microwave solid state power devices yonglai tian
TRANSCRIPT
Microwave Solid State Power Devices
Yonglai Tian
Introduction of microwave power devices Performance of Si and GaAs microwave devices Wide bandgap semiconductors for microwave applications Processing of WBG silicon carbide wafers SiC microwave power devices GaN microwave power device
Various types of microwave power devices
Magnetron Traveling wave tube
KlystronGyrotrons
Disadvantages
• Large size• Heavy • Fixed frequency• Complicated power supply (HV)• Poor quality of waveform
spectrum• Slow tuning and coupling
• Cost
Single mode cavity for Microwave sintering of advanced ceramics
Multiple DoD platform will benefit from microwave solid state devices and WBG semiconductors
Electrodeless HID lamps driven by microwaves
1400w magnetron driven HID lamps,
200w aperture HID lamps (7mm) driven by solid state microwave devices
Various types of microwave solid state devices
Bipolar Junction Transistors (BJT)– Si BJT
– HBT (hetero junction bipolar transistor) AlGaAs-GaAs HBT SiGe-Si HBT
Field Effect Transistors– GaAs MESFET (metal-semiconductor field effect transistors)
– HEMT (high electron mobility transistors)
Various types of microwave solid state devices
• Wide Bandgap Transistors– SiC
SIT (static induction transistors) MESFET (metal-semiconductor field effect transistors) HBT (hetero junction bipolar transistor)
– GaN HEMT (high electron mobility transistors)
Introduction of microwave power devices Performance of Si and GaAs microwave devices Wide bandgap semiconductors for microwave applications Processing of WBG silicon carbide wafers SiC microwave power devices GaN microwave power device
Performance characterization
• Out put power Pmax
Pmax Vmax x Imax
– Vmax: Voltage breakdown
– Imax: Heat removed, gate width and length
• Power Density PD
PD = Vmax x Current density– Vmax: Voltage breakdown
– Current density: limited by bandgap and thermal conductivity
Performance characterization
• Frequency
f max (Vs/L)
– Vs. saturated carrier velocity
– Gate length
Pma α 1/f2
• Efficiency PAE
Depends on wave shape, impedance, leakage current and power gain
Widely used Si microwave devices
• Si BJT– < 5 GHz– 100-600W at 1 GHz– > 40% Efficiency– Low cost
• Limitation:– Pmax: voltage breakdown and
current (limited by emitter periphery and resistivity of epitaxial layer)
– f : limited by carrier mobility,
capacitance C bc
A typical Si BJT characteristics
– Frequency; 2.7-2.9 GHz
– Output power: 105 W– Pulse width: 50 m– Duty cycle: 10%– Gain: 6.5 db (min)– Efficiency:
40% (min)– Supply voltage: 40V
GaAs MESFET (Metal semiconductor field effect transistors)
• GaAs MSFET– 3-30 GHz– Power density: 0.5-0.8 w/mm– Power level and cost:
Frequency band Power (W) cost ($)
C and S 10 300 20
600 30 900
Ku 10 1000 15 1500
• Limitation: – f and Pmax: gate length, thermal
conductivity
HEMT and HBT
HEMT (High electronic mobility transistor)
• AlGaAs-GaAs heterojunction– 5-100 GHz– High frequency – High Pmax
– High efficiency– Low noise
HBT (heterojunction bipolar junction transistor)
• Similar to BJT, but much higher power and frequency performance
State of the art power output performance
State of the art power density performance
State of the art PAE performance
Evolution of microwave device noise figures
Introduction of microwave power devices Performance of Si and GaAs microwave devices Wide bandgap semiconductors for microwave applications Processing of WBG silicon carbide wafers SiC microwave power devices GaN microwave power device
Advantages of wide bandgap semiconductors(SiC, GaN and diamond)
1. Wide bandgap– SiC: 3.2 eV
– GaN: 3.4 eV
– Si : 1.1 eV
– GaAs: 1.4 eV
3 times higher than that of Si and GaAs
– High service temperature of 650 oC due to the high intrinsic temperature
– Low noise
Advantages
2. High breakdown voltage – SiC: 10 times higher than that of
Si and GaAs
– High output power due to high V– High operating frequency– Short-channel MESFETs in SiC
Fmax : 50 GHz
Advantages
3. High thermal conductivity– SiC 4.9 w/(C-cm)
10 times higher than that of Si and GaAs
– Si: 1.6 w/(C-cm)
– GaN 0.5 w/(C-cm)
4. High Saturated velocity – SiC 2.2 x107 m/s
2 times higher than that of Si and GaAs
– Si and GaAs: 1 x107 m/s
Physical characteristics of Si, GaAs and main wide bandgap semiconductors
WBG semiconductor material challenges
Introduction of microwave power devices Performance of Si and GaAs microwave devices Wide bandgap semiconductors for microwave applications Processing of WBG silicon carbide wafers SiC microwave power devices GaN microwave power device
Growth of SiC single crystal
• J. A. Lely , Philips Labs 1955 sublimation process for growing a-SiC crystals
• Davis at North Carolina State University (NCSU), 1987 seeded-growth sublimation process
• Cree Res, started in 1987 by students from the NCSU.
• Cree, 1990, Introduction of 25 mm single crystal wafers of 6H-SiC
1990
Physical vapor transport (PVT) growth of SiC single crystal wafers
• PVT growth process:– Evaporation of SiC charge
materials
– Transport of vapor spices to the growth surface
– Adsorption surface diffusion and incorporation of atoms into crystal.
– Temperature: 2000-2300oC T of 10-30C controlled by
moving RF coil
– Growth rate controlled by T and pressure in reactor
Defects in SiC wafer
• Micropipes– breakdown at low voltage
• Dislocations• Low angle grain boundaries• Stacking faults
GMU WBGS research projects:Ion implantation of SiC wafers
• Ion implantation is the only viable selective area doping techniques for SiC device production
• N and P were implanted in p-type and Al and B were implanted in n-type 6H-SiC using single and multiple ion energy schedules ranged from 50 KeV to 4 MeV
• Second ion mass spectrometry measurements (SIMS) were conducted to obtain the implant depth profiles
• Doping layer theickness.
N-implanted SiC (50 KeV to 4MeV at 700oC)
B-implanted SiC (50 KeV to 4MeV at 700oC)
Multiple energy P-implanted SiC
Rapid annealing of ion implanted SiC
• The crystal lattice is damaged by the penetration of ion energetic ions
• Post annealing is necessary to recover the lattice damage
• Microwave and conventional annealing at 1500C – Microwave: Heating rate; 200oC/min, total time: 20 min.
– Conventional: heating rate: 10oC/min, total time 3 hr.
• Rutherford backscattering (RBS) measurements are conducted before and after ion-implantation to study the recovery of the crystal lattice.
RSB spectra on N-implanted SiC
Sheet resistivity of annealed SiC wafersGMU data
Sheet resistivity of nitrogen-implanted 4H-SiC as a function of time and temperature.
Sheet resistivity of phosphorus -implanted 4H-
SiC as a function of time and temperature.
Best Reported Sheet Resistivity of Ion Implanted SiC
Figure 1. Sheet resistivity of nitrogen implants into 6H silicon carbide at room tmperature
. Figure 2. Sheet resistivity of Al implants into 6H silicon carbide at room tmperature
Introduction of microwave power devices Performance of Si and GaAs microwave devices Wide bandgap semiconductors for microwave applications Processing of WBG silicon carbide wafers SiC microwave power devices GaN microwave power device
SiC microwave power devices
High power 4H-SiC static induction transistors (SITs)
– Vertical short channel FET structure
– Current flow vertically by modulating the internal potential of the channel using surrounding gate structure
– Characteristics similar to a vacuum-tube tiode
– 470W (1.36 /mm) at 600 MHz– 38 W (1.2 w/mm) at 3 GHz– PAE ~ 47%
High power 4H-SiC static induction transistors (SITs)
Measured static I-V characteristics of a SIT
Cross section of a SiC SIT
SEM photo of a SIT device. The mesa fingers are 1 µm wide and 100 µm long. The total mesa length is 1 cm (100 fingers).
• The best performance– High output power; 900 W (at 1.3
GHz, drain efficiency = 65%, gain = 11 dB) [Northrop-Grumman/ Cree Inc]
– High frequency performance with a cut-off frequency of 7 GHz [Purdue]
A comparison of SIT with other relevant SiC
microwave devices..
High power SiC MESFET
• Three epitaxial layers– P buffer layer– Channel layer doped
Nd=3x1017cm-3
– Heavily doped n+ cap layer
• Performance– Pmax : 15W
– Frequency: 2.1 Ghz– Power density: 1w/mm– PAE; 54%
a
Cross section of SiC MESFET. The epitaxial layers were grown on a semi-insulating SiC substrate, including p-buffer layer and a n-doped channel layer
Introduction of microwave power devices Performance of Si and GaAs microwave devices Wide bandgap semiconductors for microwave applications Processing of WBG silicon carbide wafers SiC microwave power devices GaN microwave power device
GaN Power High electronic mobility transistors
• two dimensional electron gas with a high mobility is formed at the AlGaN-GaN heterojunction interface, the mobility can be in excess of 1000 cm2/Vs
• High frequency 100GHz
• High power density: 10w/mm
• Base station microwave power amplifier
• highly linear mixers
• high power switches