nmark agv-hp 11 motion controllers

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temperature of the device under varying loads, changes inambient temperature or beam clipping on the input aperture.

Real-Time Process VisibilityThe location of the AGV-HP mirrors can be captured andanalyzed in real time. With direct access to the positions ofthe scanner the user no longer has to program delayparameters to compensate for lag and tracking errors in theservo system. The process can be optimized prior tomarking the part, saving time and reducing material waste.The state of the laser can also be controlled based on in-position and velocity criteria, further reducingprogramming complexity.

Advanced Programming FeaturesThe AGV-HP utilizes all of Aerotech’s advanced motionand PSO (Position Synchronized Output) capabilities thathave been developed for traditional servo-based laserprocessing applications. Contouring functions such asAcceleration Limiting can be used to automatically reducespeeds in tight corners or small radii to minimize overshoot.The laser can be triggered based on the position feedback ofthe mirrors with PSO to ensure consistent spot overlap asthe scanner changes speed. Aerotech’s Infinite Field ofView (IFOVTM) function seamlessly combines servo andscanner motion to extend the marking capability of thescanner across the entire travel of the servo stages,eliminating stitching errors that can occur in a moretraditional move-expose-repeat process.

Design Choices The AGV-HP family is available with 10, 14, 20, and 30 mminput apertures and can be equipped with an F-Theta ortelecentric lens directly from Aerotech. Users can alsoacquire the focusing optic directly from a trusted supplierwith Aerotech supplying a spacer ring to ensure that backreflections through the optic do not damage the scannermirrors. Mirror coatings for a wide range of UV, visible, IRand CO2 wavelengths are supported. Coatings optimizedfor ultra-fast lasers are also available.

Nmark AGV-HPHigh Accuracy, Thermally Stable Galvo Scanner

The Ultimate in Accuracy and StabilityThe highly repeatable and thermally stable feedbacksensors used on the AGV-HP scanner systems can becalibrated down to single-digit, micron-level accuracy overthe field of view (see figure below). With the extremely lowthermal gain drift performance of the position transducers,complex, high-density laser machining applications thattake long periods of time to complete will maintainconsistent micron-level feature placement accuracy over thelifetime of the process. Likewise, high throughputapplications will maintain consistent part-to-part qualitywithout having to re-calibrate between parts. For thehighest level of thermal stability, the AGV-HP scanners canbe equipped with water cooling to stabilize the operating

Highest accuracy scanner available attainssingle-digit, micron-level accuracy over thefield of view

Optical feedback technology significantlyimproves thermal stability

Industry-best resolution of >24 bits when usedwith Aerotech’s Nmark CLS controller

Wide range of apertures and focal lengths

Many choices of mirror surface treatments for avariety of laser wavelengths

AGV-HP galvoscanner offersmicron-level accu-racy over the fieldof view.

Nmark AGV-HP provides industry-best micron-level 2D accuracyover the entire field of view.

Galvanometer

Nmark AGV-HP

2

Nmark AGV-HP SPECIFICATIONS

Mechanical Specifications AGV-10HP AGV-14HP AGV-20HP AGV-30HPBeam Aperture 10 mm 14 mm 20 mm 30 mm

Maximum Scan Angle ±20°

Beam Displacement 13.0 mm 18.0 mm 25.1 mm 35.7 mm

Feedback Resolution 0.007 µrad

Repeatability(1)(2) 2 µrad

Dither 0.2 µradrms(3)

Non-Linearity <0.01%

Gain Error 0.1 mrad

Thermal Drift

Offset Drift(4) 20 µrad/°C

Gain Drift(4) 1 ppm/°C

Long-Term Offset Drift(2)(4) 10 µrad/12 hrs

Small Angle Response Time(5) 400 µs 800 µs

Marking Speed(6) 3 m/s 2.5 m/s 1.5 m/s 0.9 m/s

Positioning Speed(6) 12.0 m/s 9.5 m/s 4.5 m/s 3.0 m/s

Tracking Error(7) 0 µs

Operating Temperature 25° ± 10°C

Mass 4.0 kg 4.3 kg 5.0 kg 5.8 kg

Material Aluminum (Black Anodize and Blue Paint)

MTBF (Mean Time Between Failure) 20,000 Hours

Electrical Specifications AGV-10HP AGV-14HP AGV-20HP AGV-30HP

Drive System Brushless Direct-Drive Galvano Motor

Feedback Noncontact Rotary Encoder

Maximum Bus Voltage ±40 VDC

Limit Switches Software Limits Only

Home Switch At Center

Notes:1. Uni-directional; 3-sigma from mean position.2. After initial 4 hour warm-up, ambient temperature variation <0.5°C.3. Without -AC air cooling option.4. Measured with galvo motors mounted in scan head.5. 0.1° mechanical step, settling to within 0.001° of final position.6. Typical performance with f = 160 mm F-Theta objective.7. In traditional scanning systems the tracking error is used to set the delays between laser pulses in order to compensate for the lag between command and response. The Nmark CLSfeatures Position Synchronized Output (PSO) capability that permits laser pulse commands to be tied directly to the position feedback of the galvo motors, thus providing laser scannercontrol with 0 (or near 0) tracking error.8. All angles are optical unless otherwise noted.9. All specifications are per axis unless otherwise noted.

Mirror Specifications(1)

Wavelength 343 nm 355 nm 515 nm 532 nm 1030 nm 1064 nm 1552 nm1030/515/343 nm

1064/532/355 nm

9.4 µm(2) 10.6 µm

Substrate Beryllium

Coating Dielectric

Reflectance >99%

Flatness λ/4 @ Wavelength of Use

MaximumCW LaserPower(3)

AGV-10HP 300 W(3) 120 W(3) 300 W(3) 120 W(3) 300 W(3) 300 W(3) 300 W(3) 120 W(3) 120 W(3) 60 W(3) 150 W(3)




DamageThresholdof Coating

Pulsed (8 ns) - 2 J/cm2 - 4 J/cm2 - 10 J/cm2 - - 7/3/1.5 J/cm2 - -

Pulsed (120 ns) - - - - - - - - - 0.8 J/cm2 2.0 J/cm2

Pulsed (325 fs) 0.10 J/cm2 0.04 J/cm2 0.20 J/cm2 0.08 J/cm2 0.40 J/cm2 0.20 J/cm2 0.30 J/cm2 0.20/0.15/0.10 J/cm2 - - -

Notes:1. Partial listing of supported wavelengths. Please consult Aerotech for a complete list of available mirrors.2. Values shown use the same mirror coating for both 10.6 µm and 9.4 µm wavelengths. 3. With -AC air cooling option; maximum average laser power is 1/3 this value without air cooling.

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Nmark AGV-HP DIMENSIONS

155

28.5 APPROXIMATE

20.6MAXIMUM

LENSIMMERSION

DEPTH 76

56 4.8

28.5

130

33 49

22 32 11 FOR

10 BEAM

130

7 14

15 21

M6X1.0 9(4) PLACES

M5X0.8 7.5(4) PLACES

4 H7 7DOWEL PIN HOLE

AND SLOT

PUSH-TO-CONNECTFITTING FOR 6MM OD TUBING

(-AC) AIR COOLING OPTION

COMPRESSION FITTINGSFOR 6MM OD TUBING

(-WC) WATER COOLING OPTION

FEEDBACK AND MOTORPOWER CONNECTORS

70

41

71 SQR

28.7 M5X0.8 7.5(4) PLACES 41

13BEAM

DISPLACEMENT

28.7

50

CL BEAM IN


AND SLOT

17.5 13

40

72.5 37.5

28.5



AND SLOT

(-1064-100) OPTICS CONFIGURATION(-MP) MOUNTING PLATE OPTION

(-AC-WC) COOLING OPTION

175

7.5

50

50

25

190 15

6.6 DRILL THRU11 C'BORE AS SHOWN

(6) PLACES


AND SLOTFROM FAR SIDE

SIDE VIEW(-MP) MOUNTING PLATE &

(-NC) NO COOLING OPTIONS

145

130

8.5 TYP

15

END VIEW(-MP) MOUNTING PLATE &


DIMENSIONS: MILLIMETERS

AGV-10HP-RSE

Galvanometer

Nmark AGV-HP

4www.aerotech.com


28.5 APPROXIMATE

155

56

76

20.6MAXIMUM

LENSIMMERSION

DEPTH

4.8

32 22

49 33

130

28.5

130 21 15

14 7 M6X1.0 9(4) PLACES


11 FOR10 BEAM


AND SLOT



(-AC) AIR COOLING OPTION COMPRESSION FITTINGFOR 6MM OD TUBING


71 SQR

41

28.7

41

70

50

28.7

13BEAM

DISPLACEMENT


13

40

37.5 72.5

28.5

17.5 M5X0.8 7.5(6) PLACES


AND SLOT

190 15 25

50

50

7.5

175

6.6 DRILL THRU 11 C'BORE AS SHOWN

(6) PLACES



145

130

8.5 TYP

15




CL BEAM IN


AND SLOT





AGV-10HP-LSE

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160

28.5 APPROXIMATE

5.5

16.9MAXIMUM

LENSIMMERSION

DEPTH 76

60

135

22 32

33 49

27

135

7

15

14

21

15 FOR14 BEAM

M6X1.0 9(4) PLACES



AND SLOT






71 SQR

28.7 41

18BEAM

DISPLACEMENT

50

28.7

41

76


CL BEAM IN


AND SLOT

75 40

27

13

40

15 M6X1.0 9(6) PLACES


AND SLOT



175

7.5

190 17.5

50

50

25


(6) PLACES





150

135

8.5 TYP

15




AGV-14HP-RSE

Galvanometer

Nmark AGV-HP

6www.aerotech.com


28.5 APPROXIMATE

160

16.9MAXIMUM

LENSIMMERSION

DEPTH

76

60 5.5 32 22

49 33

135

15

7

21

14

27

135

15 FOR14 BEAM


M6X1.0 9(4) PLACES







AND SLOT

71 SQR

28.7

41

50

28.7

41

76 18

BEAMDISPLACEMENT



AND SLOT

13

40

15

27

75 40

M6X1.0 9(6) PLACES


AND SLOT

175

7.5

50

50

25

190 17.5


(6) PLACES



135

15

8.5 TYP

150








CL BEAM IN

AGV-14HP-LSE

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175

28.5 APPROXIMATE

5.5

11MAXIMUM

LENSIMMERSION

DEPTH 87

75.5

150

49

33

25

135

14

21

21 FOR20 BEAM

M6X1.0 9(4) PLACES







AND SLOT

26.3

50.6

26.3

50.6 83.5

60

25.1BEAM

DISPLACEMENT

70

90

M6X1.0 9(4) PLACES

CL BEAM IN


AND SLOT



200

215 17.5

50

50

25

7.5


(6) PLACES





15

8.5 TYP

165

135



45

11

25

17.5

85 42.5

M6X1.0 9(6) PLACES


AND SLOTDIMENSIONS: MILLIMETERS

AGV-20HP-RSE

Galvanometer

Nmark AGV-HP

8www.aerotech.com


28.5 APPROXIMATE

175

11MAXIMUM

LENSIMMERSION

DEPTH

87

75.5 5.5

49 33

14

21

150

25

135

21 FOR20 BEAM

M6X1.0 9(4) PLACES


(-WC) WATER COOLING OPTIONFEEDBACK AND MOTORPOWER CONNECTORS


AND SLOT



70

26.3

60

50.6

25.1BEAM

DISPLACEMENT

90

M6X1.0 9(4) PLACES

26.3

83.5

50.6


AND SLOT

11

45

42.5 85

17.5

M6X1.0 9(6) PLACES

25


AND SLOT

200

7.5

50

50

25

215 17.5


(6) PLACES



165

15

135

8.5 TYP




CL BEAM IN





AGV-20HP-LSE

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28.5 APPROXIMATE

195

93

102

5.5 11

MAXIMUMLENS

IMMERSIONDEPTH

150

30

33 49

165

14

21

31 FOR30 BEAMM6X1.0 9

(4) PLACES



(-WC) WATER COOLING OPTIONPUSH-TO-CONNECT

FITTING FOR 6MM OD TUBING(-AC) AIR COOLING OPTION


AND SLOT

95 SQR.

90

58

33.5

65 33.5

117.5

98.5

35.7BEAM

DISPLACEMENT

M6X1.0 9(8) PLACES

58 CL BEAM IN


AND SLOT

57.5 85

M6X1.0 9(6) PLACES

22.5 16

50 30


AND SLOT

225

240 25

25

50

50

7.5

6.6 DRILL THRU 11.1 C'BORE AS SHOWN

() PLACES





150

8.5 TYP

15

180






AGV-30HP-RSE

Galvanometer

Nmark AGV-HP

10www.aerotech.com


150

30

165

33 49

14

21

M6X1.0 9(4) PLACES31 FOR

30 BEAM


AND SLOT


(-WC) WATER COOLING OPTIONFEEDBACK AND MOTORPOWER CONNECTORS



28.5 APPROXIMATE

195

93

102

11MAXIMUM

LENSIMMERSION

DEPTH

5.5

98.5

90

95 SQR.

35.7BEAM

DISPLACEMENT

117.5

65

58

33.5

M6X1.0 9(8) PLACES

58

33.5

CL BEAM IN


AND SLOT

16

50

30

22.5

57.5 85

M6X1.0 9(6) PLACES


AND SLOT

180

150

8.5 TYP

15



225

7.5

50

50

25

240 25


(6) PLACES








AGV-30HP-LSE

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AGV-HP Series Galvanometer ScannerAGV-10HP 2-axis galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedbackAGV-14HP 2-axis galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedbackAGV-20HP 2-axis galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedbackAGV-30HP 2-axis galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback

Beam Entry Orientation-RSE Right-side laser beam entry (standard)-LSE Left-side laser beam entry

Nmark AGV-HP ORDERING INFORMATION

AGV-14HP -RSE -1064-100 -MP -NC

Series Beam Entry Orientation Optics Configuration Mounting Option Cooling Options

AGV-10HPAGV-14HPAGV-20HPAGV-30HP

-RSE-LSE

-CO2-DS

-1552-1064-1030-532-515-355-343

-1064/532/355-1030/515/343

-355-53T-343-53T-1064-100-532-100

-CO2-100T-1552-100T-1064-100T-1030-100T-532-100T-515-100T-355-100T-343-100T-CO2-160-1064-160-532-160-355-160-343-160

-1064-163-1552-163T-1064-163T-1030-163T-532-163T-515-163T-355-163T-343-163T-1064-170-532-170

-1064-200-CO2-255-1064-255-532-255-355-255-343-255

-1064-500

-MP -NC-AC-WC

-AC-WC

AGV-HP Series Galvanometer Scanner

Galvanometer

Nmark AGV-HP

12www.aerotech.com

Optics Configuration (Partial listing. Please consult Aerotech for other supported wavelengths and lens combinations.)

No Lens Options, F-Theta Not Included

Option AGV-10HP AGV-14HP AGV-20HP AGV-30HP

-CO2 Mirrors for 10.6 µm wavelength; no focal lens

-DS Durable silver coated mirrors; 450 nm - 10.6 µm wavelength; limited operating power; no focal lens -

-1552 Mirrors for 1552 nm wavelength; no focal lens -

-1064 Mirrors for 1064 nm wavelength; no focal lens






-1064/532/355 Mirrors for 1064, 532, and 355 nm wavelengths; no focal lens - -

-1030/515/343 Mirrors for 1030, 515, and 343 nm wavelengths; no focal lens - -

F-Theta Included Options(1, 2)


-355-53T

355 nm Wavelength53 mm Focal Length17.2 x 17.2 mm FOV

Telecentric


Telecentric

- -

-343-53T


Telecentric


Telecentric

- -

-1064-100


Non-Telecentric


Non-Telecentric

- -

-532-100


Non-Telecentric

- - -

-CO2-100T -

10.6 µm Wavelength100 mm Focal Length50.0 x 50.0 mm FOV

Telecentric


Telecentric

-

-1552-100T


Telecentric


Telecentric

- -

-1064-100T


Telecentric


Telecentric


Telecentric

-1030-100T


Telecentric


Telecentric

- -

-532-100T


Telecentric


Telecentric

- -

-515-100T


Telecentric


Telecentric

- -

-355-100T


Telecentric

- - -

-343-100T


Telecentric

- - -


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F-Theta Included Options(1, 2) (Continued)


-CO2-160 -


Non-Telecentric


Non-Telecentric

-

-1064-160

1064 nm Wavelength160 mm Focal Length

107.6 x 107.6 mm FOVNon-Telecentric


Non-Telecentric

- -

-532-160



532 nm Wavelength160 mm Focal Length77.2 X 77.2 mm FOV

Non-Telecentric

- -

-355-160


Non-Telecentric

- - -

-343-160


Non-Telecentric

- - -

-1064-163 - -


Non-Telecentric

-

-1552-163T


Telecentric


Telecentric

- -

-1064-163T


Telecentric


Telecentric


Telecentric

-

-1030-163T


Telecentric


Telecentric

- -

-532-163T


Telecentric


Telecentric

- -

-515-163T


Telecentric


Telecentric

- -

-355-163T


Telecentric


Telecentric

- -

-343-163T


Telecentric


Telecentric

- -

-1064-170 -



- -

-532-170 -



- -

-1064-200 - - -


Non-Telecentric

-CO2-255 - -

10.6 µm Wavelength255 mm Focal Length


10.6 µm Wavelength255 mm Focal Length



Galvanometer

Nmark AGV-HP

14www.aerotech.com

F-Theta Included Options(1, 2) (Continued)


-1064-255 - -




Non-Telecentric

-532-255 - -



-

-355-255

355 nm Wavelength255 mm Focal Length143 x 143 mm FOV

Non-Telecentric



- -

-343-255

343 nm Wavelength255 mm Focal Length142 x 142 mm FOV

Non-Telecentric



- -

-1064-500 - - -



Mounting Option-MP Optional mounting plate with integral flanges for bridge/gantry installation

Cooling Options-NC No air cooling of mirrors and no water cooling of beam entrance plate and motors (standard)-AC Air cooling of mirrors for high-powered laser applications-WC Water cooling of beam entrance plate and motors for high-powered laser, high duty cycle and thermal drift

intolerant applications-AC-WC Air cooling of mirrors and water cooling of beam entrance plate and motors for high-powered laser, high duty

cycle and thermal drift intolerant applications

Lens Mounting Adapters (order as separate line item)LM10HP-XXX Lens mount adapter for AGV-10HP and AGV-10HPO; standard versions support the lens configurations offered

by Aerotech; custom versions available on requestLM14HP-XXX Lens mount adapter for AGV-14HP and AGV-14HPO; standard versions support the lens configurations offered



by Aerotech; custom versions available on request


Notes:1. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e2 Gaussian profile.2. Reported field size is minimum achievable based on zero beam vignetting.

nmark agv-hp 11 motion controllers

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