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OPERATION AND SERVICE MANUAL MODEL 4280A IMHz C METER/C-V PLOTTER (Including Option 001) SERIAL NUMBERS This manual applies directly to instruments with serial numbers prefixed 2346J. With changes described in Section VII, this manual also applies to instruments with serial numbers prefixed 23 I5J. For additional important information about serial numbers, see INSTRUMENTS COVERED BY MANUAL in Section I. 0 COPYRIGHT: YOKOGAWA-HEWLETT-PACKARD, LTD., 1983 9-1, TAKAKURA-CHO, HACHIOJI-SHI, TOKYO, JAPAN I Manual Part No. 04280-90001 Microfiche Part No. 04280-90051 Printed: OCT. 1985

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OPERATION AND SERVICE MANUAL

MODEL 4280A

IMHz C METER/C-V PLOTTER

(Including Option 001)

SERIAL NUMBERS

This manual applies directly to instruments with serial numbers prefixed 2346J.

With changes described in Section VII, this manual also applies to instruments with serial numbers prefixed 23 I5J.

For additional important information about serial numbers, see INSTRUMENTS COVERED BY MANUAL in Section I.

0 COPYRIGHT: YOKOGAWA-HEWLETT-PACKARD, LTD., 1983 9-1, TAKAKURA-CHO, HACHIOJI-SHI, TOKYO, JAPAN

I Manual Part No. 04280-90001 Microfiche Part No. 04280-90051 Printed: OCT. 1985

Model 4280A Table of Contents

TABLE OF CONTENTS

Section Title

I GENERAL INFORMATION

Page Section

3-38. 3-41.

;:;: Introduction . . . . . . . . . . . l-l Description . . . . . . . . . . . . l-l

l-10. Specifications . . . . . . . . . l-12. Safety Considerations . . . ;:; 1-15. Instruments Covered by

Manual . . . . . . . . . . . . . . l-3 l-20. Options . . . . . . . . . . . . . . . . 1-3 l-22. Option 001 . . . . . . . . . . . . . 1-3 1-23. Other Options . . . . . . . . . . l-3 l-24. Accessories Supplied . . . l-28 l-26. Accessories Available . . . l-28

3-43. 3-46. 3-48.

3-52. 3-54. 3-56.

3-58. 3-60.

II INSTALLATION 3-62.

g::: Introduction . . . . . . . . . . . 2-l Initial Inspection . . . . . 2-l

2-5. Preparation for Use . . . . 2-1 2-6. Power Requirements . . . . . 2-l 2-8. Line Voltage and Fuse

Selection . . . . . . . . . . . 2-l Z-10. Power Cable . . . . . . . . . . . . 2-l 2-14. Interconnections . . . . . . . 2-2 2-16. Operating Environment . . . 2-2 2-19. Installation

Instructions . . . . . . . . 2-4 2-21. Installation of Options

907, 908 and 909 . . . . 2-4 2-23. Storage and Shipment . . . 2-4 2-24. Environment . . . . . . . . . . . . 2-4 2-26. Packaging . . . . . . . . . . . . . . 2-4

3-64.

3-66. 3-68.

3-70. 3-72.

3-74. 3-76. 3-78. 3-80. 3-82. 3-84.

III OPERATION

3-l. Introduction . . . . . . . . . . . 3-l 3-3. Operating

3-5. 3-7. 3-9.

3-12. 3-17.

3-21. 3-23. 3-26. 3-29. 3-31. 3-33. 3-35.

Instructions . . . . . . . . 3-2 Panel Features . . . . . . . . . 3-2 Self Test . . . . . . . . . . . . . . 3-16 Measurement Functions

and Measurement Modes . . . . . . . . . . . . . . . 3-16

Displays . . . . . . . . . . . . . . . 3-17 Initial Display and

Control Settings . . . . 3-22 Error Codes . . . . . . . . . . . . 3-22 Test Signal . . . . . . . . . . . . 3-30 Measurement Speed . . . . . . 3-30 Measurement Ranges . . . . . 3-30 Connection Mode . . . . . . . . 3-30 UNKNOWN Terminals . . . . . . 3-33 How to Connect a Test

Sample . . . . . . . . . . . . . . 3-33

3-86. 3-88. 3-90. 3-92. 3-94. 3-96. 3-98. 3-100. 3-102.

3-104.

3-106.

3-108.

Title Page

Equivalent Circuits . . . . 3-34 Internal Error

Correction . . . . . . . . . . 3-35 MATH Function . . . . . . . . . . 3-36 Digit Shift . . . . . . . . . . . . 3-37 Internal DC Bias Source

Safety Features . . . . . 3-37 Usable Accessories . . . . . 3-38 External Triggering . . . . 3-39 External Error

Correction . . . . . . . . . . 3-39

C Mode . . . . . . . . . . . . . . . . . 3-40 Internal DC Bias

Source . . . . . . . . . . . 3-40 Internal DC Bias

Operation . . . . . . . . 3-40 Internal DC Bias

Source Output Limit and Range Control . . . . . . . . . . 3-41

External DC Bias . . . . 3-41 Measurement

Example . . . . . . . . . . 3-41

C-V Mode . . . . . . . . . . . . . . . 3-52 Bias Sweep

Parameters . . . . . . . 3-52 START V . . . . . . . . . . . . . 3-52 STOP V . . . . . . . . . . . . . . 3-52 STEP V . . . . . . . . . . . . . . 3-52 HOLD TIME . . . . . . . . . . . 3-56 STEP DELAY TIME . . . . . 3-56 C-V Mode Measurement

Example . . . . . . . . . . 3-56

C-t Mode . . . . . . . . . . . . . . . 3-62 C-t Parameters . . . . . . 3-62 PULSE V . . . . . . . . . . . . . 3-62 MEAS V . . . . . . . . . . . . . . 3-63 NO OF READINGS . . . . . . 3-63 th . . . . . . . . . . . . . . . . . . 3-63 td . . . . . . . . . . . . . . . . . . 3-63 Pulse Bias Source . . . 3-63 Connection Mode

Selection . . . . . . . . 3-64 DC Offset for Pulsed

Biasing . . . . . . . . . . 3-64

C-t Mode Measurement with Internally Supplied Bias Pulse . . . . . . . . . . . . 3-68

th (Pulse Bias Width) Setting Range . . . . 3-68

i

Table of Contents Model 4280A

TABLE OF CONTENTS

Section

3-110.

3-112.

3-114.

3-116.

3-118.

3-120.

3-122.

3-124.

3-126. 3-128.

3-130.

3-132.

3-134.

3-136.

3-139.

3-141.

3-143.

Title Page

td (Measurement Interval ) Setting Range . . . . . . . . . . .

External DC Offset of Internally Supplied Pulse Bias Voltage . . . .

Example of Internally Biased C-t Mode Measurement . . . . .

C-t Mode Measurement Using Externally Supplied Bias Pulse . . . . . . . . . . .

Measurement Integration Mode . . . . . . . . . . . .

BURST Integration Mode . . . . . . . . . . . .

SAMPLING Integration Mode . . . . . . . . . . . .

Using an External Pulse Generator for Pulse Biasing . . .

SYNC OUTPUT . . . . . . . . DC Offset of

Externally Supplied Pulse Bias Voltagee . . .

External Pulse Bias Slow c-t Measurement . . . . .

DC Bias Offset for SLOW c-t Measurements . . . .

Bias-Pulse Width (th) Settable Range (SLOW C-t) . . . . . .

Measurement Interval (td) Settable Range (SLOW C-t) . . . . . .

External Pulse Bias SLOW c-t Measurement Example . . . . . . . . .

External Pulse Bias FAST C-t Measurement . . . . .

Connection Modes and Internal Bias Mode Selection for FAST C-t Measurement . . . . .

3-68

3-68 3-151.

3-68

3-72

3-72

3-72

3-72

3-73 3-73

3-73

3-76

3-76

3-76

3-164. 3-166.

3-168. 3-170.

3-172. 3-174.

3-176. 3-178. 3-180. 3-182.

3-184. 3-186. 3-188. 3-190. 3-192. 3-194.

3-196.

3-76 3-198.

3-76

3-80

3-80

Section

3-147.

3-149.

3-154.

3-156. 3-161.

3-200.

3-204.

3-206.

3-208.

Title Page

DC Bias Offset for FAST C-t Measurements . . . . 3-80

Bias Pulse Width (th) Settable Range (FAST c-t) . . . . . . 3-80

Measurement Interval (td) Settable Range (FAST C-t) . . . . . . . . . . . . 3-81

External Pulse Bias FAST C-t Measure- ment Example . . . . 3-81

X-Y Recorder Outputs . . 3-84 C-High Resolution

(Option 001 Units Only) . . . . . . . . . . . . . . 3-88

HP-IB Interface . . . . . . . 3-92 HP-IB Interface

Capabilities . . . . . . . 3-92 Connection to HP-IB . . . 3-92 HP-IB Status

Indicators . . . . . . . . . 3-92 LOCAL Key . . . . . . . . . . . . . 3-92 HP-IB Address

Switches . . . . . . . . . . . 3-92 TALK ONLY Mode . . . . . . . . 3-93 ADDRESSABLE Mode . . . . . . 3-94 Remote Program Codes . . . 3-94 Setting Parameters

via the HP-IB . . . . . . 3-100 Data Output . . . . . . . . . . . 3-102 Output Data Format . . . . 3-102 ASCII Format . . . . . . . . . . 3-102 BINARY Format . . . . . . . . . 3-103 Data Transfer Mode . . . . 3-105

Block Data Transfer Mode . . . . . . . . . . . . 3-106

How to Get into Block Data Transfer Mode . . . 3-106

How to Get out of Block Data Transfer Mode . . . 3-106

Number of Measure- ment Points . . . . . 3-107

Outputting Measurement Data in Block Data Transfer Mode . . . 3-107

Output Data Formats in Block Data Transfer Mode . . . 3-107

Standard Data Transfer Mode . . . 3-108

ii

Model 4280A Table of Contents

TABLE OF CONTENTS

Section Title Page

3-210. Data Format in Standard Data Transfer Mode . . . 3-108

Output Data Formats in Standard Data Transfer Mode . . . 3-109

Isolate Function . . . . . . 3-111 Restrictions on Changing

Connection Modes . . . 3-111 LEARN Mode . . . . . . . . . . . . 3-111 Service Request Status

Byte . . . . . . . . . . . . . . . 3-116 4280A Programming

Guide . . . . . . . . . . . . . . 3-118

3-212.

3-214. 3-216.

3-218. 3-220.

3-222.

Appendix External Error Correction . . . . . . . A-l

IV PERFORMANCE TESTS

4-l. 4-3. 4-5. 4-7. 4-9.

4-l 1.

4-13.

4-19.

4-21.

4-23. 4-25.

Introduction . . . . . . . . . . Equipment Required . . . . Test Record . . . . . . . . . . . Calibration Cycle . . . . . Test Frequency Accuracy

Test . . . . . . . . . . . . . . . Test Signal Level

Accuracy Test . . . . . . Measurement Accuracy

Tests . . . . . . . . . . . . . . Internal Bias Voltage

Accuracy Test . . . . . . RECORDER OUTPUTS

Voltage Accuracy Test . . . . . . . . . . . . . . .

HP-IB Interface Test . . . Conductance Measurement

Accuracy Confirmation Check . . . . . . . . . . . . . .

4-l 4-l 4-l 4-l

4-7

4-8

4-9

4-15

4-17 4-18

Section

5-17.

5-19.

5-21. 5-23. 5-25.

5-27.

5-29.

5-31.

5-33.

5-35.

5-37.

5-39.

5-41.

5-43.

5-45.

5-47.

5-49.

5-51.

5-53.

Title Page

Al4 Switching Frequency Adjustment . . . . . . . . . . 5-6

All Reset Circuit Adjustment . . . . . . . . . . 5-7

Al4 +5V Adjustment . . . . . 5-9 A5 +12OV Adjustment . . . . 5-10 A4 Oscillator Level

Adjustment . . . . . . . . . . 5-11 A8 Integrator Offset

Adjustment . . . . . . . . . . 5-12 A8 Auto Zero

Adjustment . . . . . . . . . . 5-14 A8/A7 Test Signal

Phase Adjustment . . . . 5-15 A7 Tracking

Adjustment . . . . . . . . . . 5-17 A8 90' Phase

Adjustment . . . . . . . . . . 5-19 A8 S/H Gate

Adjustment . . . . . . . . . . 5-21 A2 DC Offset

Adjustment . . . . . . . . . . 5-23 A6 Loop Phase

Adjustment . . . . . . . . . . 5-25 A6 Bandpass Filter

Adjustment . . . . . . . . . . 5-28 A6 I-V Offset

Adjustment . . . . . . . . . . 5-29 A2 Range Resistor

Adjustment . . . . . . . . . . 5-30 A3 26dB L-R Amplifier

Adjustment . . . . . . . . . . 5-31 A4 DC Bias Supply

Adjustment . . . . . . . . . . 5-33 A10 Analog Output

Adjustment . . . . . . . . . . 5-35

VI REPLACEABLE PARTS 4-27

V ADJUSTMENTS

5-l. Introduction . . . . . . . . . . 5-l 5-3. Safety Requirements . . . 5-l 5-7. Equipment Required . . . . 5-l 5-9. Factory Selected

Components . . . . . . . . . 5-l 5-11. Adjustment

Relationships . . . . . . 5-5 5-13. Adjustment Locations . . . 5-5 5-15. Initial Operating

Procedure . . . . . . . . . . 5-5

6-l. Introduction . . . . . . . . . . . 6-l 6-3. Abbreviations . . . . . . . . . . 6-l 6-5. Replaceable Parts

List . . . . . . . . . . . . . . . . 6-l 6-7. Ordering Information . . . . 6-2 6-10. Direct Mail Order

System . . . . . . . . . . . . . . 6-2

VII MANUAL CHANGES

:::: Introduction ........... 7-l Manual Changes ......... 7-l

. . . 111

Table of Contents Model 4280A

TABLE OF CONTENTS

Section

VIII SERVICE

Title Page

8-l. 8-3.

8-5. 8-7.

8-9. 8-11. 8-13. 8-15. 8-17.

8-19.

8-25. 8-27.

8-28.

8-30. 8-33.

8-36. 8-40.

8-42. 8-45. 8-47. 8-49. 8-51. 8-53.

8-55. 8-57. 8-59.

Introduction ........... 8-l Safety

Considerations ...... 8-1 Theory of Operation .... 8-l Recommended Test

Equipment ........... 8-l Troubleshooting ........ 8-l Repair ................. 8-l Basic Theory ........... 8-2 Connection Modes ....... 8-2 Vector-Voltage-Current

Measurement ......... 8-2 Vector Voltage Ratio

Detector ............ 8-4 Digital Control ........ 8-5 Block Diagram

Discussion .......... 8-6 Analog Measurement

Section ............. 8-6 Signal Source .......... 8-6 Connection Mode

Switching Circuit .... 8-6 I-V Converter .......... 8-7 Vector Ratio

Detector ............ 8-9 Process Amplifier ...... 8-9 Phase Detector ......... 8-10 A-D Converter .......... 8-10 Auto-Zero Circuit ...... 8-10 Integrator ............. 8-10 Auto-Phase Adjust

Circuit ............. 8-11 Zero Cross Detector .... 8-11 Internal Bias Source .... 8-11 Option 001 C Offset

(Al board) .......... 8-12

iv

Model 4280 A List of Tables

LIST OF TABLES

Number Title Page

l-l. 1-2.

l-3.

3-l. 3-2. 3-3. 3-4. 3-5.

3-6. 3-7.

;:;:

3-12. 3-13. 3-14. 3-15. 3-16. 3-17.

3-19. 3-20.

3-22.

3-23.

3-25.

3-26.

3-28.

3-29.

3-30.

3-31. 3-32.

3-33.

3-34. 3-35.

Specifications ............. l-4 Supplemental Performance

Characteristics ......... l-22 Accessories Available ...... l-29

Power on Self Test ......... 3-18 Standard Self Test ......... 3-18 Overflow Annunciations ..... 3-23 Operation Error Codes ...... 3-23 Dissipation Factor

Equations and Equivalent Circuit Conversion Formulas ................ 3-34

Usable Accessories ......... 3-38 Internal DC Bias Source

Ranges .................. 3-40 Auto-Ranging Mode .......... 3-40 Internal DC Bias Source

V LIMIT vs Range ........ 3-41 START V Resolution ......... 3-52 STEP V Resolution .......... 3-52 HOLD TIME Resolution ....... 3-56 PULSE V Resolution ......... 3-62 th Resolution .............. 3-63 Connection Mode

Selection ............... 3-64 td Setting Range ............ 3-68 Connection Modes for SLOW

and FAST C-t Mode Measurements ............ 3-72

DC Offset of External Pulse voltage ........... 3-73

Bias-Pulse Width (th) Settable Range (SLOW C-t) .................... 3-76

Measurement Interval (td) Settable Range (SLOW C-t) ............... 3-77

Bias-Pulse Width (th) Settable Range (FAST C-t) .................... 3-80

Measurement Interval (td) Settable Range (FAST C-t) .............. 3-81

Usable Ranges for C-HIGH RESOLN .................. 3-88

HP-IB Interface Capabilities ............ 3-92

HP-IB Mode Selection ....... 3-93 Output Data Delimiters -

TALK ONLY Mode (51) ..... 3-93 Output Data Format -

TALK ONLY Mode .......... 3-94 Remote Program Codes ....... 3-95 Remote Program Codes for

Measurement Parameters .............. 3-99

Number

3-36.

3-37.

3-38.

3-39.

3-40. 3-41. 3-42.

4-l. 4-2.

4-3.

4-4. 4-5.

4-6.

4-7.

4-8.

4-9.

4-10.

4-11.

4-12.

5-l. 5-2.

5-3.

6-1.

6-2. 6-3.

7-l.

7-2.

Title Page

Output Data Transfer Modes and Formats . . . . . . . . . . . . . 3-102

Number of Measurement Points When Block Data Transfer Mode Is Used . . . . . . . . . . . . . . . . . . . . 3-107

Program Codes for Outputting Block Data . . . . . . . . . . . . . . . . . . . . 3-107

Data Format Program Codes . . . . . . . . . . . . . . . . . . . 3-108

LEARN Mode . . . . . . . . . . . . . . . . . 3-112 Sample Programs . . . . . . . . . . . . 3-118 Data Transmission Times . . . . 3-118

Recommended Equipment . . . . . . 4-A Test Frequency Accuracy

Test Limits . . . . . . . . . . . . . 4-7 Test Signal Level Accuracy

Test Limits . . . . . . . . . . . . . 4-8 Open Test Limits . . . . . . . . . . . 4-9 Capacitance Standard

Test Limits (CNlO) . . . . . . 4-11 Capacitance Standard Test

Limits (CN13) . . . . . . . . . . . 4-12 Capacitance Standard Test

Limits (CN15) . . . . . . . . . . . 4-14 Internal Bias Voltage

Accuracy Test Limits . . . . 4-16 RECORDER OUTPUTS Voltage

Accuracy Test Limits . . . . 4-17 Controller Instructions

and Operator Responses for Test Program 1 . . . . . . 4-21

Controller Instructions and Operator Responses for Test Program 2 . . . . . . 4-23

Controller Instructions and Operator Responses for Test Program 3 . . . . . . 4-26

Adjustable Components . . . . . . 5-2 Factory Selected

Components . . . . . . . . . . . . . . 5-4 Adjustment Requirements . . . . 5-5

List of Reference Designators and Abbreviations . . . . . . . . . . . 6-1

Manufacturers Code Lists . . . . 6-2 Replaceable Parts . . . . . . . . . . 6-3

Manual Change by Serial Number . . . . . . . . . . . . . . . . . . 7-l

Summary of Changes by Assembly . . . . . . . . . . . . . . . . 7-2

V

List of Illustrations Model 4280A

LIST OF ILLUSTRATIONS

Number

l-l.

l-2.

2-l.

2-2. 2-3.

;::: 3-3. 3-4.

3-5.

3-6.

3-7. 3-8. 3-9.

3-10.

3-11.

3-12.

3-13.

3-15.

3-16.

Title Page

Model 4280A and Accessories . . . . . . . . . . . . . . l-l

Serial Number Plate . . . . . . . . l-3

Voltage and Fuse Selection . . . . . . . . . . . . . . . . 2-2

Power Cables Supplied . . . . . . 2-3 Rack Mount Kit . . . . . . . . . . . . . 2-5

Contents of Section III . . . . 3-l Front Panel Features . . . . . . . 3-2 Rear Panel Features . . . . . . . . 3-14 Interchanging Measurement

Functions and Measurement Modes . . . . . . . . 3-19

Maximum Display Value, Display Digits, and Resolution for the C Display . . . . . . . . . . . . . . . . . . 3-20

Maximum Display Value, Display Digits, and Resolution for the G Display . . . . . . . . . . . . . . . . . . 3-21

AUTO Ranging Operation . . . . . 3-31 Connection Modes . . . . . . . . . . . 3-32 Two-Terminal Pair

Configuration . . . . . . . . . . . . 3-33 Floating Test Sample

Connection . . . . . . . . . . . . . . . 3-33 Grounded Test Sample

Connection . . . . . . . . . . . . . . . 3-33 Connection Using a Wafer

Prober . . . . . . . . . . . . . . . . . . . 3-32 External Triggering

Signal . . . . . . . . . . . . . . . . . . . 3-39 Procedure for Setting

Interna 1 DC Bias Voltage . . . . . . . . . . . . . . . . . . 3-42

Procedure for Setting V LIMIT . . . . . . . . . . . . . . . . . . . . 3-42

3-17(a). External DC Bias Application up to +142V . . . . . . . . . . . . . . . . . . . . 3-43

3-17(b). External DC Bias Application up to ?2OOV . . . . . . . . . . . . . . . ...*. 3-44

3-18. C Mode Measurement Example . . . . . . . . . . . . . . . . . . 3-46

3-19. HP-19 Controlled C Mode Measurement Example . . . . . . 3-48

3-20. Bias Sweep Set-up Procedure . . . . . . . . . . . . . . . . 3-54

3-21. C-V Mode Measurement Example . . . . . . . . . . . . . . . . . . 3-57

3-22. HP-19 Controlled C-V Mode Measurement Example . . . . . . 3-59

vi

Number

3-23.

3-25.

3-26.

3-27. 3-28.

3-29.

3-30.

3-31.

3-32.

3-33.

3-34.

3-35.

3-36. 3-37. 3-38. 3-39.

3-40.

3-41. 3-42.

4-l.

4-2.

4-3. 4-4.

4-5.

4-6.

4-7.

Title Page

Procedure for Setting C-t Mode Parameters . . . . . . . . .

Internal Pulse Bias C-t Mode Measurement Example . . . . . . . . . . :. . . . . .

HP-19 Controlled Internal Pulse Bias C-t Mode Measurement Example . . . . .

BURST Integration Mode . . . . . SAMPLING Integration

Mode . . . . . . . . . . . . . . . . . . . . External Pulse Generator

Connection . . . . . . . . . . . . . . Pulse Generator Output

Controlled by SYNC OUTPUT Signal . . . . . . . . . . .

External Pulse Bias SLOW C-t Measurement Example . . . . . . . . . . . . . . . . .

HP-19 Controlled External Pulse Bias SLOW C-t Measurement Example

External Pulse Bias FAST""' C-t Measurement Example . . . . . . . . . . . . . . . . .

HP-19 Controlled External Pulse Bias FAST C-t Measurement Example . . . . .

Procedure for Setting up an X-Y Recorder to Plot c-v Characteristics . . . . . . . . .

C-HIGH RESOLN Function . . . . . HP-19 Address Switches . . . . . Block Data Transfer Mode . . . . Standard Data Transfer

Mode . . . . . . . . . . . . . . . . . . . . LEARN Mode Program

Example . . . . . . . . . . . . . . . . . 4280A Status Byte . . . . . . . . . . Sample Programs . . . . . . . . . . . .

Test Frequency Accuracy Test Setup . . . . . . . . . . . . . .

Test Signal Level Accuracy Test Setup . . . . . . . . . . . . . .

Open Test Setup . . . . . . . . . . . . Capacitance Standard Test

Setup (CNlO) . . . . . . . . . . . . Capacitance Standard Test

Setup (CN15) . . . . . . . . . . . . Internal Bias Voltage

Accuracy Test Setup . . . . . RECORDER OUTPUTS Voltage

Accuracy Test Setup . . . . .

3-65

3-69

3-70 3-74

3-75

3-73

3-73

3-78

3-79

3-82

3-83

3-86 3-90 3-93

3-106

3-109

3-112 3-116 3-120

4-7

4-8 4-9

4-10

4-13

4-15

4-17

Model 4280A

LIST OF ILLUSTRATIONS

List of illustrations

Number

4-8.

4-9.

5-l.

5-2.

5-3. 5-4.

5-5.

5-6.

5-7.

5-8.

5-9.

5-10.

5-11.

5-12.

5-13.

5-14. 5-15.

5-16.

5-17.

5-18.

Title Page

HP-IB Interface Test Setup . . . . . . . . . . . . . . . . . . . . 4-18

Conductance Measurement Accuracy Confirmation Check Setup . . . . . . . . . . . . . . 4-27

Al4 Switching Frequency Adjustment Setup . . . . . . . . . 5-6

Reset Circuit Adjustment Setup . . . . . . . . . . . . . . . . . . . . 5-7

Al4 +5V Adjustment Setup . . . . . 5-9 A5 +12OV Adjustment

Setup . . . . . . . . . . . . . . . . . . . . 5-10 A4 Oscillator Level

Adjustment Setup . . . . . . . . . 5-11 A8 Integrator Offset

Adjustment Setup . . . . . . . . . 5-12 Waveform at A8TP4 (SLOPE

AMP OUT) . . . . . . . . . . . . . . . . . 5-13 A8/A7 Test Signal Phase

Adjustment Setup . . . . . . . . . 5-15 A7 Tracking Adjustment

Setup . . . . . . . . . . . . . . . . . . . . 5-17 A8 90" Phase Adjustment

Setup . . . . . . . . . . . . . . . . . . . . 5-19 A8 S/H Gate Adjustment

Setup . . . . . . . . . . . . . . . . . . . . 5-21 A2 DC Offset Adjustment

Setup . . . . . . . . . . . . . . . . . . . . 5-23 A6 Loop Phase Adjustment

Setup . . . . . . . . . . . . . . . . . . . . 5-25 Waveform at A6TPll . . . . . . . . . . 5-27 A2 Range Resistor

Adjustment Setup . . . . . . . . . 5-30 A3 26dB L-R Amplifier

Adjustment Setup . . . . . . . . . 5-31 A4 DC Bias Supply

Adjustment Setup . . . . . . . . . 5-33 A10 Analog Output

Adjustment Setup . . . . . . . . . 5-35

Number

8-l. 8-2.

;I;:

8-5.

8-6.

8-7.

8-8.

8-9.

8-10.

8-11.

8-12.

Title Page

4280A Block Diagram . . . . . . . . . 8-2 Basic Connection Modes . . . . . . 8-3 I-V Converter . . . . . . . . . . . . . . . 8-3 Phase Detection Vector

Diagram . . . . . . . . . . . . . . . . . . 8-4 Vector Voltage Ratio

Detection Timing . . . . . . . . . 8-5 Signal Source Block

Diagram . . . . . . . . . . . . . . . . . . 8-6 Connection Mode Switching

Circuit Block Diagram . . . . . 8-7 I-V Converter Block

Diagram . . . . . . . . . . . . . . . . . . 8-8 Vector Representation of

the Vector Modulator outputs . . . . . . . . . . . . . . . . . . 8-9

Vector Ratio Detector Block Diagram . . . . . . . . . . . . 8-10

Internal Bias Source Block Diagram . . . . . . . . . . . . 8-11

Al C Offset Block Diagram . . . . . . . . . . . . . . . . . . 8-12

vii