtration Sales Representative for more details.

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Fluoroflow®

100% Fluoropolymer Construction

FluoroCap®

100% Fluoropolymer Construction Capsules

Chemflow® PE & XFPTFE Membrane / High DensityPolyethylene Structure

Clariflow®

Polyethersulfone (PES) Membrane /MiniPolypropylene Structure

Proflow II™

PTFE Membrane / Polypropylene/Mini Structure

Polyflow® MembranePolypropylene Nominal Rated Membrane / Polypropylene Structure

Polyflow®

Polypropylene Absolute Rated Depth Media / Polypropylene Structure

Filter SELECT* Available ratings and Product line configurations (micron) Ultraclean Typical applications

0.03, 0.05, 0.1,0.2, 0.45, 1

• Critical filtration of aggressive acids, bases, strippers, and solvents

• Available for high temperature applications

Capsules 0.03, 0.05, 0.1, 0.2

• Encapsulated filter for critical filtration of aggressive chemicals and process fluids under harsh conditions where the introduction of contamination during cartridge change out is a concern

• Available for high temperature applications

Cartridge 0.05, 0.1, 0.2, 1 • Purification of photoresists, chemicals and etch baths• Filtration of solvents, cleaning solutions

CartridgeMini-CapsuleMini-Cartridge

0.02, 0.04, 0.1, 0.2, 0.45, 0.65, 0.8

• Aqueous based chemicals; recirculating etch baths; UPW systems

CartridgeMini-CapsuleMini-Cartridge

Cartridge Mini-CapsuleMini-Cartridge

0.6 1.2, 2.5, 5, 10, 20, 40

• Dl water prefiltration• Solvent and gas prefiltration• General filtration

0.05, 0.1, 0.2, 0.45, 1

Cartridge 0.04, 0.07, 0.1, 0.2 • Filtration of photochemicals and ultrapure chemicals• Gas filtration

• Ultrapure chemicals and gas processing; photochemical processing

• Bulk chemical distribution

TherevolutionarySELECTtechnologyfiltercartridgescanimproveandlowerthecostsofwaferprocessing.Imagine:upto80%moreeffectivefiltrationarea-withtwicethethroughput!Allofthiswithaparticleretentionof>99.99%fromaproductthatiscleanroommanufacturedandtested.

Ultracleantechnologyleadsthemicroelectronicsindustryincleanliness.Ultracleanisaproprietaryprocessappliedtoelectronicsgradeproducts.Itprovidesatotalmetalsextractableslevelof<5ppb.Ultraclean’slowlevelofmetalsextractablesprovidesuserswithahighlyconsistentmanufacturingprocessandverylowproductrejectrates.

XFisarevolutionarymembranetechnology.ItprovidessuperiorflowovertraditionalcartridgesbyutilizinganasymmetricPTFEmembrane.XFcartridgesofferuptothreetimestheflowrateandthroughputatlowerdifferentialpressure.

* Patent pending

ParkerHannifinCorporationiscommittedtoprovidethehighestqualityproducttoourcustomers.Tothisend,ourISO9001:2000certifiedQualitySystemensuresthatthisoccurs.AtParkerHannifinCorporation,wedoourbesttoresolveallqualityissuesinaquickandtimelymanner.Inaddition,westrivetoeliminateproblemsbeforetheyareseen.Bytakingthiscontinuouslyproactiveapproachtothequalityofallofourproducts,ParkerHannifinCorporationhasthebestproductonthemarketatalltimes.


Cartridge

MIcrOfIlTrATION prODucTsEngineered for microelectronic and semiconductor applications

S

S

S

X

XS

S

X

X

S

USELECTTechnologyUltracleanTechnologyXFTechnology

U

U

X

S

INNOVATIVE TEchNOlOgy lEADErs S

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MEMBRANE CARTRIDGES

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SPECIFICATIONS

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fluOrOflOw® XFXF: the ultimate in flow rates and throughput

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3 3 0

XFisarevolutionarymembranetechnologyfromParkerHannifin.ItprovidessuperiorflowoveratraditionalcartridgebyutilizinganasymmetricPTFEmembrane.CombinedwiththeSELECTpleatingtechnology,XFcartridgesofferuptothreetimestheflowrateandthroughputofstandardcartridges-atlowerdifferentialpressure.Fluoroflow®XFfeaturesanall-fluoropolymerconstructionwiththehighestdegreeofchemicalcompatibilityandthermalresistance.Thesepremiumfiltersarerecommendedforsensitivechemicalprocessesrequiringhighlyviscousliquidstypicallyusedinsemiconductorandwafermanufacturing.Fluoroflow®XFisidealforcustomersincriticalprocessese.g.etching,strippingandcleaning.

• Superiorliquidflowrates•Lowerdifferentialpressurewithimprovedretention• All-fluoropolymerconstruction• Increasedproductyield• Minimizeddefectrates• Maximizedequipmentuptime

• Semiconductorwetetchandclean -Etching -Stripping -Cleaning• Bulkchemicaldeliveries• Aggressivechemicalapplications

Materials of constructionAsymmetricPTFEmembraneAll-fluoropolymersupportandstructure

Allcomponentsarethermallybondedtoensureintegrityandreduceextractables.

Effective filtration areaSELECT 11.4ft2(1.03m2)pernominal10”(250mm)cartridgeStandard 6.8ft2(0.61m2)pernominal10”(250mm)cartridge

Metals extractables<20ppb ina10%HNO3extractionof1.5liters for24hoursatambienttemperatureRetentionEfficiency 99.9%at0.138µm;99%at0.093µm

Maximum differential pressure/temperatureForward SELECT80psi(5.5bar)@75oF(24oC) Standard60psi(4.1bar)@75oF(24oC)Reverse SELECT50psi(3.4bar)@75oF(24oC) Standard40psi(2.8bar)@75oF(24oC)

cleanliness (particle shedding)

Wet-packed <2particles/ml>0.2µmafter7galat1gpm

TOc/resistivity rinse-up (wet-packed)

TOCrecoverywithin5ppboffeedwithoutadditionalrinse-upResistivityrecoverywithin0.2megohm-cmoffeedafter12gal@1gpm

Integrity test values

APPLICATIONS

BENEFITS

XF

FILTERRATING BUBBLE POINT*

µm

0.10 >22 1.50

psig bar

*In 60/40 IPA/water @ 25°C

>__

PERFORMANCE ATTRIBUTES

DISTRIBUTED BY:

ORDERING INFORMATION

TECHNICAL SUPPORT AND PRODUCT INFORMATION

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DISTRIBUTED BY:

ProcessAdvancedFiltrationDivision2340EastmanAvenueOxnard,California,93030,USATollFree:+18777842234Phone:+18056043400Fax:+18056043401www.parker.com

Parker Hannifin Corporationprovidesourcustomerswithunsurpassedproductconsistencyandcost-efficiency.Ourexperiencedprofessionalscanhelpyouselecttherightsolutionforyourapplication.Formoreinformationortoplaceanorder,contactyourlocaldistributor.Informationonproductspecifications,applicationsandchemicalcompatibilitycanbefoundonourwebsiteatwww.parker.comorthroughyournearestParker Hannifin Corporationoffice.

Parker Hannifin CorporationdesignsandmanufacturesanextensivelineofinnovativesolutionsforspecificapplicationsintheMicroelectronics,Biopharmaceutical,FoodandBeverage,IndustrialandChemicalindustries.

water in flow rates, Typical *

fluOrOflOw® XFXF: the ultimate in flow rates and throughput

14

SELECT 9.5gpm/psid(52.2lpm/100mbar)Standard 5.7gpm/psid(31.3lpm/100mbar)

Eachcartridgeisidentifiedwithaproductnumber,poresizeandlotnumberfortraceability.

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.FluoroflowisaregisteredtrademarkofParkerHannifinCorporation.VitonandKalrezareregisteredtrademarksofE.I.DuPontdeNemours&Co.,Inc.ChemrazisaregisteredtrademarkofGreen,TweedInc.*USPatentsPending4,588,464and4,663,041

SPEC-33-FS-XFRevA10/06

CODE2378

DESCRIPTION226/Flat222/Flat226/Fin222/Fin

O-RingsCODE

245

6

7N

MATERIALSiliconeViton®FEP-EncapsulatedVitonFEP-EncapsulatedSiliconeChemraz®None

Nominal LengthEnd FittingCODE

041020

30*

LENGTH4" (100mm)10" (250mm)20" (500mm)30" (750mm)

Filter RatingCODE

031MICRON0.10µm XF

OptionsCODE

E

H

*HT is not available in 30" length

TEMPERATUREElectronic Standard (150 C Max)High Temperature (180 C Max)

Pleat TechnologyCODEFS-1833-14

DESCRIPTIONSELECTStandard

0 13

TreatmentCODEBlank

W

DESCRIPTIONDry Packed (STD)Wet Packed

Water Flow Rate (gpm)

Water Flow Rate (lpm)

0

0.10

0.20

0.30

0.40

0.50

0.60

0.70

0 1 2 3 4 5 6

4 8 12 16 20

10

0

20

30

40

50

Diffe

renti

al Pr

essu

re (p

sid)

Diffe

renti

al Pr

essu

re (m

bar)

10-inch (250mm) cartridge

SELECT

Standa

rd

*Flow rates shown are for FluoroCap filters with 3/4” Flaretek® (in-line) fittings and for fluids with viscosity of 1cP.

SPECIFICATIONS

ULTRA CLEANULTRA CLEANULTRA CLEAN

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Fluoroflow-SELECT-UCcartridgescombineSELECTpleattechnologywithextremelylowmetalsextractableslevels(<5ppbfor16metalsbasedondatafor10”cartridges).TheyarerecommendedforsensitivechemicalprocessesrequiringhighflowratesandUltracleanconditions.Theyarespeciallydesignedanddevelopedtomeetcustomerneedsincriticalsemiconductorprocessessuchasetching,residueremovalandcleaning.AllUltracleanproductsarewet-packedtoeliminatealengthywettingprocedurethusminimizingequipmentdowntimeandensuringsuperiorcleanliness.

• <5ppbextractablelevelfor16metals• All-fluoropolymerconstructionprovidesthehighestdegreeof

chemicalcompatibility• SELECTpleattechnologywithoptimizedmembranesurfacearea

formaximizedfilterlifeandflowrates• Highflowratesforefficientprocessoperation• Operatingtemperature150oC(upto180oC)• 100%integritytestedtoensurequality• Manufacturedinacertifiedcleanenvironment

• Semiconductorwetetchandclean -Etching -Stripping -Cleaning• Bulkchemicaldeliveries• Aggressivechemicalapplication

Materials of construction



Effective filtration area6.0ft2(0.56m2) 4”(100mm)cartridge12.2ft2(1.1m2) 10”(250mm)cartridge

Metals extractables<5ppb(total) ina10%HNO3extractionof1.5liters for24hoursatambienttemperature

Maximum differential pressure/temperatureForward 80psid(5.5bar)@75ºF(24ºC) 55psid(3.8bar)@167ºF(75ºC) 30psid(2.0bar)@257ºF(125ºC) 15psid(1.0bar)@300ºF(150ºC)ForwardHToption 100psid(6.8bar)@75ºF(24ºC) 75psid(5.1bar)@167ºF(75ºC) 50psid(3.4bar)@257ºF(125ºC) 15psid(1.0bar)@356ºF(180ºC) Reverse 50psid(3.4bar)@75ºF(24ºC) 15psid(1.0bar)@250ºF(121ºC)


Wet-packed <2particles/ml>0.20µmafter7galat1gal/min

TOc/resistivity rinse-up (wet-packed)TOCrecoverywithin3-5ppboffeedwithoutadditionalrinse-up.Resistivityrecoverywithin0.4megohm-cmoffeedafter22gal@1gpm.


fluOrOflOw®-sElEcT-uc (anUltracleanproduct)Leading the industry in cleanliness, low metals extractables, high flow rates and throughput

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APPLICATIONS

BENEFITS


m

0.030.050.100.20

> 60> 40> 21> 13

4.12.81.50.9

psig bar



DISTRIBUTED BY:



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DISTRIBUTED BY:







0.03µm 0.85gpm/psid(4.7lpm/100mbar)0.05µm 2.00gpm/psid(11.0lpm/100mbar)0.10µm 4.10gpm/psid(22.5lpm/100mbar)0.20µm 4.60gpm/psid(25.3lpm/100mbar)

fluOrOflOw®-sElEcT-uc (anUltracleanproduct)Leading the industry in cleanliness, low in metals extractables, high flow rates and throughput

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Water Flow Rate (gpm)*10% loss in flow rate for HT option


0

1.0

2.0

3.0

0.5

1.5

2.5

3.5

0 1 2 3 4 5 6Di

ffere

ntia

l Pre

ssur

e (p

sid)

10-inch (250mm) Cartridge

1284 16 20

50

0

100

150

200

250

Diffe

rent

ial P

ress

ure

(mba

r)


0.03 m

0.20 m0.10 m

0.05 m

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.FlouroflowisaregisteredtrademarkofParkerHannifinCorporation.VitonandKalrezareregisteredtrademarksofE.I.DuPontdeNemours&Co.,Inc.ChemrazisaregisteredtrademarkofGreen,TweedInc.*USPatentsPending4,588,464and4,663,041

SPEC-FS-UC-18RevB10/06

End FittingCODE

2378


O-RingsCODE

245

6

7N

MATERIALSiliconeViton®FEP-EncapsulatedVitonFEP-EncapsulatedSiliconeChemraz™None

Nominal LengthCODE

041020

30*

LENGTH4" (100mm)10" (250mm)20" (500mm)30" (750mm)

FS 18

Filter RatingCODE

923925001002

MICRON0.03µm0.05µm0.10µm0.20µm

OptionsCODE

E

H

TEMPERATUREElectronic Standard (150 C Max)High Temperature (180 C Max)

* High Temperature is not available in 30" length

U


SPECIFICATIONS

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2color(1235andBlack)

Inhightemperatureprocesses,exceptionalflowratesandon-streamlifecanbeobtainedbyusingFluoroflow®-SELECTfiltercartridges.TheSELECTmembranepleatdesign(patentpending)resultsinhigherflowrates,longerfilterlifeandlessdown-timethanastandardpleatedconfiguration.Theall-fluoropolymerconstructionoffersexcellentchemicalresistanceinaggressivechemicalapplications.

• Exceptionalflowratesincreasebathturnoverrates• Highchemicalandthermalresistance• 100%integritytested• Operatingtemperature150oC(upto180oCwithHToption)• Wet-packedoptionavailableforfastinstallation• Highermembraneareaforincreasedfilterlife

• Processesusingaggressivechemicalsandprocessfluids• Hightemperaturerecirculationbathsoperatingatelevated

temperatures• Hotphosphoricacidinnitrideetchingprocess

fluOrOflOw®-sElEcTAll-fluoropolymer, highest flow rate cartridge for applications up to 180ºC






Maximum differential pressure/temperatureForward 80psid(5.5bar)@75ºF(24ºC) 55psid(3.8bar)@167ºF(75ºC) 30psid(2.0bar)@257ºF(125ºC) 15psid(1.0bar)@300ºF(150ºC)ForwardHToption 100psid(6.8bar)@75ºF(24ºC) 75psid(5.1bar)@167ºF(75ºC) 50psid(3.4bar)@257ºF(125ºC) 15psid(1.0bar)@356ºF(180ºC) Reverse 50psid(3.4bar)@75ºF(24ºC) 15psid(1.0bar)@250ºF(121ºC)

cleanliness (particle shedding)Wet-packed <2particles/ml>0.2µmafter7galat1gal/minDry-packed <2particles/ml>0.2µmafter12galat1gal/min



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BENEFITS

APPLICATIONS


m

0.030.050.100.200.451.00

> 60> 40> 21> 13> 7> 3

4.12.81.50.90.50.2

psig bar



DISTRIBUTED BY:



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DISTRIBUTED BY:






fluOrOflOw®-sElEcTAll-fluoropolymer, highest flow rate cartridge for applications up to 180ºC

0.03µm 0.85gpm/psid(4.7lpm/100mbar)0.05µm 2.0gpm/psid(11.0lpm/100mbar)0.10µm 4.1gpm/psid(22.6lpm/100mbar)0.20µm 4.6gpm/psid(25.3lpm/100mbar)0.45µm 10.5gpm/psid(57.6lpm/100mbar)1.00µm 16.0gpm/psid(87.8lpm/100mbar)

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Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.FluoroflowisaregisteredtrademarkofParkerHannifinCorporation.VitonandKalrezareregisteredtrademarksofE.I.DuPontdeNemours&Co.,Inc.ChemrazisaregisteredtrademarkofGreen,TweedInc.*USPatentsPending4,588,464and4,663,041

SPEC-FS-18RevH10/06



0

1.0

2.0

3.0

0.5

1.5

2.5

3.5

0 1 2 3 4 5 6

Diffe

rent

ial P

ress

ure

(psid

)


1284 16 20

50

0

100

150

200

250

Diffe

rent

ial P

ress

ure

(mba

r)0.05 m


0.10 m0.20 m

0.45 m1.00 m

0.03 m

CODE2378


TreatmentsCODEBlank

FW

DESCRIPTIONSUPW Flush Ozone UPW FlushWet Packed

O-RingsCODE

245

6

7N


Nominal LengthEnd FittingCODE

041020

30 40

LENGTH4" (100mm)10" (250mm)20" (500mm)30" (750mm)40" (1,000mm)

FS 18

Filter RatingCODE

923925001002004010

MICRON0.03µm0.05µm0.10µm0.20µm0.45µm1.00µm

OptionsCODE

E

H*

*HT is only available in 4", 10" and 20" lengths

TEMPERATUREElectronic Standard (150 C Max)High Temperature(180 C Max)


SPECIFICATIONS


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Fluoroflow-HSA-UCcartridgesarerecommendedforsensitiveprocessesrequiringultracleanconditionsandhighflowrates.Leadingtheindustryincleanliness,Fluoroflow-HSA-UCall-fluoropolymercartridgesexceedcurrentstandardsbyofferinga<5ppb extractableslevelfor16metals(basedondatafor10”cartridges).Theyarespeciallyprocessedtomeetcustomerneedsincriticalsemiconductorprocessessuchasetching,strippingandcleaning.AllUltracleanproductscomewet-packedtoeliminatelengthywettingprocedures,therebyminimizingdowntimeandensuresuperiorcleanliness.

• <5ppbextractableslevelfor16metals• All-fluoropolymerconstructionprovidesthehighestdegreeof

chemicalcompatibility• Operatingtemperature150oC(upto180oCwithHToption)• Highermembranesurfaceareaforlongerfilterlifeandflowrates• Highflowratesforefficientprocessoperation• Manufacturedinacertifiedcleanenvironment


Materials of construction100%Fluoropolymerconstruction




Maximum differential pressure/temperature

Forward 80psid(5.5bar)@75ºF(24ºC) 55psid(3.8bar)@167ºF(75ºC) 30psid(2.0bar)@257ºF(125ºC) 15psid(1.0bar)@300ºF(150ºC)ForwardHToption 100psid(6.8bar)@75ºF(24ºC) 75psid(5.1bar)@167ºF(75ºC) 50psid(3.4bar)@257ºF(125ºC) 15psid(1.0bar)@356ºF(180ºC) Reverse 50psid(3.4bar)@75ºF(24ºC) 15psid(1.0bar)@250ºF(121ºC)





3 3 9

BENEFITS

APPLICATIONS

fluOrOflOw®-hsA-uc (anUltracleanproduct)Leading the industry in cleanliness, low metals extractables and high flow rates


m

0.030.050.100.20

> 60> 40> 21> 13

4.12.81.50.9

psig bar


19


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





fluOrOflOw®-hsA-uc (anUltracleanproduct)Leading the industry in cleanliness, low metals extractables and high flow rates



Water Flow Rate (gpm)*10% loss in flow rate for HT option


0

1.0

2.0

3.0

0.5

1.5

2.5

3.5

0 1 2 3 4 5 6Di

ffere

ntia

l Pre

ssur

e (p

sid)


1284 16 20

50

0

100

150

200

250

Diffe

rent

ial P

ress

ure

(mba

r)


0.03 m

0.20 m0.10 m

0.05 m

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.FluoroflowisaregisteredtrademarkofParkerHannifinCorporation.VitonandKalrezareregisteredtrademarksofE.I.DuPontdeNemours&Co.,Inc.ChemrazisaregisteredtrademarkofGreen,TweedInc.

SPEC-33-HSA-UC-RevB10/06

End FittingCODE

2378


O-RingsCODE

245

6

7N

MATERIALSiliconeVitonº®FEP-EncapsulatedVitonFEP-EncapsulatedSiliconeChemraz®None

Nominal LengthCODE

041020

30*

LENGTH4" (102mm)10" (250mm)20" (500mm)30" (750mm)

33 18

Filter RatingCODE

923925001002


OptionsCODE

E

H


* High Temperature is not available in 30" length

U

20


SPECIFICATIONS

LETT

ER

A4

Fluoroflow®-HSApleatedfiltercartridgesarerecommendedforfiltrationofaggressivechemicalsinhighflowrateapplications.Thesecartridgesfeatureanall-fluoropolymerconstruction:thisprovidesthehighestleveloffluidpurityandprocessapplicationversatility.Fluoroflow®-HSAcartridgesareflushedwithUPWtominimizeextractables.TheFluoroflow®-HSAfiltersofferexcellentresistanceinaggressivechemicalapplications.

• Highermembranesurfaceareaincreasesfilterlifetoreduceequipmentdown-time

• All-fluoropolymerconstructionprovidesthehighestdegreeofchemicalcompatibility

• Operatingtemperature150oC(upto180oCwithHToption)• Wet-packedoptioneliminateslengthywettingprocedure,

minimizingequipmentdowntime








Forward 80psid(5.5bar)@75ºF(24ºC) 55psid(3.8bar)@167ºF(75ºC) 30psid(2.0bar)@257ºF(125ºC) 15psid(1.0bar)@300ºF(150ºC)ForwardHToption 100psid(6.8bar)@75ºF(24ºC) 75psid(5.1bar)@167ºF(75ºC) 50psid(3.4bar)@257ºF(125ºC) 15psid(1.0bar)@356ºF(180ºC) Reverse 50psid(3.4bar)@75ºF(24ºC) 15psid(1.0bar)@250ºF(121ºC)





3 3 3

21

fluOrOflOw®-hsAAll-fluoropolymer cartridge for aggressive chemical filtration in high flow rate applications

BENEFITS

APPLICATIONS


m

0.030.050.100.200.451.00

> 60> 40> 21> 13> 7> 3

4.12.81.50.90.50.2

psig bar



DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:






fluOrOflOw®-hsAAll-fluoropolymer cartridge for aggressive chemical filtration in high flow rate applications

22


Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.FlouroflowisaregisteredtrademarkofParkerHannifinCorporation.VitonandKalrezareregisteredtrademarksofE.I.DuPontdeNemours&Co.,Inc.ChemrazisaregisteredtrademarkofGreen,TweedInc.

SPEC-33-HSARevE10/06



0

1.0

2.0

3.0

4.0

4.5

0.5

1.5

2.5

3.5

0 1 2 3 4 5 6

Diffe

renti

al Pr

essu

re (p

sid)


1284 16 20

50

0

100

150

200

250

300

Diffe

renti

al Pr

essu

re (m

bar)

0.03 m

0.45 m

1.00 m

0.20 m0.10 m

0.05 m

End FittingCODE

2378


OptionsCODEBlank

FW

TREATMENTUPW FlushOzone UPW FlushWet Packed

O-RingsCODE

245

6

7N


Nominal LengthCODE

0410203040

LENGTH4" (102mm)10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

33 18

Filter RatingCODE

923925001002004010503

MICRON0.03µm0.05µm0.1µm0.2µm0.45µm1µm100 (Nominal)

OptionsCODE

E

H*


* High Temperature is available only in 4", 10" and 20" lengths


SPECIFICATIONS


LETT

ER

A4

fluOrOflOw®-uc (anUltracleanproduct)Leading the industry in cleanliness and low metals extractables

Leadingtheindustryincleanliness,Fluoroflow-UCall-fluoropolymercartridgefiltersexceedcurrentstandardsbyofferinga<5ppbmetalsextractableslevel(16metals,basedondatafor10”cartridges).Theyarespeciallyprocessedtomeetcustomerneedsincriticalsemiconductorprocessessuchasetching,strippingandcleaning.AllUltracleanproductsarewet-packedtoeliminatelengthywettingprocedures,tomaximizeequipmentuptimeandensuresuperiorcleanliness.

•<5ppbextractableslevelfor16metals• All-fluoropolymerconstructionprovidesthehighestdegreeof

chemicalcompatibility• Highflowratesforefficientprocessoperation• Manufacturedinacertifiedcleanenvironment




Effective filtration area

6.8ft2(0.63m2)pernominal10”(250mm)cartridge


Maximum differential pressure

Forward 80psid(5.5bar)@75ºF(24ºC) 55psid(3.8bar)@167ºF(75ºC) 30psid(2.0bar)@257ºF(125ºC) 15psid(1.0bar)@300ºF(150ºC) Reverse 50psid(3.4bar)@75ºF(24ºC) 15psid(1.0bar)@250ºF(121ºC)





3 3 8

23

BENEFITS

APPLICATIONSFILTERRATING BUBBLE POINT*

m

0.050.100.20

> 40> 21> 13

2.81.50.9

psig bar



DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





fluOrOflOw®-uc (anUltracleanproduct)Leading the industry in cleanliness and low metals extractables


24


SPEC-33-UCRevB10/06

0.05µm 0.9gpm/psid(4.9lpm/100mbar)0.10µm 2.3gpm/psid(12.7lpm/100mbar)0.20µm 3.2gpm/psid(17.6lpm/100mbar)

End FittingCODE

2378


O-RingsCODE

245

6

7N


Nominal LengthCODE

102030

LENGTH10" (250mm)20" (500mm)30" (750mm)

33 E14

Filter RatingCODE

925001002

MICRON0.05µm0.10µm0.20µm

U


7

6

5

4

3

2

1

00 1 2 3 4 5 6

0.10µm

0.20µmDiffe

renti

al Pr

essu

re (p

sid)

10-inch (250 mm) CartridgeWater Flow Rate (lpm)

1284 16 20

50

0

100

150

200

250

300

400

350

450

Diffe

renti

al Pr

essu

re (m

bar)

0.05µm


SPECIFICATIONS

LETT

ER

A4

3 3 1

Fluoroflow®pleatedfiltercartridgesfeatureanall-fluoropolymerconstruction;thisprovidesthehighestchemicalresistancewhenfilteringacids,basesandsolvents.Fluoroflow®cartridgesfitstandardfilterhousingsandareavailableinavarietyoffilterratings,lengthsandend-fittingsformaximumversatility.Fluoroflow®cartridgesareavailableflushedwithUPWtominimizeextractablesandwet-packedtoeliminatetheneedforon-sitewetting,tofityourneeds.

• Highchemicalcompatibilitymaximizesprocesscapability• Wet-packedoptioneliminateslengthywettingprocedureand

minimizesequipmentdowntime

• Aggressivechemicalsandprocessfluidsattemperaturesup to 150˚C

• Ozonatedand/orhotUPW




6.8ft2(0.63m2)pernominal10”(250mm)cartridge


Maximum differential pressureForward 80psid(5.5bar)@75ºF(24ºC) 55psid(3.8bar)@167ºF(75ºC) 30psid(2.0bar)@257ºF(125ºC) 15psid(1.0bar)@300ºF(150ºC) Reverse 50psid(3.4bar)@75ºF(24ºC) 15psid(1.0bar)@250ºF(121ºC)





25

APPLICATIONS

fluOrOflOw® All-fluoropolymer cartridge for effective filtration of aggressive chemicals

BENEFITS


m

0.050.100.200.451.00

> 40> 21> 13> 7> 3

2.81.50.90.50.2

psig bar



DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:






fluOrOflOw® All-fluoropolymer cartridge for effective filtration of aggressive chemicals

26


SPEC-33RevH10/06

0.05µm 0.9gpm/psid(4.9lpm/100mbar)0.10µm 2.3gpm/psid(12.7lpm/100mbar)0.20µm 3.2gpm/psid(17.6lpm/100mbar)0.45µm 4.7gpm/psid(25.8lpm/100mbar)1.00µm 6.7gpm/psid(36.9lpm/100mbar)

End FittingCODE

2378


OptionsCODEBlank

FW

TREATMENTUPW FlushOzone UPW FlushWet Packed

O-RingsCODE

245

6

7N


Nominal LengthCODE

0410203040

LENGTH4" (102mm)10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

33 E14

Filter RatingCODE

925001002004010503

MICRON0.05µm0.1µm0.2µm0.45µm1µm100 (Nominal)


7

6

5

4

3

2

1

00 1 2 3 4 5 6

0.10µm

0.20µm

1.00µm

Diffe

renti

al Pr

essu

re (p

sid)

10-inch (250 mm) CartridgeWater Flow Rate (lpm)

1284 16 20

50

0

100

150

200

250

300

400

350

450

Diffe

renti

al Pr

essu

re (m

bar)

0.05µm

0.45µm


SPECIFICATIONS

LETT

ER

A4

fluOrOcAp® XFXF: the ultimate in flow rates and throughput

1 5 5

27

XFisarevolutionarymembranetechnologyfromParker.ItprovidessuperiorflowoveratraditionalcartridgebyutilizinganasymmetricPTFEmembrane.CombinedwiththeSELECTpleatingtechnology,XFcartridgesofferoverthreetimestheflowrateandthroughputofstandardcartridges-atalowerdifferentialpressure.

FluoroCap®XFencapsulatedfiltercartridgesofferexceptionalflowrates and on-stream life at high temperatures up to 180˚C (180˚C forHToption)andhighdifferentialpressures.Theintegralfilterdesignmaximizesup-timebyprovidingfasterandeasierchange-outwithoutlaboriouscleaningprotocols.Increasedworkersafetyresultsfromthereducedexposuretohazardousmaterials.Theeliminationoffilterelementreplacementreducesthepotentialforprocesscontamination.

• Superiorliquidflowrates•Lowerdifferentialpressurewithimprovedretention• All-fluoropolymerconstruction• Minimizeddefectrates• Maximizingequipmentup-time• Capsulesreducedown-time,chanceofcontaminationand

riskofexposuretohazardousmaterials• Compactsizeandfootprint

• Highlyviscous,aggressive,andcorrosiveliquidchemical filtrationandhighturnoverbathsapplications -Piranhaetch -Siliconnitrideetch -Photoresiststripping

APPLICATIONS

BENEFITS

Materials of constructionAsymmetricPTFEmembrane100%Fluoropolymerconstruct



Metals extractables

<20ppb(total) ina10%HNO3extractionof1.5liters for24hoursatambienttemperature

Maximum differential pressure/temperatureForward SELECT80psi(5.5bar)@75°F(24°C) Standard60psi(4.1bar)@75°F(24°C)Forward SELECT12.5psi(0.9bar)@75°F(24°C)HToption Standard20psi(1.3bar)@75°F(24°C)Reverse SELECT50psi(3.4bar)@75°F(24°C) Standard40psi(2.8bar)@75°F(24°C)

cleanliness (particle shedding)Wet-packed <2particles/ml>0.2µmafter5galat1gpmDry-packed <2particles/ml>0.2µmafter7galat1gpm

TOc/resistivity rinse-up (wet-packed)TOCrecoverywithin3-5ppboffeedafter12gal@1gpmResistivityrecoverywithin0.4megohm-cmoffeedafter22gal@1gpm.


FILTERLENGTH

NOMINALCAPSULES LENGTH

EFFECTIVEFILTRATION AREA

4" (100mm) 10" (250mm) 4" (100mm)10" (250mm)

9" (230mm)17.5" (445mm)

9" (230mm)17.5" (445mm)

5.5ft2 (0.51m2)11.4ft2 (1.03m2)3.4ft2 (0.32m2)6.8ft2 (0.61m2)

SELECT

Standard

PLEAT


µm

0.10 >22 1.50

psig bar


>__

XF


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





fluOrOcAp® XFXF: the ultimate in flow rates and throughput

28


Specificationsaresubjecttochangewithoutnotification.©2006ParkerHannifinCorporation.FluoroCapisaregisteredtrademarkofParkerHannifinCorporation.ParflareisatrademarkofParkerHannifinCorporation.FlareLockisatrademarkofFluoroware,Inc.

SPEC-FCAP-XFRevA10/06


Typical Water Flow Rate (lpm)

0

0.20

0.40

0.60

0.80

1.00

1.20

1.40

0 1 2 3 4 5 6

4 8 12 16 20

10

0

20

30

40

50

Diffe

renti

al Pr

essu

re (p

sid)

Diffe

renti

al Pr

essu

re (m

bar)

10-inch (250mm)

Standard

SELECT

StyleCODE

F1

TLR

DESCRIPTIONIn-LineT-StyleL-Style (Left)R-Style (Right)

ConnectionsCODE DESCRIPTION

3/4" Buttweld3/8" Parflare 90¼1/2" Parflare 90¼3/4" Parflare 90¼3/4" Parflare3/8" Parflare1/2" Parflare3/4" Flarelock®

CODE DESCRIPTION3/4" Pillar 90¼3/4" MNPT3/4" Pillar

BCDEF3

GHJ

KPW3

3 T, L, R can only be ordered with F and W connections2 Inline only1 F cannot be ordered with W connections.

Filter RatingCODE

031MICRON0.1µm XF

Vent Alignment4

CODESD

C5

ALIGNMENTSame Side180¼ Opposite Side Centered

Element LengthCODE

012345

LENGTH4" (100mm)10" (250mm)20" (500mm)30" (750mm)10" shortened

TreatmentCODE

CW

DESCRIPTIONDry Packed (STD)Ozonated UPWFlushed andWet Packed

PleatingCODE

21


TemperatureCODE

CH

DESCRIPTIONStandard up to 150¼CHigh temp up to 180¼C

4 Vent/Drain connections are 1/4" versions of the inlet/outlet fittings, except for codes K and W which are 1/2" Pillar vent/drain fittings. 5 T, L and R only

0 13

*Flow rates shown are for FluoroCap filters with 3/4” Parflare™ (in-line) fittings and for fluids with viscosity of 1cP.

Eachcartridgeisidentifiedwithaproductnumber,poresize,andlotnumberfortraceability.

SPECIFICATIONS

LETT

ER

A4

SPECIFICATIONSMaterials of construction

100%FluoropolymerconstructionAllcomponentsarethermallybondedtoensureintegrityandreduceextractables.


Metals extractables

<20ppb(total) ina10%HNO3extractionof1.5liters for24hoursatambienttemperature

Maximum differential pressure/temperatureForward 80psid(5.5bar)@75°F(24°C)Standard 55psid(3.8bar)@167°F(75°C) 30psid(2.0bar)@257F(125°C) 15psid(1.0bar)@300°F(150°C)Forward 100psid(6.8bar)@75°F(24°C)HighTemp. 75psid(5.1bar)@167°F(75°C) 50psid(3.4bar)@257F(125°C) 15psid(1.0bar)@356°F(180°C)Reverse 50psid(3.4bar)@75°F(24°C)Standardand 15psid(1.0bar)@250°F(121°C)HighTemp.



TOc/resistivity rinse-up (wet-packed)TOCrecoverywithin3-5ppboffeedafter12gal@1gpmResistivityrecoverywithin0.4megohm-cmoffeedafter22gal@1gpm.


FluoroCap®-SELECTencapsulatedfiltercartridgesofferexceptionalflow rates and on-stream life at temperatures up to 180˚C and high differentialpressures.TheSELECTmembranepleatdesign(patentpending)resultsinhigherflowratesandgreaterfilterlifeandlessdown-timethanastandardpleatedconfiguration.Theintegralfilterdesignmaximizesup-timebyprovidingfasterandeasierchange-outwithoutlaboriouscleaningprotocols.Increasedworkersafetyresultsfromreducedexposuretohazardousmaterials.Eliminatingcartridgereplacementreducesthepotentialforprocesscontamination.

TheFluoroCap®familyofcapsulesisofferedinseveralversionsprovidingarangeofflow-rateandtemperaturecapabilities.

T LEFT RIGHT

• Chemicalandthermalresistanceincreasesprocesscapability• All-fluoropolymerdesignprovidesthehighestlevelofpurity• Capsulesreducedowntime,chanceofcontaminationand

riskofexposuretohazardousmaterials• Allfiltersare100%integritytestedtoensure productperformance

• Aggressivechemicalsandprocessfluidsunderharshconditions• Wetetchandclean

1 5 3

fluOrOcAp®-sElEcTHighest flow rate all-fluoropolymer capsule for aggressive chemical applications

FILTERLENGTH

NOMINALCAPSULE LENGTH


4" (100mm)10" (250mm)20" (500mm)30" (750mm)10" (250mm)

9" (230mm)17.5" (445mm)26.25" (660mm)36.5" (927mm)14.5" (368mm)

6.0ft2 (0.56m2)12.2ft2 (1.1m2)24.4ft2 (2.2m2)36.6ft2 (3.3m2)12.2ft2 (1.1m2)

29

BENEFITS

APPLICATIONS


m

0.030.050.100.200.451.00

> 60> 40> 21> 13>7>3

4.12.81.50.90.50.2

psig bar



DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





fluOrOcAp®-sElEcTHighest flow rate all-fluoropolymer capsule for aggressive chemical applications




0 5 10 15 20 25 30 355

4

3

2

1

0

3

2

1

00 2 4 6 8 10

Diffe

renti

al Pr

essu

re (1

00 m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

10-inch (250mm) Capsule

0.03 m

1.00 m

0.45 m

0.20 m

0.10 m

0.05 m


30

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.FluoroCapisaregisteredtrademarkofParkerHannifinCorporation.ParflareisatrademarkofParkerHannifinCorporation.FlareLockisatrademarkofFluoroware,Inc.*USPatentsPending4,588,464and4,663,041

SPEC-FCAP-SELECTRevG10/06

StyleCODE

F1

TLR


TreatmentCODE

CW


Element LengthCODE

0123

42

LENGTH4" (100mm)10" (250mm)20" (500mm)30" (750mm)10" (250mm) (Short)

2

C


3/4" Buttweld3/8" Parflare 90°1/2" Parflare 90°3/4" Parflare 90°3/4" Parflare3/8" Parflare1/2" Parflare3/4" Flarelock®

CODE DESCRIPTION3/4" Pillar 90°3/4" MNPT3/4" Pillar

Vent Alignment4

CODESD

C5

ALIGNMENTSame Side180¼ Opposite SideCentered

Filter RatingCODE

923925001002004010


BCDEF3

GHJ

KPW3

3 T, L, R can only be ordered with F and W connections4 Vent/Drain connections are 1/4" versions of the inlet/outlet fittings, except for codes K and W which are 1/2" Pillar vent/drain fittings. 5 T, L and R only

2 Inline only1 F cannot be ordered with W connections.

OptionsCODE

C

H

TEMPERATUREFlourocap-Standard(150°C max)High Temperature(180°C max)

*Flow rates shown are for FluoroCap filters with 3/4” Parflare™ (in-line) fittings and for fluids with viscosity of 1cP.

SPECIFICATIONS

LETT

ER

A4

SPECIFICATIONS

FluoroCapencapsulatedfiltersfeatureanall-fluoropolymerpleatedfiltercartridgeforexcellentchemicalresistanceinaggressivechemicalapplications.Theintegralfilterdesignmaximizesup-timebyprovidingfasterandeasierchange-outwithoutlaboriouscleaningprotocols.Becausethereplacementoffilterelementsiseliminated,thechanceofintroducingcontaminationintotheprocessisminimized.FluoroCapincreasesthelevelofsafety,andreducestheriskofexposuretohazardousmaterials.

FluoroCapcapsulesareavailableflushedwithozonatedUPWtofurtherminimizeextractablesorwet-packedtoeliminateon-sitewettingforuseinaqueousapplications.

T LEFT RIGHT

• Integralfiltercartridgeandhousingoffersnewhousingeverytime

• Chemicalresistanceincreasesprocesscapabilityandcompatibility

• Capsulesreducedown-time,chanceofcontaminationandriskofexposuretohazardousmaterialsduringfilterchange-out

• Allfiltersare100%integritytestedbeforereleaseforreliableproductperformance

• Allcapsulesare100%pressuretestedtoassurereliableproductperformance

• Aggressivechemicalsandprocessfluidsunderharshconditions• Wetbenchandclean

Materials of construction100%Fluoropolymerconstruction




Maximum differential pressure/temperatureForward 80psid(5.5bar)@75°F(24°C)Standard 55psid(3.8bar)@167°F(75°C) 30psid(2.0bar)@257F(125°C) 15psid(1.0bar)@300°F(150°C)Forward 100psid(6.8bar)@75°F(24°C)HighTemp. 75psid(5.1bar)@167°F(75°C) 50psid(3.4bar)@257F(125°C) 15psid(1.0bar)@356°F(180°C)Reverse 50psid(3.4bar)@75°F(24°C)Standardand 15psid(1.0bar)@250°F(121°C)HighTemp.



TOc/resistivity rinse-up (wet-packed)TOCrecoverywithin3-5ppboffeedafter12gal@1gpm.Resistivityrecoverywithin0.4megohm-cmoffeedafter22gal@1gpm.


fluOrOcAp®

Encapsulated all-fluoropolymer cartridge for aggressive chemical filtration

FILTERLENGTH

NOMINALCAPSULES LENGTH


4" (100mm)10" (250mm)20" (500mm)30" (750mm)10" (250mm)

9" (230mm)17.5" (445mm)26.25" (660mm)36.5" (927mm)14.5" (368mm)

4.8ft2 (0.45m2)9.8ft2 (0.9m2)

19.6ft2 (1.82m2)29.4ft2 (2.76m2)

9.8ft2 (0.9m2)

31

BENEFITS

APPLICATIONS

1 5 1


m

0.030.050.100.200.451.00

> 60> 40> 21> 13>7>3

4.12.81.50.90.50.2

psig bar



DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





fluOrOcAp®

Encapsulated all-fluoropolymer cartridge for aggressive chemical filtration



0 5 10 15 20 25 30 355

4

3

2

1

0

3

2

1

00 2 4 6 8 10

0.05 m

0.20 m

0.45 m

1.00 m Diffe

renti

al Pr

essu

re (1

00 m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

10-inch (250mm) Capsule

0.10 m

0.03 m


32

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.FluoroCapisaregisteredtrademarkofParkerHannifinCorporation.ParflareisatrademarkofParkerHannifinCorporation.FlareLockisatrademarkofFluoroware,Inc.

SPEC-FCAPRevH10/06

0.03µm 0.65gpm/psid(3.3lpm/100mbar)0.05µm 1.5gpm/psid(8.2lpm/100mbar)0.10µm 3.2gpm/psid(17.6lpm/100mbar)0.20µm 4.1gpm/psid(22.5lpm/100mbar)0.45µm 6.6gpm/psid(36.2lpm/100mbar)1.00µm 8.9gpm/psid(49.0lpm/100mbar)*Flow rates shown are for FluoroCap filters with 3/4” Parflare™ (in-line) fittings and for fluids with viscosity of 1cP.

StyleCODE

F1

TLR


TreatmentCODE

CW


Element LengthCODE

0123

42

LENGTH4" (100mm)10" (250mm)20" (500mm)30" (750mm)10" (250mm) (Short)

1C


3/4" Buttweld3/8" Parflare 90°1/2" Parflare 90°3/4" Parflare 90°3/4" Parflare3/8" Parflare1/2" Parflare3/4" Flarelock®

CODE DESCRIPTION3/4" Pillar 90°3/4" MNPT3/4" Pillar

Vent Alignment4

CODESD

C5

ALIGNMENTSame Side180¼ Opposite SideCentered

Filter RatingCODE

923925001002004010


BCDEF3

GHJ

KPW3

3 T, L, R can only be ordered with F and W connections4 Vent/Drain connections are 1/4" versions of the inlet/outlet fittings, except for codes K and W which are 1/2" Pillar vent/drain fittings. 5 T, L and R only

2 Inline only1 F cannot be ordered with W connections.

OptionsCODE

C

H

TEMPERATUREFlourocap-Standard(150°C max)High Temperature(180°C max)

SPECIFICATIONS

LETT

ER

A4

chEMflOw® XF XF: the ultimate in flow rates and throughput

1 2 5

33

XFisarevolutionarymembranetechnologyfromParkerAdvancedFiltration.ItprovidessuperiorflowoveratraditionalcartridgebyutilizinganasymmetricPTFEmembrane.CombinedwiththeSELECTpleatingtechnology,XFcartridgesofferoverthreetimestheflowrateandthroughputofstandardcartridges-atlowerdifferentialpressure.ChemflowXFwithSELECTPleatingtechnologycontainsover11.0ft2ofPTFEmembranewithcomponentsmadefromHighDensityPolyethylene(HDPE).TheXFmembranecombinedwiththeHDPEsupportsleadstoexceptionalperformancewhenfilteringultra-highpuritychemicals(UHP).Theyarerecommendedforhighlyviscousliquidfiltrationandhigh-turnoverrecirculationbathsattemperatures<60oC.

• Superiorliquidflowrates•Lowerdifferentialpressurewithimprovedretention• HDPEsupportandstructureensuresahighdegreeof

cleanliness• Increasedproductyields• Minimizeddefectrates

• Semiconductorandwafermanufacture -Highlyviscousliquidfiltrationattemperatures<60oC -Highturnoverbathapplicationsattemperatures<60oC• Bulkchemicaldelivery

Materials of constructionMembrane PTFE(Asymmetric)Supportlayers HDPEStructure HDPE


Effective filtration areaSELECT11.0ft2(0.99m2)pernominal10”(250mm)cartridgeStandard5.7ft2(0.51m2)pernominal10”(250mm)cartridge

Metals extractables<70ppb ina10%HNO3extractionof1.5liters for24hoursatambienttemperatureRetentionEfficiency 99.9%at0.138µm;99%at0.093µm

Maximum differential pressure/temperatureForward 55psi(4.1bar)@75oF(24oC)Reverse 30psi(2.8bar)@75oF(24oC)



TOc/resistivity rinse-up (wet-packed)TOCrecoverywithin5ppboffeedwithoutadditionalrinse-upResistivityrecoverywithin0.2megohm-cmoffeedafter12gal@1gpm


BENEFITS

APPLICATIONS

XF


µm

0.10 >22 1.50

psig bar


>__


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





chEMflOw® XFXF: the ultimate in flow rates and throughput

34



Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.ChemflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisaregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.CunoisaregisteredtrademarkofCunoInc.

SPEC-PE-XFRevA10/06

CODE10203040

LENGTH10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

LengthCODE

01245

MATERIALBuna NEPDMSiliconeViton®FEP EncapsulatedViton

O-Ring MaterialEnd FittingCODE

2378


0 E

Insert StyleCODE

1A

DESCRIPTIONNone (Std)1/2" Shortenedon 222 Fitting

OptionsCODEBlank

W

TREATMENTStandard DryWet Packed

Pleat TechnologyCODE

ESPE


Filter RatingCODE

031MICRON0.10µm XF

0 13


Typical Water Flow Rate (lpm)

0

0.20

0.40

0.60

0.80

1.00

1.20

1.40

0 1 2 3 4 5 6

4 8 12 16 20

10

0

20

30

40

50

Diffe

renti

al Pr

essu

re (p

sid)

Diffe

renti

al Pr

essu

re (m

bar)

10-inch (250mm)

SELECT

Standard* Per 10-inch (250 mm) cartrdige equivalent and for fluids with viscosity of 1cP.

SPECIFICATIONS

LETT

ER

A4

SPECIFICATIONS

Chemflowcontainsover8.3ft2ofPTFEmembranewithcomponentsmadefromHighDensityPolyethylene(HDPE).OurprovenPTFEmembranecombinedwiththeHDPEsupportsleadstoexceptionalperformancewhenfilteringultra-highpuritychemicals(UHP).EachChemflowcartridgeismanufacturedandintegritytestedinacertifiedClass10,000cleanroomtoensureconsistentperformanceandquality.

• Highliquidflowrates• Broadchemicalcompatibility• Wovensupportstructure• Highparticleretention• Longservicelife• Lowextractables• Wet-packedoptioneliminateslengthywettingprocedureto

maximizeequipmentuptime

• Photoresists• Etchbaths –Aluminumetch –Bufferedoxideetch• Solventfiltration• Magneticmediasolvents• Recirculatingbaths• Rinses• Cleaningsolutions

Materials of constructionMembrane PTFESupportlayers HDPEStructure HDPE

Effective filtration area8.3ft2(0.78m2)per10”(250mm)cartridge

Metalsextractables<55ppb(total) ina10%HNO3extractionof1.5liters for24hoursatambienttemperature

Maximum differential pressure/temperatureForward 80psid(5.5bar)@75°F(24°C)Reverse 50psid(3.4bar)@75°F(24°C)

Maximum operating temperature

140°F(60°C)

cleanliness (particle shedding)Wet-packed <1particles/ml>0.2µmafter5galat1gpm

Dataasfromopenbagandinstalled,noadditionalinstallationflushing.

TOc/resistivity rinse-up (wet-packed)TOCrinse-uptobackgroundplus5ppboffeedafter70gal@1gpm.Resistivityrinse-uptobackgroundminus0.2megohm-cmoffeedafter60gal@1gpm.


chEMflOw-pEPTFE membrane with HDPE structure to maintain chemical purity

1 2 1

APPLICATIONS

BENEFITS

*In a 60/40 IPA/DI water.

35

FILTERRATING

MINIMUMBUBBLE POINT*

0.050.1

0.20

µm psig bar

> 40> 21>13

2.81.50.9


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





PE

CODE10203040

LENGTH10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

LengthCODE

925001002010


Filter RatingCODE

01245

MATERIALBuna NEPDMSiliconeViton®FEP EncapsulatedViton

O-Ring MaterialEnd FittingCODE

2378


0 E

Insert StyleCODE

1A

DESCRIPTIONNone (Std)1/2" Shortenedon 222 Fitting

OptionsCODEBlank

W

TREATMENTStandardWet Packed

Specificationsaresubjecttochangewithoutnotification.©2006ParkerHannifinCorporation.ChemflowisaregisteredtrademarkofParkerHannifinCorporation.ViltonisaregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.CunoisaregisteredtrademarkofCunoInc.

SPEC-PERevG10/06

chEMflOw-pE PTFE membrane with HDPE structure to maintain chemical purity

36



Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

Water Flow Rate (lpm)10-inch (250 mm) Cartridges


0 5 10 15 20 25 30 35

0 2 4 6 8 10

300

200

100

0

5

4

3

2

1

0

0.05µm 0.10µm

0.20µm

* Per 10-inch (250 mm) cartrdige equivalent and for fluids with viscosity of 1cP.

SPECIFICATIONS

LETT

ER

A4

Proflow™II-E-SELECTisachemicallyresistantcartridgeowingtoitsuseofPTFEmembraneandpolypropylenecomponents.

DuetoitsinnovativeSELECTPleating,performanceisincreasedmarkedlyoversimilarcompetitivecartridges.Onlyoneofeveryfourpleatsextendstothecore,adesignthatplacesmostofthefiltrationareanearertotheouterwall.Thispreventscrowdingofthemediaaroundthecore,whichinstandardpleatedcartridgestendstorestricttheexitingflow.Thisinnovativedesignresultsinhigherflowrates,lowerdifferentialpressuresandlongerlife.

Proflow™II-E-SELECTfiltersaremanufacturedinacertifiedcleanroomwheretheyareflushedwithnon-pyrogenicdeionizedwaterand100%integritytested.Eachfilterisserialnumberedtoprovidecompleteproducttraceability.

• Highflowratereducesprocessingtime• Lowextractablesshortenstart-uptime• Excellentchemicalcompatibility• Longerlifereducesthecostoffiltration

• Chemicaletchbaths• Photoresists• Developers• BCDSchemicals• Recirculatingchemicalbaths(non-HF/BOE)• Solvents• Magneticmediasolutions

Materials of constructionMembrane PTFESupportlayers PolypropyleneStructure Polypropylene



12.4ft2(1.15m2)per10”(250mm)cartridge

Maximum differential pressure/temperatureForward 70psid(4.8bar)@68°F(20°C) 40psid(2.8bar)@180°F(82°C)Reverse 40psid(2.8bar)@68°F(20°C)


Wetpacked <1particles/ml>0.2µmafter6galat1gpm




APPLICATIONS

BENEFITS

prOflOw™ II-E-sElEcTPTFE membrane filter with extended surface area for superior flow rates

3 5 3

37

psig barBUBBLE POINT*

0.05 >40 2.8 0.10 >21 1.5 0.20 >13 0.9

*Integrity test values are for filters wetted with 60/40 IPA water.

µm

FILTERRATING

___


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





prOflOw ™ II-E-sElEcTPTFE membrane filter with extended surface area for superior flow rates



38

Specificationsaresubjecttochangewithoutnotification.©2006ParkerHannifinCorporation.ProflowisaregisteredtrademarkofParkerHannifinCorporation.ViltonisaregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.

SPEC-PS-ERevE10/06

Water Flow Rate (lpm)10-inch (250mm) cartridge


0 8 16 246

5

4

3

2

1

0

400

300

200

100

00 2 4 6 8

0.05 m

0.10 m

0.20 m Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)


End FittingCODE

2378


Insert StyleCODE

15

6

A

DESCRIPTIONNone (Std)EncapsulatedStainless SteelEncapsulatedPolysulfone1/2Ó Shortenedon 222 Fitting

O-RingsCODE

1245

6

N

MATERIALEPDMSiliconeViton®FEP-EncapsulatedVitonFEP-EncapsulatedSiliconeNone

LengthCODE

10203040

LENGTH10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

PS E0

Filter RatingCODE

925001002

MICRON0.05µm0.10µm0.20µm

OptionsCODEBlank

W

TREATMENTStandardWet Packed

SPECIFICATIONS

LETT

ER

A4

SPECIFICATIONS

Proflow™II-EcartridgesaredesignedtoprovidemicrofiltrationSemiconductor/Microelectronicswithincreasedflowrates(airandliquid),broadchemicalresistanceandhighperformance.

Proflow™II-Eensuresmaximumfiltrationperformanceinthepurificationofaggressiveliquidsandorganicsolvents;thePTFEmembranealsoservesasahighlyefficienthydrophobicbarriertoensurelowmoisturecontentoffilteredultrapuregases.

EachProflow™II-Ecartridgeismanufacturedandintegritytestedinacertifiedcleanroomtoensureconsistentperformanceandquality.

• Excellentliquidandairflowratesreducebatchprocessingtime

• Broadchemicalcompatibilityenablesuseinmanyapplications• Broadrangeoffilterratingsgivespreciseparticleretention• Superiorhydrophobicitypreventsfiltersfromwetting

outingaspurificationapplications

• Etchbaths• Solventfiltration• Magneticmediasolvents• Recirculatingfluids• UltrapuregasforCVD• Compresseddryair• Waferdryingsystems


Effective filtration area4.6ft2(0.43m2) 5”(130mm)cartridges9.3ft2(0.86m2) 10”(250mm)cartridges

Maximum differential pressure/temperatureForward 80psid(5.5bar)@75ºF(24ºC)40psid(2.8bar)@180ºF(82ºC)Reverse 50psid(3.4bar)@75ºF(24ºC)


Wetpacked <1particles/ml>0.2µmafter6galat1gpm


TOc/resistivity rinse-up (wet packed)TOCrinse-uptobackgroundplus5ppboffeedafter70gal@1gpm.Resistivityrinse-uptobackgroundminus0.2megohm-cmoffeedafter30gal@1gpm.


prOflOw™ II ElEcTrONIcs grADEPleated PTFE membrane cartridge for use in high purity process fluids

3 5 1

BENEFITS

APPLICATIONS

39

FILTER RATING BUBBLE POINT*

µm

0.050.100.200.451.00

>40>21>13>5>1

2.81.50.90.3

0.07

psig bar

*In a 60/40 IPA/DI water.


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:




water in flow rates, Typical * 0.05µm 0.8gpm/psid(4.39lpm/100mbar)0.10µm 1.7gpm/psid(9.33lpm/100mbar)0.20µm 3.2gpm/psid(17.5lpm/100mbar)0.45µm 7.6gpm/psid(41.72lpm/100mbar)1.00µm 9.1gpm/psid(49.97lpm/100mbar)

prOflOw™ II ElEcTrONIcs grADEPleated PTFE membrane cartridge for generating high purity process fluids

40

Specificationsaresubjecttochangewithoutnotification.©2006ParkerHannifinCorporation.ProflowisaregisteredtrademarkofParkerHannifinCorporation.ViltonisaregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.CunoisaregisteredtrademarkofCunoInc.

SPEC-3-P-II-ERevH10/06

Eachcartridgeisidentifiedwithaproductnumber,poresizeandlotnumberfortraceability.03

CODE DESCRIPTION 1 No Insert 5 (Standard) Encapsulated 6 Stainless Steel Encapsulated Polysulfone A 1/2" Shortened on 222 Fitting

CODE DESCRIPTION 0 DOE (Cuno®) 1 DOE 2 226/Flat 3 222/Flat 6 020/Internal/Flat 7 226/Fin 8 222/Fin® G 120/Internal/ Recessed Endcap H 213/Recessed Endcap (Ametek) R 222/Recessed Endcap

CODE LENGTH 05 5" (130mm) 10 10" (250mm) 20 20" (500mm) 30 30" (750mm) 40 40" (1000mm)

CODE MICRON 925 0.05µm 001 0.10µm 002 0.20µm 004 0.45µm 010 1.00µm

CODE MATERIAL 0 Buna N 1 EPDM 2 Silicone 4 Viton®

5* FEP-Encapsulated Viton 6* FEP-Encapsulated Silicone N None

CODE THICKNESS 1 0.200" (5mm) 2 0.125" (3mm) 4 (1) 0.200" (5mm) & (1) 0.125" (3mm) N No Gasket

E

*O-Rings only

Insert Style

End Fitting

Nominal Length

Filter Rating Gasket/O-Rings Gaskets

CODE TREATMENT Blank Standard W We-packed

Options

CODE TREATMENT 4 Standard 6 Extended flushed with 18 Megohm DI Water

Application

10-inch (250mm) CartridgeWater Flow Rate (lpm)


SPECIFICATIONS

LETT

ER

A4

SPECIFICATIONS

Proflow™IIGeneralgradecartridgesprovideaneconomicalternativeforgeneralapplicationswherereliablegasandliquidflowratesarerequired.With5.6squarefeetofexpandedPTFEmembrane,ProflowII-Gisahighlyefficienthydrophobicbarrier,fortheproductionofdrygas,andwilleffectivelypurifyaggressiveliquidsandorganicsolvents.

Proflow™II-Gcartridgesaremanufacturedundercleanroomconditionsandintegritytestedbeforeshipmenttoassureconsistentperformanceandquality.

•Reliableairandliquidflowratesforeffectiveperformance•Broadchemicalcompatibilityenablesuseinmanyapplications•Broadrangeofmicronratingsforuserconvenience•Superiorhydrophobicityforlonglifeinvent/airapplications•Integritytestedtoensurequality

•Photoresists•Compressedgas•Non-sterileventing•Electronicgradesolvents•Hotdeionizedwater(lessthan80°C)




Maximum differential pressure/temperatureForward 80psid(5.5bar)@75ºF(24ºC) 40psid(2.8bar)@180ºF(82ºC)Reverse 50psid(3.4bar)@75ºF(24ºC)


Wet-packed <1particles/ml>0.2µmafter6galat1gpmDataasfromopenbagandinstalled,noadditionalinstallationflushing.



prOflOw™ II gENErAl grADEHydrophobic PTFE membrane for general purpose gas and solvent purification

3 5 4

BENEFITS

APPLICATIONS

41

psig barBUBBLE POINT*

0.05 >40 2.8 0.10 >21 1.5 0.20 >13 0.9

*60/40 IPA.

µm

FILTERRATING


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:





prOflOw™ II gENErAl grADEHydrophobic PTFE membrane for general purpose gas and solvent purification

0.05µm 0.6gpm/psid(3.29lpm/100mbar)0.10µm 1.2gpm/psid(6.59lpm/100mbar)0.20µm 2.5gpm/psid(13.73lpm/100mbar)0.45µm 5.1gpm/psid(28.00lpm/100mbar)1.00µm 6.2gpm/psid(34.04lpm/100mbar)

42

Specificationsaresubjecttochangewithoutnotification.©2006ParkerHannifinCorporation.ProflowIIisaregisteredtrademarkofParkerHannifinCorporation.ViltonisaregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.CunoisaregisteredtrademarkofCunoInc.

SPEC-3-P-II-GRevH10/06


3 0

CODE DESCRIPTION 1 No Insert 5 (Standard) Encapsulated 6 Stainless Steel Encapsulated Polysulfone A 1/2" Shortened on 222 Fitting

CODE DESCRIPTION 0 DOE (Cuno®) 1 DOE 2 226/Flat 3 222/Flat 6 020/Internal/Flat 7 226/Fin 8 222/Fin® G 120/Internal/ Recessed End cap H 213/Recessed Endcap (Ametek) R 222/Recessed End cap

CODE LENGTH 10 10" (250mm) 20 20" (500mm) 30 30" (750mm) 40 40" (1000mm)

CODE MICRON 925 0.05µm 001 0.10µm 002 0.20µm 004 0.45µm 010 1.00µm

CODE MATERIAL 0 Buna N 1 EPDM 2 Silicone 4 Viton®

5* FEP-Encapsulated Viton 6* FEP-Encapsulated Silicone N None

CODE THICKNESS 1 0.200" (5mm) 2 0.125" (3mm) 4 (1) 0.200" (5mm) & (1) 0.125" (3mm) N No Gasket

G

*O-Rings only

Insert Style

End Fitting

Nominal Length

Filter Rating Gasket/O-Rings GasketsCODE TREATMENT 4 Standard 6 Flushed with 18 Megohm DI Water

Application



0 4 8 12 165

4

3

2

1

00 1 2 3 4 5

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

150

100

50

0

0.05µm

0.10µm0.20µm

0.45µm

1.00µm


SPECIFICATIONS

LETT

ER

A4

Clariflow®-E-SELECTcartridgesdeliverhigh-puritywater,acids,bases,andotheraqueoussolutionsforsemiconductorandmicroelectronicsapplications.Themirrored-anisotropicpolyethersulfone(PES)membraneprovidessuperiorflowrates,extendedon-streamlife,anddemonstratesexcellentchemicalcompatibility(pH4-12).

DuetoitsinnovativeSELECTpleating,performanceisincreasedmarkedlyoversimilarcompetitivecartridges.Onlyoneofeveryfourpleatsextendstothecore,adesignthatplacesmostofthefiltrationareanearertotheouterwall.Thispreventscrowdingofthemediaaroundthecore,whichinstandardpleatedcartridgestendstorestricttheexitingflow.Thisinnovativedesignresultsinhigherflowrates,lowerdifferentialpressures,andlongerlife.

• Highflowratereducesprocessingtimeandallowsforsmallersystemsizes

• Goodchemicalcompatibilityforuseinaqueousapplications• Longerlifereducesthecostoffiltration

• Centralpadandpoint-of-useUPW• Diluteaqueousbasedprocessfluids

Materials of constructionMembrane PolyethersulfoneSupportLayers PolypropyleneStructure Polypropylene

Effective filtration area8.8ft2(0.82m2) 0.02µmporesizeper10”(250mm)cartridge10.3ft2(0.96m2) otherporesizesper10”(250mm)cartridge

Maximum differential pressure/temperatureForward 70psid(5.5bar)@20°C(68°F) 40psid(2.8bar)@82°C(180°F)Reverse 40psid(2.8bar)@20°C(68°F)


Dry-packed <1particles/ml>0.2µmafter6galat1gpmDataasfromopenbagandinstalled,noadditionalinstallationflushing.

resistivity rinse-upResistivityrinse-uptobackgroundminus0.2megohm-cmoffeedafter20gal@1gpm.


*InDIwater.

2 6 2

BENEFITS

APPLICATIONS

43

clArIflOw®-E- sElEcTPolyethersulphone (PES) membrane cartridge with extended surface area

µm TEST PRESSUREpsig bar

FILTER RATING BUBBLE POINT*

0.02 >55 3.8 0.04 >55 3.8 0.10 >55 3.8 0.20 >32 2.2


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:






clArIflOw®-E- sElEcTPolyethersulfone (PES) membrane cartridge with extended surface area


44


Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.ClariflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisaregisteredtrademarksofE.I.DuPontdeNemours&Co.,Inc.

SPEC-CS-SELECTRevD10/06

Insert StyleCODE

15

6

A

DESCRIPTIONNone (Std.)EncapsulatedStainless SteelEncapsulatedPolysulfone1/2" Shortenedon 222 Fitting

End FittingCODE

2378


CS E0

CODE10203040

LENGTH10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

LengthCODE

922924001002

MICRON0.02 m0.04 m0.10 m0.20 m

Filter RatingCODE

1245

6

N

MATERIALEPDMSiliconeViton¨FEP-EncapsulatedVitonFEP-EncapsulatedSiliconeNone

0-Ring

5

4

3

2

1

0

300

200

100

0

0 4 8 12 16 20 24 28

0 2 4 6 8Water Flow Rate (gpm)


Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

0.20µm

0.10µm

0.04µm

0.02µm


SPECIFICATIONS

LETT

ER

A4

TheClariflow®ElectronicsgradecartridgehasbeenoptimizedfortheSemiconductorandElectronicsindustriestofilterhighpuritychemicalsandultrapurewater.Clariflow®’suniquemirrored-anisotropicPolyethersulfone(PES)membranehasexceptionallyhighflowratesandlongon-streamlife,andprovidesconsistentremovalofbothorganicandinorganicparticulates.ThisPESmembraneandall-polypropylenesupportstructureresultsinacartridgewithlowionicandorganicextractables,broadchemicalcompatibilityandahighresistancetohydrolysis,thusminimizingparticleshedding.

Clariflow®isinherentlyhydrophilicandcontainsnoaddedsurfactantsorwettingagents.Eachcartridgeisfabricatedinacleanroomenvironment,pre-flushedwith18megohm-cmultrapuredeionizedwater,and100%integritytestedduringproduction.

• Rapidresistivityrinse-upshortensprocessingtime• Lowdifferentialpressurereducessystemwearandtear• Broadchemicalcompatibilityallowsuseinmostsemiconductor

applications• Effectivecolloidalcontaminantremovalimproveswaferyields• Highflowrateandlongservicelifereduceprocessingtime

• HotdeionizedwaterpadandPOU(lessthan80ºC)• Dilutedaqueous-basedprocessfluids

Materials of constructionMembrane PolyethersulfoneSupportlayers PolypropyleneStructure Polypropylene


6.8ft2(0.63m2)per10”(250mm)cartridges



Drypacked <1particles/ml>0.2µmafter6galat1gpmDataasfromopenbagandinstalled,noadditionalinstallationflushing.

resistivity rinse-upResistivityrinse-uptobackgroundminus0.2megohm-cmoffeedafter20gal@1gpm.


45

clArIflOw® ElEcTrONIcs grADEHigh purity chemical filtration

2 6 1

BENEFITS

APPLICATIONS

FILTERRATING BUBBLE POINT**

µm

0.020.040.100.200.450.650.80

psig

>55>55 28*45301715

bar

3.83.81.9*3.12.11.21.0

**In a 60/40 solution of IPA/ DI Water.*In DI water.


DISTRIBUTED BY:



LETT

ER

A4

DISTRIBUTED BY:






clArIflOw® ElEcTrONIcs grADEHigh purity chemical filtration

0.02µm 0.5gpm/psid(2.75lpm/100mbar)0.04µm 1.0gpm/psid(5.49lpm/100mbar)0.10µm 1.8gpm/psid(9.88lpm/100mbar)0.20µm 3.7gpm/psid(20.31lpm/100mbar)0.45µm 4.8gpm/psid(26.35lpm/100mbar)0.65µm 8.9gpm/psid(48.86lpm/100mbar)0.80µm 9.5gpm/psid(52.16lpm/100mbar)

Specificationsaresubjecttochangewithoutnotification.©2006ParkerHannifinCorporation.ClariflowisaregisteredtrademarkofParkerHannifinCorporation.ViltonisaregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.CunoisaregisteredtrademarkofCunoInc.

SPEC-25ERevK10/06

46

25 0 E

Insert StyleCODE

15

6

A

DESCRIPTIONNone (STD)Encapsulated 316LStainless SteelEncapsulatedPolysulfone1/2" Shortenedon 222 Fitting

End FittingCODE

01

2* 3*6

7* 8*GHR

DESCRIPTIONDOE (CUNO®)DOE226/Flat222/Flat020/Internal/Flat226/Fin222/Fin120/Internal/Recessed Endcap213/Recessed Endcap (Ametek)222/Recessed Endcap

CODE 052

10203040


2 5" cartridges are available in 0.04 through 0.8 m ratings.* 5" cartridges are available in these configurations

Nominal Length

CODE922924001002004006008

MICRON0.02µm0.04µm0.10µm0.20µm0.45µm0.65µm0.80µm

Filter Rating Gasket/O-Rings

CODE124

N

THICKNESS0.200" (5mm)0.125" (3mm)(1) 0.200" (5mm) &(1) 0.125" (3mm)No Gasket

Thickness (Gaskets Only)CODE0124

53

63

N

MATERIALBuna NEPDMSiliconeViton®FEP EncapsulatedVitonFEP EncapsulatedSiliconeNone

3 O-rings only.

Water Flow Rate (lpm)10-inch (250mm) Cartridges


0 5 10 15 20 25 30 356

4

2

00 2 4 6 8 10

0.02µm0.04µm

0.10µm

0.20µm

0.45µm

0.65µm

0.80µm

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

400

300

200

100

0


SPECIFICATIONS

LETT

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Clariflow®Generalgradecartridgesaredesignedforgeneral-purposeuseinthefiltrationofhigh-purityliquidsandaqueouschemicals.

Themirrored-anisotropicPolyethersulfone(PES)membraneisinherentlyhydrophilicandhasaporemorphologythatdeliversexceptionallyhighflowrates.

Becausetherearenoaddedsurfactantsorwettingagents,andthesupportlayersandstructureareall-polypropylene,thefilterexhibitslowextractables,broadchemicalcompatibilityandgoodresistancetohydrolysis.

• Highflowratereducesprocessingtime• Broadchemicalcompatibilityallowsuseinmostapplications• Lowdifferentialpressurereducessystemwearandtear

• Chemicalfiltration• Liquidclarification• Recirculatingfluids• Generalusewaterfiltration• Deionizedwatersystems





clArIflOw® gENErAl grADEHydrophilic Polyethersulfone (PES) membrane for aqueous liquid filtration applications

2 6 3

BENEFITS

APPLICATIONS

47


DISTRIBUTED BY:



LETT

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DISTRIBUTED BY:





clArIflOw® gENErAl grADEHydrophilic Polyethersulfone (PES) membrane for liquid filtration applications


48


SPEC-25GRevI10/06


10-inch (250mm) cartridgeWater Flow Rate (lpm)


0 8 16 24 325

4

3

2

1

00 2 4 6 8 10

0.04 m0.10 m

0.20 m

0.45 m

0.65 & 0.80 m

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

300

200

100

0

End Fitting

25 10 G

Nominal Length Filter Rating Gasket/0-RingsCODE

0123678

DESCRIPTIONDOE (CUNO¨)DOE226/Flat222/Flat020/Internal/Flat226/Fin222/Fin

CODE10203040

LENGTH10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

CODE924001002004006008


CODE01245*

6*

N

MATERIALBuna NEPDM (Standard)SiliconeViton¨FEP-EncapsulatedVitonFEP-EncapsulatedSiliconeNone

CODE124

N

MATERIAL0.200" (5mm)0.125" (3mm)(1) 0.200" (5mm) &(1) 0.125" (3mm)No Gasket

Thickness (Gasket Only)

*O-Rings only


SPECIFICATIONS

LETT

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ClariflowWaterServicegradecartridgesarecost-effectivealternativestoClariflowElectronicsandGeneralgradecartridgesforthefiltrationofavarietyofaqueousliquids.

TheWaterServicecartridgeisbuiltaroundauniquepolyethersulfone(PES)membranethatisinherentlyhydrophilic,andcontainsnoaddedsurfactantsorwettingagents.Assuch,itisknownforcleanfiltrates,andalsoofferscompetitiveflowrates,extendedservicelife,andexcellentresistancetohydrolysis.

WaterServicecartridgesarefabricatedundercleanroomconditions,andeachelectronicsgrade(WE)versionispre-flushedwithdeionizedwaterandintegritytestedbeforeshipment.

• Reliableandcost-effectivetoreduceexpenses• Broadchemicalcompatibilityallowsuseinaqueousapplications• ResistancetohydrolysisallowsextendeduseinUPWsystems• Highflowrate/lowdifferentialpressurereducessystem

wearandtear

• Deionizedwaterfiltration• Chemicalfiltration• Liquidclarification• Recirculatingliquids• Wineandbeerclarification• Juices• Bottledwater




Maximum differential pressureForward 80psid(5.5bar)@75ºF(24ºC) 40psid(2.8bar)@180ºF(82ºC)Reverse 50psid(3.4bar)@75ºF(24ºC)

bulk packagingBulkpackagedincasequantitiestoreducematerialdisposal10” 28percarton20” 12percarton30” 12percarton40” 9percarton

Integrity test valuesElectronicsWEgradeonly

*Ina60/40IPA/DIwater

BENEFITS

APPLICATIONS

clArIflOw® wATEr sErVIcE grADEHydrophilic Polyethersulfone (PES) membrane for cost-effective purification

2 6 6

49

FILTERRATING

MINIMUM WATER BUBBLE POINT

µm barpsig0.040.100.200.45

45*704030

3.14.82.82.1


DISTRIBUTED BY:



LETT

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DISTRIBUTED BY:






SPEC-25WSRevF10/06

50

clArIflOw® wATEr sErVIcE grADEHydrophilic Polyethersulfone (PES) membrane for cost-effective water purification



End FittingsCODE

0123678GHR

DESCRIPTIONDOE (CUNO¨)DOE226\Flat222\Flat020/Internal/Flat226\Fin222\Fin120/Internal/RecessedEnd cap 213/RecessedEnd cap (Ametek)222/Recessed End cap

Insert StyleCODE

1

5

6

A

DESCRIPTIONNo Insert (standard)Encapsulated316 SS InsertEncapsulatedPolysulfone Insert1/2" Shortenedon 222 Fitting

Thickness(Gaskets Only)

CODE124

N

THICKNESS0.200" (5mm)0.125" (3mm)(1) 0.200" (5mm) &(1) 0.125" (3mm)None

Gasket/O-RingsCODE

01245*

6*

N

MATERIALBuna NEPDMSiliconeViton¨EncapsulatedVitonEncapsulatedSiliconeNone

GradeCODE

E

G

SPECIFICATIONElectronics(Preflushedand Testable)General

Nominal LengthCODE

10203040

LENGTH10" (250mm)20" (500mm)30" (750mm)40" (1,000mm)

25 0 W

Filter RatingCODE

924001002004006

MICRON0.04µm0.10µm0.20µm0.45µm0.65µm

All cartridges are 2.75" (690 mm) in diameter.

*O-rings only

10-inch (250mm) CartridgesWater Flow Rate (lpm)


0 8 16 24 325

4

3

2

1

0

300

200

100

00 2 4 6 8 10

0.04µm

0.45µm

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

0.10µm

0.20µm* Per 10-inch (250 mm) cartrdige equivalent and for fluids with viscosity of 1cP.

SPECIFICATIONS

LETT

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SPECIFICATIONS

2 2 5

pOlyflOw® MEMbrANE-sElEcT Polypropylene membrane cartridge with extended surface area

Polyflow®Membrane-SELECTcartridgespurifyhigh-puritysolventsandchemicalsforsemiconductorandmicroelectronicsapplications.Theall-polypropyleneconstructionisanexcellent,economicalternativetofluoropolymer-basedcartridgesformanychemicals.Itensuresthehighlyefficientremovalofparticulatethatcouldimpactprocessquality.

DuetoitsinnovativeSELECTPleating,performanceisincreasedmarkedlyoversimilarcompetitivecartridges.Onlyoneofeveryfourpleatsextendstothecore,adesignthatplacesmostofthefiltrationareanearertotheouterwall.Thispreventscrowdingofthemediaaroundthecore,whichinstandardpleatedcartridgestendstorestricttheexitingflow.Thisinnovativedesignresultsinhigherflowrates,lowerdifferentialpressuresandlongerlife.

Polyflowcartridgesaremanufacturedinacertifiedcleanroomwheretheyareflushedwithnon-pyrogenicdeionizedwaterand100%integritytestedtoprovidecompleteproducttraceability.

• Highflowratereducesprocessingtimeandallowsforsmallersystemsizes

• Lowextractablesshortenstart-uptime• Excellentchemicalcompatibilityforuseinmostapplications• Longerlifereducesthecostoffiltration

• Etchants/solvents• Photoresists/diluteacidsandbases• Developers• Bulkchemicaldeliverysystems• Residueremovers

Materials of constructionMembrane PolypropyleneSupportlayers PolypropyleneStructure Polypropylene

Effective filtration area11.5ft²(1.07m²) 0.04poresizeper10”(250mm)cartridge8.4ft2(0.78m2) 0.07poresizeper10”(250mm)cartridge*10.1ft2(0.94m2) 0.10poresizeper10”(250mm)cartridge9.8ft2(0.88m2) 0.20poresizeper10”(250mm)cartridge*doublelayersofmembrane

Metals extractable<50ppb(total) ina10%HNO3extractionof1.5liters for24hoursatambienttemperature

Maximum differential pressure/temperatureForward 70psid(4.8bar)@68°F(20°C)* 40psid(2.8bar)@158°F(70°C)Reverse 30psid(2.1bar)@68°F(20°C)*60psid(4.1Bar)@68ºFfor0.04µm

cleanliness (particle shedding)Wet-packed <1particles/ml>0.2µmafter10galat1gpmDataasfromopenbagandinstalled,noadditionalinstallationflushing.



*Ina60/40IPA/DIwater.

MINIMUM BUBBLEPOINT*

FILTERRATING

0.040.070.100.20

psig µm bar4025169

2.81.71.10.6

APPLICATIONS

BENEFITS

51


DISTRIBUTED BY:



LETT

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DISTRIBUTED BY:





pOlyflOw® MEMbrANE-sElEcT Polypropylene membrane cartridge with extended surface area


52

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.PolyflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisaregisteredtrademarksofE.I.DuPontdeNemours&Co.,Inc.

SPEC-PMS-SELECTRevD10/06

Each cartridge is identified with a product number, pore size and lot number for traceability.

End FittingCODE

2378


Insert StyleCODE

15

6

A

DESCRIPTIONNo Insert (Std.)EncapsulatedStainless SteelEncapsulatedPolysulfone1/2" Shortenedon 222 Fitting

O-RingsCODE

01245

N

MATERIALBunaEPDMSiliconeViton®FEP-EncapsulatedViton®None

LengthCODE

10203040

LENGTH10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

MS E0

Filter RatingCODE

924001002101


OptionsCODEBlank

W

TREADStandardWet Pack

Per 10-inch (250mm) CartridgeWater Flow Rate (lpm)


0 8 16 248

6

4

2

0

500

400

300

200

100

00 2 4 6 8

0.10 m

0.20 m Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid) 0.04 m

0.07 m


SPECIFICATIONS

LETT

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SPECIFICATIONS

pOlyflOw® MEMbrANEPolypropylene membrane cartridge filter for general chemical purification

Polyflow®Membranecartridgesarecomprisedofpleated,hydrophobicpolypropylenemembranewithpolypropylenesupportlayersandhardware.Thistotalpolypropyleneconstructionprovidesawiderangeofbenefitsincluding:broadchemicalcompatibility,outstandingthermalstability,andisanexcellenthydrophobicbarrier.Polyflow®Membranecartridgesareareliablechoiceforthepurificationofaggressivechemicals,compressedgases,andforventapplications.Thesecartridgeshavebeenmanufacturedtomaximizeparticleloadingcapacityandremovalefficiencies,whileofferingincreasedflowratesandlowerdifferentialpressures.Productreliabilityisensuredbymanufacturingtomicroelectronicsprocessingqualitystandards.

• Highflowratesreduceprocessingtime• Broadchemicalcompatibilityallowsuseinwiderangeof

applications• Excellenthydrophobicityallowsforuseinventing/gasfiltration

applications• 100%integritytestedpriortoshipmenttoensurequality

• Rinses/etchants/solvents/developers• Acidetchbenches• Photoresistfiltration• Photomaskchemicals• Diluteacidsandbases• Cleancompressedairandgases• Bulkchemicals

–Drumfilling –Bottlepackaging –Tankcarfilling

• Photoresistresidueremovers

Materials of constructionMembrane PolypropyleneSupportlayers PolypropyleneStructure Polypropylene

Effective filtration area 7.7ft2(0.72m2) 0.04poresizeper10”(250mm)cartridge6.6ft2(0.61m2) 0.07poresizeper10”(250mm)cartridge*7.7ft2(0.72m2) 0.1poresizeper10”(250mm)cartridge7.7ft2(0.72m2) 0.2poresizeper10”(250mm)cartridge*doublelayersofmembrane


Maximum differential pressure/temperatureForward 80psid(5.5bar)@75°F(24°C)* 40psid(2.8bar)@180°F(82°C)Reverse 40psid(2.8bar)@75°F(24°C)*60psid(4.1Bar)@75°Ffor0.04µm


Wet-packed <1particles/ml>0.2µmafter10galat1gpmDatafrombagopenandinstalled,noadditionalinstallationflushing.


Integrity test valuesMINIMUM BUBBLE

POINT*FILTERRATING

0.040.070.100.20

psig µm bar4025169

2.81.71.10.6

*Ina60/40IPA/DIwater.

APPLICATIONS

BENEFITS

53

2 2 4


DISTRIBUTED BY:



LETT

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DISTRIBUTED BY:




water in flow rates, Typical * 0.04µm 0.41gpm/psid(2.2lpm/100mbar)0.07µm 0.35gpm/psid(1.9lpm/100mbar)0.10µm 0.7gpm/psid(3.8lpm/100mbar)0.20µm 1.8gpm/psid(10.3lpm/100mbar)

pOlyflOw® MEMbrANEPolypropylene membrane cartridge filter for general chemical purification

54

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.PolyflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisaregisteredtrademarksofE.I.DuPontdeNemours&Co.,Inc.CunoisaregisteredtrademarksofCuno,Inc.

SPEC-24-PMRevI10/06


10-inch (250mm) cartridgeWater Flow Rate (lpm)


0 5 10 15 20 25 308

6

4

2

0

500

400

300

200

100

00 2 4 6 8

0.10 m

0.20 m

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

0.04 m0.07 m

End FittingCODE

012378

DESCRIPTIONDOE (CUNO®)DOE226\Flat222\Flat226\Fin222\Fin

Insert StyleCODE

1

5

6

A

DESCRIPTIONNo Insert(Standard)EncapsulatedStainless SteelEncapsulatedPolysulfone1/2" Shortenedon 222 Fitting


CODE124

N

THICKNESS0.200" (5mm)0.125" (3mm)(1) 0.200" (5mm) &(1) 0.125" (3mm)None

Gasket/O-RingsCODE

01245*

N

MATERIALBuna NEPDMSiliconeViton®FEP-EncapsulatedVitonNone

Nominal LengthCODE

10203040

LENGTH10" (250mm)20" (500mm)30" (750mm)40" (1000mm)

24 0

Filter RatingCODE

924001002101


OptionsCODEBlankEW

TREATStandardWet Packed

* O-rings only


LETT

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DEPTH CARTRIDGES

LETT

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SPECIFICATIONS

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Polyflow®’srandomfiberpolypropylenedepthmediaprovideslongon-streamlifeandhighretentionefficiencies.Whilemanypolypropylenedepthmediaarenominallyratedandcannotmeettheiractualclaimedretentionefficiency,Polyflow®hasbeenengineeredtomeetexactingperformanceclaims.ParkerHannifin’sinnovativeresearchteamdevelopedanexclusivecalenderingprocessthatproducesmediawithunsurpasseddirt-loadingcapacity.Beforeeachlotofmediaisfabricated,thebestcalenderingconditionsaredeterminedtoensureminimallot-to-lotvariabilityandpeakproductperformance.Thenumberofpleatsforeachfilterratinghasalsobeenoptimizedtoensuremaximumdirt-loadingcapacityandon-streamlife.Polyflow®isthermallybondedfrom100%virginpolypropylenetoensuresuperiorcleanlinessandexcellentchemicalandthermalcompatibilityunderharshprocessingconditions.

• Lowextractables• Absoluteparticleretentionprovidesexcellentprotectionfor

downstreamfilters• Broadchemicalcompatibilityallowsuseinmostapplications• Highflowrate/longservicelifereducesprocessingtime• Non-pyrogenicforuseinpharmaceuticalapplications

• Solventclarification• Recirculatingliquids• Generalwaterfiltration• Beverage/wineclarification• Reagentgradechemicals• RO/DIpre-filtration• Wastewater

Materials of constructionDepthmedia PolypropyleneSupportlayers PolypropyleneStructure Polypropylene


filtration efficiency

cartridge extractablesNVR<35mgper10”(250mm)cartridge

Maximum differential pressure/temperatureForward 80psid(5.5bar)@75°F(24°C)Reverse 40psid(2.8bar)@75°F(24°C) 15psid(1.0bar)@140°F(60°C)


160°F(71°C)

pOlyflOw®

Pleated polypropylene absolute-rated depth cartridges with superior dirt-holding capacity

2 2 3

57

APPLICATIONS

BENEFITS

The0.6µmofferstypicalretentionupto99%efficient.1.2µm,2.5µm,5µm,10µm,20µm,and40µmareupto99.9%efficientatspecifiedporesize.


DISTRIBUTED BY:



LETT

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DISTRIBUTED BY:






pOlyflOw®

Pleated polypropylene absolute rated depth with superior dirt-holding capacity

58

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.PolyflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.CunoisaregisteredtrademarkofCunoInc.

SPEC-22-PRevI10/06


Insert StyleCODE

15

6

A

DESCRIPTIONNone (STD)Encapsulated 316LStainless SteelEncapsulatedPolysulfoneShortened 222 1/2"

22

CODE0510203040


Nominal LengthCODE

006012025050100200400


Filter Rating

THICKNESS0.200" (5mm)0.125" (3mm)(1) 0.200" (5mm) &(1) 0.125" (3mm)No Gasket


CODE124

N

0

CODE0123678G

H

R

DESCRIPTIONDOE (CUNO¨)DOE226/Flat222/Flat020/Internal/Flat226/Fin222/Fin120/Internal/RecessedEndcap213/Recessed Endcap(Ametek)222/Recessed Endcap

End FittingCODE

0124

5*

6*

N

MATERIALBuna NEPDMSiliconeViton®FEP EncapsulatedVitonFEP EncapsulatedSiliconeNone

Gasket/O-Rings

*O-rings only

0.6µm 4.2gpm/psid(23.3lpm/100mbar)1.2µm 5.0gpm/psid(27.4lpm/100mbar)2.5µm 13.5gpm/psid(74.1lpm/100mbar)5.0µm 26.0gpm/psid(142.7lpm/100mbar)10.0µm 40.0gpm/psid(219.6lpm/100mbar)20.0µm 50.0gpm/psid(274.4lpm/100mbar)40.0µm 60.0gpm/psid(329.3lpm/100mbar)

0 4 8 12 16 20 24 281.2

1.0

0.8

0.6

0.4

0.2

0.0

80

70

60

50

40

30

20

10

00 1 2 3 4 5 6 7 8

10-inch (250mm) CartridgesWater Flow Rate (lpm)


Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

0.6µm 1.2µm

2.5µm

5.0µm

40.0µm

10.0µm20.0µm


SPECIFICATIONS

LETT

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2 2 6

Polyflow®-G depth media has been developed for a wide variety of general process applications from fluid clarification to general prefiltration. Its high dirt-loading, random-fiber polypropylene depth media provides consistent particle retention. Polyflow®-G is thermally bonded from 100% virgin polypropylene to ensure clean filtrates and excellent chemical and thermal compatibility in the most demanding processing conditions.

Polyflow®-G leads in overall reduction of filtration costs when compared to spunbonded, stringwound, and nominally-rated pleated prefilter cartridges. Its longer filtration life reduces downtime due to fewer change-outs.

• High flow rate and long service life reduce processing time• Broad chemical compatibility allows use in most applications• Thermally bonded construction minimizes extractables for cleaner filtrates

• Solvent filtration• Liquid clarification• Recirculating liquids• General water filtration• Reagent grade chemicals• Beverage/wine clarification• RO/DI prefiltration• Waste water• CMP• Residue removal

Materials of constructionDepth media PolypropyleneSupport layers PolypropyleneStructure Polypropylene

All components are thermally bonded to ensure integrity and to reduce extractables.

Nominal Filter Ratings

0.2µm, 0.5µm, 1µm, 3µm, 10µm, and 30µm


3.6ft2 (0.33m2) per 10” (250mm) cartridge

Cartridge extractables

NVR < 35mg per 10” (250mm) cartridge

Biological safetyAll components meet USP specifications for Class VI-121˚C Plastics criteria.

Maximum differential pressure/temperatureForward 80psid (5.5bar) @ 75˚F (24˚C)Reverse 40psid (2.8bar) @ 75˚F (24˚C) 15psid (1.0bar) @ 140˚F (60˚C)


160˚F (71˚C)

POLYFLOW®-GAll-polypropylene nominal rated depth cartridges for economical prefiltration

59

APPLICATIONS

BENEFITS


DISTRIBUTED BY:



LETT

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DISTRIBUTED BY:

Process Advanced Filtration Division2340 Eastman AvenueOxnard, California, 93030, USA Toll Free: +1 877 784 2234 Phone: +1 805 604 3400 Fax: +1 805 604 3401 www.parker.com

Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.

Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

Water in Flow Rates, Typical *


60

Specifications are subject to change without notification© 2006 Parker Hannifin Corporation.Polyflow is a registered trademark of Parker Hannifin Corporation.Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc.

SPEC -PG Rev G 10/06

POLYFLOW®-GAll-polypropylene nominal-rated depth cartridges for economical prefiltration


End FittingStyleCODE DESCRIPTION CODE

0123678GHR

DESCRIPTIONDOE (CUNO®)DOE226/Flat222/Flat020/Internal/Flat226/Fin222/Fin120/Internal/Recessed End cap213/RecessedEnd cap (Ametek)222/Recessed End cap

PG

CODE0510203040


Nominal LengthCODE

002005010030050100300


Filter RatingCODE

124

N

DESCRIPTION0.200" (5mm)0.125" (3mm)(1) 0.200" (5mm) &(1) 0.125" (3mm)None

Gasket Thickness

0

CODE0

1245*

6*

N

MATERIALBuna N(Standard)EPDMSiliconeViton®FEP EncapsulatedViton®FEP EncapsulatedSiliconeNone

Gasket/O-Rings

*O-Rings only

None1/2" Shortenedon 222 Fitting

1A

0.2µm 4.2gpm/psid (23.3lpm/100mbar)0.5µm 11.0gpm/psid (60.4lpm/100mbar) 1.0µm 33.0gpm/psid (181.1lpm/100mbar)3.0µm 70.0gpm/psid (384.2lpm/100mbar)5.0µm 70.0gpm/psid (384.2lpm/100mbar)10.0µm 70.0gpm/psid (384.2lpm/100mbar)30.0µm 70.0gpm/psid (384.2lpm/100mbar)



0 4 8 12 16 20 24 281.2

1

0.8

0.6

0.4

0.2

0

80

60

40

20

00 1 2 3 4 5 6 7 8

0.2µm

1.0µm Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

0.5µm

3, 5, 10 & 30µm


LETT

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MINI CARTRIDGES

LETT

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SPECIFICATIONS

LETT

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SPECIFICATIONS

Proflow™II-Emini-cartridgesremoveimpuritiesandparticlesfromgasesandliquidsinmicroelectronicsapplications.Theyofferexcellentflowrates,alongwithgoodchemicalcompatibilityforgreaterversatilityinawidevarietyofapplications.

Proflow™II-Emini-cartridgesareavailableinpopularbatchsizesandminimizehold-upvolume.Costsavingsresultfromthereductionoflostproduct,andbyscalingtheprocessproperlytoavoidwastingexcessfiltercapacity.

Theendfittingforthesemini-cartridgesensuresasecuresealwithaninternal–116O-ringthatisavailableinseveralmaterialstosuitvariousapplicationdemands.

• Lowextractablesshortenstart-uptime• Excellentflowratesforgreaterprocessefficiency• Broadchemicalcompatibilityallowsusewithmost

semiconductorfluids• End-fittingprovidesasecureO-ringseal(-116)availableina

numberofmaterialchoices• Lowhold-upvolume

• POUpurificationofsolvents/acids/bases/etchingsolutions• Photomasksolutions• Photoresists• Waferdryingsystems• Wetbenches


Effective filtration area3.1ft2(0.29m2)perD-size(125mm)cartridge

Maximum differential pressure/temperatureForward 70psid(4.8bar)@75ºF(24ºC) 35psid(2.4bar)@140ºF(60ºC) 20psid(1.4bar)@167ºF(75ºC)Reverse 30psid(2.1bar)@75ºF(24ºC)

resistivity rinse-upTherinse-upvolumerequiredforProflow-E®mini-cartridgestoreach18megohm-cmresistivityisapproximately12gal(45.4liters).


*In60/40IPA/DIwater

3 4 6

prOflOw™ II-E MINI-cArTrIDgEsA Small-volume PTFE filter for microelectronics applications

63

APPLICATIONS

BENEFITS


µm

0.100.20

bar

1.50.9

*Tested in 60/40 IPA/water @ 25°C

psig

>21>13


DISTRIBUTED BY:



LETT

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DISTRIBUTED BY:




water in flow rates, Typical * Water Flow Rate (lpm)


0 4 8 12 165

4

3

2

1

00 1 2 3 4 5

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

300

200

100

0

0.20µm

0.10µm

34 E M MM D

CODE 001002

MICRON0.1µm 0.2µm

Filter Rating

CODE01 2 4 N

MATERIALBuna NEPDMSiliconeViton®None

0-Ring

prOflOw™ II-E MINI-cArTrIDgEsSmall-volume PTFE filter for microelectronics applications

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.PolyflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.

SPEC-34E-MCRevF10/06

64


PERFORMANCE ATTRIBUTES D-size(250mm)Mini-Cartridge

* for fluids with viscosity of 1cP.

SPECIFICATIONS

LETT

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SPECIFICATIONS

Clariflow®-Emini-cartridgesdeliverhigh-puritywaterandsolventsinsemiconductorandmicroelectronicsapplications.Themirroredanisotropicpolyethersulfone(PES)membraneprovidessuperiorfluidflowrates,extendedon-streamlife,andhighlyefficientremovaloforganicandinorganicparticulatesthatcanimpactprocessquality.

Themini-cartridgesmatchcommonbatchsizesandminimizehold-upvolume.Costsavingsresultfromthereductionoflostproduct,andbyscalingtheprocessproperlytoavoidwastingexcessfiltercapacity.

• Lowextractablesshortenstart-uptime• Highflowratereducesprocessingtime• Lowdifferentialpressurereducessystemwearandtear• Goodchemicalcompatibilityforuseinwiderangeofapplications• End-fittingprovidesasecureO-ringseal(-116)availableina

numberofmaterials• Lowhold-upvolume

• Deionizedwateratpoint-of-use• Aqueousprocessingfluids

Materials of constructionMembrane PolyethersulfoneSupportLayers PolypropyleneStructure Polypropylene


2.5ft2(0.23m2)perD-size(125mm)cartridge



clArIflOw® -E MINI-cArTrIDgEsSmall volume PES membrane filters for microelectronics applications

2 5 7

65

APPLICATIONS

BENEFITS

FILTERRATING


µm

0.10

0.20

70

45

4.8

3.1

psig bar

*Integrity test values are for filters wetted with DI water.


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clArIflOw® -E MINI-cArTrIDgEsSmall-volume PES membrane filters for microelectronics applications

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.ClariflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.

SPEC-25E-MCRevF10/06


66



0 4 8 12 165

4

3

2

1

00 1 2 3 4 5

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

300

200

100

0

0.20µm

0.10µm


25 E M MM D

CODE001002

MICRON0.1µm0.2µm

Filter RatingCODE

0124N

MATERIALBuna NEPDMSiliconeViton¨None

0-Ring

D-size(250mm)Mini-Cartridge


SPECIFICATIONS

LETT

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SPECIFICATIONS

Polyflow®Mini-cartridgesfeaturearandom-fiberpolypropylenedepthmatrixthatprovidessuperiorretentionefficiencies.Inaddition,theuniquecalenderingprocessproducesdepthmediawithunsurpasseddirt-holdingcapacitythusextendingservicelife.Longerproductlifeleadstoincreasedsavingsbyrequiringfewerfilterchange-outs.

Polyflow®Mini-cartridgesmatchpopularbatchsizesandminimizehold-upvolume.Costsavingsresultfromreductionoflostproductandbyscalingtheprocessproperlytoavoidwastingexcessfiltercapacity.

• Highflowratereducesprocessingtime• Longservicelifeminimizeschange-outfrequency• Broadchemicalcompatibilityenablesuseinarangeof

applications• Highretentionefficiencyprovidesexcellentprotectionfor

downstreamfilters• Non-pyrogenic(perLALtest)foruseincriticalapplications• End-fittingprovidesasecureO-ringseal(-116)availableina

numberofmaterials• Lowhold-upvolume

• Solventandreagentgradechemicals• LabscaleRO/DIprefiltration• Recirculatingliquids• Generalwaterfiltration• Ventfiltration

Materials of constructionDepthMedia PolypropyleneSupportLayers PolypropyleneStructure Polypropylene

Effective filtration areas0.9ft2(0.08m2)per5”(125mm)cartridge1.6ft2(0.15m2)per5”(125mm)cartridge2.0ft2(0.19m2)per5”(125mm)cartridge2.1ft2(0.20m2)per5”(125mm)cartridge

filtration efficiencyThe0.6µmofferstypicalretentionefficiencyofupto97-99%.1.2µm,2.5µm,5.0µm,and10.0µmare99.9%efficientatthestipulatedporesize.

cartridge extractables

NVR<3mgper10”(250mm)cartridge


67

pOlyflOw® MINI-cArTrIDgEsSmall-volume filters with polypropylene depth matrix for prefiltration applications

2 2 2

APPLICATIONS

BENEFITS


DISTRIBUTED BY:



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DISTRIBUTED BY:





pOlyflOw® MINI-cArTrIDgEsSmall-volume filters with polypropylene depth matrix for prefiltration applications


Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.PolyflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.

SPEC-22-MCRevG10/06

68

NOMINALEFA

TYPICALWATER FLOW RATE*

TYPICALAIR FLOW RATE

ft2 cm2

0.9 836 1.0 5.5 7.6 18.8

1.6 1486 2.1 11.5 12.0 24.0

2.0 1858 3.3 18.1 15.4 38.1

2.1 1950 6.0 32.9 20.0 49.5

2.1 1950 6.5 35.7 26.6 65.7

gpm/psid lpm/100mbar scfm/psid Nm3/hr/100mbar

FILTERRATING

0.60µm

1.20µm

2.50µm

5.00µm

10.00µm

*For fluids with viscosity of 1cP.

22 EM D M M

CODE006012025050100


Filter RatingCODE

01246N

MATERIALBuna NEPDMSiliconeViton®FEP Encap SilconeNone

0-Ring

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MINI CAPSULES

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SPECIFICATIONS

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SPECIFICATIONS

Proflow™II-Ecapsulesaredesignedtoremoveimpuritiesandparticlesfromgasesandliquidsinmicroelectronicsapplications.Theyofferexcellentflowrates,withgoodchemicalcompatibility,offeringgreatversatilityinawidevarietyofapplications.Proflow™II-Ecapsulesareavailableinthreesizes,allowinguserstomatchthefilterstobatchsizeandminimizeliquidhold-upvolume.Costsavingsresultfromthereductionoflostproductandbyscalingtheprocessproperlytoavoidwastingexcessfiltercapacity.Theencapsulateddesignmaximizesefficiencybyprovidingfaster,easierchange-outwithoutlaboriouscleaningprocedures.Eliminatingtheneedtoopenreusablehousingsforcapsulereplacementminimizesthechanceofintroducingcontaminationintotheprocess,andpromotessafetybyreducingtheriskofexposuretopotentiallyhazardousfluids.

• Excellentflowratesforgreaterprocessefficiency• Allcapsulesare100%integritytestedforreliableproduct

performance• Encapsulateddesignreducesdowntimeandchanceof

contamination• Widevarietyoffiltersizesandfittingstomeetanysystem

requirement• Customorderingoptionallowsdifferentinlet/outletfittingsfor

specificneeds• Improvedventdesignpreventsventcapsfromdisconnecting

underpressure

• POUpurificationofsolvents/acids/bases/etchingsolutions• Photomasksolutions• Photoresists• Waferdryingsystems• Wettoolbenches


Membrane PTFESupportLayers PolypropyleneStructure PolypropyleneHousing PolypropyleneAllcomponentsarethermallybondedtoensureintegrityandminimizeextractables.

Effective filtration areaH=Half-size 1.1ft2(0.10m2)per4.82”(122mm)capsuleS=Standard-size 2.2ft2(0.21m2)per6.38”(162mm)capsuleD=Double-size 3.1ft2(0.29m2)per7.92”(201mm)capsule


resistivity rinse-upTherinse-upvolumerequiredfordouble-sizeProflow-E™capsulestoreach18megohm-cmresistivityisapproximately12gal(45.4liters).


71

prOflOw™ II-E MINI-cApsulEsEncapsulated PTFE filter for small-volume microelectronics applications

3 4 3

APPLICATIONS

BENEFITS FILTER RATING


µm

0.100.20

psig

2113

bar

1.40.9

*In a 60/40 IPA/DI water


DISTRIBUTED BY:



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DISTRIBUTED BY:





Size

CODEHSD

DESCRIPTIONHalf SizeStandard SizeDouble Size

34 EC

CODEBHSDPJKG

LENGTH1/4" Hose Barb1/2" Hose Barb1 1/2" Sanitary FlangeQuick Disconnect1/4" NPT (Male)1/2" NPT (Male)3/8" NPT (Female)Swagelok¨ 1/2"

* Select code for both Inlet and Outlet

Inlet/Outlet

CODE001002

MICRON0.10 m0.20 m

Filter Rating

CODE0124N

MATERIALBuna NEPDMSiliconeViton¨None

Vent 0-Ring


prOflOw™ II-E MINI-cApsulEsEncapsulated PTFE filters for small-volume microelectronics applications

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.PolyflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.SwagelokisaregisteredtrademarkofTheCrawfordFittingCompany.

SPEC-34CAPS-ERevE10/06

72



0 4 8 125

4

3

2

1

00 1 2 3 4

Half

Standard

Double

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

300

200

100

0



0 4 8 12 165

4

3

2

1

00 1 2 3 4 5

HalfStandard

Double

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

300

200

100

0

0.10µm Proflow II-E 0.20µm Proflow II-E* for fluids with viscosity of 1cP.

SPECIFICATIONS

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SPECIFICATIONS

Clariflow®-Ecapsulesfilterhigh-qualitywaterandsolventsinsemiconductorandmicroelectronicsapplications.Themirroredanisotropicpolyethersulfone(PES)membraneprovidessuperiorfluidflowrates,extendedon-streamlife,andhighlyefficientremovaloforganicandinorganicparticulatesthatcanimpactprocessquality.Clariflow-Ecapsulesareavailableinavarietyofsizesandend-fittingcombinationsenablingusersselectthebestconfigurationfortheirsystemrequirements.Theencapsulateddesignmaximizesefficiencybyprovidingfaster,easierchange-outwithoutlaboriouscleaningprocedures.Eliminatingtheneedtoopenreusablehousingsforcartridgereplacementminimizesthechanceofintroducingcontaminationintotheprocess,andpromotessafetybyreducingtheriskofexposuretopotentiallyhazardousfluids.

• Reduceprocessdowntime,chanceofcontaminationandriskofexposuretohazardousmaterials

• Lowextractablesshortenstart-uptime• Highflowratereducesprocessingtime• Improveddesignpreventsventcapsfromdisconnectingunder

pressure

• Deionizedwateratpoint-of-use• Aqueouschemicalfluids

Materials of constructionMembrane PolyethersulfoneSupportlayers PolypropyleneStructure PolypropyleneHousing Polypropylene


Effective filtration areaH=Half-size 0.9ft2(0.08m2)per4.82”(122mm)capsuleS=Standard-size 1.8ft2(0.16m2)per6.38”(162mm)capsuleD=Double-size 2.5ft2(0.23.m2)per7.92”(201mm)capsule


resistivity rinse-upTherinse-upvolumerequiredfordouble-sizeClariflow®-Ecapsulestoreach18megohm-cmresistivityisapproximately12gal(45.4liters).


clArIflOw® -E MINI-cApsulEsEncapsulated PES membrane filters for microelectronics applications

2 5 3

73

APPLICATIONS

BENEFITSµm psig bar

FILTERRATING


0.10 70 4.80.20 45 3.1

*Wetted with DI water


DISTRIBUTED BY:



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DISTRIBUTED BY:





74

clArIflOw™-E MINI-cApsulEsEncapsulated PES membrane filters for microelectronics applications


Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporation.ClariflowisaregisteredtrademarkofParkerHannifinCorporation.VitonisregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.SwagelokisaregisteredtrademarkofTheCrawfordFittingCompany.

SPEC-25CAPSERevK10/06

4

3

2

1

0

250

200

150

100

50

0

0 4 8 12

0 1 2Water Flow Rate (gpm)

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

3 4

0.10µm Clariflow-E Water Flow Rate (lpm)

*With 1.5 inch sanitary flange inlet / outlet fittings

Half

Standard

Double

4

3

2

1

0

250

200

150

100

50

0

0 4 8 12

0 1 2Water Flow Rate (gpm)

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

3 4

0.20µm Clariflow-E Water Flow Rate (lpm)

Half

Standard

Double

*With 1.5 inch sanitary flange inlet / outlet fittings

SizeCODE

HSD

DESCRIPTIONHalf Size Standard SizeDouble Size

25 C E

CODEBHSDPJKG

FITTING1/4" Hose Barb1/2" Hose Barb1 1/2" Sanitary FlangeQuick Disconnect1/4" NPT (Male)1/2" NPT (Male)3/8" NPT (Female)Swagelok¨ 1/2"

Inlet/OutletCODE

001002

MICRON0.10 m0.20 m

Filter RatingCODE

0124NZ

MATERIALBuna NEPDMSiliconeViton®NoneNo Vents

Vent 0-Ring


SPECIFICATIONS

LETT

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SPECIFICATIONS

Polyflow®Capsulesfeaturearandom-fiberpolypropylenedepthmatrixthatprovidessuperiorretentionefficiencies.Inaddition,theuniquecalenderingprocessproducesdepthmediawithunsurpasseddirt-holdingcapacitythatextendsfilterservicelife.Longerlifeleadstoincreasedsavingsbyrequiringfewerfilterchange-outs.Polyflow®capsulesareavailableinthreesizes,enablinguserstomatchthefilterstoactualbatchsizesandminimizethehold-upvolume.Costsavingsresultfromthereductionoflostproduct,andbyscalingtheprocessproperlytoavoidwastingexcessfiltercapacity.Theencapsulateddesignmaximizesefficiencybyprovidingfaster,easierchange-outwithoutlaboriouscleaningprocedures.Eliminatingtheneedtoopenreusablehousingsforcartridgereplacementminimizesthechanceofintroducingcontaminationintotheprocess,andpromotessafetybyreducingtheriskofexposuretopotentiallyhazardousfluids.

• Highflowratereducesprocessingtime• Longservicelifeminimizeschangeoutfrequency• Broadchemicalcompatibilityenablesuseinmostapplications• Highretentionefficiencyprovidesexcellentprotectionfor

downstreamfilters• Non-pyrogenic(perLALtest)foruseincriticalapplications• Customorderingoptionallowsdifferentinlet/outletfittingsfor

specificneeds

• Solventandreagentgradechemicals• LabscaleRO/DIpre-filtration• Recirculatingliquids• Generalwaterfiltration• Ventfiltration

Materials of constructionDepthmedia PolypropyleneSupportlayers PolypropyleneStructure PolypropyleneHousing Polypropylene

AllcomponentsmeetUSP-XXIVClassVI-121°Ccriteria,andarethermallybondedtoensureintegrityandreduceextractables.

Effective filtration areas

Seereversesidefordetails

filtration efficiency1.2µm,2.5µm,5.0µm,and10.0µmare99.9%efficientatthestipulatedporesize.The0.6µmcapsuleofferstypicalretentionefficiencyofupto97-99%.

cartridge extractablesNVR<3mgper10”(250mm)capsule

Autoclavable and sanitizableMaybeautoclavedforupto25cyclesat275°F(135°C),orsanitizedusingmostcommoncleaningagents.


Forward 70psid(4.8bar)@75ºF(24ºC) 35psid(2.4bar)@140ºF(60ºC) 20psid(1.4bar)@167ºF(75ºC)Reverse 30psid(2.1bar)@75ºF(24ºC)

pOlyflOw® MINI-cApsulEsEncapsulated filters with polypropylene depth matrix for small-volume prefiltration applications

2 2 1

75

APPLICATIONS

BENEFITS


DISTRIBUTED BY:



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DISTRIBUTED BY:





76

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporationClariflowisaregisteredtrademarkofParkerHannifinCorporationVitonisregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.SwagelokisaregisteredtrademarkofTheCrawfordFittingCompany.

SPEC-22CAPSRevK10/06

pOlyflOw® MINI-cApsulEsEncapsulated filters with polypropylene depth matrix for small-volume prefiltration applications


SizeCODE

HSD

DESCRIPTIONHalf SizeStandard SizeDouble Size

22 C

CODE006012025050100

CODEBHSDPJKG

END FITTING1/4" Hose Barb1/2" Hose Barb1-1/2" Sanitary FlangeQuick-Disconnect1/4" NPT (Male)1/2" NPT (Male)3/8" NPT (Female)Swagelok¨ 1/2"


Filter RatingInlet / Outlet

CODE0124NZ

MATERIALBuna NEPDMSiliconeViton®NoneNo Vents

Vent 0-RingStyleCODE

BE

DESCRIPTIONBiologicalElectronics

FILTERRATING

CAPSULESIZE

NOMINALEFA

TYPICALWATER FLOW RATE*

TYPICALAIR FLOW RATE

0.6µm

ft2 cm2

HalfStandard

Double

0.40.70.9

371650836

0.40.81.0

2.24.45.5

3.45.97.6

8.414.618.8

0.61.11.6

37110211486

0.81.42.1

4.47.711.5

4.58.3

12.0

11.120.524.0

0.81.52.0

74313931858

1.32.53.3

7.113.718.1

6.211.615.4

15.328.738.1

0.81.62.1

74314861950

2.34.56.0

12.624.732.9

7.615.220.0

18.837.649.5

0.91.62.1

83614861950

2.85.06.5

15.327.535.7

8.720.326.6

21.450.065.7

1.2µmHalf

StandardDouble

2.5µmHalf

StandardDouble

5µmHalf

StandardDouble

10µmHalf

StandardDouble

gpm/psid lpm/100mbar scfm/psid Nm3/hr/100mbar

*For fluids with viscosity of 1 cP, and capsules with sanitary fittings.

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HOUSING

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SPECIFICATIONS

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TrufluOr +™ fIlTEr hOusINgHigh purity filter housing

3 0 5 2

High purity PFA Vessels for use in critical high purity filtration applicationsfoundinthesemiconductorandpharmaceuticalin-dustries.ConstructedofhighpurityPFA(wettedparts)andPVDF(non-wettedparts)thishousingprovidesthehighestperformanceinchemicalcompatibilityandpurity.Thestationarybowlandlock-ing ring ensures a positive seal and ease of filter replacement.

•Ultra-high-purityconstruction•Designedforhighertemperatureandpressurerequirementsbroadchemicalcompatibility•Packagedincleanroomenvironment• Excellent flow rates• Available in 10”, 20” and 30” configurations• Wide variety in port and vent/drain configurations

•Highlyaggressivechemicals•Highpuritywaterandchemicals• Semiconductor POU filtration•OEMequipmentforsemiconductormarket•AcidEtchandBOE•PhotomaskandPhotoresist-Chemicals-Solvents-Developers

APPLICATIONS

BENEFITS

79

Materials of constructionHeadandBowl HighPurityPFAO-Ring FEPEncapsulatedViton®LockingRing PVDF(non-wettedpart)ConnectionsInlet/Outlet 3/4”or1”Flare 3/4”or1”Butt-WeldVent/Drain 1/4”Flare 1/4”Butt-Weld 1/4”NPTF 1/4”Closed 1/4”Flare

cartridge configurations supported50psig(3.4bar)at194°F(90°C)100psig(6.9bar)at77°F(25°C)

cartridge configurations supported

Dimentional dataTrufluor + 10”

¾” Butt-Weld Pipe 12.0” / 30.5 cm 25.7” / 65.3 cm¾” Flare 10.5” / 26.7 cm 29.3” / 74.4 cm

1” Butt-Weld Pipe 9.0” / 22.9 cm 25.7” / 65.3 cm1” Flare 11.0” / 27.9 cm 29.3” / 74.4 cm

Housing Style Overall Width Overall Length







10” 222/Flat End Cap SS Reinforced 222/Flat End Cap 20” 222/Flat End Cap SS Reinforced 222/Flat End Cap 30” 222/Flat End Cap SS Reinforced 222/Flat End Cap

Trufluor + 20”

Trufluor + 30”


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TrufluOr +™ fIlTEr hOusINgHigh purity filter housing

80

Specificationsaresubjecttochangewithoutnotification©2006ParkerHannifinCorporationTruFluorisaregisteredtrademarkofParkerHannifinCorporationVitonisregisteredtrademarkofE.I.DuPontdeNemours&Co.,Inc.

C-3052RevA10/06

Bowl Length

CODE102030

DESCRIPTION10” (254mm)20” (508mm)30” (762mm)

TFP

CODECFW

CODE0810

LENGTH3/4" (19.05mm)1” (25.40mm)

DESCRIPTIONClosed²Flare²Butt-Weld

Drain/Vent TypeConnection

CODET

DESCRIPTIONFEPEncapsulatedViton¹

Seal MaterialConnection TypeCODE

FW

DESCRIPTIONFlareButtweld

CODE02

DESCRIPTION1/4” (6.35mm)

Drain/Vent Size

T0 2

1 Trademark of E.I. du Pont de Nemours and Co.2 Additional changes apply

Flow Rate (lpm)


0 25 50 75 10010

0 5 10 15 20 25 30

Diffe

renti

al Pr

essu

re (m

bar)

Diffe

renti

al Pr

essu

re (p

sid)

600

500

400

300

200

100

0

9

8

7

6

5

4

3

2

1

0

3/4” Port

1” Port

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COMPATIBILITY AND RECOMMENDATIONS

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77

fIlTEr rEcOMMENDATION by ApplIcATION

ultraclean

leadsthemicroelectronicsindustryincleanliness

Toimproveproductqualityandyield,ourR&Danddesignteamshavesuccessfullydeveloped

therevolutionaryUltracleancleaningprocess.Thisproprietaryprocessisappliedtoelectronicsgrade

productstoprovideatotalmetalsextractableslevelof<5ppb.

Ultraclean’slowlevelsofmetalsextractables

provideuserswithahighlyconsistentmanufacturingprocess

–andthusverylowproductrejectrates.

sElEcT

PleatingTechnology

Bathrecoveryrateisrelatedtoafilter’sflowcapacity.However,spaceavailabilityinprocessbathsislimited,thusthereisalwaysaconstantchallengetoincreasethesurface

areaandtheflowcapacityofthefilterwithoutincreasingitssize.

OurrevolutionarySELECTpleatingutilizesaninnovativepleat-designthatnotonlyincreasestheeffectivefiltrationarea,butalsogreatlyincreasestheflow-rateascomparedtoconventionaltypes

ofpleating.SELECTpleatingeffectivelyoffersupto80%morefiltrationarea,whichtranslatesintotwicetheflowcapacity.

Bathrecoverycanthusbesignificantlyimprovedandcostslowered.

sElEcT pleating

standard

coreguard

Etching

Cleaning

Plating

Photochemicalfiltration

DI

ResidueRemoval

HF/HNO3/acetic acidBOE/BHF-HF/NH4F

H3PO4H3PO4/HNO3/aceteic acid

NMP, glycol amine, etc.

Glycol, NH4F

DMSO/amine,EL/2 pentamone

H2SO4/H2O2NH4OH/H2O2/H2O

HCI/H2O2/H2O

Metal compound/acid orbase/buffer

Photo sensitive agent/polymer resin

H2O

H2O/O3

ProflowFluoroflow

Fluoroflow XF

Proflow-E (<60°C)Fluoroflow (>60°C)Proflow-E (<60°C)Fluoroflow (>60°C)

Chemflow-E (<60°C)Fluoroflow (>60°C)

Fluoroflow-XF

Polyflow M (<60°C)Fluoroflow (>60°C)

Chemflow

Si etchSiO2 etchSi3N4 etch

Al etchHydroxy/amine

based

Glycol/NH4F based

DMSO/amine based

PiranhaSC1SC2

Cu, Ni, Au, etc

Photoresist

Developing

OxideMetal

Rinsing

Rinsing

ChemflowClariflow

FluorocapFluoroflow

Chemflow (<60°C), Fluoroflow (>60°C)

Chemflow (<60°C), Fluoroflow (>60°C)

Proflow (<60°C), Fluoroflow (>60°C)

FluorocapFluoroflowFluoroflow

Clariflow (<60°C), Fluoroflow (>60°C)

Polyflow M

Chemflow PEFluoroflow

ProflowPolyflow GPolyflow G

Clariflow (<60°C), Fluoroflow (>60°C)

Fluoroflow

CMP

Ozonated DI

Primary choice Secondary choice

Application Chemicals Filter Family

LETT

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Thischemicalcompatibilitychartusesaratingsystem:A,B,CandF(mostcompatibletoleast)andisaneasywayofratingafilterbasedsolelyonitschemicalcompatibility.However,allchemicalcompatibilityguidesareintendedasgeneralreferencedocuments.Bytheirnature,theycannotaddressthewiderangesofprocessparametersandtheirinteractions.Theseincludevariationsintemperature,pressure,chemicalconcentration,solidorliquidphase,pHlevel,andsolubility.Aseachoftheseparametersischanged,soamaterial’sresistancetochemicalattackcanbeaffected.

Duetothisvariability,werecommendthatuserscontactourTechnicalServicesteaminordertoconfirmthesuitabilityandchemicalresistanceofaproposedfiltermaterialforeachapplication.OurTechnicalServicesteamwillundertakeacompatibilityevaluationandprovideaproductrecommendation.

chEMIcAl cOMpATIbIlITy chArTMicroelectronics industry

O-rINgs hOusINgsfIlTErs

Fluor

oflow

®

Fluor

oCap

™

Profl

owII

™

Chem

flow

PE®

Polyf

low® M

embr

ane

Polyf

low®

Clar

iflow®

Chem

rez®

Teflo

n® Enc

apsu

lated

Vito

n®

Viton

®

EPR

Silic

one

Buna

PFA

Stain

lessS

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AceticAcid(5-80%) A A C C A A C A A A A F B A A AAceticAcidGlacial A A B C B B C A A F B F B A C BAcetone(Dimethylketone) A A A C A A F A A F A F F A A AAmmoniumFluoride A A B A B B A A A A A F B A F BAmmoniumHydroxide A A A C A A A A A B A A B A C AAquaRegia A A F F F F F A A F F F F A F FBOE;NH4F:HF A A A B A B A A A A F F F A F ACarbonTetrachloride A A F F F F F A A A F A F A B FCitricAcid(1-10%) A A A A A A B A A A A A F A A CChromPhos;(32:1:0.1)H2O:H3PO4:CRO2 A A B B C C F A A C F F F A C FCoatingAquatorAZ A A A B C C F A A F C F F A A BCopperSulfate A A A C A A A A A A A A A A A ADimethylSulfoxide(DMSO) A A A B A A F A A F A F F A A FEGMEA A A B B B C F A A F F F F A B FEKC(Strip)Pyrollidone,n-methyl(NMP)to40°C A A C C C C F A A F B F F A A BEKC(Strip)Pyrollidone,n-methyl(NMP)40-150°C A A F F F F F A A F F F F A A FEthanol A A A A A A A A A B A A A A A AFreonTF A A B C C C F A A B F F F A A CHexamethyldisilazane(HMDS) A A B C B C F A A F F F F A C FHydrochloricAcid(5-30%) A A A A A A A A A A A F B A F AHydrofluoricAcid(10-49%) A A A A A A A A A A C F C A A AHydrofluoricAcid50% A A A B F F B A A A F F F A A FHyrdofluoricAcid(conc.)cold A A C C A A F A A A F F F A B AHydrogenPeroxide(3-10%) A A A A A A A A A A B A B A A AHyrdogenPeroxide(11-30%) A A A A A A B A A A B A F A A AHydrogenPeroxide(31-90%) A A A B A A F A A A F B F A A AIsopropylAlcohol(IPA) A A A A A A A A A A B A B A A AMethanol A A A A A A B A A C B B B A A AMethyleneChloride A A B C F F F A A B F F F A A FMethylEthylKetone(MEK) A A B C F F F A A F A F F A A FMixedAcidEtch;(HNO3<20%:HF:CH3:CO2H) A A C F C C F A A C F F F A B FNegativeResist A A C C F F F A A A F F F A A FNitricAcid(10-35%) A A A F A A B A A A B A F A A ANitricAcid(50-70%) A A F F F F F A A A F F F A A FNitricAcid(conc.) A A F F F F F A A B F A F A C FNOE;NH4F:H20:EthyleneGlycol/Surfactant A A A A C C A A A C C F C A F CP-Etch;(92:5:3)DIH20:HF:HNO3 A A B F C C F A A B F F F A B C

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PEGMEA A A B A C C F A A F F F F A B FPetroleumEther A A C C C C C A A B F F B A A FPiranha;(H2SO4:H2O2) A A F F F F F A A F F F F A F FPhosphoricAcid(10-19%)to65°C A A A A A A C A A A A B B A A APhosphoricAcid(20-50%)to65°C A A A A A A C A A A A F F A A APhosphoricAcid(51-80%)to65°C A A F C A A F A A A B F F A A FPhosphoricAcid(conc.)to65°C A A A F A A F A A A B F F A A APhosphoricAcid65-150°C A A F F F F F A A F F F F A F FPMMADeveloper A A A B C C F A A F A F F A A CPMMARinse A A A B C C F A A F B F F A A CPositiveResistAZ4330 A A A B C C F A A F C F F A A CPositiveResist A A A B C C F A A F A F F A A CPositiveResist,ShipleyS1800 A A A B C C F A A F A F F A A CPositiveResist,ShipleyS1400 A A A B C C F A A F A F F A A CPositiveResist,ShipleySystem8 A A A B C C F A A F A F F A A CPositiveResist,AZ1300series A A A B C C F A A F A F F A A CPositiveResist,AZ5200series A A A B C C F A A F A F F A A CPotassiumHydroxide10% A A A B A A A A A B A B B A A APotassiumHydroxide30% A A A B A A B A A B A B F A A APRS-3000(Strip)seePyrallidonePyrallidone,n-methyl(NMP)to40°C A A C C C C F A A F B F F A A BPyrallidone,n-methyl(NMP)40-150°C A A F F F F F A A F F F F A A FRCAEtch;(75:15:5:5); A A B F F F F A A B F F FAACH3PO4:CH3CO2H:HNO3:DIH2OSC1;(RCAClean)NH4OH:H2O2:DIH2O A A C C F F C A A C F F F A C CSC2;HCI:H2O2:DIH2O A A F C F F C A A C F F F A C CSodiumHydroxide5% A A A B A A A A A F A C A A A ASodiumHydroxide(20-40%) A A A B A B B A A F A F C A A ASulfuricAcid(5-25%)to65°C A A A A A A A A A A A F B A A ASulfuricAcid(50-60%)to65°C A A A A A A C A A A C F F A B ASulfuricAcid(75-96%)to65°C A A A A A A F A A A F F F A B ASulfuricAcid(conc.)to65°C A A F C F F F A A C F F F A F FSulfuricAcid65-150°C A A F F F F F A A F F F F A B FTetramethylAmmoniumHydroxide(TMAH5%) A A A B B B F A A C C C F A B CWater,Deionizedto65°C A A A A A A A A A A A A A A B CWater,Deionized65-95°C A A F F F F F A A F F F F A B CWater,Ozonated A A F C F F F A A A A A F A A FXylene(Xylol) A A F F F F F A A A F F F A A F

©2006ParkerHannifinCorporation.

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microfiltration - asiannet gas and solvent purification 1997 ptfe membrane filters with hdpe...

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