Minimal Fab Promoting Organization/Waseda University

Naoto Kobayashi

“ Minimal Fab” –Innovative Semiconductor and MEMS Fabrication System

31st January, 2019@Asia Nano Forum Commercialization WG Workshop,

Tokyo Big Sight, Tokyo

ØA novel micro-device fabrication technology system for semiconductor devices invented and developed by Dr. Shiro Hara at AIST(*).

ØMinimal fab realizes high-mix, low-volume (HMLV) semiconductor fabconsisting of ultra small tools by half inch size wafers, which has never been realized in the conventional fab.

ØAlthough IC manufacturing facilities usually require billions of dollars in investment, the same functionality can be achieved by these minimal fab units, which will require just $0.1–$1 million to set-up.

ØMoreover, the conventional IC fabs require months to set up; whereas, minimal fabs can be up and running in days.

ØMinimal Fab Promoting Organization is a consortium, where many semiconductorrelated companies joining in Japan, to promote the dissemination activities ofMinimal fab in the world..

What is Minimal fab?

(*) AIST: National Institute of Advanced Industrial Science and Technology

Room-sized Minimal FAB

Traditional MAGA FAB

Scaling down of fabrication factory

200m 2m

10m0.3m

wafer size: 0.5”

Fab investment 5B$

Fab investment 5M$

wafer size: 12”1/

1,00

0

1/1,

000

No clean room

Courtesy of Dr. S. Hara (AIST)

Minimal Tool, Wafer, Shuttle

Half inch wafer:φ12.5mm

Minimal Shuttle

1440

Courtesy of Dr. S. Hara (AIST)

Minimal fab＠AIST

Gate Oxidation

OxideEtcher

Resist RemoverAl wet etcher

Etcher

DeveloperCoater

Etcher Sputter

MasklessexposureDRIE

Wafer Scanner

Packaging line

RCAstation

P Diffusionfurnace

B Diffusionfurnace

Courtesy of Dr. S. Hara (AIST)

http://www.yokogawa.com/yjp/biz/semi/pdf/Minimalfab_Equipment_List_E.pdf

IoT device we will develop

AMPSensor A/D MPURAM RF

Power Management

Keys are CMOS and MEMS.

Minimal Packaging

●Tool size: W0.3 D0.45 H1.44m

IoT: Internet of ThingsCMOS: Complementary Metal Oxide SemiconductorMEMS: Micro Electro Mechanical System

Courtesy of Dr. S. Hara (AIST)

1. Development of Users(1) Academia, Institutes, R&D units of Companies (2) Manufacturers of MEMS and Sensors for IoT (Internet of Things)

2. Ventures and SME’s for a variety of utilization.

3. Semiconductor manufacturers and users in the world.

Future Perspective for Minimal fabWe should go into the real business phase!!

(MEMS: Micro Electro Mechanical System)

1. Flexibility for various type of production

2. Low-cost and low-energy

3. Small-area and high-speed

4. Customization and adaptability

5. User-oriented design and systemization

Minimal fab suitable for novel factory