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    NTUEE Electronics L.H.Lu 51

    CHAPTER5MOSFIELDEFFECTTRANSISTORS(MOSFETs)

    ChapterOutline

    5.1 DeviceStructureandPhysicalOperation

    5.2 CurrentVoltageCharacteristics

    5.3 MOSFETCircuitsatDC

    5.4 ApplyingtheMOSFETinAmplifierDesign

    5.5 SmallSignalOperationandModels

    5.6 BasicMOSFETAmplifierConfigurations

    5.7 BiasinginMOSAmplifierCircuits

    5.8 DiscreteCircuitMOSAmplifiers

    5.9 TheBodyEffectandOtherTopics

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    5.1DeviceStructureandPhysicalOperation

    DevicestructureofMOSFET

    MOSmetaloxidesemiconductorstructure

    MOSFETisafourterminaldevice:gate(G),source(S),drain(D)andbody(B)

    Thedevicesize(channelregion)isspecifiedbychannelwidth(W)andchannellength(L)

    TwokindsofMOSFETs:nchannel(NMOS)andpchannel(PMOS)devices

    Thedevicestructureisbasicallysymmetricintermsofdrainandsource

    Sourceanddrainterminalsarespecifiedbytheoperationvoltage

    NTUEE Electronics L.H.Lu 52

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    Operationwithzerogatevoltage

    TheMOSstructureformaparallelplateplatecapacitorwithgateoxidelayerinthemiddle

    Twopnjunctions(SBandDB)areconnectedasbacktobackdiodes

    Thesourceanddrainterminalsareisolatedbytwodepletionregionswithoutconductingcurrent

    TheoperatingprincipleswillbeintroducedbyusingthenchannelMOSFETasanexample

    Creatingachannel

    for

    current

    flow

    Positivechargesaccumulateingateasapositivevoltageappliestogateelectrode

    Electricfieldformsadepletionregionbypushingholesinptypesubstrateawayfromthesurface

    ElectronsaccumulateonthesubstratesurfaceasgatevoltageexceedsathresholdvoltageVtTheinducednregionthusformsachannelforcurrentflowfromdraintosource

    ThechanneliscreatedbyinvertingthesubstratesurfacefromptypetontypeinversionlayerThefieldcontrolstheamountofchargeinthechannelanddeterminesthechannelconductivity

    NTUEE Electronics L.H.Lu 53

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    Applyingasmalldrainvoltage

    ApositivevGS>VtisusedtoinducethechannelnchannelenhancementtypeMOSFET

    FreeelectronstravelfromsourcetodrainthroughtheinducednchannelduetoasmallvDSThecurrentiDflowsfromdraintosource(oppositetothedirectionoftheflowofnegativecharge)

    Thecurrentisproportionaltothenumberofcarriersintheinducedchannel

    Thechanneliscontrolledbytheeffectivevoltageoroverdrive

    voltage:vOVvGSVt

    Theelectronchargeinthechannelduetotheoverdrivevoltage:|Q|=CoxWLvOVGateoxidecapacitanceCoxisdefinedascapacitanceperunitarea

    MOSFETcanbeapproximatedasalinearresistorinthisregionwitharesistancevalueinverselyproportionaltotheexcessgatevoltage

    NTUEE Electronics L.H.Lu 54

    vDS(mV)

    iD(mA)

    100 200

    0.1

    0.2

    0.3

    0.4

    vGS=Vt+1V

    vGS=Vt+2V

    vGS=Vt+3V

    vGS=Vt+4V

    vGSVt

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    Operationasincreasingdrainvoltage

    AsvDSincreases,thevoltagealongthechannelincreasesfrom0tovDSThevoltagebetweenthegateandthepointsalongthechanneldecreasesfromvGSatthesource

    endto(vGSvDS)atthedrainend

    SincetheinversionlayerdependsonthevoltagedifferenceacrosstheMOSstructure,increasingvDSwillresultinataperedchannel

    TheresistanceincreasesduetotaperedchannelandtheiDvDScurveisnolongerastraightline

    AtthepointvDSsat=vGSVt ,thechannelispinchedoffatthedrainside

    IncreasingvDSbeyondthisvaluehaslittleeffectonthechannelshapeandiDsaturatesatthisvalue

    Trioderegion:vDS

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    DerivationoftheIVrelationship

    InducedchargeinthechannelduetoMOScapacitor:

    EquivalentresistancedR alongthechannel:

    IVderivations:

    Processtransconductance parameter(A/V2):kn=nCox Aspectratio:W/L

    Transconductance parameter(A/V2):kn=nCox(W/L)

    Drain

    current

    of

    MOSFETs: Trioderegion:

    Saturationregion:

    Onresistance(channelresistanceforsmallvDS):

    NTUEE Electronics L.H.Lu 56

    )]([)( xvVvCxQ tGSoxI

    ]21)[(

    )]([

    )]([)(

    2

    0 0

    DSDStGSoxnD

    v L

    DtGSoxn

    tGSoxn

    D

    In

    DD

    vvVvLWCi

    dxidvxvVvWC

    xvVvWC

    dxi

    xWQ

    dxidRidv

    DS

    )()()( xWQ

    dx

    Wxhxqn

    dxdR

    Inn

    2)(2

    1tGSnDsat

    Vvki

    ]2

    1)[( 2

    DSDStGSnD vvVvki

    )(/1 tGSnDS Vvkr

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    ThepchannelenhancementtypeMOSFET

    pchannelenhancedtypeMOSFETsarefabricatedonntypesubstratewithp+ sourceandp+ drain

    Normally,sourceisconnectedtohighvoltageanddrainisconnectedtolowvoltage

    Asanegativevoltageappliestothegate,theresultingfieldpusheselectronsinntypesubstrateawayfromthesurface,leavingbehindacarrierdepletionregion

    As

    gate

    voltage

    exceeds

    a

    negative

    threshold

    voltageVt ,

    holes

    accumulate

    on

    the

    substrate

    surfaceAptypechannel(inversionlayer)isinducedforcurrentflowfromsourcetodrain

    NegativegatevoltageisrequiredtoinducethechannelenhancementtypeMOSFET

    ComplementaryMOS(CMOS)

    CMOStechnologyemploysbothPMOSandNMOSdevices

    Ifsubstrateisptype,PMOStransistorsareformedinnwell(ntypebodyneeded)

    Ifsubstrateisntype,NMOStransistorsareformedinpwell(ptypebodyneeded)

    Thesubstrateandwellareconnectedtovoltageswhichreversebiasthejunctionsfordeviceisolation

    Exercise5.1

    (Textbook)

    Exercise5.2(Textbook)

    NTUEE Electronics L.H.Lu 57

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    5.2CurrentVoltageCharacteristics

    Circuitsymbol

    nchannelenhancementmodeMOSFET

    Thecurrentvoltagecharacteristics

    Cutoffregion:(vGSVt)

    Trioderegion:(vGS>VtandvDSVtandvDSvGSVt)

    large

    signal

    model

    (saturation)

    NTUEE Electronics L.H.Lu 58

    ]2

    1)[( 2DSDStGSoxnD vvVv

    L

    WCi

    2)(2

    1tGSoxnD Vv

    L

    WCi

    0Di

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    Channellengthmodulation

    ThechannelpinchoffpointmovesslightlyawayfromdrainasvDS>vDSsatTheeffectivechannellength(Leff)reduceswithvDSElectronstraveltopinchoffpointwillbeswepttodrainbyelectricfield

    ThelengthaccountedforconductanceinthechannelisreplacedbyLeff:

    Finiteoutput

    resistance

    VA(Earlyvoltage)=1/isproportionaltochannellength:VA=VAL

    VAisprocesstechnologydependentwithatypicalvaluefrom5~50V/m

    DuetothedependenceofiDonvDS,MOSFETshowsfiniteoutput

    resistanceinsaturationregion

    NTUEE Electronics L.H.Lu 59

    )1()(2

    1)(

    2

    1)(

    2

    1

    )]([

    2'2'2'

    0 0

    '

    L

    LVv

    L

    WkVv

    LL

    WkVv

    L

    Wki

    dxidvxvVvWk

    tGSntGSntGS

    eff

    nD

    Vv L

    DtGSn

    tGS eff

    )1()(2

    1thatassuming 2' DStGSnDDS vVv

    L

    Wkiv

    L

    L

    1

    ])(2

    [][ 12

    '1

    D

    A

    D

    tGSn

    constantv

    DS

    Do

    I

    V

    IVv

    L

    Wk

    v

    ir

    GS

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    Thebodyeffect

    TheBSandBDjunctionshouldbereversebiasedforthedevicetofunctionproperly

    Normally,thebodyofanchannelMOSFETisconnectedtothemostnegativevoltage

    ThedepletionregionwidensinBSandBDjunctionsandunderthechannelasVSBincreases

    Bodyeffect:Vtincreasesduetotheexcesschargeinthedepletionregionunderthechannel

    The

    body

    effect

    can

    cause

    considerable

    degradation

    in

    circuit

    performanceThresholdvoltage:

    Currentequations:

    Temperatureeffect

    Vtdecreasesby~2mVforevery1Crise iDincreaseswithtemperature

    kndecreaseswithtemperature iDdecreaseswithincreasingtemperature

    Foragivenbiasvoltage,theoverallobservedeffectofatemperatureincreaseisadecreaseiniD

    NTUEE Electronics L.H.Lu 510

    2)(2

    1tGSoxnDsat

    VvL

    WCi

    ]2

    1)[( 2

    DSDStGSoxnD vvVv

    L

    WCi

    )ln(and2

    where

    ]22[0

    i

    Af

    ox

    SiA

    fSBftt

    n

    N

    q

    kT

    C

    qN

    VVV

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    Breakdownandinputprotection

    Weakavalanche

    pnjunctionbetweenthedrainandsubstratesuffersavalanchebreakdownasVDSincreases

    Largedraincurrentisobserved

    Typicalbreakdownvoltage20~150V

    Punch

    through Occursatlowervoltage(~20V)forshortchanneldevices

    Draincurrentincreasesrapidlyasthedraindepletionregionextendsthroughthechannel

    Doesnotresultinpermanentdamagetothedevice

    Gateoxidebreakdown

    Gateoxidebreakdownoccurswhengatetosourcevoltageexceeds30V Permanentdamagetothedevice

    InputProtection

    ProtectioncircuitisneededfortheinputterminalsofMOSintegratedcircuits

    Usingclampingdiodefortheinputprotection

    NTUEE Electronics L.H.Lu 511

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    ThepchannelenhancementtypeMOSFET

    ForaPMOS,thesourceisconnectedtohighvoltageandthedrainisconnectedtolowvoltage

    ToinducethepchannelfortheMOSFET,anegativevGSisrequiredVt(thresholdvoltage)

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    Exercise5.4(Textbook)

    Exercise5.5(Textbook)

    Exercise5.6(Textbook)

    Exercise5.7(Textbook)

    NTUEE Electronics L.H.Lu 513

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    5.3MOSFETCircuitsatDC

    DCanalysisforMOSFETcircuits

    Assumetheoperationmodeandsolvethedcbiasutilizingthecorrespondingcurrentequation

    Verifytheassumptionwithterminalvoltages(cutoff,triodeandsaturation)

    Ifthesolutionisinvalid,changetheassumptionofoperationmodeandanalyzeagain

    DCanalysisexample

    NTUEE Electronics L.H.Lu 514

    VVVV DSGS 696.1and3 Assuming

    MOSFET

    in

    saturation

    VDS

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    Exercise5.8(Textbook)

    Exercise5.9(Textbook)

    Exercise5.10(Textbook)

    Example5.5(Textbook)

    Example5.6(Textbook)

    Exercise5.12

    (Textbook)

    Example5.7(Textbook)

    Example5.8(Textbook)

    NTUEE Electronics L.H.Lu 515

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    5.4ApplyingtheMOSFETinAmplifierDesign

    MOSFETvoltageamplifier

    MOSFETwitharesistiveloadRDcanbeusedasavoltageamplifier

    Thevoltagetransfercharacteristic(VTC)

    TheplotofvI(vGS)versusvO(vDS)

    DCanalysisasvGSincreasesfrom0toVDD

    Cutoff

    mode:

    (0

    V

    vGSVt)

    Triodemode:(vGSfurtherincreases)

    NTUEE Electronics L.H.Lu 516

    2)(2

    1tGSnD Vvki

    DtGSnDDDSO RVvkVvv 2)(21

    ]2

    1)[(

    2

    DSDStGSnD vvVvki

    0Di

    DDDSO Vvv

    DDSDStGSnDDDSO RvvVvkVvv ]2

    1)[(

    2

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    BiasingtheMOSFETtoobtainlinearamplification

    TheslopeintheVTCindicatesvoltagegain

    MOSFETinsaturationcanbeusedasvoltageamplification

    PointQisknownasbiaspointordcoperatingpoint

    ThesignaltobeamplifiedissuperimposedonVBE vGS(t)=VGS+vgs(t)

    ThetimevaryingpartinvGS(t)istheamplifiedsignal

    Thecircuitcanbeusedasalinearamplifierif:

    Aproperbiaspointischosenforgain

    Theinputsignalissmallinamplitude

    Thesmallsignalvoltagegain

    TheamplifiergainistheslopeatQ:

    Maximumvoltagegainoftheamplifier

    NTUEE Electronics L.H.Lu 517

    DtGSnDDDS RVVkVV 2)(

    2

    1

    DOVnDtGSnVv

    GS

    DSv RVkRVVk

    dv

    dvA

    GSGS )(

    ||2/

    |2/

    ||| maxvOV

    DD

    OV

    DDv A

    V

    V

    V

    RIA

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    DeterminingtheVTCbygraphicalanalysis

    Providesmoreinsightintothecircuitoperation

    Loadline:thestraightlinerepresentsineffecttheload

    iD=(VDDvDS)/RDTheoperatingpointistheintersectionpoint

    Locatingthe

    bias

    point

    Q

    Thebiaspoint(intersection)isdeterminedbyproperlychoosingtheloadline

    TheoutputvoltageisboundedbyVDD(upperbound)andVOV(lowerbound)

    Theloadlinedeterminesthevoltagegain

    Thebiaspointdeterminesthemaximum upper/lowervoltageswingoftheamplifier

    NTUEE Electronics L.H.Lu 518

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    5.5SmallSignalOperationandModels

    TheDCbiaspoint

    MOSFETinsaturation

    Draincurrent:

    Drainvoltage:

    Thesmallsignalcircuitparametersaredeterminedbythebiaspoint

    Thesignal

    signal

    operation

    Thesmallsignaldraincurrent:

    Thesmallsignalvoltagegain:

    NTUEE Electronics L.H.Lu 519

    22

    2

    1)(

    2

    1OVntGSnD VkVVkI

    OVDDDDDS VRIVV

    dDgstGSntGSn

    gsngstGSntGSntgsGSnD

    gsGSGS

    iIvVVL

    WkVVL

    Wk

    vL

    WkvVV

    L

    WkVV

    L

    WkVvV

    L

    Wki

    vVv

    )()(2

    1

    2

    1)()(

    2

    1)(

    2

    1

    '2'

    2''2'2'

    gstGSnd vVVL

    Wki )('

    DOVn

    gs

    dv

    gsDOVnDdd

    dDddDDdDDDDDDDD

    RVL

    Wk

    v

    vA

    vRVL

    WkRiv

    vVRiVRiIVRiVv

    )(

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    Thesmallsignalparameters

    Transconductance(gm):describeshowidchangewithvgs

    Outputresistance(ro):describeshowidchangewithvds

    DraincurrentvarieswithvDSduetochannellengthmodulation

    FiniterotomodelthelineardependenceofiDonvDS Theeffectcanbeneglectedifroissufficientlylarge

    Body

    transconductance

    (gmb):

    describes

    how

    idchanges

    with

    vbs

    ThebodyeffectoftheMOSFETismodeledbygmb

    Can

    be

    neglected

    if

    body

    and

    source

    are

    connected

    together

    NTUEE Electronics L.H.Lu 520

    DntGSnVv

    GS

    D

    gs

    dm I

    L

    WkVV

    L

    Wk

    v

    i

    v

    ig

    GSGS

    '' 2)(

    1][ 1D

    A

    D

    constantv

    DS

    Do

    IV

    Ivir GS

    2' )(2

    1tGSnD Vv

    L

    Wki

    mmb gg

    SB

    tm

    BS

    ttGSn

    BS

    t

    t

    D

    vv

    BS

    Dmb

    v

    Vg

    v

    VVv

    L

    Wk

    v

    V

    V

    i

    v

    ig

    DS

    GS

    )(

    '

    constantconstant

    oxSiAFSBFtt CqNvVV /2where]22[0

    SBFSB

    t

    Vv

    V

    22

    +

    vgs

    G D

    S

    +

    vbs

    B

    rogmvgs gmbvbs

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    Thesmallsignalequivalentcircuitmodels

    Hybridmodel

    Tmodel

    NTUEE Electronics L.H.Lu 521

    Neglectro

    Neglectro

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    5.6BasicMOSFETAmplifierConfiguration

    Threebasicconfigurations

    Characterizingamplifiers

    TheMOSFETcircuitscanbecharacterizedbyavoltageamplifiermodel(unilateralmodel)

    TheelectricalpropertiesoftheamplifierisrepresentedbyRin,RoandAvoTheanalysisisbasedonthesmallsignalorlinearequivalentcircuit(dccomponentsnotincluded)

    Voltagegain:

    Overallvoltagegain:

    NTUEE Electronics L.H.Lu 522

    CommonSource(CS) CommonGete(CG) CommonDrain(CD)

    vo

    oL

    L

    i

    ov A

    RR

    R

    v

    vA

    vo

    soL

    L

    sigin

    inv

    sigin

    in

    sig

    ov A

    RR

    R

    RR

    RA

    RR

    R

    v

    vG

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    Thecommonsource(CS)amplifier

    CharacteristicparametersoftheCSamplifier

    Inputresistance:

    Outputresistance:

    Opencircuitvoltagegain:

    Voltage

    gain: Overallvoltagegain:

    CSamplifiercanprovidehighvoltagegain

    Inputandoutputareoutofphaseduetonegativegain

    Output

    resistance

    is

    moderate

    to

    high

    SmallRDreducesRoatthecostofvoltagegain

    NTUEE Electronics L.H.Lu 523

    inR

    DoDo RrRR ||

    DmoDmvo RgrRgA )||(

    )||()||||(LDmoLDmv

    RRgrRRgA

    )||()||||( LDsig

    moLDm

    sig

    v RRRr

    rgrRRg

    Rr

    rG

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    Thecommonsource(CS)withasourceresistance

    Characteristicparameters(byneglectingro)

    Inputresistance:

    Outputresistance:

    Opencircuitvoltagegain:

    Voltagegain:

    Overallvoltagegain:

    SourcedegenerationresistanceRsisadopted

    Gainisreducedbythefactor(1+gmR

    s)

    Consideredanegativefeedbackoftheamplifier

    NTUEE Electronics L.H.Lu 524

    inR

    Do RR

    sm

    Dmvo

    Rg

    RgA

    1

    sm

    LDmv

    Rg

    RRgA

    1

    )||(

    sm

    LDmv

    Rg

    RRgG

    1

    )||(

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    Thecommongate(CG)amplifier

    CharacteristicparametersoftheCGamplifier(byneglectingro)

    Inputresistance:

    Outputresistance:

    Opencircuitvoltagegain:

    Voltagegain:

    Overallvoltagegain:

    CGamplifiercanprovidehighvoltagegain

    Inputandoutputareinphaseduetopositivegain

    Input

    resistance

    is

    very

    lowAsingleCGstageisnotsuitableforvoltageamplification

    Outputresistanceismoderatetohigh

    SmallRDreducesRoatthecostofvoltagegain

    Theamplifierisnolongerunilateralifroisincluded

    NTUEE Electronics L.H.Lu 525

    min gR /1

    Do RR

    Dmvo RgA

    )||(LDmv

    RRgA

    )||(1

    1LDm

    sigm

    v RRgRg

    G

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    Thecommoncollector(CD)amplifier

    CharacteristicparametersoftheCDamplifier(byneglectingro)

    Inputresistance:

    Outputresistance:

    Voltagegain:

    Overallvoltagegain:

    CDamplifierisalsocalledsourcefollower.

    Inputresistanceisveryhigh

    Outputresistanceisverylow

    Thevoltagegainislessthanbutcanbecloseto1

    CDamplifiercanbeusedasvoltagebuffer

    NTUEE Electronics L.H.Lu 526

    inR

    mo gR /1

    1)1/()/1/( LmLmmLLv RgRggRRA

    1)1/()/1/()( LmLmmLLv

    RgRggRRG

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    5.7BiasinginMOSAmplifierCircuits

    DCbiasforMOSFETamplifier

    Theamplifiersareoperatingataproperdcbiaspoint

    Linearsignalamplificationisprovidedbasedonsmallsignalcircuitoperation

    TheDCbiascircuitistoensuretheMOSFETinsaturationwithapropercollectorcurrentID

    Biasingbyfixinggatetosourcevoltage

    Fix

    the

    dc

    voltage

    VGSto

    specify

    the

    saturation

    current

    of

    the

    MOSFET:

    BiascurrentdeviatesfromthedesirablevalueduetovariationsinthedeviceparametersVtandn

    Biasingbyfixinggatevoltageandconnectingasourceresistance

    Thebiasconditionisspecifiedby: and

    Draincurrenthasbettertolerancetovariationsinthedeviceparameters

    NTUEE Electronics L.H.Lu 527

    22

    )(2

    1

    )(2

    1

    tGntGSnD VVkVVkI

    StGSnGSG RVVkVV 2)(

    2

    1 2)(

    2

    1tGSnD VVkI

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    Biasingusingadraintogatefeedbackresistor

    Asinglepowersupplyisneeded

    RGensurestheMOSFETinsaturation(VGS=VDS)

    MOSFEToperatingpoint:

    ThevalueofthefeedbackresistorRGaffectsthesmallsignalgain

    Biasingusingaconstantcurrentsource

    TheMOSFETcanbebiasedwithaconstantcurrentsourceI

    TheresistorRDischosentooperatetheMOSFETinactivemode

    Thecurrentsourceistypicallyacurrentmirror

    Current

    mirror

    circuit: MOSFETsQ1andQ2areinsaturation

    ThereferencecurrentIREF=I =ID

    Whenapplyingtotheamplifiercircuit,thevoltage

    VD2hastobehighenoughtoensureQ2insaturation

    NTUEE Electronics L.H.Lu 528

    2)(2

    1tGSn

    D

    GSDD VVkR

    VV

    2

    2

    )(21

    )(2

    1

    tGSnREF

    tGSnGSDD

    VVkI

    VVkR

    VV

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    Example5.12(Textbook)

    Exercise5.33

    (Textbook)

    Exercise5.34(Textbook)

    Exercise5.35(Textbook)

    Exercise5.36(Textbook)

    NTUEE Electronics L.H.Lu 529

    8 Di Ci i MOS A lifi

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    5.8DiscreteCircuitMOSAmplifiers

    Circuitanalysis:

    DCanalysis:

    Removeallacsources(shortforvoltagesourceandopenforcurrentsource)

    Allcapacitorsareconsideredopencircuit

    DCanalysisofMOSFETcircuitsforallnodalvoltagesandbranchcurrents

    FindthedccurrentID

    andmakesuretheMOSFETisinsaturation

    ACanalysis:

    Removealldcsources(shortforvoltagesourceandopenforcurrentsource)

    Alllargecapacitorsareconsideredshortcircuit

    ReplacetheMOSFETwithitssmallsignalmodelforacanalysis

    The

    circuit

    parameters

    in

    the

    small

    signal

    model

    are

    obtained

    based

    on

    the

    value

    of

    ID

    NTUEE Electronics L.H.Lu 530

    Completeamplifiercircuit DCequivalentcircuit ACequivalentcircuit

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    Thecommonsource(CS)amplifier

    Thecommonsourceamplifierwithasourceresistance

    NTUEE Electronics L.H.Lu 531

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    Thecommongate(CG)amplifier

    Thecommon

    drain

    (CD)

    amplifier

    NTUEE Electronics L.H.Lu 532

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    Theamplifierfrequencyresponse

    Thegainfallsoffatlowfrequencybandduetotheeffectsofthecouplingandbypasscapacitors

    ThegainfallsoffathighfrequencybandduetotheinternalcapacitiveeffectsintheMOSFETs

    Midband:

    Allcouplingandbypasscapacitors(largecapacitance)areconsideredshortcircuit

    Allinternalcapacitiveeffects(smallcapacitance)areconsideredopencircuit

    Midband gainisnearlyconstantandisevaluatedbysmallsignalanalysis

    ThebandwidthisdefinedasBW=fHfL AfigureofmeritfortheamplifierisitsgainbandwidthproductdefinedasGB=|AM|BW

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    Exercise5.37(Textbook)

    Exercise5.38

    (Textbook)

    Exercise5.39(Textbook)

    Exercise5.40(Textbook)

    Exercise5.41(Textbook)

    NTUEE Electronics L.H.Lu 534