new architectures for pw-scale high peak power …new architectures for pw-scale high peak power...

40
LLNL-PRES-761044 This work was performed under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under contract DE-AC52-07NA27344. Lawrence Livermore National Security, LLC New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018 EUV Source Workshop HiLASE & ELI, Prague, Czech Republic Craig W. Siders , [email protected] Physicist, Senior Scientist, Commercial Tech Development Leader Constantin Haefner Program Director A.J. Bayramian, A.C. Erlandson, T.C. Galvin, S. Langer, E.F. Sistrunk, T.M. Spinka Advanced Photon Technologies, NIF & Photon Science Lawrence Livermore National Laboratory, DOE/NNSA November 6 th , 2018

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Page 1: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

LLNL-PRES-761044This work was performed under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under contract DE-AC52-07NA27344. Lawrence Livermore National Security, LLC

New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation2018 EUV Source Workshop

HiLASE & ELI, Prague, Czech Republic

Craig W. Siders, [email protected], Senior Scientist, Commercial Tech Development Leader

Constantin HaefnerProgram Director

A.J. Bayramian, A.C. Erlandson, T.C. Galvin,S. Langer, E.F. Sistrunk, T.M. Spinka

Advanced Photon Technologies, NIF & Photon ScienceLawrence Livermore National Laboratory, DOE/NNSA

November 6th, 2018

Page 2: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

2LLNL-PRES-761044

Sierra: 125-PetaFLOP

World’s 3rd fastest supercomputer

HAPLS: World’s fastest Petawatt laser

NIF: World’s highest energy Petawatt laser

LLNL is a premier Science-basedStockpile Stewardship Laboratory

Why does LLNL care about EUVL?

Page 3: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

3LLNL-PRES-761044

Why does LLNL care about EUVL?

2019Sierra125-PetaFLOP

2023El Capitan1 ExaFLOP

1015 transistors

Why does LLNL care about EUVL?Because Stewardship is FLOPS

Cost/transistor fundamentally underlies Stewardship.

Page 4: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

4LLNL-PRES-761044

Pulsed 10-µm CO2 lasers are current leader for the main pulse drive laser in 13.5-nm Sn EUV system

LLNL-PRES-7330315

Verybasic“simulations”haveprovidedextremelyvaluableguidance

Nishihara,etal,PhysicsofPlasmas15,056708(2008)

! =IEUV,CR + IEUV,HD

IEUV + Iion + Irad, !10"

where IEUV,CR and IEUV,HD are the radiation fluxes of13.5-nm emission in the 2% bandwidth from the corona andhigh-density region, respectively.

The kinetic and ionization loss fluxes are independent oftime in the isothermal expansion model; however, since theplasma scale length increases with time, the radiation lossflux depends on it, and therefore on the laser pulse duration.For a given ion density and an electron temperature !n0 ,Te",we can optimize the CE by changing the pulse duration.Figure 2 shows the maximum CE !solid" and the absorbedlaser intensity !dotted" required to sustain the plasma in !ni#n0 ,Te" plane thus obtained. The CE is strongly dependenton the electron temperature and ion density. The CE of tintargets varies in the range of a few % to 12%. An electrontemperature in the range of 30–70 eV is required for highCE, because most 13.5-nm emission from tin comes fromions with the charge state Sn10−14+, and this range of electrontemperature is required for the ionization. A relatively highCE can be obtained in a relatively low ion density region,mainly due to large spectral efficiency, the ratio of 13.5-nmemission with 2% bandwidth to total radiation, and loweropacity in the low-density region. The required laser inten-sity decreases with a decrease in density and temperature, asexpected. The optimum laser pulse duration shown in Fig. 3decreases with an increase in density due to the opacity ef-fect in the high-density region. The power balance modelindicates that a longer wavelength laser, such as CO2, mayresult in higher CE compared with a shorter wavelength la-ser, such as an Nd:YAG glass laser.

The model prediction agrees fairly well with our experi-ments, at least for the 1 "m laser.6,11 The dependence of CEon the laser intensity and the absolute value of CE agrees

well with our experiments using a spherical target withGekko XII laser.6 The maximum CE of 3% was obtained atthe laser intensity of 5#1010−1011 W /cm2 in the experi-ment, which coincides with the theoretical prediction. Theoptimum laser pulse duration also agrees well with the ex-perimental observation of 2.2 ns using a planar target.11

III. INTEGRATED CODE DEVELOPMENTAND BENCHMARK

A. Charge exchange spectroscopy and atomic codes

For the investigation of the plasma, spectroscopic data ofions are necessary; however, spectroscopic data on multiplycharged tin and xenon ions are fairly limited at present. Theenergy levels of those multiply charged ions have not yetbeen established because of the complexity of their elec-tronic structures attributed to strong electron correlation be-tween large numbers of active electrons.29 Charge exchangespectroscopy, in which line intensities of photon emissionsare measured following the charge-transfer reaction in colli-sions of multiply charged ions with neutral target gases, isused here to investigate the transition energies and energylevels of multiply charged ions.21,30,31 The multiply chargedtin ions were produced in a 14.25-GHz electron cyclotronresonance !ECR" ion source at Tokyo MetropolitanUniversity.32 The ions were extracted with an electric poten-tial of 20 kV, and were selected by a dipole magnet accord-ing to their mass-to-charge ratios. The ion beam was directedinto a collision chamber, where the beam intersected an ef-fusive target gas beam from a multicapillary plate. Opticalradiation from the collision volume was observed at 90° tothe ion-beam direction using a compact grazing-incidencespectrometer equipped with a liquid-nitrogen-cooled CCDcamera.

Figure 4 shows the EUV spectra of multiply charged tinions Snq+ !8$q$21" passing through a He gas target in thewavelength range of 6–24 nm. The single-electron capture is

109W/cm2

12% 10% 8% 6% 4% 2%

1012W/cm21011W/cm21010W/cm2

ion density (cm-3)

electrontemperature(eV)

90

80

70

60

50

40

30

201017 1018 1019 1020

FIG. 2. !Color" Optimum conversion efficiency from 1 to 13% with incre-ment of 1% !color", and absorbed laser intensities 109, 1010, 1011, and1012 W /cm2 from left to right !solid lines", are required to sustain theplasma in !ni ,Te" plane.

462210

52

electrontemperature(eV)

90

80

70

60

50

40

30

201017 10201018 1019

ion density (cm-3)FIG. 3. !Color" Optimum pulse duration in ns for maximum conversionefficiencies of 2, 5, 10, 22, and 46 ns from right to left in the !ni ,Te" plane.

056708-4 Nishihara et al. Phys. Plasmas 15, 056708 !2008"

Downloaded 13 Nov 2012 to 193.1.170.40. Redistribution subject to AIP license or copyright; see http://pop.aip.org/about/rights_and_permissions

§ Steady-statepowerbalanceà conversionefficiency(CE)laserabsorption/atomickinetics/hydrodynamics/radiativeemission

§ Lowdensitiesà prepulse +longerwavelengthlaser(CO2 ,λ =10.6 µm)

Optimum CE, absorbed laser power (λ = 1.06 µm)

! =IEUV,CR + IEUV,HD

IEUV + Iion + Irad, !10"

where IEUV,CR and IEUV,HD are the radiation fluxes of13.5-nm emission in the 2% bandwidth from the corona andhigh-density region, respectively.

The kinetic and ionization loss fluxes are independent oftime in the isothermal expansion model; however, since theplasma scale length increases with time, the radiation lossflux depends on it, and therefore on the laser pulse duration.For a given ion density and an electron temperature !n0 ,Te",we can optimize the CE by changing the pulse duration.Figure 2 shows the maximum CE !solid" and the absorbedlaser intensity !dotted" required to sustain the plasma in !ni#n0 ,Te" plane thus obtained. The CE is strongly dependenton the electron temperature and ion density. The CE of tintargets varies in the range of a few % to 12%. An electrontemperature in the range of 30–70 eV is required for highCE, because most 13.5-nm emission from tin comes fromions with the charge state Sn10−14+, and this range of electrontemperature is required for the ionization. A relatively highCE can be obtained in a relatively low ion density region,mainly due to large spectral efficiency, the ratio of 13.5-nmemission with 2% bandwidth to total radiation, and loweropacity in the low-density region. The required laser inten-sity decreases with a decrease in density and temperature, asexpected. The optimum laser pulse duration shown in Fig. 3decreases with an increase in density due to the opacity ef-fect in the high-density region. The power balance modelindicates that a longer wavelength laser, such as CO2, mayresult in higher CE compared with a shorter wavelength la-ser, such as an Nd:YAG glass laser.

The model prediction agrees fairly well with our experi-ments, at least for the 1 "m laser.6,11 The dependence of CEon the laser intensity and the absolute value of CE agrees

well with our experiments using a spherical target withGekko XII laser.6 The maximum CE of 3% was obtained atthe laser intensity of 5#1010−1011 W /cm2 in the experi-ment, which coincides with the theoretical prediction. Theoptimum laser pulse duration also agrees well with the ex-perimental observation of 2.2 ns using a planar target.11

III. INTEGRATED CODE DEVELOPMENTAND BENCHMARK

A. Charge exchange spectroscopy and atomic codes

For the investigation of the plasma, spectroscopic data ofions are necessary; however, spectroscopic data on multiplycharged tin and xenon ions are fairly limited at present. Theenergy levels of those multiply charged ions have not yetbeen established because of the complexity of their elec-tronic structures attributed to strong electron correlation be-tween large numbers of active electrons.29 Charge exchangespectroscopy, in which line intensities of photon emissionsare measured following the charge-transfer reaction in colli-sions of multiply charged ions with neutral target gases, isused here to investigate the transition energies and energylevels of multiply charged ions.21,30,31 The multiply chargedtin ions were produced in a 14.25-GHz electron cyclotronresonance !ECR" ion source at Tokyo MetropolitanUniversity.32 The ions were extracted with an electric poten-tial of 20 kV, and were selected by a dipole magnet accord-ing to their mass-to-charge ratios. The ion beam was directedinto a collision chamber, where the beam intersected an ef-fusive target gas beam from a multicapillary plate. Opticalradiation from the collision volume was observed at 90° tothe ion-beam direction using a compact grazing-incidencespectrometer equipped with a liquid-nitrogen-cooled CCDcamera.

Figure 4 shows the EUV spectra of multiply charged tinions Snq+ !8$q$21" passing through a He gas target in thewavelength range of 6–24 nm. The single-electron capture is

109W/cm2

12% 10% 8% 6% 4% 2%

1012W/cm21011W/cm21010W/cm2

ion density (cm-3)

electrontemperature(eV)

90

80

70

60

50

40

30

201017 1018 1019 1020

FIG. 2. !Color" Optimum conversion efficiency from 1 to 13% with incre-ment of 1% !color", and absorbed laser intensities 109, 1010, 1011, and1012 W /cm2 from left to right !solid lines", are required to sustain theplasma in !ni ,Te" plane.

462210

52

electrontemperature(eV)

90

80

70

60

50

40

30

201017 10201018 1019

ion density (cm-3)FIG. 3. !Color" Optimum pulse duration in ns for maximum conversionefficiencies of 2, 5, 10, 22, and 46 ns from right to left in the !ni ,Te" plane.

056708-4 Nishihara et al. Phys. Plasmas 15, 056708 !2008"

Downloaded 13 Nov 2012 to 193.1.170.40. Redistribution subject to AIP license or copyright; see http://pop.aip.org/about/rights_and_permissions

Optimum pulse duration (in ns)

50-kHz, 10’s-ns, 0.5-J, 20-kW average, MW’s peak power,~5% E-O efficiencies~1-3% wall-plug

10-µm CO2

10-µm CO21-µm Nd

CO2 lasers were the early choice for 13.5-nm EUV development- Scalable high-power laser architecture- Long wavelength well matched for MP interaction- DPSSL (diode-pumped solid-state laser) tech in

infancy CE: ~6-7%

Page 5: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

5LLNL-PRES-761044

§ DPSSLs have significantly closed the gap in last 20 years. LLNL’s short-wave

IR (SWIR, 2µm) DPSSL architecture is scalable to higher average power (~300

kW) than current commercial CO2 lasers (~20 kW) and has many advantages:

— Efficiency: estimated to be 3x more efficient, wall-plug.

— Stability: Reduced thermal load, improved thermal management, and

diode pumping - <1% shot-to-shot energy stability

— Compactness: For 300-kW system, 1.5m x 20m single-layer (plus a 4 m2

pulse compressor vacuum vessel for short-pulse operation)

— Agile Pulsewidth: broadband, passively switched architecture – short

(sub-ps) to long (sub-us to CW).

— Flexible high peak-power: Can trade energy and rep-rate at fixed average

power, MW up to multi-PW peak.

— Shaping: pulses can be dynamically temporally shaped accurately to

desired profile.

— Multi-function: both pre-pulse and main pulse can be amplified

colinearly in same amplifier.

Bottom Line Up Front: Scalable diode-pumped solid state lasers could drive next-generation EUV sources

Page 6: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

6LLNL-PRES-761044

Bottom Line Up Front: Scalable diode-pumped solid state lasers could drive next-generation EUV sources

*See “Simulating EUV Production - an Overview of the Underpinnings,” Howard Scott and Steve Langer, 2017 International Workshop on EUV LithographyJune 12-15, 2017 Berkeley, CA

?

§ Key outstanding question: 2-µm vs. 10-µm. Does this help or hurt conversion efficiency?— Locations of energy deposition and EUV

emission are closely matched for Sn/CO2— 30x difference in critical densities for 2 vs 10,

so absorption and emission more separated— For Sn/2-µm, will energy be effectively

conveyed across this gap?

§ We have utilized 1D HYRDA simulation* to initially assess 2-um conversion efficiency.

CE = ?

Page 7: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

7LLNL-PRES-761044

§ The highest 2-µm conversion efficiency is 12.1% for 3.6-GW/cm2. The emission peaks at wavelengths shorter than 13.5 nm.

§ Pulse lengths were varied to match burn-through times.

§ 10-µm CO2 CE:— Up to 6-7% expt.— 1D HYRDA: >10%

1D HYDRA Simulations of 13.5 nm EUV emission for Sn/2-µm evidence conversion efficiencies on-par with CO2

2-µm SWIR lasers should be considered for next-gen EUV drive lasers.

5 10 15 20

1.

2.

3.

4.

10−6

Integrated spectrum

wavelength(nm)

spec

trum

3.6-GW/cm2

10-6

5 10 15 20Emission Wavelength [nm]

Integrated Spectra

4

3

2

1

0 2-µm Drive Laser

CE = 12.1%

5 10 15 200.

2.

4.

6.

10−8

Integrated spectrum

wavelength(nm)

spec

trum

1.35-GW/cm2

10-8

5 10 15 20Emission Wavelength [nm]

6

4

2

0 2-µm Drive Laser

CE = 6.5%0.4-GW/cm2

5 10 15 200.0

0.2

0.4

0.6

0.8

1.0

1.2

10−7

Integrated spectrum

wavelength(nm)

spec

trum

5 10 15 20Emission Wavelength [nm]

0.2

0.0

10-7

0.8

0.6

0.4

1.0

1.2

2-µm Drive Laser

CE = 0.92%

CE = 7.5%

5 10 15 20

2.

4.

6.

8.

10−7

Integrated spectrum

wavelength(nm)

spec

trum

10-7

5 10 15 20Emission Wavelength [nm]

Integrated Spectra

8

6

4

2

0 2-µm Drive Laser

2.1-GW/cm2

Page 8: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

8LLNL-PRES-761044

1-PW

13-PW

Entire Earth:175-PW

1-PW = 1015 W = 1000000000000000 Watt = 1 Trillion tea/coffee pots

What do we mean by high peak power lasers?

Page 9: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

9LLNL-PRES-761044

9

Chirped Pulse Amplification was the key for unlocking PW lasers

Page 10: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

10LLNL-PRES-748574

1996: The First Petawatt Laser, invented at LLNL: 600 J, >1 PW

Petawatt specs:• 1.3-PW = 1,300,000,000,000,000 Watts of power• 600-J / 0.5-ps (1-ps = 0.000000000001-sec)• Chirped-pulse amplification• 4-shots per day• Average power = 0.007-W• ~1021 W/cm2 intensity = 3.3x1010 J/cm3 = 300x109 bar = 108-K

LLNL-PRES-761044

Page 11: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

11LLNL-PRES-761044

11

e-, e+, p+, n, ion

Numerous particle and photon secondary sources are produced in the interaction of an intense laser with a solid

LLNL-PRES-748574LLNL-PRES-761044

Page 12: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

12LLNL-PRES-761044

1996: The First Petawatt Laser, invented at LLNL: 600 J, >1 PW

Petawatt discoveries:

• 10-100-MeV electron beams

• 10-100-MeV proton and ion beams

• Hard x-rays and gamma-rays

• Photo-fission

• Positron production

Petawatt specs:

• 1.3-PW = 1,300,000,000,000,000 Watts of power

• 600-J / 0.5-ps (1-ps = 0.000000000001-sec)

• Chirped-pulse amplification

• 4-shots per day

• Average power = 0.007-W

• ~1021 W/cm2 intensity = 3.3x1010 J/cm3 = 300x109 bar = 108-K

Page 13: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

13LLNL-PRES-748574

High-resolution x-ray microscopy

Betatron X-rays

Sensitive nuclear material detection

SNM Detection

Effective confidence in parts

Non-Destructive

Tailor made properties

Ind. Processing

Laboratory astrophysics

HEDS/Material Sci.

Compact laser-based accelerators

Accelerators

Hadron therapy – cancer treatment

Medical

Exploring nanoscale magnetism

High-Harmonics

8

6

4

2

-5 5 0

Log

Tem

pera

ture

(K)

Log density(g/cm3)

Sun

Earth’s core

Jupiter

M=60 sun

Brown dwarf

Giant Planet

Inertial fusion

Log density (g*cm-3)

Log

tem

pera

ture

(K)

solid

pressure = 1 Mbar

atomic pressures ~ Eh /a

B 3

HED regime P>1Mbar

DD fusion

SuperNovaremnant

LLNL-PRES-761044

Page 14: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

14LLNL-PRES-748574

ANL-08/39 BNL-81895-2008

LBNL-1090E-2009 SLAC-R-917

Science and Technology of Future Light Sources

A White Paper

Report prepared by scientists from ANL, BNL, LBNL and SLAC. The coordinating team consisted of Uwe Bergmann, John Corlett, Steve Dierker, Roger Falcone, John Galayda, Murray Gibson, Jerry Hastings, Bob Hettel, John Hill, Zahid Hussain, Chi-Chang Kao, Janos Kirz, Gabrielle Long, Bill McCurdy, Tor Raubenheimer, Fernando Sannibale, John Seeman, Z.-X. Shen, Gopal Shenoy, Bob Schoenlein, Qun Shen, Brian Stephenson, Joachim Stöhr, and Alexander Zholents. Other contributors are listed at the end of the document.

Argonne National Laboratory

Brookhaven National Laboratory

Lawrence Berkeley National Laboratory

SLAC National Accelerator Laboratory

December 2008

Applications of Fusion Energy Sciences Research

Scientific Discoveries and New Technologies Beyond Fusion

Fusion Energy Sciences Advisory Committee—U.S. Department of Energy Office of Science September 2015

BASIC RESEARCH DIRECTIONSfor User Science at the National Ignition Facility

Report on the National Nuclear Security Administration – Office of Science Workshop on Basic Research Directions on User Science at the National Ignition Facility

Workshop on Energy and Environmental Applications of Accelerators

June 24–26, 2015

1 N u c l e a r P o s t u r e R e v i e w Re po r t

National Nuclear Security Administration United States Department of Energy

Washington, DC 20585

Prevent, Counter, and Respond—A Strategic Plan to Reduce Global Nuclear Threats

FY 2017–FY 2021 Report to Congress March 2016

Copyright © National Academy of Sciences. All rights reserved.

Predictive Theoretical and Computational Approaches for Additive Manufacturing: Proceedings of a Workshop

Michelle Schwalbe, Rapporteur

U.S. National Committee on Theoretical and Applied Mechanics

Board on International Scientific Organizations

Policy and Global Affairs

Predictive Theoretical and Computational Approaches for Additive Manufacturing

Proceedings of a Workshop

PREPUBLICATION COPY—UNEDITED PROOFS

Copyright © National Academy of Sciences. All rights reserved.

Making Value for America: Embracing the Future of Manufacturing, Technology, and Work: Summary

MAKING VALUE FORAMERICAEmbracing the Future

of Manufacturing,

Technology, and Work

SUMMARY

Workshop on Laser Technology for Accelerators

Summary Report

January 23–25, 2013

DOE Advanced Accelerator Concepts Research Roadmap Workshop

February 2–3, 2016

Image credits: lower left LBNL/R. Kaltschmidt, upper right SLAC/UCLA/W. An

High-resolution x-ray microscopy

Betatron X-rays

Sensitive nuclear material detection

SNM Detection

Effective confidence in parts

Non-Destructive

Tailor made properties

Ind. Processing

Laboratory astrophysics

HEDS/Material Sci.

Compact laser-based accelerators

Accelerators

Hadron therapy – cancer treatment

Medical

Exploring nanoscale magnetism

High-Harmonics

8

6

4

2

-5 5 0

Log

Tem

pera

ture

(K)

Log density(g/cm3)

Sun

Earth’s core

Jupiter

M=60 sun

Brown dwarf

Giant Planet

Inertial fusion

Log density (g*cm-3)

Log

tem

pera

ture

(K)

solid

pressure = 1 Mbar

atomic pressures ~ Eh /a

B 3

HED regime P>1Mbar

DD fusion

SuperNovaremnant

LLNL-PRES-761044

Page 15: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

15LLNL-PRES-761044

Worldwide scientific laser facilities mostly meet the demands for proof of principle experiments

High-field

ICF/IFE/HEDMat.Phys.

Ultrafast

WDMSPL PumpsIndustrial Appl.EUVL

l3

Average PowerPeak Power

Ti:Sa

Nd:g

Yb:X

OPA

Gas

Laser Media

Er:X

Cr:X

Tm:X

Operational

In Build

Conceptual

De-activatedApplication

Page 16: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

16LLNL-PRES-761044

Commercial and advanced scientific short pulse laser applications require high repetition rate

NeutronRadiography

HadronTherapy

NeutronMaterials Development

HAPLS

Peak Power

Average Power

X-FELs & HHG

Laser Fusion PowerFast-Ignition

Inertial Confinement Fusion

Ti:Sa

Nd:g

Yb:X

OPA

Gas

Laser Media

Er:X

Cr:X

Tm:X

e+/e-collidersx/g-beams

Operational

In Build

Conceptual

De-activatedApplication

SpaceDebrisClearing

Feed-Forward Feed-Back

The increase in repetition-rate of PW-class lasers enables both practical commercial applications and “closes the loop” on intensity performance.

EUVLithography

Page 17: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

17LLNL-PRES-761044

High-average Power, High-Intensity Lasers are poised to have far reaching impact on industry, society, and science

Pushing the frontiers of high-power applications and high-intensity science requires next-generation high repetition-rate high-energy solid state lasers.

Ti:Sa

Nd:g

Yb:X

OPA

Gas

Laser Media

Er:X

Cr:X

Tm:X

Operational

In Build

Conceptual

De-activated

Application

1996 “The PW Laser” @LLNL

Pulse Energy

Page 18: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

18LLNL-PRES-761044

High-average Power, High-Intensity Lasers are poised to have far reaching impact on industry, society, and science

Pushing the frontiers of high-power applications and high-intensity science requires next-generation high repetition-rate high-energy solid state lasers.

Ti:Sa

Nd:g

Yb:X

OPA

Gas

Laser Media

Er:X

Cr:X

Tm:X

Operational

In Build

Conceptual

De-activated

Application

Pulse Energy

2017: The LLNL/ELI HAPLS1996 “The PW Laser” @LLNL

1000x100x10x

SDC

GW

MW

Page 19: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

19LLNL-PRES-761044

20 years later: LLNL/ELI’s HAPLS-L3 laser runs 200,000 times faster than the original 1996 Petawatt

Page 20: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

20LLNL-PRES-761044

• Designed, built and commissioned at LLNL (2013-2017): 3 years from concept to product• HAPLS is installed and recommissioned in the L3 hall at ELI• Integrated team approach to ensure successful technology transfer• All milestones met on time and on schedule• Delivery of a robust, highly automated laser system for integration into user facility

HAPLS Project: Design, development and delivery of a Petawatt capable of firing at 10Hz repetition rate = 1MJ/hour

The HAPLS Laser

Page 21: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

21LLNL-PRES-761044

ELI L3-High-repetition-rate Advanced Petawatt Laser System (L3-HAPLS) is the only PW-class DPSSLP laser operational today

Requirement SpecificationEnergy at 820nm ≥30 J (Phase 2)Pulse Length ≤30 fsPeak Power ≥1 PWPre-pulse Power Contrast ≤10-9 ≤ c ≤10-11

Energy Stability 0.6% rmsTechnology DPSSL pumped Ti:sapphire CPARepetition Rate 10 Hz (Phase 2)Power Consumption <150 kW

June 2018: HAPLS Final Review

242018 ICALEO plenary.ppt – Haefner – 2018-10-16

July 2018

LLNL-PRES-761044

Page 22: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

22LLNL-PRES-761044LLNL-PRES-748574

l/4

Relay

Diodes

Diodes

Diodes

He gascooling

He gascooling

Spatial Filter

Injection Transport Relay

Polarizer

LongPulse FrontEnd

Relay

Amp 2 Amp 1

Adaptive optic

Injection Transport

Ti:sapphireAmplifier

Frequency Converter

The HAPLS pump architecture utilizes dual diode-pumped surface-cooled multislab amplifiers in a 4-pass polarization switched architecture

Adaptive optic

Downscaled 10-kJ/10-Hz Inertial Fusion Energy (IFE) Laser Design

HAP Compressor

LLNL-PRES-761044

Page 23: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

23LLNL-PRES-761044LLNL-PRES-748574LLNL-PRES-761044

Page 24: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

24LLNL-PRES-761044

Ti:Sa

Nd:g

Yb:X

OPA

Laser Media

Er:X

Cr:X

Tm:X

Efficient, long gain-lifetime materials are preferred for next-generation diode-pumped architectures

Efficient, Diode-pumpableLaser Media

Gain Bandwidth

(1� ⌘QD) · ⌘conversion

· ⌘diode

Ti:S

Nd:G

Page 25: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

25LLNL-PRES-761044LLNL-PRES-748574

l/4

Relay

Diodes

Diodes

Diodes

He gascooling

He gascooling

Spatial Filter

Injection Transport Relay

Polarizer

LongPulse FrontEnd

Relay

Amp 2 Amp 1

Adaptive optic

Injection Transport

Ti:sapphireAmplifier

Frequency Converter

The HAPLS pump architecture utilizes dual diode-pumped surface-cooled multislab amplifiers in a 4-pass polarization switched architecture

Adaptive optic

Downscaled 10-kJ/10-Hz Inertial Fusion Energy (IFE) Laser Design

HAP Compressor

LLNL-PRES-761044

Page 26: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

26LLNL-PRES-761044LLNL-PRES-748574

l/4

Relay

Diodes

Diodes

Diodes

He gascooling

He gascooling

Spatial Filter

Injection Transport Relay

Polarizer

HighContrastShortPulse FrontEnd

Relay

Amp 2 Amp 1

Adaptive optic

The dual-diode pumped surface-cooled multislab amplifier in a 4-pass polarization switched architecture is a template for high average power high peak-power systems

HAP Compressor

LLNL-PRES-761044

Page 27: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

27LLNL-PRES-761044

Based on HAPLS pump laser and NIF ARC technology, LLNL has developed a concept for a Scalable High-average-power Advanced Radiographic Capability

OutputWaste

Indirect CPA: DPSSL-pumped Ti:S 2.6%

Efficiency

1-JIndirect CPA: Lamp-pumped SSL pumped Ti:S

1-J

0.4%WP EO

3.8%

0.6%

Direct CPA: SHARC 5.0% 7.2%1-J

LLNL-PRES-761044

Page 28: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

28LLNL-PRES-761044

SHARCScalable High-power Advanced Radiographic Capability

150-J, 150-fs, 1-PW, 10-Hz

Page 29: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

29LLNL-PRES-761044

Ti:Sa

Nd:g

Yb:X

OPA

Laser Media

Er:X

Cr:X

Tm:X

Efficient, long gain-lifetime materials are preferred for next-generation diode-pumped architectures

Efficient, Diode-pumpableLaser Media

Gain Bandwidth

(1� ⌘QD) · ⌘conversion

· ⌘diode

Ti:S

Tm:YLF

Nd:G

Page 30: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

30LLNL-PRES-761044

BATBig Aperture Thulium Laser

30-J, 100-fs, 0.3-PW, 10-kHz300-kW Average Power

Page 31: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

31LLNL-PRES-761044LLNL-PRES-748574

BAT utilizes 2x the laser diodes of HAPLS, but has 1000x the average power!

LLNL-PRES-761044

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Page 33: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

33LLNL-PRES-761044

Diode pumping and multi-pulse extraction have significant impact on system efficiencies

1-H

z 30

-J F

lash

lam

p-pu

mpe

d SS

L-pu

mpe

d Ti

S10

-Hz

30-J

DPS

SLpu

mpe

d Ti

S

10-k

Hz

30-J

BAT

10-H

z/15

0-J

SHAR

C

LegendOutputSlab HeatingFuorescenceTransportUnconverted LightPump Light LossPump HeatElectronics HeatRefridgeration

1-J 1-J 1-J 1-J

Page 34: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

34LLNL-PRES-761044

BAT-Class

BAT-Class lasers set a new standard for high average and high peak power lasers with high true wall-plug efficiency

0.2-J 100-kHz

Estimated from EO-efficiencyTanino et al, 2013 ISEUVL

EUV: 3-J

100-kHz

Page 35: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

35LLNL-PRES-761044LLNL-PRES-748574

l/4

Relay

Diodes

Diodes

Diodes

He gascooling

He gascooling

Spatial Filter

Injection Transport Relay

Polarizer

HighContrastShortPulse FrontEnd

Relay

Amp 2 Amp 1

Adaptive optic

The dual-diode pumped surface-cooled multislab amplifier in a 4-pass polarization switched architecture is a template for high average power high peak-power systems

HAP Compressor

fs’s, PW’s>1020W/cm2

LLNL-PRES-761044

Page 36: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

36LLNL-PRES-761044LLNL-PRES-748574

l/4

Relay

Diodes

Diodes

Diodes

He gascooling

He gascooling

Spatial Filter

Injection Transport Relay

Polarizer

LongPulse FrontEnd

Relay

Amp 2 Amp 1

Adaptive optic

The dual-diode pumped surface-cooled multislab amplifier in a 4-pass polarization switched architecture is a template for high average power EUV drive laser systems

ns’s, MW’s~109-13W/cm2

Pre-Pulse FrontEnd

LLNL-PRES-761044

Page 37: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

37LLNL-PRES-761044LLNL-PRES-748574

l/4

Relay

Diodes

Diodes

Diodes

He gascooling

He gascooling

Spatial Filter

Injection Transport Relay

Polarizer

DualPulseLong-ShortPulse FrontEnd

Relay

Amp 2 Amp 1

Adaptive optic

The dual-diode pumped surface-cooled multislab amplifier in a 4-pass polarization switched architecture is a template for high average power EUV drive laser systems

HAP Compressor

ns’s, MW’s~109-18W/cm2

LLNL-PRES-761044

Page 38: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

38LLNL-PRES-748574

LLNL’s high-power DPSSL architectures scale to 100’s kW average power, advancing both scientific and industrial frontiers

23LLNL-PRES-748574

SHARCScalable High-power Advanced Radiographic Capability

150-J, 150-fs, 1-PW, 10-Hz

26LLNL-PRES-748574

BATBig Aperture Thulium Laser

30-J, 100-fs, 0.3-PW, 10-kHz300-kW Average Power

EUV-BAT:3-J (PP + MP)100-kHz

Scalable & efficient 2-µm BAT is a strong candidate next-gen Blue-X driver lasers.

Page 39: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

LLNL-PRES-761044

Page 40: New Architectures for PW-Scale High Peak Power …New Architectures for PW-Scale High Peak Power Lasers Scalable to Near-MW Average Powers and Their Application to EUV Generation 2018

40LLNL-PRES-761044

HAPLS system architecture

Frontend Alpha Amplifier

Beta(Power)

Amplifier

wideband MultipassAmplifier

Stretcher

Compressor

Beam Conditioning

Pulse shaping and contrast enhancement

Deformable Mirror

DPSSL pump lasers

Target

Harmonic converter

Pump power amplifier

Modified NIF front-end

Power amplifier

diagnostics3.2 MW laser diode arrays

ELI Beamlines facility control

system

Integrated Controls

HAPLS b Pump Laser