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Size Nano Colloids Precisely and Quickly
Liquid Nanoparticle Sizer (LNS) SystemModel 9310
NANOPARTICLE MEASUREMENT SOLUTIONS
• 6 – 360 nm measurement range in under 5 minutes
• Actual quantitative concentrations
• Any particle, any shape, any composition, any distribution (including multimodal)
• Great for CMP slurry, resin rinse, bio-pharma, and filter characterization, monitoring, and control
Industry Recognition• C79-0113 Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems• C93-0217 Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water Systems
CMP Slurry Characterized with the LNS System
Multi-Mode CMP Slurry Measurement
Particle Diameter (nm)
Diffe
rent
ial V
olum
e Co
ncen
trat
ion
d(n
m3 /m
L/d
log
(DP)
2.0e+16
1.8e+16
1.6e+16
1.4e+16
1.2e+16
1e+16
8e+15
6e+15
4e+15
2e+15
010 20 30 40 50 60 70 80 90 100
Multi-mode colloids are easily distinguished
30 nm Rated Water FilterChallenged with 2E8 #/ml (6 ppm) 30 nm Particles
Fractional Coverage (Monolayers)
Rete
ntio
n (%
)
100
80
60
40
20
00.000 0.025
SilicaPSLGold
0.050 0.075 0.100 0.125 0.150 0.175 0.200
Filter retention depends on the challenge particle
UPW Rinse of Ion Exchange Resin
Flush Volume (Liters UPW)
Cum
mul
ativ
e Pa
rtic
le C
once
ntra
tion
Adde
d (#
/mL
>10
nm
)
1e+9
1e+8
1e+7
1e+6
1e+51 10 100 1000
Resin AResin BResin CResin DResin EResin FSpool
Resin rinse times vary widely
Filter Performance Testing Resin Rinse Benchmarking
Data prepared and presented by CT Associates to the SEMI Ion Exchange Task Force on 02/27/2014
Van Schooneveld et. al., American Filtration Society Spring Conference, Minneapolis, MN, 2013
Van Schooneveld et. al., Nanotech 2011: Technical Proceedings of the 2011 Nanotechnology Conference and Expo
Kanomax FMT, Inc. 4104 Hoffman Road White Bear Lake, Minnesota 55110-3708 USA Phone +1 (651) 762-7762 Fax +1 (651) 762-7763 www.KanomaxFMT.com
Flaretek is a registered trademark of Entegris, Inc. Swagelok is a registered trademark of Swagelok Company Windows is a registered trademark of Microsoft Corporation Printed in the USA. 6/2019 Copyright © 2019 Kanomax FMT
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Kanomax FMT and the Kanomax Group have unique aerosol expertise and can deliver powerful solutions to your nanoparticle measurement challenges. Let’s get started - connect with us today!
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Specifications Particle size range: 6-360 nmParticle size resolution: 64 channels per decade of sizeMeasurement time: <5 minutesInspection volume rate: 0.2-1.0 μL/minTotal liquid sample flow rate (online): 50-280 mL/minNebulizer flow rate: 0.5-3.0 mL/min (direct injection)Dilution factor range: 50-20,000Colloid concentration range (post dilution): 3E7-3E11 number/mLResponse time to concentration change: <90 secondsInlet water pressure (online): 140-300 kPa (20-45 psig)Compressed air flow rate/pressure: 2.5 std L/min CDA or Nitrogen 2.8 bar (50 - 60 psi)Wetted surfaces (before nebulization): PFA, PTFE, sapphire, 316L stainless steel, PEEKCPC working fluid: n-butyl alcohol (butanol)I/O Communications: Ethernet, internal memoryPower requirements: 100/115/220/240 VAC; 50-60 HzOperating temperature: 10-35°COperating humidity: 0-90% RH non-condensingStorage temperature: 5-35°CDimensions: 9.5 × 8 × 36 inches (D/W/H)Software – computer operating system: Windows 10
Refer to individual product sheets for component details.Computer not included.
Specifications subject to change without notice. The LNS System was developed in collaboration with CT Associates, Inc. The LNS System uses a soft X-ray charge conditioner.
Particle Diameter
Conc
entra
tion
Aerosolization Particle Size Distribution Measurement
Colloid Sample
EngineeredNebulization
CondensationParticle Counter
Evaporation Charge Conditioning, Electrical Mobility-based
Particle Size Classification
Integrated Software Platform - Kanolysis• All-in-one control of the LNS system• Automated sampling sequence• Real-time data analysis
Patent Protected• Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax. • Kanomax has applied for additional domestic and international patents for technology contained within the LNS System. • Patent number 7,852,465 has been issued to Kanomax.
Principle of Operation
View Analysis
Kanolysis - View AnalysisK
500
400
300
200
100
01 2 5 10 2
Geometric MeanDiameter (nm)
StatisticsGSD Total Concentration
(#/ml)D10 (nm) D50 (nm) D90 (nm)
Diameter (nm)
Conc
entr
atio
n (#
/ml)
5 100 2 5 1000
Plot
Example
Measured Data 40.7 2.32 2.91e+4 14.4 34.5 132
44.3 2.14 2.72e+4 16.2 41.9 120
27.9 1.80 2.08e+4 12.9 26.2 61.0
114 1.54 6.75e+3 64.3 112 194
Single Mode Curve Fit
Mode 1 Curve Fit
Mode 2 Curve Fit