MProbeVisVHR system - inline confi guration

Precision 0.01nm or 0.01%

Accuracy 0.2% or 1 nm

Stability 0.02nm or 0.03%

Spot Size <0.5 mm

Sample Size from 1 mm

MProbe system (desktop confi guration)

Focusing lensReserved for desktop

Majority of translucent or lightly absorbing fi lms can be measured quickly and reliably:Oxides,Nitrides, Photore-sists, Polymers, Semiconductors (Si, aSi, polySi), Hard coatings (SiC, DLC), Polymer coatings (Paralene, PMMA, Polyamides) and many more.

Thickness Range: 15 nm - 350 m Wavelength Range: 400nm -1100 nm LCD/FPD applications: TCO, Cell Gaps, Polyamides. Multilayer polymer web (food protective fi lms, stick-ers/labels, adhesives), Polymer fi lms on metal (antirust,antifi nger),hard coating, anti-refl ection coating, coating on rough surfaces (Y2O3, YF3, Paralene). Wet and dry fi lms, liquid layers.

Real time measurement and analysis. Multi-layer, thin,thick, freestanding and nonuniform layers.

Extensive materials library (500+ materials) - new mate-rials easily added. Support of parameterized materials: Cauchy, Tauc-Lorentz, Cody-Lorentz, EMA and many more.... Flexible: Desktop or in-situ, R&D or inline. Easy integra-tion with external system using OPC, Modbus or SDK (dll library) interface

Measurement: thickness, optical constants, surface rough-ness User friedly and powerful: One-click measurement and analysis. Powerful tools: simulation & sensitivity, back-ground and scaling correction,linked layers and materials, multisample measurements, dynamic measurement and production batch processing.

MProbe VisVHR Thin Film Measurement System It is easy to be an expert with MProbe

Specifi cation

Spectral range (nm) 400-1100Spectrometer/detector F4 spectrometer, 3600

pixels Si CCD, 16 bit ADC,360-1100 nm range

Spectral resolution <2 nm (Vis channel)<0.3 nm (VHR channel)

Light source 5 W Tungsten-halogen lamp (Xe fi lled), CT 2800o

Lifetime: 10000 hrsRefl ectance probe Fiberoptics (7 fi bers as-

sembly), 400m fi ber corePrecision <0.01 nm or 0.01%Accuracy <1nm or 0.2%Weight (main unit) 6 kgSize (main unit) 8”x 12” x 4” (WxDxH)Power 100-250VAC, 50/60 Hz

20W

Raw refl ectance from Si wafer. Two spectrometer channels: Vis and VHR can be used together or inde-pendently. Integration time: 10ms

Measurement of the 2 layer polymer fi lm (1 m and 30m thicknesses). Two channels can be combined to determine both thicknesses accurately

Hardware options-FLVis Vis achromatic focusing lens. WD:60 mm. Spo

size: <0.5mm. -FDHolder Face-down sample holder (desktop option).

For measurement of transparent and fl exible samples

-TO Transmittance option-TO Switch 2 channel switch, allows to combine refl ectanc

and transmittance measurement.

- TR In/Out trigger 5V TTL. 1 External (in) trig-ger to start measurement, 6 out triggers

Software options

-MOD remote control (TCP) based on Modbus protocol

- OPC DA 2.0 and 3.0 compartible OPC server for integration with control system

-SDK SDk for integration with 3rd party software

- CM continuos measurement with speci-fi ed number of measurement and/or delay between them

SEMICONSOFT, INC 83 Pine Hill rd., Southborough,MA 01772 tel. +1.617.388.6832 fax. +1.508.858.5473 email: info@semiconsoft.com Thin -fi lm solutions: instruments, software custom development projects.