msc eth in micro and nanosystems · greatcell solar sa, helbling technik ag, heptagon, hmt...
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Electronics / Electrical Engineering
MechanicalEngineering
Materials, Surfacesand Properties
Modeling and Simulation
Devices andSystems
Energy Conversionand
Quantum Phenomena
MaterialsPhysics, Chemistry, Biology
Product Developmentand Innovation Management
MSc ETH in Micro and NanosystemsAn educational program that can cope with the challenges of a fast changing industrial and academic environment
Jointly offered by D-MAVT and D-ITET
world of memsconsumer electronics
automotive industryinternet of things
entertainmentenvironment
healthcarerobotics
digital micromirror device
thermoelectric generatorthermoelectric heat flux
silicon microphone
energy harvester
infrared camera
humidity sensor
AFM cantilever
Seebeck effect
accelerometer
piezoresistiveelectrostatic
ink jet head
bolometer ultrasound
thermopile
gyroscopedew point
capacitor
altimeter
The world of MEMSMicro and nanosystmes are all around us
world of memsconsumer electronics
automotive industryinternet of things
entertainmentenvironment
roboticsdigital micromirror device
thermoelectric generatorthermoelectric heat flux
energy harvester
infrared camera
humidity sensor
AFM cantilever
Seebeck effect
accelerometer
piezoresistiveelectrostatic
ink jet head
bolometer ultrasound
thermopile
gyroscopedew point
capacitor
altimeter
The world of MEMSMicro and nanosystmes are all around us
healthcare
silicon microphone
The world of MEMSMEMS & Internet of Things – Humidity sensor
The Internet of Things is a network ofphysical devices that operate within theexisting internet infrastructure.
Environmental monitoringdevices can sense air qualitytemperature, humidity, noise,light, pressure, etc.
https://cubesensors.com/
world of memsconsumer electronics
automotive industryinternet of things
entertainmentenvironment
roboticsdigital micromirror device
thermoelectric generatorthermoelectric heat flux
energy harvester
infrared camera
humidity sensor
AFM cantilever
Seebeck effect
accelerometer
piezoresistiveelectrostatic
ink jet headt
bolometer ultrasound
thermopile
gyroscopedew point
capacitor
altimeter
The world of MEMSMicro and nanosystems are all around us
healthcare
silicon microphone
The world of MEMSMEMS in robotics – Heat flux sensors
Robotic laser welding enables joining anextended range of materials with high qualityand low weld footprint.
Thermoelectric heat fluxsensors measure laser power,enabling more reliable operation.
greenTEG gRAY Laser Power Detector Series
world of memsconsumer electronics
automotive industryinternet of things
entertainmentenvironment
roboticsdigital micromirror device
thermoelectric generatorthermoelectric heat flux
energy harvester
infrared camera
humidity sensor
AFM cantilever
Seebeck effect
accelerometer
piezoresistiveelectrostatic
ink jet head
bolometer ultrasound
thermopile
gyroscopedew point
capacitor
altimeter
The world of MEMSMicro and nanosystems are all around us
healthcare
silicon microphone
The world of MEMSMEMS in automotive industry - Gyroscope
Airbag control systems combine multiplesensor devices to predict accidents andsignificantly increase passenger safety.
Micromachined gyroscopesand accelerometers are keyelements in airbag controlsystems.
The world of MEMSMEMS in autonomous driving
Autonomous driving requires exactdetermination of the vehicle’s motionparameters and its environment to allowaccident-free driving.
Utilized MEMS sensors include:accelerometer, gyroscope, laserradar, ultrasound positioning, etc.
The Case for a Specialized Master• Be prepared for the ever-changing academic and industrial
landscape by an inter-disciplinary education.
• Have access to a broad and interconnected spectrum ofresearch areas.
• Study among other highly qualified students with similarinterests and varying backgrounds
The Case for a Specialized Master in Micro and Nanosystems
• Welcome day and apéros with tutors and other MNS students
• Talks with PhDs and start ups
• Social events for future, current and former MNS students
• Contact: Leon [email protected]
[email protected]://www.facebook.com/MNSETHZ
• •
International Contest of Applicationsin Nano-Micro Technologies (iCAN)
2014 Post disaster monitoring system
2nd Place in Sendai, Japan
2016µWINDfon
1st prize in Paris, France
2015Alaska boots
2nd Place, Swiss competition
www.ican-contest.ch
• 2011 Siemens Mobility, Zürich• 2011 Sensirion, Stäffa• 2012 Kistler, Winterthur• 2013 ABB, Lenzburg• 2014 Siemens Building Technologies, Zug• 2015 Sensirion, Stäffa• 2016 Sonova (Phonak), Stäffa• 2017 IST AG, Ebnat-Kappel
Excursions
> 200 companies and institutes in CH, A, F, D are working on/with micro andnanosystems
Austriamicrosystems, EV Group - E. Thallner GmbH, Femto Lasers, IMS Nanofabrication GmbH, MNA - Micro@Nanofabrication-Austria, NANONET Styria, NSTL - NanoScience and Technology Center Linz, Alcatel Vacuum Technology, Siemens VDO, Tronic’s Microsystems, ANSYS Germany GmbH, Carl Zeiss SMT AG, Continental Teves, DaimlerChrysler AG, ECPE Engineering Center for Power Electronics GmbH, Evotec OAI AG, GE Global Research, German Aerospace Center (DLR), Heidelberg Instruments Mikrotechnik GmbH, Infineon Technologies, Ing. Erich Pfeiffer GmbH, JEOL (Germany) GmbH, JPK, Instruments AG, Leica Microsystems GmbH, MTU Aero Engines GmbH, Nanofilm Technologie GmbH, NanoWorld Holding AG, NDI Europe GmbH, neosino nanotechnologies AG, nomat GmbH, OSRAM Opto Semiconductors Infrared, Paul Müller Industrie GmbH & Co. KG, PerkinElmer Optoelectronics, PI -Physikinstrumente GmbH & Co. KG, RAITH GmbH, Robert Bosch GmbH, Siemens AG, Siemens Medical Solutions, Solvay Infra Bad Hönningen GmbH, SUSS MicroTec, Wika Alexander Wiegand GmbH & Co. KG, XENOS Semiconductor Technologies GmbH, Zentro-Elektrik, STMicroeleclronics, OC Oerlikon, HILTISercalo Microtechnology Ltd., 3D AG Holographic Products It Services, ABB Schweiz, ABB Switzerland Ltd Corp. Research, Agilent Technologies (Schweiz)AG, Alpes Lasers SA, Alphasem AG, Asulab S.A., a company of the Swatch Group, AWM Mold Tech Ltd., Axpo Holding AG, Ayanda Biosystems SA, BitplaneAG, BMG Engineering AG, CarboGen AG, Ciba Specialty Chemicals Inc., Cicor Technologies, CLA Clinical Laboratory Automation SA, Codec SA,Colibrys (Switzerland) Ltd, Composites Busch SA, Concentris GmbH, Consenec AG, CPAutomation SA, CSEM - Centrec Suisse D'Électronique E deMicrotechnique, CSM-Instruments, DiagnoSwiss S.A., Didel SA, ECO Analytics AG, EM Microelectronic - Marin SA, Endress+Hauser Flowtec AG, EpiSpeedAG, ER Systems SA, ESCATEC Switzerland AG, E-Vision, Inc., Fastcom Technology SA, Ferrovac GmbH, Force Dimension LLC, Georg Fischer LtdGreatcell Solar SA, Helbling Technik AG, Heptagon, HMT microelectronic AG, HSW, HTceramix SA, IBM Research GmbH, IICS SA, inno-x gmbh, Insulation & Polymer Technologies, Intelliact AG, Intersema Sensoric SA, IR MICROSYSTEMS, Jacob Holm Industries GmbH, Leica Geosystems, Lyncée Tec SA, Magtrol SA, Manometer Ltd., Mecartex SA, Medlight SA, Microchemical Systems SA, Microcrystal, Microcut Ltd, MICRODUL AG, Micronas , Semiconductor Holding AG, Mikron Agie Charmilles AG, Mimotec SA, Mobile Information &Communication Systems, NanoFeel, Nanonis GmbH, Nanosensors, Nanosurf AG, NanoTechTools Company, NanoWorld AG, Netstal-Maschinen AG, Novartis Pharma AG, OMNISENS SA, Phonak AG, Photonfocus AG, POSIC S.A., Rieter Machine Works Ltd., Roche Diagnostics Microtechnology Center, Schoeller Textil AG, Schweizerische Gesellschaft für Reinraumtechnik, SELEXIS EUROPE, Sensile Holding, Sensile Technologies SA, Sensirion AG, SenTec AG, Shockfish SA, Siemens Schweiz AG, SIG Holding AG, SIG Pack Systems AG, Sinus-Point AG, Skan AG, SMARTDATA SA, Solaronix SA, STMicroelectronics, Sulzer Innotec, Sulzer Metco, Sunrise Luciol SaRL, Swiss Life Sciences Association, Swissbit AG, SwissProbe GmbH, Synopsis Switzerland LLC, Synthes GmbH, Tecan Schweiz AG, Technische Rundschau , TechPowder SA, Time-Bandwidth Products, Inc., trafag AG - Sensors & Controls, U-blox AG, Unaxis Switzerland Ltd, Unisensor AG, VHF-Technologies SA, WIKA - Manometer AG, WYLER AG -Inclination Measuring Systems, XEMICS SA Micro (Semtec), Xemtec AG, Xitact S.A., Zeptosens AG
The Case for a Specialized Master• Be prepared for the ever-changing academic and industrial
landscape by an inter-disciplinary education.
• Have access to a broad and interconnected spectrum ofresearch areas.
• Study among other highly qualified students with similarinterests and varying backgrounds
• Set yourself apart by a further and specialized education: Transdisciplinary education, team oriented Modern technology for innovations System integration and applications
The Case for a Specialized Master in Micro and Nanosystems
Overview of Master categories structure
Category CP Description
Core Courses 36• Basis of the Master‘s Program• Providing core knowledge in the respective area of
specialization• Choice of courses in accordance with tutor
Multidisciplinary Courses 6 • Courses at ETH, Uni Zürich and HSG
• Choice of courses in accordance with tutor
„GESS Science in Perspective“ 2 • General-education courses in humanities, social and political
science from the course catalogue of D-GESS ETH Zürich
Semester Project 8 • Use of acquired technical knowledge• Provides experience in solving a specific engineering problem
Industrial Internship 8 • Min. 12-week internship in a Swiss or foreign company
Master´s Thesis 30 • Conclusion of the Master‘s Program• Independent and scientific work
http://www.mastermicronano.ethz.ch/
Core Courseshttp://www.master-micronano.ethz.ch/curriculum.html
Each tutor has particular areas of interest and offers every student an individualized curriculum within the relevant research area from the list of• recommended core courses and • elective core courses
Master curriculum structure
~ 6 months full-time work Subject with project plan Approved by the tutor Project at ETH and/or abroad
Master Thesis (30 ECTS)
Before starting thesis work, students must- have fulfilled all specific admission requirements;- have achieved 32 credit points in the category
core courses;- have acquired the credit points corresponding to
the Semester Project (8 cp)
Application for HS2018 / FS2019
Application period: 01 March – 31 March 2018
Apply online: https://www.ethz.ch/en/studies/registration-application/master/application/how-to-apply.html
No need of recommendation letters for ETH Bachelor students
No need of English test for ETH Bachelor students
For questions regarding the admission process: ETH Admission Office: [email protected]
ETH Zentrum Opening Hours during the semester: LEE K 208 Monday: 13:00 - 16:00Leonhardstrasse 21 Tuesday: 09:00 - 13:008092 Zürich Wednesday: 09:00 - 12:00
Thursday: 13:00 - 16:[email protected] Friday: 09:00 - 12:00
D-MAVT Studienadministration
Daniela Divljak Lorena Luzi Tsamcho Meier Dr. Maddalena Velonà
The Master program is tutor-drivenEach student is entitled to a tutor Tutor and student define an individualized curriculum Tutor coaches students in course planning, research, mobility, industrial
training and monitors progress Changing the tutor is possible
Tutor system
Learning Agreement
Prepare your Learning Agreement on the basis of your interests and the tutor’s sample curriculum• Submission: Within 3 weeks of the start
of the semester• Study Plan: For each semester or for the
whole study program • Updates: Always possible with tutor’s
approval• Final version: Before starting the
Master’s Thesis
Tutors in Micro and Nanosystems D-MAVT Jürg Dual Christofer Hierold Dennis Kochmann Brad Nelson David Norris Dimos Poulikakos Sotiris Pratsinis D-ITET Jürg Leuthold Janos Vörös Vanessa Wood D-PHYS Klaus Ensslin Thomas Ihn D-BSSE Andreas Hierlemann
Prof. Jürg LeutholdD-ITET, Institute of Electromagnetic Fields (IEF)
www.ief.ethz.ch
Main Research Interests:Design – Fabrication – System-level testing- Optoelectronic devices for communications- Sources and detectors for sensing- Plasmonic devices
100 Gbit/s plasmonic transmitter.
Wireless antenna usingnanotechnolgical devices
Novel nonlinearlight sources
Prof. Brad NelsonD-MAVT, Institute of Robotics and Intelligent Systems
www.iris.mavt.ethz.ch
Main Research Interests:- Making sub-mm intelligent machines- Manipulating sub-mm scale objects
HC Berg, J. Bact., (2000)
Prof. Christofer HieroldD-MAVT, Micro and Nanosystems
www.micro.mavt.ethz.ch
Main Research Interests:- Advanced microsystems:
e.g. thermoelectric generators, acoustic sensors , and microsystems for medical applications
- Nanotransducers and nanosensors: e.g. ultra low power carbon based sensors
dry active EEG electrode
Prof. Sotiris PratsinisD-MAVT, Particle Technology Laboratory
www.ptl.mavt.ethz.ch
Fundamentals (Prof. Mavrantzas, Goudeli, Kelesidis)
Catalysis (Dr. Büchel, Koirala, Fujiwara)
Biomaterials (Dr. Sotiriou, Spyrogianni, Blattmann, Starsich) Devices (Güntner, Schädli)
www.lbb.ethz.ch
Main Research Interests: Stretchable bioelectronic devices Biosensors Interfacing biology with FluidFM nanopipette Building controlled neuron networks
Prof. Janos VörösD-ITET, Laboratory of Biosensors and Bioelectronics
Prof. Jürg DualD-MAVT, Institute of Mechanical Systems
www.zfm.mavt.ethz.ch
Main Research Interests:- Ultrasonic Particle Manipulation- Wave Propagation in Microsystems- Fluid Sensing in Microsystems
Prof. Dennis M. KochmannD-MAVT, Mechanics & Materials
www.mm.ethz.ch
Main Research Interests:- modeling across length and time scales:
bridging from atoms to devices- engineered (meta)materials
with controllable properties- materials by design: linking
microstructure to properties
Prof. Dennis M. KochmannD-MAVT, Mechanics & Materials
Prof. Dimos PoulikakosD-MAVT, Laboratory of Thermodynamics in Emerging Technologies
www.ltnt.mavt.ethz.ch
Main Research Interests:- Energy conversion, transport and fluidics- Biothermofluidics- Energy and the environment
Prof. Andreas HierlemannD-BSSE, Bio Engineering Laboratory
www.bsse.ethz.ch/bel
Main Research Interests:- Neuroelectronic interfacing- Microfluidics and microtissues
3 mm
10 µm
Prof. David NorrisD-MAVT, Optical Materials Engineering Laboratory
www.omel.mavt.ethz.ch
Main Research Interests:- Synthesis/characterization of quantum dots- Thermal plasmonics for thermophotovoltaics- Quantum plasmonics
Prof. Vanessa WoodD-ITET, Laboratory for Nanoelectronics
www.lne.ethz.ch
Main Research Interests:- Optical and electronic measurement techniques on
nano- and micro-size materials & structures- Nano- and micron-size materials with new electronic
or ionic properties- Applications: LEDs, solar cells, batteries
Materials Devices Analytics
Opt
oele
ctro
nic
& E
lect
roch
emic
al
Prof. Klaus EnsslinD-PHYS, Nanophysics
www.nanophys.ethz.ch
Main Research Interests:- Nanostructures of GaAs family and Graphene- Superconductor/Semiconductor hybrids- Transport in mesoscopic structures
Prof. Thomas IhnD-PHYS, Nanophysics
www.nanophys.ethz.ch
Main Research Interests:- Electron and spin transport in quantum
dots and quantum rings- Scanning probes techniques applied to
semiconductor nanostructures
http://www.mastermicronano.ethz.ch/For more information, contact us or visit:For more information, contact us or visit: